JPH03167464A - Humidity-sensitive element and its manufacture - Google Patents
Humidity-sensitive element and its manufactureInfo
- Publication number
- JPH03167464A JPH03167464A JP30480689A JP30480689A JPH03167464A JP H03167464 A JPH03167464 A JP H03167464A JP 30480689 A JP30480689 A JP 30480689A JP 30480689 A JP30480689 A JP 30480689A JP H03167464 A JPH03167464 A JP H03167464A
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- upper electrode
- film
- sensitive
- humidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000000463 material Substances 0.000 claims abstract description 18
- 229920000620 organic polymer Polymers 0.000 claims abstract description 16
- 239000002952 polymeric resin Substances 0.000 claims abstract description 16
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 230000009477 glass transition Effects 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 238000007740 vapor deposition Methods 0.000 abstract description 9
- 239000012528 membrane Substances 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 24
- 239000011521 glass Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- SUPCQIBBMFXVTL-UHFFFAOYSA-N ethyl 2-methylprop-2-enoate Chemical compound CCOC(=O)C(C)=C SUPCQIBBMFXVTL-UHFFFAOYSA-N 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は有機高分子樹脂を感湿材料として用いてなる感
湿素子およびその製造に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a moisture-sensitive element using an organic polymer resin as a moisture-sensitive material and its production.
従来、この種の感湿素子は、絶縁性基板の主表面上に互
いに対向する一対の薄膜状対向電極を設けるとともにこ
の対向電極間に有機高分子樹脂材料からなる感湿膜をサ
ンドウィッチ状に狭持させ、最表面の上側電極が透湿性
を有する構或となって＞，６、この感湿膜の相対湿度に
対する対向電極間の電気容量値の変化を湿度の検出とし
て対向電極の各電極端子に接続さｊＬた外部引き出し用
リード線から取り出されることになる。Conventionally, this type of moisture-sensing element has a pair of thin-film counter electrodes facing each other on the main surface of an insulating substrate, and a moisture-sensitive film made of an organic polymer resin material sandwiched between the counter electrodes. The upper electrode on the outermost surface has moisture permeability, and the change in the capacitance value between the opposing electrodes with respect to the relative humidity of this moisture-sensitive film is used as humidity detection for each electrode terminal of the opposing electrode. It will be taken out from the external lead wire connected to jL.
しかしながら、有機高分子樹脂材料を感湿膜とする容量
式の感湿素子は、感湿膜の表面側に設けられる透湿性上
側電極を形成するのに真空室（チャンパー）を加熱しな
い、常温状態で成膜を行なっていた。このために常温状
態で透湿性上側電極を成膜した感湿素子は、例えば約８
０℃以上の高温度雰囲気中での連続使用や温度サイクル
などの熱ストレスが付与されると、透湿性上側電極にク
ラツク（ひび割れ）が発生するという問題があった。１
た、上側電極の抵抗値が徐々に大きくなるという問題が
あった。However, capacitive moisture-sensing elements with a moisture-sensitive film made of an organic polymer resin material operate at room temperature without heating the vacuum chamber (chamber) to form a moisture-permeable upper electrode provided on the surface side of the moisture-sensitive film. Film deposition was performed using For this reason, a moisture-sensitive element in which a moisture-permeable upper electrode is formed at room temperature is, for example, about 8.
There has been a problem in that cracks occur in the moisture-permeable upper electrode when subjected to thermal stress such as continuous use in a high-temperature atmosphere of 0° C. or higher or temperature cycling. 1
Another problem was that the resistance value of the upper electrode gradually increased.
この透湿性上側電極のクラックの発生は、蒸着法による
成膜時の温度が低いため、蒸着温度よシも高い状態とな
ると、感湿膜の有機高分子樹脂材料が膨張し、低い状態
となると、逆に収縮する。The cracks in the moisture-permeable upper electrode occur because the temperature during film formation by the vapor deposition method is low, so when the vapor deposition temperature is higher than the vapor deposition temperature, the organic polymer resin material of the moisture-sensitive film expands. , on the contrary, it contracts.
しかしながら、この最表面側の透湿性上側電極は、有機
高分子樹脂材料とともに膨張，収縮しないので、有機高
分子樹脂材料との間に熱膨張の差によるミスマッチング
（ギャップ）が生じ、透湿性上側電極にクラツクが発生
するものと考えられる。However, since this moisture permeable upper electrode on the outermost surface side does not expand or contract together with the organic polymer resin material, a mismatch (gap) occurs between the moisture permeable upper electrode and the organic polymer resin material due to the difference in thermal expansion. It is thought that a crack occurs in the electrode.
