JPH0316112A - イオンビーム加工装置 - Google Patents
イオンビーム加工装置Info
- Publication number
- JPH0316112A JPH0316112A JP2143698A JP14369890A JPH0316112A JP H0316112 A JPH0316112 A JP H0316112A JP 2143698 A JP2143698 A JP 2143698A JP 14369890 A JP14369890 A JP 14369890A JP H0316112 A JPH0316112 A JP H0316112A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- charged particle
- pattern
- mask
- ion beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010884 ion-beam technique Methods 0.000 title claims description 10
- 239000002245 particle Substances 0.000 claims abstract description 39
- 230000007547 defect Effects 0.000 claims abstract description 17
- 230000003287 optical effect Effects 0.000 claims abstract description 12
- 238000005192 partition Methods 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 3
- 238000012937 correction Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 3
- 239000000654 additive Substances 0.000 abstract 1
- 230000000996 additive effect Effects 0.000 abstract 1
- 230000008030 elimination Effects 0.000 abstract 1
- 238000003379 elimination reaction Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 238000001514 detection method Methods 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- GVEPBJHOBDJJJI-UHFFFAOYSA-N fluoranthrene Natural products C1=CC(C2=CC=CC=C22)=C3C2=CC=CC3=C1 GVEPBJHOBDJJJI-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 description 2
- BBEAQIROQSPTKN-UHFFFAOYSA-N pyrene Chemical compound C1=CC=C2C=CC3=CC=CC4=CC=C1C2=C43 BBEAQIROQSPTKN-UHFFFAOYSA-N 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- LOCGAKKLRVLQAM-UHFFFAOYSA-N 4-methylphenanthrene Chemical compound C1=CC=CC2=C3C(C)=CC=CC3=CC=C21 LOCGAKKLRVLQAM-UHFFFAOYSA-N 0.000 description 1
- 241000612182 Rexea solandri Species 0.000 description 1
- 241001333909 Soter Species 0.000 description 1
- RJGDLRCDCYRQOQ-UHFFFAOYSA-N anthrone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3CC2=C1 RJGDLRCDCYRQOQ-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- DOWJXOHBNXRUOD-UHFFFAOYSA-N methylphenanthrene Natural products C1=CC2=CC=CC=C2C2=C1C(C)=CC=C2 DOWJXOHBNXRUOD-UHFFFAOYSA-N 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- AAAQKTZKLRYKHR-UHFFFAOYSA-N triphenylmethane Chemical compound C1=CC=CC=C1C(C=1C=CC=CC=1)C1=CC=CC=C1 AAAQKTZKLRYKHR-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2143698A JPH0316112A (ja) | 1990-06-01 | 1990-06-01 | イオンビーム加工装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2143698A JPH0316112A (ja) | 1990-06-01 | 1990-06-01 | イオンビーム加工装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58201764A Division JPS6094728A (ja) | 1983-10-27 | 1983-10-27 | 荷電粒子ビームを用いた加工方法およびその装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0316112A true JPH0316112A (ja) | 1991-01-24 |
| JPH0563930B2 JPH0563930B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-09-13 |
Family
ID=15344887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2143698A Granted JPH0316112A (ja) | 1990-06-01 | 1990-06-01 | イオンビーム加工装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316112A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6024466A (en) * | 1997-02-13 | 2000-02-15 | Uniden Corp. | Electronic parts holder |
| WO2022153793A1 (ja) * | 2021-01-15 | 2022-07-21 | 株式会社ブイ・テクノロジー | フォトマスク修正装置およびフォトマスクの修正方法 |
-
1990
- 1990-06-01 JP JP2143698A patent/JPH0316112A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6024466A (en) * | 1997-02-13 | 2000-02-15 | Uniden Corp. | Electronic parts holder |
| WO2022153793A1 (ja) * | 2021-01-15 | 2022-07-21 | 株式会社ブイ・テクノロジー | フォトマスク修正装置およびフォトマスクの修正方法 |
| JP2022109566A (ja) * | 2021-01-15 | 2022-07-28 | 株式会社ブイ・テクノロジー | フォトマスク修正装置およびフォトマスクの修正方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0563930B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-09-13 |
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