JPS60175573A - 超微粒子スプレ−膜の形成法 - Google Patents

超微粒子スプレ−膜の形成法

Info

Publication number
JPS60175573A
JPS60175573A JP3142784A JP3142784A JPS60175573A JP S60175573 A JPS60175573 A JP S60175573A JP 3142784 A JP3142784 A JP 3142784A JP 3142784 A JP3142784 A JP 3142784A JP S60175573 A JPS60175573 A JP S60175573A
Authority
JP
Japan
Prior art keywords
substrate
film
ultra
pattern
fine particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3142784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0316187B2 (enrdf_load_stackoverflow
Inventor
Chikara Hayashi
林　主税
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Shingijutsu Kaihatsu Jigyodan
Original Assignee
Research Development Corp of Japan
Shingijutsu Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Development Corp of Japan, Shingijutsu Kaihatsu Jigyodan filed Critical Research Development Corp of Japan
Priority to JP3142784A priority Critical patent/JPS60175573A/ja
Publication of JPS60175573A publication Critical patent/JPS60175573A/ja
Publication of JPH0316187B2 publication Critical patent/JPH0316187B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
JP3142784A 1984-02-23 1984-02-23 超微粒子スプレ−膜の形成法 Granted JPS60175573A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3142784A JPS60175573A (ja) 1984-02-23 1984-02-23 超微粒子スプレ−膜の形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3142784A JPS60175573A (ja) 1984-02-23 1984-02-23 超微粒子スプレ−膜の形成法

Publications (2)

Publication Number Publication Date
JPS60175573A true JPS60175573A (ja) 1985-09-09
JPH0316187B2 JPH0316187B2 (enrdf_load_stackoverflow) 1991-03-04

Family

ID=12330938

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3142784A Granted JPS60175573A (ja) 1984-02-23 1984-02-23 超微粒子スプレ−膜の形成法

Country Status (1)

Country Link
JP (1) JPS60175573A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06296920A (ja) * 1993-04-15 1994-10-25 Matsushita Electric Works Ltd 立体表面への膜形成方法
JP2006007164A (ja) * 2004-06-29 2006-01-12 Alps Electric Co Ltd スプレーコート方法及びスプレーコート装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06296920A (ja) * 1993-04-15 1994-10-25 Matsushita Electric Works Ltd 立体表面への膜形成方法
JP2006007164A (ja) * 2004-06-29 2006-01-12 Alps Electric Co Ltd スプレーコート方法及びスプレーコート装置

Also Published As

Publication number Publication date
JPH0316187B2 (enrdf_load_stackoverflow) 1991-03-04

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