このような課題を解決するために本発明は、感湿膜の表
面に凹部を形或するとともにこの凹部内面に透湿性上側
電極を設けたものである。オた、この透湿性上側電極は
、有機高分子樹脂材料のガラス転移点ようも高い加熱温
度で成膜するものである。In order to solve these problems, the present invention forms a recess on the surface of a moisture sensitive membrane and provides a moisture permeable upper electrode on the inner surface of the recess. Additionally, this moisture permeable upper electrode is formed at a heating temperature that is higher than the glass transition point of the organic polymer resin material.
〔作用〕
本発明における感湿膜の表面凹部内に形威される透湿性
上側電極は、高温状態の使用においてクラックが発生し
にくくなる。また、ガラス転移点以上の加熱成膜により
透湿性上側電極下の感湿膜が圧縮され、緻密化される。[Function] The moisture-permeable upper electrode formed in the surface recesses of the moisture-sensitive membrane of the present invention is less likely to crack when used in high-temperature conditions. Further, by heating the film to a temperature higher than the glass transition point, the moisture-sensitive film under the moisture-permeable upper electrode is compressed and densified.
以下、図面を用いて本発明の実施例を詳細に説明する。 Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は本発明による感湿素子およびその製造方法の一
実施例を説明する平面図であり、第２図は第１図のｎ−
ｎ’線の断面図である。これらの図において、何えばガ
ラス，アルミナもしくはシリコンウエハなどからなる絶
縁性基板１の主表面上にはＰｔなどの耐蝕性の金属を蒸
着またはスパッタリング法により膜厚約ｉｏｏｏ〜１０
０００Ｘ程度の下側電極２が成膜されている。この下側
電極２は絶縁性基板１がガラス基板の場合、Ｐｔはガラ
ス基板に対して密着強度が小さいので、ＮｂもしくはＴ
１などの密着増強膜をガラス基板とｐｔ膜との間に成膜
させても良い。なお、２ａは下側電極２と同一材科，同
一手段によシ一体的に成膜された電極端子である。この
下側電極２上には有機高分子樹脂材料をスピンコートも
しくはデイッピング法によυ塗布した後、ガラス転移点
以上の熱処理を行なって膜厚約１００００〜５００００
１程度の厚さで感湿膜３が成膜されている。なか、感湿
膜３を構成する有機高分子樹脂材科としては、メチルメ
タクリレートの重合物、メチルメタクリレートとビニル
基を２個以上有する化合物との共重合体、エチルメタク
リレートの重合物、エチルメタクリレートとビニル基を
２個以上有する化合物との共重合体、メタクリル酸の重
合物などが用いられる。FIG. 1 is a plan view illustrating an embodiment of a moisture-sensitive element and a method for manufacturing the same according to the present invention, and FIG.
It is a sectional view taken along the n' line. In these figures, a corrosion-resistant metal such as Pt is deposited on the main surface of an insulating substrate 1 made of glass, alumina, or a silicon wafer, to a thickness of approximately 10 to 10 mm by vapor deposition or sputtering.
A lower electrode 2 of approximately 000X is formed. When the insulating substrate 1 is a glass substrate, this lower electrode 2 is made of Nb or T, since Pt has low adhesion strength to the glass substrate.
An adhesion enhancing film such as No. 1 may be formed between the glass substrate and the PT film. Note that 2a is an electrode terminal formed integrally with the lower electrode 2 from the same material and by the same method. An organic polymer resin material is coated on the lower electrode 2 by spin coating or dipping, and then heat-treated to a temperature higher than the glass transition point to a film thickness of about 10,000 to 50,000.
The moisture sensitive film 3 is formed to have a thickness of about 1 mm. Among them, the organic polymer resin materials constituting the moisture sensitive film 3 include polymers of methyl methacrylate, copolymers of methyl methacrylate and a compound having two or more vinyl groups, polymers of ethyl methacrylate, and polymers of ethyl methacrylate and ethyl methacrylate. A copolymer with a compound having two or more vinyl groups, a polymer of methacrylic acid, etc. are used.
この感湿膜３０表面上には例えばＡｕ もしくはＣｒを
加熱蒸着法によシ膜厚１００〜５００Ｘの厚さで透湿性
の薄膜状上側電極４が成膜されている。この場合、この
上側電極４の成膜はガラス転移点以上の加熱温度雰囲気
中で行なわれ、これによってこの上側電極４が成膜され
た感湿膜３０表面のみが圧縮されて凹部３ａが形威され
、結果的にこの凹部３ａ内に上側電極４が形成されるこ
とになる。On the surface of the moisture-sensitive film 30, a moisture-permeable thin film upper electrode 4 is formed with a thickness of 100 to 500X using, for example, Au or Cr by thermal evaporation. In this case, the film formation of this upper electrode 4 is carried out in an atmosphere with a heating temperature higher than the glass transition point, and as a result, only the surface of the moisture sensitive film 30 on which this upper electrode 4 is formed is compressed, and the recesses 3a are formed. As a result, the upper electrode 4 is formed within this recess 3a.
