JPH03157942A - Manufacture of resin-sealed semiconductor integrated circuit - Google Patents

Manufacture of resin-sealed semiconductor integrated circuit

Info

Publication number
JPH03157942A
JPH03157942A JP29807589A JP29807589A JPH03157942A JP H03157942 A JPH03157942 A JP H03157942A JP 29807589 A JP29807589 A JP 29807589A JP 29807589 A JP29807589 A JP 29807589A JP H03157942 A JPH03157942 A JP H03157942A
Authority
JP
Japan
Prior art keywords
resin
low
quality
tablet
mold
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29807589A
Other languages
Japanese (ja)
Inventor
Masao Hino
日野 雅夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Yamaguchi Ltd
Original Assignee
NEC Yamaguchi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Yamaguchi Ltd filed Critical NEC Yamaguchi Ltd
Priority to JP29807589A priority Critical patent/JPH03157942A/en
Publication of JPH03157942A publication Critical patent/JPH03157942A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/46Means for plasticising or homogenising the moulding material or forcing it into the mould
    • B29C45/462Injection of preformed charges of material

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PURPOSE:To reduce the manufacturing cost of the title circuit by a method wherein a high-quality and high-cost resin tablet is used for forming a resin- sealed IC and a low-quality and low-cost resin tablet is used for forming other parts. CONSTITUTION:A lead frame 6 is set between a bottom force 1 and a top force 2 and is clamped. A high-quality and high-cost resin tablet 5A for forming a package of an IC is set below, a low-quality and low-cost resin tablet 5B for forming other parts, such as a runner and the like, is set above and both tablets 5A and 5B are pressed by a plunger 4 and are injected in order in a metal mold from the tablet set below. As a resin to be discharged as an unnecessary part is substituted with a low-quality and low-cost resin, the manufacturing cost of a resin-sealed semiconductor integrated circuit is reduced.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は樹脂封止型半導体集積回路の製造方法に関し、
特に、封止金型へ供する塊状樹脂(以下タブレットと呼
ぶ)の組み合せに関する。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a method for manufacturing a resin-encapsulated semiconductor integrated circuit,
In particular, the present invention relates to a combination of bulk resins (hereinafter referred to as tablets) to be provided to a sealing mold.

〔従来の技術〕[Conventional technology]

従来、樹脂封止型半導体集積回路(以下ICと呼ぶ)の
封入工程では、第5図に示すごとく、上・下の封入金型
]、2の間に形成される空洞部(以下キャビティと呼ぶ
)3に樹脂を注入することにより、金型内にセットされ
たICのリードフレーム上に所定の外形を形成する方法
が行なわれていた。
Conventionally, in the encapsulation process of resin-molded semiconductor integrated circuits (hereinafter referred to as IC), as shown in FIG. ) 3 to form a predetermined external shape on an IC lead frame set in a mold.

金型のタブレフ1〜投入孔には、一般に3〜4個のタブ
レット5が投入される。タブレット5は射出プランジャ
ー4の圧力により押され、金型内の樹脂流路であるラン
ナー7を通りキャビティ3へ送られる。
Generally, three to four tablets 5 are charged into the tablef 1 to the charging hole of the mold. The tablet 5 is pushed by the pressure of the injection plunger 4 and sent to the cavity 3 through a runner 7 which is a resin flow path in the mold.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

上述の如く、金型に注入された樹脂5は、ランナ一部及
びIC部に充満し、熱により硬化し、ICの外形を形成
する。
As described above, the resin 5 injected into the mold fills a portion of the runner and the IC portion, is cured by heat, and forms the outer shape of the IC.

金型より取り外された樹脂は第6図に示す形状をしてい
る。ICとして必要なのはリードフレーム6に形成され
たパッケージ部8であり、ランナ一部の樹脂7Aは不要
物として除去、廃棄される。
The resin removed from the mold has the shape shown in FIG. What is necessary for the IC is the package portion 8 formed on the lead frame 6, and the resin 7A that is part of the runner is removed and discarded as unnecessary material.

近年、ICの信頼性1品質を高めるため、樹脂の耐湿性
等の特性が改良され、樹脂の価格が高くなってきている
。しかし、上述の如く、使用した樹脂の半分近くはラン
ナ一部の樹脂7Aとなり廃棄されるため、非常に大きな
無駄を生じており、ICのコスト低減の妨げとなってい
た。
In recent years, in order to improve the reliability and quality of ICs, the moisture resistance and other characteristics of resins have been improved, and the prices of resins have become higher. However, as described above, nearly half of the resin used becomes the resin 7A of a part of the runner and is discarded, resulting in a very large amount of waste, which hinders IC cost reduction.

