JPH031379B2 - - Google Patents

Info

Publication number
JPH031379B2
JPH031379B2 JP9256886A JP9256886A JPH031379B2 JP H031379 B2 JPH031379 B2 JP H031379B2 JP 9256886 A JP9256886 A JP 9256886A JP 9256886 A JP9256886 A JP 9256886A JP H031379 B2 JPH031379 B2 JP H031379B2
Authority
JP
Japan
Prior art keywords
pulsed
evaporation
molecular beam
vapor deposition
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9256886A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62250167A (ja
Inventor
Shoichi Nozoe
Nobuyuki Nishinomya
Kimyuki Jinno
Hitoshi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP9256886A priority Critical patent/JPS62250167A/ja
Publication of JPS62250167A publication Critical patent/JPS62250167A/ja
Publication of JPH031379B2 publication Critical patent/JPH031379B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9256886A 1986-04-22 1986-04-22 パルス分子線蒸着方法とその装置 Granted JPS62250167A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9256886A JPS62250167A (ja) 1986-04-22 1986-04-22 パルス分子線蒸着方法とその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9256886A JPS62250167A (ja) 1986-04-22 1986-04-22 パルス分子線蒸着方法とその装置

Publications (2)

Publication Number Publication Date
JPS62250167A JPS62250167A (ja) 1987-10-31
JPH031379B2 true JPH031379B2 (enExample) 1991-01-10

Family

ID=14058028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9256886A Granted JPS62250167A (ja) 1986-04-22 1986-04-22 パルス分子線蒸着方法とその装置

Country Status (1)

Country Link
JP (1) JPS62250167A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2771810B1 (fr) * 1997-11-28 2000-02-11 Sgs Thomson Microelectronics Amelioration de la mesure d'epaisseur en temps reel d'un materiau depose dans une installation de depot par evaporation

Also Published As

Publication number Publication date
JPS62250167A (ja) 1987-10-31

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Legal Events

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EXPY Cancellation because of completion of term