JPH0313494B2 - - Google Patents
Info
- Publication number
- JPH0313494B2 JPH0313494B2 JP60271879A JP27187985A JPH0313494B2 JP H0313494 B2 JPH0313494 B2 JP H0313494B2 JP 60271879 A JP60271879 A JP 60271879A JP 27187985 A JP27187985 A JP 27187985A JP H0313494 B2 JPH0313494 B2 JP H0313494B2
- Authority
- JP
- Japan
- Prior art keywords
- area
- duct
- work area
- electric damper
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012423 maintenance Methods 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000003550 marker Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は半導体製造工場などのトンネルクリ
ーンルームの緊急安全装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an emergency safety device for a tunnel clean room in a semiconductor manufacturing factory or the like.
従来のこの種装置は、緊急ボタンと緊急ブザー
とを計装配線によつて接続し、緊急時ボタンを押
せば緊急ブザーが鳴るように構成されていた。し
かしこのような構成にあつては下記のような欠点
がある。
Conventional devices of this kind have been configured such that an emergency button and an emergency buzzer are connected through instrumentation wiring, so that when the emergency button is pressed, the emergency buzzer sounds. However, such a configuration has the following drawbacks.
(1) トンネルクリーンルームは閉鎖的であるので
緊急ブザーが鳴つても避難方向がすぐに判断で
きない。(1) Since the tunnel clean room is closed, it is not possible to immediately determine the direction of evacuation even if the emergency buzzer sounds.
(2) クリーンルームは換気回数が多いので、トン
ネル内で有害ガスが発生した場合すぐ充満し、
逃げ道がなくなり、人間の安全性を保障できな
い。(2) Clean rooms are frequently ventilated, so if harmful gas is generated in the tunnel, it will quickly fill up.
There is no escape route, and human safety cannot be guaranteed.
(3) 空調機の給気フアンを停止すると室内の清浄
度が確保できず不良品を発生させると同時に緊
急回避後の立上りがおそくなる。(3) If the air supply fan of the air conditioner is stopped, the cleanliness of the room cannot be ensured, leading to the production of defective products and at the same time slowing down the start-up after emergency avoidance.
この発明の目的は、前記従来技術の欠点を解消
し、ブザーが鳴ると避難方向をすぐに判断するこ
とができ、人間の安全性を確保すると同時にダク
トの施工が容易で安価なトンネルクリーンルーム
用緊急安全装置を提供するにある。
The purpose of the present invention is to eliminate the drawbacks of the prior art, to immediately determine the evacuation direction when the buzzer sounds, to ensure human safety, and at the same time, to provide an emergency tunnel clean room with easy and inexpensive duct construction. To provide safety equipment.
第１図はこの発明に係るトンネルクリーンルー
ム用緊急安全装置の１実施例の系統図、第２図は
平面図を示す。
FIG. 1 shows a system diagram of an embodiment of an emergency safety device for a tunnel clean room according to the present invention, and FIG. 2 shows a plan view.
近年半導体製造工場などのクリーンルームとし
て製造ライン毎にトンネル状に覆つたトンネルク
リーンルームが用いられるようになつた。 In recent years, tunnel clean rooms, in which each production line is covered in a tunnel shape, have come to be used as clean rooms in semiconductor manufacturing factories and the like.
トンネルクリーンルーム１Ａ，１Ｂ，１Ｃ，１
Ｄ，１Ｅ，１Ｆ，１Ｇ，１Ｈは複数個設置され、
各トンネルクリーンルームの一端は紙面に平行に
設けられた廊下２９につながる。 Tunnel clean room 1A, 1B, 1C, 1
Multiple D, 1E, 1F, 1G, 1H are installed,
One end of each tunnel clean room is connected to a hallway 29 provided parallel to the plane of the paper.
トンネルクリーンルーム１Ａは装置２Ａ，２Ｂ
を配設した処理域３Ａ，３Ｂ、装置２Ａ，２Ｂの
前面の作業域４、装置２Ａ，２Ｂの後面の保全域
５に分れる。 Tunnel clean room 1A has equipment 2A and 2B
It is divided into a processing area 3A, 3B where the equipment 2A, 2B are installed, a work area 4 at the front of the equipment 2A, 2B, and a maintenance area 5 at the rear of the equipment 2A, 2B.
外気は外気ガラリ６より外気ダクト７を経て空
調機８に導入される。還気は吸込口９Ａより還気
ダクト９を経て空調機８に導入される。給気は空
調機８内の給気フアン１０によつて給気ダクト１
１、処理域用給気ダクト１１Ａ，１１Ｂ、作業域
用給気ダクト１１Ｃを経て給気される。処理域用
給気ダクト１１Ａ，１１Ｂには夫々処理域用電動
ダンパ１２Ａ，１２Ｂを付設する。 Outside air is introduced into the air conditioner 8 from the outside air louver 6 through the outside air duct 7. Return air is introduced into the air conditioner 8 from the suction port 9A through the return air duct 9. Air is supplied to the air supply duct 1 by an air supply fan 10 in the air conditioner 8.
1. Air is supplied through the processing area air supply ducts 11A, 11B and the work area air supply duct 11C. Processing area electric dampers 12A and 12B are attached to the processing area air supply ducts 11A and 11B, respectively.
作業域用循環フアン１３、処理域用循環フアン
１３Ａ，１３Ｂをフイルタ１４，１４Ａ，１４Ｂ
に付設する。 The work area circulation fan 13 and the processing area circulation fans 13A, 13B are connected to the filters 14, 14A, 14B.
attached to.
還気ダクト９には循環用電動ダンパ１５を付設
する。排気ダクト１６には排気フアン１７、排気
用電動ダンパ１８、排気ガラリ１９に接続する。 A circulation electric damper 15 is attached to the return air duct 9. The exhaust duct 16 is connected to an exhaust fan 17, an electric exhaust damper 18, and an exhaust louver 19.
作業域用循環フアン１３のケーシング２０の吸
込口２１に作業域用電動ダンパ２２を付設し、運
転時は作業域４には作業域給気ダクト１１Ｃと作
業域用電動ダンパ２２とにより作業域給気ダクト
１１Ｃからの空気と保全域５から上昇する空気と
を共に作業域４に吹込む。 An electric damper 22 for the work area is attached to the suction port 21 of the casing 20 of the circulation fan 13 for the work area, and during operation, the work area 4 is supplied with air by the work area air supply duct 11C and the electric damper 22 for the work area. Air from the air duct 11C and air rising from the conservation area 5 are both blown into the work area 4.
吹込まれた空気はグレーチング２３を通過して
床下チヤンバ２４に入り更にグレーチング２３を
通過上昇して作業域用循環フアン１３のケーシン
グ２０の吸込口２１に吸込まれて循環する。 The blown air passes through the grating 23, enters the underfloor chamber 24, further passes through the grating 23, rises, is sucked into the suction port 21 of the casing 20 of the work area circulation fan 13, and is circulated.
トンネルクリーンルーム内に付設して緊急時に
押す緊急ボタン２５を監視室に付設したセレクタ
スイツチ２６、廊下に付設した標識灯２７、処理
域用電動ダンパ１２Ａ，１２Ｂ、処理域用循環フ
アン１３Ａ，１３Ｂ、作業域用電動ダンパ２２、
循環用電動ダンパ１５、排気用電動ダンパ１８、
排気フアン１７を計装配線２８によつて夫々接続
する。 A selector switch 26 attached to the monitoring room with an emergency button 25 attached to the tunnel clean room and pressed in case of an emergency, a marker light 27 attached to the corridor, electric dampers 12A, 12B for the treatment area, circulation fans 13A, 13B for the treatment area, work area electric damper 22,
Circulation electric damper 15, exhaust electric damper 18,
The exhaust fans 17 are connected by instrumentation wiring 28, respectively.
次に作用を説明する。 Next, the action will be explained.
通常運転時は、排気用電動ダンパ１８は閉、循
環用電動ダンパ１５、処理域用電動ダンパ１２
Ａ，１２Ｂ、作業域用電動ダンパ２２、はすべて
開、処理域用循環フアン１３Ａ，１３Ｂ、作業域
用循環フアン１３、空調機内給気フアン１０はす
べて運転、排気フアン１７は停止している。 During normal operation, the exhaust electric damper 18 is closed, the circulation electric damper 15, and the treatment area electric damper 12.
A, 12B and the work area electric damper 22 are all open, the processing area circulation fans 13A and 13B, the work area circulation fan 13, and the air conditioner air supply fan 10 are all in operation, and the exhaust fan 17 is stopped.
緊急時は人が緊急ボタン２５を押すと、監視室
のセレクタスイツチ２６が位置を判定して廊下２
９に設置した標識灯２７の矢印を発生源から出口
方向に点灯することによつて避難方向を判断する
ことができる。 In an emergency, when a person presses the emergency button 25, the selector switch 26 in the monitoring room determines the position and
The evacuation direction can be determined by lighting the arrow of the marker light 27 installed at 9 in the direction from the source to the exit.
この際排気用電動ダンパ１８は開、循環用電動
ダンパ１５、処理域用電動ダンパ１２Ａ，１２
Ｂ、作業域用電動ダンパ２２は閉、処理域用循環
フアン１３Ａ，１３Ｂは停止、作業域用循環フア
ン１３、排気フアン１７、空調機内の給気フアン
１０はすべて運転する。第２図において、当該ト
ンネルクリーンルーム１Ａ以外のトンネルクリー
ンルーム１Ｂ，１Ｃ，１Ｄ，１Ｅ，１Ｆ，１Ｇ，
１Ｈも１Ａと同様に処理され、作業域のみに清浄
空気を流し、床下２４から放出する。 At this time, the exhaust electric damper 18 is opened, the circulation electric damper 15, and the treatment area electric damper 12A, 12.
