JPS62250167A - パルス分子線蒸着方法とその装置 - Google Patents

パルス分子線蒸着方法とその装置

Info

Publication number
JPS62250167A
JPS62250167A JP9256886A JP9256886A JPS62250167A JP S62250167 A JPS62250167 A JP S62250167A JP 9256886 A JP9256886 A JP 9256886A JP 9256886 A JP9256886 A JP 9256886A JP S62250167 A JPS62250167 A JP S62250167A
Authority
JP
Japan
Prior art keywords
vapor
evaporation
substrate
vapor deposition
onto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9256886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH031379B2 (enExample
Inventor
Shoichi Nozoe
野副　尚一
Nobuyuki Nishinomiya
伸幸 西宮
Kimiyuki Jinno
神野　公行
Hitoshi Sato
均 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP9256886A priority Critical patent/JPS62250167A/ja
Publication of JPS62250167A publication Critical patent/JPS62250167A/ja
Publication of JPH031379B2 publication Critical patent/JPH031379B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9256886A 1986-04-22 1986-04-22 パルス分子線蒸着方法とその装置 Granted JPS62250167A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9256886A JPS62250167A (ja) 1986-04-22 1986-04-22 パルス分子線蒸着方法とその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9256886A JPS62250167A (ja) 1986-04-22 1986-04-22 パルス分子線蒸着方法とその装置

Publications (2)

Publication Number Publication Date
JPS62250167A true JPS62250167A (ja) 1987-10-31
JPH031379B2 JPH031379B2 (enExample) 1991-01-10

Family

ID=14058028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9256886A Granted JPS62250167A (ja) 1986-04-22 1986-04-22 パルス分子線蒸着方法とその装置

Country Status (1)

Country Link
JP (1) JPS62250167A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2771810A1 (fr) * 1997-11-28 1999-06-04 Sgs Thomson Microelectronics Amelioration de la mesure d'epaisseur en temps reel d'un materiau depose dans une installation de depot par evaporation

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2771810A1 (fr) * 1997-11-28 1999-06-04 Sgs Thomson Microelectronics Amelioration de la mesure d'epaisseur en temps reel d'un materiau depose dans une installation de depot par evaporation

Also Published As

Publication number Publication date
JPH031379B2 (enExample) 1991-01-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term