JPH0313658Y2 - - Google Patents

Info

Publication number
JPH0313658Y2
JPH0313658Y2 JP1986068266U JP6826686U JPH0313658Y2 JP H0313658 Y2 JPH0313658 Y2 JP H0313658Y2 JP 1986068266 U JP1986068266 U JP 1986068266U JP 6826686 U JP6826686 U JP 6826686U JP H0313658 Y2 JPH0313658 Y2 JP H0313658Y2
Authority
JP
Japan
Prior art keywords
valve
electrostrictive element
valve body
main body
valve seat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986068266U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62181768U (enEXAMPLES
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986068266U priority Critical patent/JPH0313658Y2/ja
Publication of JPS62181768U publication Critical patent/JPS62181768U/ja
Application granted granted Critical
Publication of JPH0313658Y2 publication Critical patent/JPH0313658Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP1986068266U 1986-05-08 1986-05-08 Expired JPH0313658Y2 (enEXAMPLES)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986068266U JPH0313658Y2 (enEXAMPLES) 1986-05-08 1986-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986068266U JPH0313658Y2 (enEXAMPLES) 1986-05-08 1986-05-08

Publications (2)

Publication Number Publication Date
JPS62181768U JPS62181768U (enEXAMPLES) 1987-11-18
JPH0313658Y2 true JPH0313658Y2 (enEXAMPLES) 1991-03-28

Family

ID=30907924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986068266U Expired JPH0313658Y2 (enEXAMPLES) 1986-05-08 1986-05-08

Country Status (1)

Country Link
JP (1) JPH0313658Y2 (enEXAMPLES)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101386671B1 (ko) 2012-11-29 2014-04-21 인지컨트롤스 주식회사 피에조밸브 및 이를 위한 제조방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62141381A (ja) * 1985-12-16 1987-06-24 Hitachi Metals Ltd 圧電駆動式弁

Also Published As

Publication number Publication date
JPS62181768U (enEXAMPLES) 1987-11-18

Similar Documents

Publication Publication Date Title
EP0544405B1 (en) Piezoelectric fluid flow control valve
US5336062A (en) Microminiaturized pump
US7198250B2 (en) Piezoelectric actuator and pump using same
US4983876A (en) Piezoelectric pump assembly
US20030152469A1 (en) Piezoelectrically driven fluids pump
US5538221A (en) Micromechanical valve for micromechanical dosing devices
JPH07158757A (ja) マイクロバルブ
KR100256899B1 (ko) 흡출밸브
US20070071615A1 (en) Diaphragm pump
WO1989001241A1 (en) Sealing method and means for fluid control device
JPH0313658Y2 (enEXAMPLES)
JPS608384B2 (ja) バイモルフ圧電素子を用いた弁
JPH05263763A (ja) 圧電ポンプおよびその運転方法
JPH0356342B2 (enEXAMPLES)
JPH0313659Y2 (enEXAMPLES)
JPH0313457B2 (enEXAMPLES)
JPS6228585A (ja) 圧電駆動式弁
JPS6065970A (ja) 電歪素子を用いた弁装置
JPH0314617Y2 (enEXAMPLES)
JPH0356343B2 (enEXAMPLES)
JPS62261777A (ja) 電歪素子を用いた弁
JPH0314616Y2 (enEXAMPLES)
JPH0435649Y2 (enEXAMPLES)
JPS6231784A (ja) 圧電駆動式弁
JPH0144864Y2 (enEXAMPLES)