JPH0316339U - - Google Patents

Info

Publication number
JPH0316339U
JPH0316339U JP7647889U JP7647889U JPH0316339U JP H0316339 U JPH0316339 U JP H0316339U JP 7647889 U JP7647889 U JP 7647889U JP 7647889 U JP7647889 U JP 7647889U JP H0316339 U JPH0316339 U JP H0316339U
Authority
JP
Japan
Prior art keywords
wafer
prober
diagram showing
wafers
tests
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7647889U
Other languages
English (en)
Japanese (ja)
Other versions
JPH079379Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7647889U priority Critical patent/JPH079379Y2/ja
Publication of JPH0316339U publication Critical patent/JPH0316339U/ja
Application granted granted Critical
Publication of JPH079379Y2 publication Critical patent/JPH079379Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP7647889U 1989-06-29 1989-06-29 Ｉｃウエハ試験用自動プローバ Expired - Lifetime JPH079379Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7647889U JPH079379Y2 (ja) 1989-06-29 1989-06-29 Ｉｃウエハ試験用自動プローバ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7647889U JPH079379Y2 (ja) 1989-06-29 1989-06-29 Ｉｃウエハ試験用自動プローバ

Publications (2)

Publication Number Publication Date
JPH0316339U true JPH0316339U (enrdf_load_stackoverflow) 1991-02-19
JPH079379Y2 JPH079379Y2 (ja) 1995-03-06

Family

ID=31617984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7647889U Expired - Lifetime JPH079379Y2 (ja) 1989-06-29 1989-06-29 Ｉｃウエハ試験用自動プローバ

Country Status (1)

Country Link
JP (1) JPH079379Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007214491A (ja) * 2006-02-13 2007-08-23 Fujitsu Ltd 半導体基板欠陥検出方法及び半導体基板欠陥検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007214491A (ja) * 2006-02-13 2007-08-23 Fujitsu Ltd 半導体基板欠陥検出方法及び半導体基板欠陥検出装置

Also Published As

Publication number Publication date
JPH079379Y2 (ja) 1995-03-06

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