なお、４ａは上側電極４と同一材料，同一手段によシ一
体的に成膜された電極端子であシ、この電極端子４ａは
絶縁性基板１上の感湿膜３が成膜されている端部に成膜
される。次にこれらの電極端子２ｍ，４ａ上に外部引き
出し用リードｉｓａ，ｓｂを導電性樹脂６によう接着し
て電気的接続を行なって完或する。Note that 4a is an electrode terminal integrally formed with the same material and method as the upper electrode 4, and the moisture-sensitive film 3 on the insulating substrate 1 is formed on this electrode terminal 4a. A film is formed on the edge. Next, external leads isa and sb are adhered to conductive resin 6 on these electrode terminals 2m and 4a to complete the electrical connection.
このような感湿素子の製造方法によれば、透湿性の薄膜
状上側電極４を有機高分子樹脂材科のガラス転移点以上
の加熱蒸着法により形或したので透湿性上側電極４が感
湿膜３の表面凹部３ａ内に成膜されるとともにこの上側
電極４のみが成膜された部分の感湿膜３が圧縮し、緻密
化されることになる。筐た、透湿性上側電極端子４ａの
電極材料として導電性樹脂６を用いた場合、硬化するこ
とによシ体積縮少が起る（特に加熱硬化では顕著）。According to this method of manufacturing a moisture-sensitive element, the moisture-permeable thin film upper electrode 4 is formed by heating vapor deposition at a temperature higher than the glass transition point of an organic polymer resin material, so the moisture-permeable upper electrode 4 is moisture-sensitive. The moisture-sensitive film 3 is formed in the surface recess 3a of the film 3, and the portion of the moisture-sensitive film 3 where only the upper electrode 4 is formed is compressed and becomes denser. When the conductive resin 6 is used as the electrode material for the moisture-permeable upper electrode terminal 4a of the housing, the volume of the conductive resin 6 is reduced by curing (particularly noticeable in heat curing).
このとき、加熱蒸着を行なわない透湿性上側電極はクラ
ツクが発生していたが、本実施例では加熱蒸着を行なっ
ているので、クラツクの発生は全〈生じなかった。At this time, cracks occurred in the moisture permeable upper electrode which was not subjected to heating vapor deposition, but since heating vapor deposition was performed in this example, no cracks occurred at all.
なお、前述した実施例にかいては、感湿膜３を加熱蒸着
法によシ形成した場合について説明したが、本発明はこ
れに限定されるものではなく、有機高分子樹脂材料のガ
ラス転移点よシも高い加熱温度中でスパッタリング法に
よシ形或しても同様の効果が得られることは言う筐でも
ない。In addition, in the above-mentioned embodiment, the case where the moisture sensitive film 3 was formed by the heating vapor deposition method was explained, but the present invention is not limited to this, and the glass transition of the organic polymer resin material was explained. It is needless to say that the same effect can be obtained by sputtering at high heating temperatures.
以上説明したように本発明によれば、感湿膜の最表面に
凹部を形成するとともにこの凹部内面に透湿性上側電極
を設けたことによシ、この透湿性上側電極下の感湿膜が
圧縮し、緻密化されるので、初期におけるヒステリシス
が小さくなるとともに温度特性が良好となる。渣た、高
温，高湿度にかけるドリフト（例えば４０℃，９０％Ｒ
Ｈでの放置のドリフト）が小さくなシ、品質シよび信頼
性の高い感湿素子が得られる。さらにこの透湿性上側電
極を有機高分子樹脂材料のガラス転移点ようも高い加熱
温度で成膜したことによシ、ガラス転移点筐での使用状
況下において感湿膜にクラツクが発生しな〈なシ、同様
に品質および信頼性の高い感湿素子が得られるという極
めて優れた効果を有する。As explained above, according to the present invention, by forming the recess on the outermost surface of the moisture-sensitive membrane and providing the moisture-permeable upper electrode on the inner surface of the recess, the moisture-sensitive membrane under the moisture-permeable upper electrode is Since it is compressed and densified, the initial hysteresis is reduced and the temperature characteristics are improved. Drift, high temperature, high humidity (e.g. 40℃, 90%R)
It is possible to obtain a moisture-sensitive element with low drift (drift due to storage at high temperature), high quality, and high reliability. Furthermore, because this moisture-permeable upper electrode is formed at a heating temperature that is higher than the glass transition temperature of the organic polymer resin material, cracks will not occur in the moisture-sensitive film when used in a glass transition temperature case. However, it also has an extremely excellent effect in that a moisture sensitive element with high quality and reliability can be obtained.