上述した従来の封止工程による製造方法に対し本発明は
、金型に投入する樹脂として、ICのパッケージを形成
する高品質高価格の樹脂と、ICのパッケージ以外の部
分を形成する低品質低価格の樹脂の2種類を使用すると
いう相違点がある。
In contrast to the manufacturing method using the conventional sealing process described above, the present invention uses a high-quality, high-priced resin that forms the IC package and a low-quality, low-priced resin that forms the parts other than the IC package as resins that are put into the mold. The difference is that two types of resin are used.

〔課題を解決するための手段〕[Means to solve the problem]

本発明の樹脂封止型半導体装置の製造方法は、封入金型
を用い金型の樹脂供給孔に複数の塊状樹脂を投入し、金
型内部へ注入することにより半導体素子の樹脂封止を行
なう樹脂封止型半導体集積回路の製造方法において、前
記複数の塊状樹脂は少くとも2種類の互いに特性の異な
る塊状樹脂によって構成されるものである。
The method for manufacturing a resin-sealed semiconductor device of the present invention uses an encapsulation mold, and injects a plurality of lumps of resin into the resin supply hole of the mold, and injects the resin into the inside of the mold, thereby sealing the semiconductor element with the resin. In the method for manufacturing a resin-sealed semiconductor integrated circuit, the plurality of lumped resins are composed of at least two types of lumped resins having mutually different characteristics.

〔実施例〕 次に本発明の実施例について図面を参照して説明する。〔Example〕 Next, embodiments of the present invention will be described with reference to the drawings.

第1図は本発明の第1の実施例を説明する。ための金型
の断面図である。
FIG. 1 illustrates a first embodiment of the invention. FIG.

下金型1と上金型2の間にリードフレーム6がセットさ
れ、樹脂注入の圧力に耐えられる様に締められている。
A lead frame 6 is set between the lower mold 1 and the upper mold 2, and is tightened to withstand the pressure of resin injection.

タブレットは図に示す様に、ICパッケージを形成する
高品質、高価格の第1のタブレット5が下側に、ランナ
ー等不要部分を形成する低品質低価格の第2のタブレッ
ト5Aが上側にセットされる。その後、射出プランジャ
ー4により加圧が行なわれ、タブレットは下方のタブレ
ットから順に金型内へ注入される。
As shown in the figure, the first tablet 5 of high quality and high price that forms the IC package is set on the bottom side, and the second tablet 5A of low quality and low price that forms unnecessary parts such as runners is set on the top side. be done. Thereafter, pressure is applied by the injection plunger 4, and the tablets are sequentially injected into the mold starting from the lower tablet.

第2図は本第1の実施例によって得られた封入品の斜視
図である。図中8Aはリードフレーム6上に作られたパ
ッケージ部であり、7B、7Cは不要部分であるランナ
一部の樹脂である。ランナ一部の樹脂7Cは上部に投入
された第2のタブレット5Bにより形成された部分であ
る。従って従来に比べ高価格のタブレットを少くするこ
とができる。
FIG. 2 is a perspective view of the enclosed product obtained by the first example. In the figure, 8A is a package part made on the lead frame 6, and 7B and 7C are resin parts of a part of the runner, which are unnecessary parts. A portion of the resin 7C of the runner is a portion formed by the second tablet 5B placed in the upper part. Therefore, the number of expensive tablets can be reduced compared to conventional ones.

第3図は本発明の第2の実施例を説明するための斜視図
である。
FIG. 3 is a perspective view for explaining a second embodiment of the present invention.

複数のタブレット投入部を持つ封入方式、マルチプラン
ジャ一方式の金型の場合の実施例である。
This is an example in the case of an enclosure type mold having a plurality of tablet insertion parts and a single multi-plunger type mold.

下金型1に設けられたタブレット投入孔に各々第1のタ
ブレット5Aおよび第2のタブレット5Bが投入される
。リードフレーム6はICの外形を形成するキャビティ
3上にセットされている。
A first tablet 5A and a second tablet 5B are inserted into tablet insertion holes provided in the lower mold 1, respectively. A lead frame 6 is set on a cavity 3 that forms the outer shape of the IC.

タブレット5A、5B投入後、上金型が下降し下金型下
部に設けられた複数のプランジャーにて樹、脂がキャビ
ティ内へ注入される。この場合箱1の実施例と同じ様に
、低品質低価格の樹脂にて作られた第2のタブレット5
Bは、キャビティ3から遠い位置に投入される。本実施
例の場合下側となる。
After inserting the tablets 5A and 5B, the upper mold is lowered and resin is injected into the cavity using a plurality of plungers provided at the bottom of the lower mold. In this case, as in the embodiment of Box 1, a second tablet 5 made of low quality and low cost resin is used.
B is introduced at a position far from the cavity 3. In this embodiment, it is the lower side.

