JPH03148849A - ウェハ試験装置 - Google Patents

ウェハ試験装置

Info

Publication number
JPH03148849A
JPH03148849A JP2275945A JP27594590A JPH03148849A JP H03148849 A JPH03148849 A JP H03148849A JP 2275945 A JP2275945 A JP 2275945A JP 27594590 A JP27594590 A JP 27594590A JP H03148849 A JPH03148849 A JP H03148849A
Authority
JP
Japan
Prior art keywords
tester
wafer prober
wafer
probe card
card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2275945A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0516180B2 (enExample
Inventor
Kazuichi Hayashi
和一 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2275945A priority Critical patent/JPH03148849A/ja
Publication of JPH03148849A publication Critical patent/JPH03148849A/ja
Publication of JPH0516180B2 publication Critical patent/JPH0516180B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2275945A 1990-10-15 1990-10-15 ウェハ試験装置 Granted JPH03148849A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2275945A JPH03148849A (ja) 1990-10-15 1990-10-15 ウェハ試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2275945A JPH03148849A (ja) 1990-10-15 1990-10-15 ウェハ試験装置

Publications (2)

Publication Number Publication Date
JPH03148849A true JPH03148849A (ja) 1991-06-25
JPH0516180B2 JPH0516180B2 (enExample) 1993-03-03

Family

ID=17562619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2275945A Granted JPH03148849A (ja) 1990-10-15 1990-10-15 ウェハ試験装置

Country Status (1)

Country Link
JP (1) JPH03148849A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111624372A (zh) * 2020-06-30 2020-09-04 成都铭钛科技有限公司 一种器件检测触发器、器件检测装置及器件检测方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111624372A (zh) * 2020-06-30 2020-09-04 成都铭钛科技有限公司 一种器件检测触发器、器件检测装置及器件检测方法

Also Published As

Publication number Publication date
JPH0516180B2 (enExample) 1993-03-03

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