JPH0315974B2 - - Google Patents

Info

Publication number
JPH0315974B2
JPH0315974B2 JP58228785A JP22878583A JPH0315974B2 JP H0315974 B2 JPH0315974 B2 JP H0315974B2 JP 58228785 A JP58228785 A JP 58228785A JP 22878583 A JP22878583 A JP 22878583A JP H0315974 B2 JPH0315974 B2 JP H0315974B2
Authority
JP
Japan
Prior art keywords
mosfet
gate
contact hole
ion
conductive electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58228785A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60120240A (ja
Inventor
Tetsuo Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP58228785A priority Critical patent/JPS60120240A/ja
Publication of JPS60120240A publication Critical patent/JPS60120240A/ja
Publication of JPH0315974B2 publication Critical patent/JPH0315974B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Molecular Biology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP58228785A 1983-12-03 1983-12-03 Ｉｓｆｅｔセンサ Granted JPS60120240A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58228785A JPS60120240A (ja) 1983-12-03 1983-12-03 Ｉｓｆｅｔセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58228785A JPS60120240A (ja) 1983-12-03 1983-12-03 Ｉｓｆｅｔセンサ

Publications (2)

Publication Number Publication Date
JPS60120240A JPS60120240A (ja) 1985-06-27
JPH0315974B2 true JPH0315974B2 (enrdf_load_stackoverflow) 1991-03-04

Family

ID=16881805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58228785A Granted JPS60120240A (ja) 1983-12-03 1983-12-03 Ｉｓｆｅｔセンサ

Country Status (1)

Country Link
JP (1) JPS60120240A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1250020A (en) * 1985-01-23 1989-02-14 Imants R. Lauks Ambient sensing devices with isolation
JPS62132160A (ja) * 1985-12-04 1987-06-15 Terumo Corp 分離ゲ−ト型ｉｓｆｅｔを用いたバイオセンサ−
US4889612A (en) * 1987-05-22 1989-12-26 Abbott Laboratories Ion-selective electrode having a non-metal sensing element

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630640A (en) * 1979-08-22 1981-03-27 Olympus Optical Co Ltd Detecting method of chemical substance by chemically sensitive element of insulated-gate transistor structure

Also Published As

Publication number Publication date
JPS60120240A (ja) 1985-06-27

Similar Documents

Publication Publication Date Title
JP2610294B2 (ja) 化学センサ
JPS5870155A (ja) イオンに応答する半導体装置
US4512870A (en) Chemically sensitive element
US4232326A (en) Chemically sensitive field effect transistor having electrode connections
US20050012115A1 (en) Ion sensitive field effect transistor and method for producing an ion sensitive field effect transistor
JPH0315974B2 (enrdf_load_stackoverflow)
TW200425507A (en) Ion sensitive field effect transistor and its manufacturing method
TW201440273A (zh) 電阻式記憶體感測元件
JPH0518935A (ja) ダイヤモンド薄膜イオンセンサ
JPH0339585B2 (enrdf_load_stackoverflow)
JPH0469338B2 (enrdf_load_stackoverflow)
JPH0345178Y2 (enrdf_load_stackoverflow)
JPH0210146A (ja) 感湿素子およびその動作回路
JPH0350985B2 (enrdf_load_stackoverflow)
JPH0241581Y2 (enrdf_load_stackoverflow)
JPH02249962A (ja) Ｆｅｔセンサ
JPH0429974B2 (enrdf_load_stackoverflow)
JPS6388438A (ja) Ｍｏｓｆｅｔ化学電極
JPH0422293Y2 (enrdf_load_stackoverflow)
JP2002340849A (ja) 半導体イオンセンサ及びその製造方法
JP2694818B2 (ja) 半導体電界効果型バイオセンサおよびその製造方法
JPS62110145A (ja) 環境検知装置及びその製造方法
JPS60209162A (ja) 化学感応電界効果トランジスタおよびその製造方法
JPS59100851A (ja) 半導体イオンセンサ
JP2002162380A (ja) 半導体イオンセンサ