JPH0316187B2 - - Google Patents
Info
- Publication number
- JPH0316187B2 JPH0316187B2 JP3142784A JP3142784A JPH0316187B2 JP H0316187 B2 JPH0316187 B2 JP H0316187B2 JP 3142784 A JP3142784 A JP 3142784A JP 3142784 A JP3142784 A JP 3142784A JP H0316187 B2 JPH0316187 B2 JP H0316187B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- ultrafine particles
- pattern
- ultrafine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011882 ultra-fine particle Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 8
- 239000012159 carrier gas Substances 0.000 claims description 6
- 239000007921 spray Substances 0.000 claims description 5
- 238000005507 spraying Methods 0.000 claims description 4
- 230000004913 activation Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3142784A JPS60175573A (ja) | 1984-02-23 | 1984-02-23 | 超微粒子スプレ−膜の形成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3142784A JPS60175573A (ja) | 1984-02-23 | 1984-02-23 | 超微粒子スプレ−膜の形成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60175573A JPS60175573A (ja) | 1985-09-09 |
| JPH0316187B2 true JPH0316187B2 (enrdf_load_stackoverflow) | 1991-03-04 |
Family
ID=12330938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3142784A Granted JPS60175573A (ja) | 1984-02-23 | 1984-02-23 | 超微粒子スプレ−膜の形成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60175573A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3222614B2 (ja) * | 1993-04-15 | 2001-10-29 | 松下電工株式会社 | 立体表面への膜形成方法 |
| JP4383268B2 (ja) * | 2004-06-29 | 2009-12-16 | アルプス電気株式会社 | スプレーコート方法及びスプレーコート装置 |
-
1984
- 1984-02-23 JP JP3142784A patent/JPS60175573A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60175573A (ja) | 1985-09-09 |
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