JPH0319528B2 - - Google Patents

Info

Publication number
JPH0319528B2
JPH0319528B2 JP59276011A JP27601184A JPH0319528B2 JP H0319528 B2 JPH0319528 B2 JP H0319528B2 JP 59276011 A JP59276011 A JP 59276011A JP 27601184 A JP27601184 A JP 27601184A JP H0319528 B2 JPH0319528 B2 JP H0319528B2
Authority
JP
Japan
Prior art keywords
light
slit
lens
cylindrical lens
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59276011A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61149919A (ja
Inventor
Tsuguhito Maruyama
Keiji Kahara
Shinji Kanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP27601184A priority Critical patent/JPS61149919A/ja
Publication of JPS61149919A publication Critical patent/JPS61149919A/ja
Publication of JPH0319528B2 publication Critical patent/JPH0319528B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Facsimile Scanning Arrangements (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP27601184A 1984-12-25 1984-12-25 スリツト光源 Granted JPS61149919A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27601184A JPS61149919A (ja) 1984-12-25 1984-12-25 スリツト光源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27601184A JPS61149919A (ja) 1984-12-25 1984-12-25 スリツト光源

Publications (2)

Publication Number Publication Date
JPS61149919A JPS61149919A (ja) 1986-07-08
JPH0319528B2 true JPH0319528B2 (en, 2012) 1991-03-15

Family

ID=17563537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27601184A Granted JPS61149919A (ja) 1984-12-25 1984-12-25 スリツト光源

Country Status (1)

Country Link
JP (1) JPS61149919A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008108174A1 (ja) * 2007-03-08 2008-09-12 Hitachi, Ltd. 照明装置並びにそれを用いた欠陥検査装置及びその方法並びに高さ計測装置及びその方法

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0769160B2 (ja) * 1989-05-15 1995-07-26 日産自動車株式会社 測定装置
EP0670618B1 (en) * 1994-03-01 1998-05-27 Seiko Epson Corporation Light-sensing device using a semiconductor laser
JP3640097B2 (ja) * 1994-12-14 2005-04-20 セイコーエプソン株式会社 光センシング装置
JP6417262B2 (ja) * 2015-04-15 2018-11-07 オリンパス株式会社 シート照明顕微鏡
EP3474541A1 (en) * 2017-10-17 2019-04-24 ams AG 3d camera system with rolling-shutter image sensor and array of addressable light sources

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS519552A (ja) * 1974-07-13 1976-01-26 Nippon Telegraph & Telephone Hokoseiketsugoki

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008108174A1 (ja) * 2007-03-08 2008-09-12 Hitachi, Ltd. 照明装置並びにそれを用いた欠陥検査装置及びその方法並びに高さ計測装置及びその方法
JP2008216219A (ja) * 2007-03-08 2008-09-18 Hitachi Ltd 照明装置並びにそれを用いた欠陥検査装置及びその方法並びに高さ計測装置及びその方法

Also Published As

Publication number Publication date
JPS61149919A (ja) 1986-07-08

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