JPH0314615Y2 - - Google Patents

Info

Publication number
JPH0314615Y2
JPH0314615Y2 JP1986006564U JP656486U JPH0314615Y2 JP H0314615 Y2 JPH0314615 Y2 JP H0314615Y2 JP 1986006564 U JP1986006564 U JP 1986006564U JP 656486 U JP656486 U JP 656486U JP H0314615 Y2 JPH0314615 Y2 JP H0314615Y2
Authority
JP
Japan
Prior art keywords
valve
piezoelectric actuator
piezoelectric
actuator
free end
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986006564U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62119580U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986006564U priority Critical patent/JPH0314615Y2/ja
Publication of JPS62119580U publication Critical patent/JPS62119580U/ja
Application granted granted Critical
Publication of JPH0314615Y2 publication Critical patent/JPH0314615Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP1986006564U 1986-01-22 1986-01-22 Expired JPH0314615Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986006564U JPH0314615Y2 (enEXAMPLES) 1986-01-22 1986-01-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986006564U JPH0314615Y2 (enEXAMPLES) 1986-01-22 1986-01-22

Publications (2)

Publication Number Publication Date
JPS62119580U JPS62119580U (enEXAMPLES) 1987-07-29
JPH0314615Y2 true JPH0314615Y2 (enEXAMPLES) 1991-04-02

Family

ID=30789198

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986006564U Expired JPH0314615Y2 (enEXAMPLES) 1986-01-22 1986-01-22

Country Status (1)

Country Link
JP (1) JPH0314615Y2 (enEXAMPLES)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS608384A (ja) * 1983-06-28 1985-01-17 Isao Miyake アルカリハライドの螢光を窒素により活性化する方法

Also Published As

Publication number Publication date
JPS62119580U (enEXAMPLES) 1987-07-29

Similar Documents

Publication Publication Date Title
US6581638B2 (en) Piezo valve
JP4585690B2 (ja) 流体制御要素
JP2001317646A (ja) 圧電式流体制御弁
JP4233162B2 (ja) ガス流を制御するための弁
JPH0314615Y2 (enEXAMPLES)
JPH02109084U (enEXAMPLES)
JPH0336768Y2 (enEXAMPLES)
JPS6412980U (enEXAMPLES)
JPH0220874B2 (enEXAMPLES)
JPH0434286Y2 (enEXAMPLES)
JPH023019Y2 (enEXAMPLES)
JPS62261778A (ja) 電歪素子を用いた弁
JPS636279U (enEXAMPLES)
JPS6144080U (ja) 電気式切換弁
JPS62188674U (enEXAMPLES)
JPH024296Y2 (enEXAMPLES)
JP3648675B2 (ja) ロック弁
JPH0414642Y2 (enEXAMPLES)
JPH0336778Y2 (enEXAMPLES)
JPS631097Y2 (enEXAMPLES)
JPH0233978U (enEXAMPLES)
JPS592366Y2 (ja) 直動型３方向電磁切換弁
JPH0313658Y2 (enEXAMPLES)
JPH0616168Y2 (ja) 方向切換弁
JPH0319654Y2 (enEXAMPLES)