第4図は本第2の実施例にて得られた封入品の斜視図で
ある。図中8Aはリードフレーム6上に作られたパッケ
ージであり、高品質高価格の樹脂にて成形されている。
FIG. 4 is a perspective view of the enclosed product obtained in the second example. In the figure, 8A is a package made on the lead frame 6, and is molded from high quality and expensive resin.

7Bおよび7cはランナー部の樹脂であり、7Cは低品
質、低価格の樹脂にて成形された部分である。
7B and 7c are resins of the runner parts, and 7C is a part molded with low quality and low cost resin.

〔発明の効果〕〔Effect of the invention〕

以上説明したように本発明は、樹脂封止型半導体集積回
路のパッケージを形成するための高品質、高価格の樹脂
タブレットと、不要部分を形成する低品質、低価格の樹
脂タブレットを使用して封入工程を行なうことにより、
従来は不要部分として廃棄されていた高品質、高価格の
樹脂を、低品質、低価格の樹脂に置き替えることができ
るなめ、樹脂封止型半導体集積回路の製造コストを低減
できる効果がある。
As explained above, the present invention uses a high-quality, high-priced resin tablet for forming the package of a resin-sealed semiconductor integrated circuit, and a low-quality, low-priced resin tablet for forming unnecessary parts. By performing the encapsulation process,
The high-quality, high-priced resin that was conventionally discarded as unnecessary parts can be replaced with a low-quality, low-priced resin, which has the effect of reducing the manufacturing cost of resin-sealed semiconductor integrated circuits.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の第1の実施例を説明するための金型の
断面図、第2図は第1の実施例により得られた封入品の
斜視図、第3図は本発明の第2の実施例を説明するため
の金型の斜視図、第4図は第2の実施例により得られた
封入品の斜視図、第5図は従来例を説明するための金型
の断面図、第6図は従来例にて得られた封入品の斜視図
である。 1・・・下金型、2・・・上金型、3・・・キャビティ
、4・・・プランジャー、5・・・タブレット、5A・
・・第1のタブレット、5B・・・第2のタブレット、
6・・・リードフレーム、7・・・ランナー、7A〜7
C・・・ランナ一部の樹脂、8.8A・・・パッケージ
部。
FIG. 1 is a sectional view of a mold for explaining a first embodiment of the present invention, FIG. 2 is a perspective view of an enclosed product obtained by the first embodiment, and FIG. FIG. 4 is a perspective view of the enclosed product obtained by the second embodiment, and FIG. 5 is a cross-sectional view of the mold to explain the conventional example. , FIG. 6 is a perspective view of an enclosed product obtained in a conventional example. 1... Lower mold, 2... Upper mold, 3... Cavity, 4... Plunger, 5... Tablet, 5A.
...First tablet, 5B...Second tablet,
6...Lead frame, 7...Runner, 7A~7
C...Runner part resin, 8.8A...Package part.

Claims (1)

【特許請求の範囲】[Claims] 封入金型を用い金型の樹脂供給孔に複数の塊状樹脂を投
入し、金型内部へ注入することにより半導体素子の樹脂
封止を行なう樹脂封止型半導体集積回路の製造方法にお
いて、前記複数の塊状樹脂は少くとも2種類の互いに特
性の異なる塊状樹脂によって構成されることを特徴とす
る樹脂封止型半導体集積回路の製造方法。
In a method for manufacturing a resin-encapsulated semiconductor integrated circuit, in which a semiconductor element is encapsulated with resin by using an encapsulation mold and injecting a plurality of lump resins into the resin supply holes of the mold and injecting the resin into the inside of the mold, the plurality of A method for manufacturing a resin-sealed semiconductor integrated circuit, characterized in that the lumpy resin is composed of at least two types of lumpy resins having mutually different characteristics.
JP29807589A 1989-11-15 1989-11-15 Manufacture of resin-sealed semiconductor integrated circuit Pending JPH03157942A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29807589A JPH03157942A (en) 1989-11-15 1989-11-15 Manufacture of resin-sealed semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29807589A JPH03157942A (en) 1989-11-15 1989-11-15 Manufacture of resin-sealed semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPH03157942A true JPH03157942A (en) 1991-07-05

Family

ID=17854826

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29807589A Pending JPH03157942A (en) 1989-11-15 1989-11-15 Manufacture of resin-sealed semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPH03157942A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5431854A (en) * 1992-01-23 1995-07-11 "3P" Licensing B.V. Method for pressing a plastic, which cures by means of a reaction, into a mould cavity, a pressing auxiliary in pill form to be used in this method and a holder composed of such material

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5431854A (en) * 1992-01-23 1995-07-11 "3P" Licensing B.V. Method for pressing a plastic, which cures by means of a reaction, into a mould cavity, a pressing auxiliary in pill form to be used in this method and a holder composed of such material

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