JPH0318681B2 - - Google Patents
Info
- Publication number
- JPH0318681B2 JPH0318681B2 JP11613983A JP11613983A JPH0318681B2 JP H0318681 B2 JPH0318681 B2 JP H0318681B2 JP 11613983 A JP11613983 A JP 11613983A JP 11613983 A JP11613983 A JP 11613983A JP H0318681 B2 JPH0318681 B2 JP H0318681B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- grating
- ion beam
- mask
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 52
- 238000010884 ion-beam technique Methods 0.000 claims description 22
- 230000000737 periodic effect Effects 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 15
- 238000009826 distribution Methods 0.000 description 13
- 238000000992 sputter etching Methods 0.000 description 10
- 238000001816 cooling Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 150000002500 ions Chemical class 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 2
- 239000004519 grease Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229920000620 organic polymer Polymers 0.000 description 1
- 239000011295 pitch Substances 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11613983A JPS608801A (ja) | 1983-06-29 | 1983-06-29 | ブレ−ズド格子の形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11613983A JPS608801A (ja) | 1983-06-29 | 1983-06-29 | ブレ−ズド格子の形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS608801A JPS608801A (ja) | 1985-01-17 |
| JPH0318681B2 true JPH0318681B2 (enrdf_load_stackoverflow) | 1991-03-13 |
Family
ID=14679697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11613983A Granted JPS608801A (ja) | 1983-06-29 | 1983-06-29 | ブレ−ズド格子の形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS608801A (enrdf_load_stackoverflow) |
-
1983
- 1983-06-29 JP JP11613983A patent/JPS608801A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS608801A (ja) | 1985-01-17 |
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