JPH0516180B2 - - Google Patents

Info

Publication number
JPH0516180B2
JPH0516180B2 JP2275945A JP27594590A JPH0516180B2 JP H0516180 B2 JPH0516180 B2 JP H0516180B2 JP 2275945 A JP2275945 A JP 2275945A JP 27594590 A JP27594590 A JP 27594590A JP H0516180 B2 JPH0516180 B2 JP H0516180B2
Authority
JP
Japan
Prior art keywords
wafer
tester
performance board
wafer prober
probe card
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2275945A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03148849A (ja
Inventor
Kazuichi Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2275945A priority Critical patent/JPH03148849A/ja
Publication of JPH03148849A publication Critical patent/JPH03148849A/ja
Publication of JPH0516180B2 publication Critical patent/JPH0516180B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2275945A 1990-10-15 1990-10-15 ウェハ試験装置 Granted JPH03148849A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2275945A JPH03148849A (ja) 1990-10-15 1990-10-15 ウェハ試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2275945A JPH03148849A (ja) 1990-10-15 1990-10-15 ウェハ試験装置

Publications (2)

Publication Number Publication Date
JPH03148849A JPH03148849A (ja) 1991-06-25
JPH0516180B2 true JPH0516180B2 (enExample) 1993-03-03

Family

ID=17562619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2275945A Granted JPH03148849A (ja) 1990-10-15 1990-10-15 ウェハ試験装置

Country Status (1)

Country Link
JP (1) JPH03148849A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111624372A (zh) * 2020-06-30 2020-09-04 成都铭钛科技有限公司 一种器件检测触发器、器件检测装置及器件检测方法

Also Published As

Publication number Publication date
JPH03148849A (ja) 1991-06-25

Similar Documents

Publication Publication Date Title
JPH022547B2 (enExample)
US20100225345A1 (en) Apparatus and method for testing a semiconductor device
TWI351524B (en) Apparatus for planarizing a probe card and method
JPH08201427A (ja) 複数の探針を位置決めして配置した探針組立体および位置決め基板
US20050124144A1 (en) Electrical connecting apparatus
JP3194669B2 (ja) 検査装置および検査装置における接続方法
KR20100069300A (ko) 프로브 카드와, 이를 이용한 반도체 디바이스 테스트 장치 및 방법
JP2000150092A (ja) Ｉｃソケット
JP2000031222A (ja) バーンイン検査治具
JPH06258374A (ja) 被検査電極板の検査方法
JPH0516180B2 (enExample)
JP2002365310A (ja) 垂直型プローブカード
JP3610919B2 (ja) 回路基板の検査用治具、検査方法、および製造方法
JP2004138576A (ja) 電気的接続装置
JP3224519B2 (ja) ウェーハ測定治具、テストヘッド装置およびウェーハ測定装置
JP2965174B2 (ja) 半導体素子検査装置
JP3061008B2 (ja) プローブ装置
KR20150139093A (ko) 테스트 장치의 커넥터 시스템
JPH1152000A (ja) プリント配線基板の検査装置及び検査方法
JPH08136601A (ja) バックボード用布線試験治具
CN218099326U (zh) 探针卡
JP2007003433A (ja) 試験装置用テストヘッド
JPH0992754A (ja) 半導体パッケージ基板、半導体パッケージ基板の検査装置及び検査方法
JPH0758168A (ja) プローブ装置
JPH04215450A (ja) 半導体集積回路装置

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term