JPH0315550Y2 - - Google Patents

Info

Publication number
JPH0315550Y2
JPH0315550Y2 JP1985067877U JP6787785U JPH0315550Y2 JP H0315550 Y2 JPH0315550 Y2 JP H0315550Y2 JP 1985067877 U JP1985067877 U JP 1985067877U JP 6787785 U JP6787785 U JP 6787785U JP H0315550 Y2 JPH0315550 Y2 JP H0315550Y2
Authority
JP
Japan
Prior art keywords
single crystal
melt
crucible
heating element
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985067877U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61183971U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985067877U priority Critical patent/JPH0315550Y2/ja
Publication of JPS61183971U publication Critical patent/JPS61183971U/ja
Application granted granted Critical
Publication of JPH0315550Y2 publication Critical patent/JPH0315550Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1985067877U 1985-05-08 1985-05-08 Expired JPH0315550Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985067877U JPH0315550Y2 (en, 2012) 1985-05-08 1985-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985067877U JPH0315550Y2 (en, 2012) 1985-05-08 1985-05-08

Publications (2)

Publication Number Publication Date
JPS61183971U JPS61183971U (en, 2012) 1986-11-17
JPH0315550Y2 true JPH0315550Y2 (en, 2012) 1991-04-04

Family

ID=30602112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985067877U Expired JPH0315550Y2 (en, 2012) 1985-05-08 1985-05-08

Country Status (1)

Country Link
JP (1) JPH0315550Y2 (en, 2012)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03183689A (ja) * 1989-12-11 1991-08-09 Mitsubishi Materials Corp 単結晶引上装置および引上方法
DE60323663D1 (de) * 2002-11-12 2008-10-30 Memc Electronic Materials Kristallziehvorrichtung und verfahren zur züchtung einer einkristallstange
KR101467103B1 (ko) * 2013-06-21 2014-11-28 주식회사 엘지실트론 실리콘 단결정 성장 장치 및 그 성장 방법
JP2018080097A (ja) * 2016-11-18 2018-05-24 住友金属鉱山株式会社 単結晶製造装置及び単結晶製造方法
US20240158952A1 (en) * 2021-12-29 2024-05-16 Xi’An Eswin Material Technology Co., Ltd. Apparatus and Method for Regulating Hot Zone for Single Crystal Growth

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522329U (en, 2012) * 1978-07-31 1980-02-13
JPS6027684A (ja) * 1983-07-26 1985-02-12 Fujitsu Ltd 単結晶製造装置

Also Published As

Publication number Publication date
JPS61183971U (en, 2012) 1986-11-17

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