JPH0314770B2 - - Google Patents
Info
- Publication number
- JPH0314770B2 JPH0314770B2 JP17133384A JP17133384A JPH0314770B2 JP H0314770 B2 JPH0314770 B2 JP H0314770B2 JP 17133384 A JP17133384 A JP 17133384A JP 17133384 A JP17133384 A JP 17133384A JP H0314770 B2 JPH0314770 B2 JP H0314770B2
- Authority
- JP
- Japan
- Prior art keywords
- mold module
- preparation chamber
- intake
- main body
- take
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002360 preparation method Methods 0.000 claims description 50
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 27
- 229910052710 silicon Inorganic materials 0.000 claims description 27
- 239000010703 silicon Substances 0.000 claims description 27
- 230000007246 mechanism Effects 0.000 claims description 26
- 238000000605 extraction Methods 0.000 claims description 17
- 230000003028 elevating effect Effects 0.000 claims description 13
- 238000002347 injection Methods 0.000 claims description 13
- 239000007924 injection Substances 0.000 claims description 13
- 238000002844 melting Methods 0.000 claims description 11
- 230000008018 melting Effects 0.000 claims description 11
- 238000001125 extrusion Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 21
- 229910052786 argon Inorganic materials 0.000 description 11
- 239000007789 gas Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 6
- 235000012431 wafers Nutrition 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 4
- 230000000149 penetrating effect Effects 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17133384A JPS6148417A (ja) | 1984-08-17 | 1984-08-17 | シリコン溶融炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17133384A JPS6148417A (ja) | 1984-08-17 | 1984-08-17 | シリコン溶融炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6148417A JPS6148417A (ja) | 1986-03-10 |
| JPH0314770B2 true JPH0314770B2 (fa) | 1991-02-27 |
Family
ID=15921281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17133384A Granted JPS6148417A (ja) | 1984-08-17 | 1984-08-17 | シリコン溶融炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6148417A (fa) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2727445B2 (ja) * | 1991-05-25 | 1998-03-11 | 株式会社 シンク・ラボラトリー | ロータリースクリーンの製造方法 |
-
1984
- 1984-08-17 JP JP17133384A patent/JPS6148417A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6148417A (ja) | 1986-03-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |