JPH0758270B2 - Method for manufacturing moisture sensitive element - Google Patents
Method for manufacturing moisture sensitive elementInfo
- Publication number
- JPH0758270B2 JPH0758270B2 JP1304806A JP30480689A JPH0758270B2 JP H0758270 B2 JPH0758270 B2 JP H0758270B2 JP 1304806 A JP1304806 A JP 1304806A JP 30480689 A JP30480689 A JP 30480689A JP H0758270 B2 JPH0758270 B2 JP H0758270B2
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- upper electrode
- film
- resin material
- sensitive element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は有機高分子樹脂を感湿材料として用いてなる感
湿素子の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention relates to a method for producing a moisture-sensitive element using an organic polymer resin as a moisture-sensitive material.
従来、この種の感湿素子は、絶縁性基板の主表面上に互
いに対向する一対の薄膜状対向電極を設けるとともにこ
の対向電極間に有機高分子樹脂材料からなる感湿膜をサ
ンドウイツチ状に挟持させ、最表面の上側電極が透湿性
を有する構成となつており、この感湿膜の相対湿度に対
する対向電極間の電気容量値の変化を湿度の検出として
対向電極の各電極端子に接続された外部引き出し用リー
ド線から取り出されることになる。Conventionally, this type of moisture-sensitive element is provided with a pair of thin-film counter electrodes facing each other on the main surface of an insulating substrate, and a moisture-sensitive film made of an organic polymer resin material is sandwiched between the counter electrodes in a sandwitch shape. The uppermost electrode on the outermost surface is configured to have moisture permeability, and the change in the capacitance value between the counter electrodes with respect to the relative humidity of the moisture sensitive film is connected to each electrode terminal of the counter electrode as the humidity detection. It will be taken out from the external lead wire.
しかしながら、有機高分子樹脂材料を感湿膜とする容量
式の感湿素子は、感湿膜の表面側に設けられる透湿性上
側電極を形成するのに真空室（チヤンバー）を加熱しな
い、常温状態で成膜を行なつていた。このために常温状
態で透湿性上側電極を成膜した感湿素子は、例えば約80
℃以上の高温度雰囲気中での連続使用や温度サイクルな
どの熱ストレスが付与されると、透湿性上側電極にクラ
ツク（ひび割れ）が発生するという問題があつた。ま
た、上側電極の抵抗値が徐々に大きくなるという問題が
あつた。However, the capacitance type moisture sensitive element using the organic polymer resin material as the moisture sensitive film does not heat the vacuum chamber (chamber) to form the moisture permeable upper electrode provided on the surface side of the moisture sensitive film, and is at room temperature. The film was formed in. For this reason, a moisture-sensitive element having a moisture-permeable upper electrode film formed at room temperature is, for example, about 80
When heat stress such as continuous use in a high temperature atmosphere of ℃ or more or temperature cycle is applied, a crack occurs in the moisture permeable upper electrode. There is also a problem that the resistance value of the upper electrode gradually increases.
この透湿性上側電極のクラツクの発生は、蒸着法による
成膜時の温度が低いため、蒸着温度よりも高い状態とな
ると、感湿膜の有機高分子樹脂材料が膨張し、低い状態
となると、逆に収縮する。しかしながら、この最表面側
の透湿性上側電極は、有機高分子樹脂材料とともに膨
張，収縮しないので、有機高分子樹脂材料との間に熱膨
脹の差によるミスマツチング（ギヤツプ）が生じ、透湿
性上側電極にクラツクが発生するものと考えられる。Since the temperature at the time of film formation by the vapor deposition method is low, the occurrence of cracks in the moisture permeable upper electrode causes the organic polymer resin material of the moisture sensitive film to expand when the temperature is higher than the vapor deposition temperature, resulting in a low state. On the contrary, it contracts. However, since the moisture permeable upper electrode on the outermost surface side does not expand or contract together with the organic polymer resin material, mismatching (gear gap) occurs due to the difference in thermal expansion between the organic polymer resin material and the moisture permeable upper electrode. It is considered that cracking occurs.
このような課題を解決するために本発明は、感湿膜の表
面に透湿性上側電極を有機高分子樹脂材料のガラス転移
点よりも高い加熱温度で成膜するものである。In order to solve such a problem, the present invention is to form a moisture permeable upper electrode on the surface of a moisture sensitive film at a heating temperature higher than the glass transition point of an organic polymer resin material.
本発明における感湿膜の表面凹部内に形成される透湿性
上側電極は、高温状態の使用においてクラツクが発生し
にくくなる。また、ガラス転移点以上の加熱成膜により
透湿性上側電極下の感湿膜が圧縮され、緻密化される。The moisture-permeable upper electrode formed in the concave portion of the surface of the moisture-sensitive film of the present invention is less likely to be cracked when used in a high temperature state. In addition, the moisture-sensitive film under the moisture-permeable upper electrode is compressed and densified by the heating film formation above the glass transition point.
