JPH0322177Y2 - - Google Patents

Info

Publication number
JPH0322177Y2
JPH0322177Y2 JP1985144727U JP14472785U JPH0322177Y2 JP H0322177 Y2 JPH0322177 Y2 JP H0322177Y2 JP 1985144727 U JP1985144727 U JP 1985144727U JP 14472785 U JP14472785 U JP 14472785U JP H0322177 Y2 JPH0322177 Y2 JP H0322177Y2
Authority
JP
Japan
Prior art keywords
air
conveyance
sides
fluid
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985144727U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6253233U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985144727U priority Critical patent/JPH0322177Y2/ja
Publication of JPS6253233U publication Critical patent/JPS6253233U/ja
Application granted granted Critical
Publication of JPH0322177Y2 publication Critical patent/JPH0322177Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP1985144727U 1985-09-21 1985-09-21 Expired JPH0322177Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985144727U JPH0322177Y2 (enEXAMPLES) 1985-09-21 1985-09-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985144727U JPH0322177Y2 (enEXAMPLES) 1985-09-21 1985-09-21

Publications (2)

Publication Number Publication Date
JPS6253233U JPS6253233U (enEXAMPLES) 1987-04-02
JPH0322177Y2 true JPH0322177Y2 (enEXAMPLES) 1991-05-15

Family

ID=31055598

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985144727U Expired JPH0322177Y2 (enEXAMPLES) 1985-09-21 1985-09-21

Country Status (1)

Country Link
JP (1) JPH0322177Y2 (enEXAMPLES)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5314861B2 (enEXAMPLES) * 1972-07-28 1978-05-20
JPS5185489U (enEXAMPLES) * 1974-12-27 1976-07-08
JPS5628353Y2 (enEXAMPLES) * 1976-10-07 1981-07-06

Also Published As

Publication number Publication date
JPS6253233U (enEXAMPLES) 1987-04-02

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