JPH0313494B2 - - Google Patents

Info

Publication number
JPH0313494B2
JPH0313494B2 JP60271879A JP27187985A JPH0313494B2 JP H0313494 B2 JPH0313494 B2 JP H0313494B2 JP 60271879 A JP60271879 A JP 60271879A JP 27187985 A JP27187985 A JP 27187985A JP H0313494 B2 JPH0313494 B2 JP H0313494B2
Authority
JP
Japan
Prior art keywords
area
duct
work area
electric damper
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60271879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62131131A (ja
Inventor
Shigeo Yokota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Plant Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Engineering and Construction Co Ltd filed Critical Hitachi Plant Engineering and Construction Co Ltd
Priority to JP60271879A priority Critical patent/JPS62131131A/ja
Publication of JPS62131131A publication Critical patent/JPS62131131A/ja
Publication of JPH0313494B2 publication Critical patent/JPH0313494B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
JP60271879A 1985-12-03 1985-12-03 トンネルクリ−ンル−ムの緊急安全装置 Granted JPS62131131A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60271879A JPS62131131A (ja) 1985-12-03 1985-12-03 トンネルクリ−ンル−ムの緊急安全装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60271879A JPS62131131A (ja) 1985-12-03 1985-12-03 トンネルクリ−ンル−ムの緊急安全装置

Publications (2)

Publication Number Publication Date
JPS62131131A JPS62131131A (ja) 1987-06-13
JPH0313494B2 true JPH0313494B2 (enEXAMPLES) 1991-02-22

Family

ID=17506174

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60271879A Granted JPS62131131A (ja) 1985-12-03 1985-12-03 トンネルクリ−ンル−ムの緊急安全装置

Country Status (1)

Country Link
JP (1) JPS62131131A (enEXAMPLES)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2736662B2 (ja) * 1988-11-04 1998-04-02 東芝セラミックス株式会社 半導体ウェーハの曇防止装置
US5290200A (en) * 1991-03-06 1994-03-01 Professional Supply, Inc. Detection and evacuation of atmospheric pollutants from a confined work place

Also Published As

Publication number Publication date
JPS62131131A (ja) 1987-06-13

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