JPH0320831Y2 - - Google Patents
Info
- Publication number
- JPH0320831Y2 JPH0320831Y2 JP1985193288U JP19328885U JPH0320831Y2 JP H0320831 Y2 JPH0320831 Y2 JP H0320831Y2 JP 1985193288 U JP1985193288 U JP 1985193288U JP 19328885 U JP19328885 U JP 19328885U JP H0320831 Y2 JPH0320831 Y2 JP H0320831Y2
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- mask
- nozzle
- electric field
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 41
- 230000005684 electric field Effects 0.000 claims description 18
- 230000007547 defect Effects 0.000 claims description 10
- 238000001514 detection method Methods 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 2
- 150000002500 ions Chemical group 0.000 description 26
- 238000010586 diagram Methods 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- LGCMKPRGGJRYGM-UHFFFAOYSA-N Osalmid Chemical compound C1=CC(O)=CC=C1NC(=O)C1=CC=CC=C1O LGCMKPRGGJRYGM-UHFFFAOYSA-N 0.000 description 1
- 241000412169 Peria Species 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985193288U JPH0320831Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-12-16 | 1985-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985193288U JPH0320831Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-12-16 | 1985-12-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62103041U JPS62103041U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-01 |
| JPH0320831Y2 true JPH0320831Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-05-07 |
Family
ID=31149173
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985193288U Expired JPH0320831Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-12-16 | 1985-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0320831Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2522992B2 (ja) * | 1988-07-06 | 1996-08-07 | セイコー電子工業株式会社 | 集束イオンビ―ム装置 |
-
1985
- 1985-12-16 JP JP1985193288U patent/JPH0320831Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62103041U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-07-01 |