第１図は本発明による感湿素子およびその製造方法の一
実施例を説明する要部平面図、第２図は第１図のｎ−ｎ
’線の断面図である。
１・・・・絶縁性基板、２・・・・下側電極、２ａ・・
・・電極端子、３・・・・感湿膜、３ａ・・・・凹部、
４・・・・上側電極、４ａ ・・・・電極端子、ｓａ，
ｓｂ・・・・外部引き出し用リード線、６・・・・導電
性樹脂。FIG. 1 is a plan view of essential parts for explaining an embodiment of the moisture-sensitive element and its manufacturing method according to the present invention, and FIG.
' is a cross-sectional view of the line. 1... Insulating substrate, 2... Lower electrode, 2a...
...electrode terminal, 3...moisture-sensitive membrane, 3a...recess,
4... Upper electrode, 4a... Electrode terminal, sa,
sb... Lead wire for external extraction, 6... Conductive resin.
Claims (2)
らなる感湿膜および透湿性上側電極を順次積層形成して
なる感湿素子において、前記感湿膜の表面に凹部を形成
するとともに該凹部内面に前記透湿性上側電極を設けた
ことを特徴とする感湿素子。(1) In a moisture-sensitive element in which a lower electrode, a moisture-sensitive film made of an organic polymer resin material, and a moisture-permeable upper electrode are sequentially laminated on an insulating substrate, a recess is formed on the surface of the moisture-sensitive film. A moisture sensing element, further comprising: the moisture permeable upper electrode provided on the inner surface of the recess.
湿性上側電極を感湿性有機高分子樹脂材料のガラス転移
点よりも高い加熱温度で加熱しながら成膜することを特
徴とした感湿素子の製造方法。(2) The method for manufacturing a moisture-sensitive element according to claim 1, wherein the moisture-permeable upper electrode is formed into a film while being heated at a heating temperature higher than the glass transition point of the moisture-sensitive organic polymer resin material. Method for manufacturing a wet element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1304806A JPH0758270B2 (en) | 1989-11-27 | 1989-11-27 | Method for manufacturing moisture sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1304806A JPH0758270B2 (en) | 1989-11-27 | 1989-11-27 | Method for manufacturing moisture sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03167464A true JPH03167464A (en) | 1991-07-19 |
| JPH0758270B2 JPH0758270B2 (en) | 1995-06-21 |
Family
ID=17937472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1304806A Expired - Lifetime JPH0758270B2 (en) | 1989-11-27 | 1989-11-27 | Method for manufacturing moisture sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0758270B2 (en) |
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| US5980709A (en) * | 1995-04-12 | 1999-11-09 | Usf Filtration And Separations Group | Method of defining an electrode area |
| US6169379B1 (en) | 1995-05-05 | 2001-01-02 | Prospects Corporation | Power driven venting of a vehicle |
| US6193865B1 (en) | 1997-09-11 | 2001-02-27 | Usf Filtration And Separations Group, Inc. | Analytic cell |
| US6284125B1 (en) | 1995-06-19 | 2001-09-04 | Usf Filtration And Separations Group, Inc. | Electrochemical cell |
| US6413410B1 (en) | 1996-06-19 | 2002-07-02 | Lifescan, Inc. | Electrochemical cell |
| US6521110B1 (en) | 1995-11-16 | 2003-02-18 | Lifescan, Inc. | Electrochemical cell |
| US6863801B2 (en) | 1995-11-16 | 2005-03-08 | Lifescan, Inc. | Electrochemical cell |
| US7749371B2 (en) | 2005-09-30 | 2010-07-06 | Lifescan, Inc. | Method and apparatus for rapid electrochemical analysis |
| US8001825B2 (en) | 2007-11-30 | 2011-08-23 | Lifescan, Inc. | Auto-calibrating metering system and method of use |
| US8016154B2 (en) | 2005-05-25 | 2011-09-13 | Lifescan, Inc. | Sensor dispenser device and method of use |
| US8192599B2 (en) | 2005-05-25 | 2012-06-05 | Universal Biosensors Pty Ltd | Method and apparatus for electrochemical analysis |
| US8323464B2 (en) | 2005-05-25 | 2012-12-04 | Universal Biosensors Pty Ltd | Method and apparatus for electrochemical analysis |
| US9274078B2 (en) | 2006-03-31 | 2016-03-01 | Lifescan, Inc. | Systems and methods of discriminating control solution from a physiological sample |
