JPH0316286Y2 - - Google Patents

Info

Publication number
JPH0316286Y2
JPH0316286Y2 JP1989145906U JP14590689U JPH0316286Y2 JP H0316286 Y2 JPH0316286 Y2 JP H0316286Y2 JP 1989145906 U JP1989145906 U JP 1989145906U JP 14590689 U JP14590689 U JP 14590689U JP H0316286 Y2 JPH0316286 Y2 JP H0316286Y2
Authority
JP
Japan
Prior art keywords
carrier
wafer
receiver
tilting table
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1989145906U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0288238U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989145906U priority Critical patent/JPH0316286Y2/ja
Publication of JPH0288238U publication Critical patent/JPH0288238U/ja
Application granted granted Critical
Publication of JPH0316286Y2 publication Critical patent/JPH0316286Y2/ja
Expired legal-status Critical Current

Links

JP1989145906U 1989-12-20 1989-12-20 Expired JPH0316286Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989145906U JPH0316286Y2 (enrdf_load_stackoverflow) 1989-12-20 1989-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989145906U JPH0316286Y2 (enrdf_load_stackoverflow) 1989-12-20 1989-12-20

Publications (2)

Publication Number Publication Date
JPH0288238U JPH0288238U (enrdf_load_stackoverflow) 1990-07-12
JPH0316286Y2 true JPH0316286Y2 (enrdf_load_stackoverflow) 1991-04-08

Family

ID=31414909

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989145906U Expired JPH0316286Y2 (enrdf_load_stackoverflow) 1989-12-20 1989-12-20

Country Status (1)

Country Link
JP (1) JPH0316286Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5324248U (enrdf_load_stackoverflow) * 1976-08-05 1978-03-01

Also Published As

Publication number Publication date
JPH0288238U (enrdf_load_stackoverflow) 1990-07-12

Similar Documents

Publication Publication Date Title
CN116550638B (zh) 基于机器视觉的钕铁硼磁性工件全自动智能选片机
EP0535981B1 (en) Apparatus to load workpieces
KR20000069465A (ko) 웨이퍼 반송 장치
US6658761B2 (en) Method and apparatus for centrifugally dehydrating workpiece
JPH0316286Y2 (enrdf_load_stackoverflow)
US4671726A (en) Cantilevered soft landing boat loader for semiconductor processing furnaces
US4536122A (en) Wafer transfer device
US4002245A (en) Material handling apparatus having gripping means for moving articles in several directions
EP0123478A1 (en) Workpiece-handling apparatus
JP4781936B2 (ja) パレット遠心脱水装置
JPH09153534A (ja) ウェーハ移載装置
US4624081A (en) Turn-around mechanism for workpieces in grinding machines
JP2641187B2 (ja) ガラス板の位置決め装置
USRE29797E (en) Material handling apparatus having gripping means for moving articles in several directions
JPS60130841A (ja) ウエハ−移載装置
JP2001315951A (ja) 移送部材の回転装置
JPS6144550A (ja) 回転装置
JP2572844B2 (ja) ワーク加工ラインのパレット交換装置
JP2001093968A (ja) 円板状部材の保持装置
JPS5828449B2 (ja) ロ−ラ組立装置
CN219173307U (zh) 一种管道坡口输送装置
CN116689311B (zh) 一种轴侧壁外观检测装置及其轴外观检测装置
JPH0338064B2 (enrdf_load_stackoverflow)
CN118183214B (zh) 一种后桥壳综合加工用承接系统
JPH0580000A (ja) ワークの外観検査装置