以下、図面を用いて本発明の実施例を詳細に説明する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
第１図は本発明による感湿素子の製造方法の一実施例を
説明する平面図であり、第２図は第１図のII-II′線の
断面図である。これらの図において、例えばガラス，ア
ルミナもしくはシリコンウエハなどからなる絶縁性基板
１の主表面上にはPtなどの耐蝕性の金属を蒸着またはス
パツタリング法により膜厚約1000〜10000Å程度の下側
電極２が成膜されている。この下側電極２は絶縁性基板
１がガラス基板の場合、Ptはガラス基板に対して密着強
度が小さいので、NbもしくはTiなどの密着増強膜をガラ
ス基板とPt膜との間に成膜させても良い。なお、2aは下
側電極２と同一材料，同一手段により一体的に成膜され
た電極端子である。この下側電極２上には有機高分子樹
脂材料をスピンコートもしくはデイツピング法により塗
布した後、ガラス転移点以上の熱処理を行なつて膜厚約
10000〜50000Å程度の厚さで感湿膜３が成膜されてい
る。なお、感湿膜３を構成する有機高分子樹脂材料とし
ては、メチルメタクリレートの重合物、メチルメタクリ
レートとビニル基を２個以上有する化合物との共重合
体、エチルメタクリレートの重合物、エチルメタクリレ
ートとビニル基を２個以上有する化合物との共重合体、
メタクリル酸の重合物などが用いられる。この感湿膜３
の表面上には例えばAuもしくはCrを加熱蒸着法により膜
厚100〜500Åの厚さで透湿性の薄膜状上側電極４が成膜
されている。この場合、この上側電極４の成膜はガラス
転移点以上の加熱温度雰囲気中で行なわれ、これによつ
てこの上側電極４が成膜された感湿膜３の表面のみが圧
縮されて凹部3aが形成され、結果的にこの凹部3a内に上
側電極４が形成されることになる。なお、4aは上側電極
４と同一材料，同一手段により一体的に成膜された電極
端子であり、この電極端子4aは絶縁性基板１上の感湿膜
３が成膜されている端部に成膜される。次にこれらの電
極端子2a,4a上に外部引き出し用リード線5a,5bを導電性
樹脂６により接着して電気的接続を行なつて完成する。FIG. 1 is a plan view for explaining an embodiment of a method for manufacturing a moisture sensitive element according to the present invention, and FIG. 2 is a sectional view taken along the line II-II ′ in FIG. In these figures, a corrosion-resistant metal such as Pt is vapor-deposited or sputtered on the main surface of an insulating substrate 1 made of, for example, glass, alumina or a silicon wafer to form a lower electrode 2 having a film thickness of about 1000 to 10000Å. Is deposited. When the insulating substrate 1 is a glass substrate, the lower electrode 2 has a small adhesion strength with respect to the glass substrate. Therefore, an adhesion enhancing film such as Nb or Ti is formed between the glass substrate and the Pt film. May be. 2a is an electrode terminal integrally formed by the same material and the same means as the lower electrode 2. An organic polymer resin material is applied on the lower electrode 2 by spin coating or a dipping method, and then heat treatment at a glass transition temperature or higher is performed to obtain a film thickness of about
The moisture sensitive film 3 is formed with a thickness of about 10000 to 50000Å. The organic polymer resin material forming the moisture sensitive film 3 is a polymer of methyl methacrylate, a copolymer of methyl methacrylate and a compound having two or more vinyl groups, a polymer of ethyl methacrylate, ethyl methacrylate and vinyl. A copolymer with a compound having two or more groups,
A polymer of methacrylic acid or the like is used. This moisture sensitive film 3
A moisture-permeable thin film-shaped upper electrode 4 having a thickness of 100 to 500 Å is formed on the surface of, by a vapor deposition method of Au or Cr, for example. In this case, the film formation of the upper electrode 4 is carried out in an atmosphere of a heating temperature equal to or higher than the glass transition point, whereby only the surface of the moisture sensitive film 3 on which the upper electrode 4 is formed is compressed to form the recess 3a. Is formed, and as a result, the upper electrode 4 is formed in the recess 3a. In addition, 4a is an electrode terminal integrally formed by the same material and by the same means as the upper electrode 4, and this electrode terminal 4a is formed on the end of the insulating substrate 1 where the moisture sensitive film 3 is formed. It is formed into a film. Next, the lead wires 5a and 5b for external extraction are adhered to the electrode terminals 2a and 4a by the conductive resin 6 to complete electrical connection.
このような感湿素子の製造方法によれば、透湿性の薄膜
状上側電極４を有機高分子樹脂材料のガラス転移点以上
の加熱蒸着法により形成したので透湿性上側電極４が感
湿膜３の表面凹部3a内に成膜されるとともにこの上側電
極４のみが成膜された部分の感湿膜３が圧縮し、緻密化
されることになる。また、透湿性上側電極端子4aの電極
材料として導電性樹脂６を用いた場合、硬化することに
より体積縮少が起る（特に加熱硬化では顕著）。このと
き、加熱蒸着を行なわない透湿性上側電極はクラツクが
発生していたが、本実施例では加熱蒸着を行なつている
ので、クラツクの発生は全く生じなかつた。According to such a method for manufacturing a moisture-sensitive element, since the moisture-permeable thin film-shaped upper electrode 4 is formed by the heating vapor deposition method of the glass transition point of the organic polymer resin material or more, the moisture-permeable upper electrode 4 is formed by the moisture-sensitive film 3. The moisture sensitive film 3 in the portion where the film is formed in the surface concave portion 3a and only the upper electrode 4 is formed is compressed and densified. In addition, when the conductive resin 6 is used as the electrode material of the moisture permeable upper electrode terminal 4a, the volume of the resin is reduced by curing (especially remarkable by heat curing). At this time, cracks were generated in the moisture-permeable upper electrode that was not subjected to heating vapor deposition, but in the present example, since heating vapor deposition was performed, no cracking occurred at all.
なお、前述した実施例においては、感湿膜３を加熱蒸着
法により形成した場合について説明したが、本発明はこ
れに限定されるものではなく、有機高分子樹脂材料のガ
ラス転移点よりも高い加熱温度中でスパツタリング法に
より形成しても同様の効果が得られることは言うまでも
ない。In addition, although the case where the moisture sensitive film 3 is formed by the heating vapor deposition method has been described in the above-described examples, the present invention is not limited to this and is higher than the glass transition point of the organic polymer resin material. It goes without saying that the same effect can be obtained by forming the film by the sputtering method at the heating temperature.
以上説明したように本発明によれば、感湿膜の最表面に
凹部を形成するとともにこの凹部が形成され、この凹部
内面に透湿性上側電極が形成されるので、この透湿性上
側電極下の感湿膜が圧縮し、緻密化されるので、初期に
おけるヒステリシスが小さくなるとともに温度特性が良
好となる。また、高温，高湿度におけるドリフト（例え
ば40℃,90％RHでの放置のドリフト）が小さくなり、品
質および信頼性の高い感湿素子が得られる。さらにこの
透湿性上側電極を有機高分子樹脂材料のガラス転移点よ
りも高い加熱温度で成膜したことにより、ガラス転移点
までの使用状況下において感湿膜にクラツクが発生しな
くなり、同様に品質および信頼性の高い感湿素子が得ら
れるという極めて優れた効果を有する。As described above, according to the present invention, since the concave portion is formed on the outermost surface of the moisture sensitive film and the concave portion is formed, and the moisture permeable upper electrode is formed on the inner surface of the concave portion, the moisture permeable upper electrode Since the moisture-sensitive film is compressed and densified, the initial hysteresis is reduced and the temperature characteristics are improved. Further, the drift at high temperature and high humidity (for example, the drift when left at 40 ° C. and 90% RH) becomes small, and a moisture sensitive element with high quality and reliability can be obtained. Furthermore, by forming this moisture permeable upper electrode at a heating temperature higher than the glass transition point of the organic polymer resin material, cracks do not occur in the moisture sensitive film under the usage conditions up to the glass transition point, and the quality is the same. Further, it has an extremely excellent effect that a highly reliable moisture sensitive element can be obtained.
第１図は本発明による感湿素子の製造方法の一実施例を
説明する要部平面図、第２図は第１図のII-II′線の断
面図である。 １……絶縁性基板、２……下側電極、2a……電極端子、
３……感湿膜、3a……凹部、４……上側電極、4a……電
極端子、5a,5b……外部引き出し用リード線、６……導
電性樹脂。FIG. 1 is a plan view of an essential part for explaining an embodiment of a method for manufacturing a moisture sensitive element according to the present invention, and FIG. 2 is a sectional view taken along the line II-II ′ of FIG. 1 ... Insulating substrate, 2 ... Lower electrode, 2a ... Electrode terminal,
3 ... Moisture-sensitive film, 3a ... recess, 4 ... upper electrode, 4a ... electrode terminals, 5a, 5b ... external lead wire, 6 ... conductive resin.
Claims (1)
材料からなる感湿膜および透湿性上側電極を順次積層形
成してなる感湿素子において、 前記感湿膜はメチルメタクリレートの重合物，メチルメ
タクリレートとビニル基を２個以上有する化合物との共
重合体，エチルメタクリレートの重合物，エチルメタク
リレートとビニル基を２個以上有する化合物との共重合
体またはメタクリル酸の重合物からなる有機高分子樹脂
材料を用い、前記感湿膜の表面に前記透湿性上側電極を
前記有機高分子樹脂材料のガラス転移点よりも高い加熱
温度で加熱しながら成膜することを特徴とした感湿素子
の製造方法。1. A moisture-sensitive element comprising a lower electrode, a moisture-sensitive film made of an organic polymer resin material, and a moisture-permeable upper electrode, which are sequentially laminated on an insulating substrate, wherein the moisture-sensitive film is a polymer of methyl methacrylate. , An organic compound consisting of a copolymer of methyl methacrylate and a compound having two or more vinyl groups, a polymer of ethyl methacrylate, a copolymer of ethyl methacrylate and a compound having two or more vinyl groups, or a polymer of methacrylic acid A moisture-sensitive element characterized in that a polymer resin material is used to form a film on the surface of the moisture-sensitive film while heating the moisture-permeable upper electrode at a heating temperature higher than the glass transition point of the organic polymer resin material. Manufacturing method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1304806A JPH0758270B2 (en) | 1989-11-27 | 1989-11-27 | Method for manufacturing moisture sensitive element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1304806A JPH0758270B2 (en) | 1989-11-27 | 1989-11-27 | Method for manufacturing moisture sensitive element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03167464A JPH03167464A (en) | 1991-07-19 |
| JPH0758270B2 true JPH0758270B2 (en) | 1995-06-21 |
Family
ID=17937472
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1304806A Expired - Lifetime JPH0758270B2 (en) | 1989-11-27 | 1989-11-27 | Method for manufacturing moisture sensitive element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0758270B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005091322A (en) * | 2003-09-19 | 2005-04-07 | Honda Motor Co Ltd | Gas sensor |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5955854A (en) | 1992-09-29 | 1999-09-21 | Prospects Corporation | Power driven venting of a vehicle |
| AUPN239395A0 (en) * | 1995-04-12 | 1995-05-11 | Memtec Limited | Method of defining an electrode area |
| US6413410B1 (en) | 1996-06-19 | 2002-07-02 | Lifescan, Inc. | Electrochemical cell |
| AUPN363995A0 (en) | 1995-06-19 | 1995-07-13 | Memtec Limited | Electrochemical cell |
| AUPN661995A0 (en) | 1995-11-16 | 1995-12-07 | Memtec America Corporation | Electrochemical cell 2 |
| US6863801B2 (en) | 1995-11-16 | 2005-03-08 | Lifescan, Inc. | Electrochemical cell |
| US6521110B1 (en) | 1995-11-16 | 2003-02-18 | Lifescan, Inc. | Electrochemical cell |
| US6193865B1 (en) | 1997-09-11 | 2001-02-27 | Usf Filtration And Separations Group, Inc. | Analytic cell |
| US8192599B2 (en) | 2005-05-25 | 2012-06-05 | Universal Biosensors Pty Ltd | Method and apparatus for electrochemical analysis |
| US8016154B2 (en) | 2005-05-25 | 2011-09-13 | Lifescan, Inc. | Sensor dispenser device and method of use |
| US8323464B2 (en) | 2005-05-25 | 2012-12-04 | Universal Biosensors Pty Ltd | Method and apparatus for electrochemical analysis |
| US7749371B2 (en) | 2005-09-30 | 2010-07-06 | Lifescan, Inc. | Method and apparatus for rapid electrochemical analysis |
| US8529751B2 (en) | 2006-03-31 | 2013-09-10 | Lifescan, Inc. | Systems and methods for discriminating control solution from a physiological sample |
| US8001825B2 (en) | 2007-11-30 | 2011-08-23 | Lifescan, Inc. | Auto-calibrating metering system and method of use |
| US8603768B2 (en) | 2008-01-17 | 2013-12-10 | Lifescan, Inc. | System and method for measuring an analyte in a sample |
| US8551320B2 (en) | 2008-06-09 | 2013-10-08 | Lifescan, Inc. | System and method for measuring an analyte in a sample |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2498329A1 (en) * | 1981-01-19 | 1982-07-23 | Commissariat Energie Atomique | THIN DIELECTRIC CAPACITIVE HYGROMETER AND METHOD OF MANUFACTURING THE SAME |
| JPH01163648A (en) * | 1987-12-19 | 1989-06-27 | Toshiba Corp | Humidity sensing element and its manufacture |
-
1989
- 1989-11-27 JP JP1304806A patent/JPH0758270B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005091322A (en) * | 2003-09-19 | 2005-04-07 | Honda Motor Co Ltd | Gas sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03167464A (en) | 1991-07-19 |
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