| US9739749B2 (en) | 2008-01-17 | 2017-08-22 | Lifescan, Inc. | System and method for measuring an analyte in a sample |
| US9784707B2 (en) | 2008-06-09 | 2017-10-10 | Lifescan, Inc. | System and method for measuring an analyte in a sample |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4021827B2 (en) * | 2003-09-19 | 2007-12-12 | 本田技研工業株式会社 | Gas sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57141546A (en) * | 1981-01-19 | 1982-09-01 | Commissariat Energie Atomique | Method of manufacturing capacitive hygrometer having thin dielectric and hygrometer obtained thereby |
| JPH01163648A (en) * | 1987-12-19 | 1989-06-27 | Toshiba Corp | Humidity sensing element and its manufacture |
-
1989
- 1989-11-27 JP JP1304806A patent/JPH0758270B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57141546A (en) * | 1981-01-19 | 1982-09-01 | Commissariat Energie Atomique | Method of manufacturing capacitive hygrometer having thin dielectric and hygrometer obtained thereby |
| JPH01163648A (en) * | 1987-12-19 | 1989-06-27 | Toshiba Corp | Humidity sensing element and its manufacture |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100409006C (en) * | 1995-04-12 | 2008-08-06 | 利费斯坎公司 | Method for determining electrode area |
| US5980709A (en) * | 1995-04-12 | 1999-11-09 | Usf Filtration And Separations Group | Method of defining an electrode area |
| US6169379B1 (en) | 1995-05-05 | 2001-01-02 | Prospects Corporation | Power driven venting of a vehicle |
| US8075760B2 (en) | 1995-06-19 | 2011-12-13 | Lifescan, Inc. | Electrochemical cell |
| US8101056B2 (en) | 1995-06-19 | 2012-01-24 | Lifescan, Inc. | Electrochemical cell |
| US6284125B1 (en) | 1995-06-19 | 2001-09-04 | Usf Filtration And Separations Group, Inc. | Electrochemical cell |
| US6179979B1 (en) | 1995-11-16 | 2001-01-30 | Usf Filtration & Separations Group, Inc. | Electrochemical cell |
| US6521110B1 (en) | 1995-11-16 | 2003-02-18 | Lifescan, Inc. | Electrochemical cell |
| US6863801B2 (en) | 1995-11-16 | 2005-03-08 | Lifescan, Inc. | Electrochemical cell |
| USRE42567E1 (en) | 1995-11-16 | 2011-07-26 | Lifescan, Inc. | Electrochemical cell |
| US5942102A (en) * | 1995-11-16 | 1999-08-24 | Usf Filtration And Separations Group Inc. | Electrochemical method |
| US6413410B1 (en) | 1996-06-19 | 2002-07-02 | Lifescan, Inc. | Electrochemical cell |
| US9075004B2 (en) | 1996-06-19 | 2015-07-07 | Lifescan, Inc. | Electrochemical cell |
| US6193865B1 (en) | 1997-09-11 | 2001-02-27 | Usf Filtration And Separations Group, Inc. | Analytic cell |
| US8016154B2 (en) | 2005-05-25 | 2011-09-13 | Lifescan, Inc. | Sensor dispenser device and method of use |
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| US8192599B2 (en) | 2005-05-25 | 2012-06-05 | Universal Biosensors Pty Ltd | Method and apparatus for electrochemical analysis |
| US8323464B2 (en) | 2005-05-25 | 2012-12-04 | Universal Biosensors Pty Ltd | Method and apparatus for electrochemical analysis |
| US8404102B2 (en) | 2005-09-30 | 2013-03-26 | Lifescan, Inc. | Method and apparatus for rapid electrochemical analysis |
| US7749371B2 (en) | 2005-09-30 | 2010-07-06 | Lifescan, Inc. | Method and apparatus for rapid electrochemical analysis |
| US9274078B2 (en) | 2006-03-31 | 2016-03-01 | Lifescan, Inc. | Systems and methods of discriminating control solution from a physiological sample |
| US8001825B2 (en) | 2007-11-30 | 2011-08-23 | Lifescan, Inc. | Auto-calibrating metering system and method of use |
| US9739749B2 (en) | 2008-01-17 | 2017-08-22 | Lifescan, Inc. | System and method for measuring an analyte in a sample |
| US9784707B2 (en) | 2008-06-09 | 2017-10-10 | Lifescan, Inc. | System and method for measuring an analyte in a sample |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0758270B2 (en) | 1995-06-21 |
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