JPH0314454U - - Google Patents
Info
- Publication number
- JPH0314454U JPH0314454U JP7456189U JP7456189U JPH0314454U JP H0314454 U JPH0314454 U JP H0314454U JP 7456189 U JP7456189 U JP 7456189U JP 7456189 U JP7456189 U JP 7456189U JP H0314454 U JPH0314454 U JP H0314454U
- Authority
- JP
- Japan
- Prior art keywords
- reference frame
- substrate
- glass substrate
- sets
- inspected
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 10
- 238000007689 inspection Methods 0.000 claims description 6
- 230000007547 defect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7456189U JPH0725679Y2 (ja) | 1989-06-26 | 1989-06-26 | ガラス基板検査用フレキシブル載置台 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7456189U JPH0725679Y2 (ja) | 1989-06-26 | 1989-06-26 | ガラス基板検査用フレキシブル載置台 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0314454U true JPH0314454U (no) | 1991-02-14 |
JPH0725679Y2 JPH0725679Y2 (ja) | 1995-06-07 |
Family
ID=31614357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7456189U Expired - Lifetime JPH0725679Y2 (ja) | 1989-06-26 | 1989-06-26 | ガラス基板検査用フレキシブル載置台 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0725679Y2 (no) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1189739C (zh) * | 2000-04-26 | 2005-02-16 | 奥林巴斯光学工业株式会社 | 保持架机构 |
JP4659813B2 (ja) * | 2007-12-27 | 2011-03-30 | セイコーエプソン株式会社 | 表示器用照明装置 |
-
1989
- 1989-06-26 JP JP7456189U patent/JPH0725679Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0725679Y2 (ja) | 1995-06-07 |
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