B, the electric damper 22 for the work area is closed, the circulation fans 13A and 13B for the processing area are stopped, and the circulation fan 13 for the work area, the exhaust fan 17, and the air supply fan 10 in the air conditioner are all operated. In FIG. 2, tunnel clean rooms 1B, 1C, 1D, 1E, 1F, 1G, other than the tunnel clean room 1A,
1H is treated in the same way as 1A, with clean air flowing only to the working area and being discharged from the underfloor 24.
このような運転により、緊急時には当該トンネ
ルクリーンルームのみを新鮮な空気のみによつて
加圧するので有害ガスが入らず避難時の人間の安
全を確保することができる。 By operating in this manner, in an emergency, only the tunnel clean room is pressurized with fresh air, so harmful gases do not enter and the safety of people during evacuation can be ensured.
また空調機内の給気フアンを停止させないから
緊急時においても最低限の清浄度を保つて不良品
の発生を防止でき、緊急回避後の立上りが早くす
ぐに稼働することができる。 In addition, since the air supply fan inside the air conditioner is not stopped, the minimum level of cleanliness can be maintained even in an emergency, and the generation of defective products can be prevented, and the system can be started up quickly after an emergency, and can be put into operation immediately.
この発明は異常が発生したとき、人間の安全確
保のため、作業域に新鮮な清浄空気を流す。新鮮
な清浄空気量は少ないため、処理域には流さな
い。この清浄空気は処理域にも若干広がるので、
処理域の最低限の清浄度は確保され、全面的に停
止したときに比べ、再立上げが容易になる。
This invention allows fresh clean air to flow into the work area to ensure human safety when an abnormality occurs. Since the amount of fresh clean air is small, it is not allowed to flow into the treatment area. This clean air also spreads slightly into the processing area, so
A minimum level of cleanliness in the processing area is ensured, and restarting is easier than when it is completely shut down.
従つて、この発明は、トンネルクリーンルーム
の緊急安全装置として有害ガス発生時に当該トン
ネルクリーンルームのみに新鮮な外気のみを空調
して加圧給気して排気するから、有害ガスが入ら
ず安全を確保することができる。 Therefore, this invention is an emergency safety device for a tunnel clean room, and when noxious gas is generated, only fresh outside air is air-conditioned and pressurized and exhausted only to the tunnel clean room, so no noxious gas enters and safety is ensured. be able to.
また空調機内の給気フアンを停止させないか
ら、緊急時においても最低限の清浄度を保つて不
良品の発生を防止でき、緊急回避後の立上りが早
くすぐ稼働することができる。 In addition, since the air supply fan inside the air conditioner is not stopped, the minimum level of cleanliness can be maintained even in an emergency, and the generation of defective products can be prevented, and the system can be started up quickly after an emergency.
第１図はこの発明に係るトンネルクリーンルー
ムの緊急安全装置の１実施例の系統図、第２図は
平面図を示す。
１……トンネルクリーンルーム、３Ａ，３Ｂ…
…処理域、４……作業域、５……保全域、７……
外気ダクト、８……空調機、９……還気ダクト、
１０……給気フアン、１１……給気ダクト、１１
Ａ，１１Ｂ……処理域給気ダクト、１１Ｃ……作
業域給気ダクト、１２Ａ，１２Ｂ……処理域用電
動ダンパ、１３……作業域用循環フアン、１３
Ａ，１３Ｂ……処理域用循環フアン、１４……フ
イルタ、１４Ａ，１４……フイルタ、１５……循
環用電動ダンパ、１６……排気ダクト、１７……
排気フアン、１８……排気用電動ダンパ、２１…
…吸込口、２２……作業域用電動ダンパ、２５…
…緊急ボタン、２６……セレクタスイツチ、２７
……標識灯、２８……計装配線、２９……廊下。
FIG. 1 shows a system diagram of an embodiment of an emergency safety device for a tunnel clean room according to the present invention, and FIG. 2 shows a plan view. 1...Tunnel clean room, 3A, 3B...
...Processing area, 4...Working area, 5...Maintenance area, 7...
Outside air duct, 8...Air conditioner, 9...Return air duct,
10...Air supply fan, 11...Air supply duct, 11
A, 11B... Processing area air supply duct, 11C... Working area air supply duct, 12A, 12B... Electric damper for processing area, 13... Circulation fan for working area, 13
A, 13B... Circulation fan for processing area, 14... Filter, 14A, 14... Filter, 15... Electric damper for circulation, 16... Exhaust duct, 17...
Exhaust fan, 18...Exhaust electric damper, 21...
...Suction port, 22...Electric damper for work area, 25...
...Emergency button, 26...Selector switch, 27
...Signor light, 28...Instrument wiring, 29...Corridor.
Claims (1)
装置後面の保全域より構成され、処理域と作業域
とがトンネルをなしたトンネルクリーンルームで
あつて、外気ダクトと、この外気ダクトに接続す
る空調機と、この空調機に接続する処理域給気ダ
クトと、この処理域給気ダクトに接続する処理域
用循環フアンとフイルタと、前記処理域給気ダク
トに付設した処理域用電動ダンパと、前記空調機
に接続する作業域給気ダクトと、この作業域給気
ダクトに接続する作業域用循環フアンとフイルタ
と、前記作業域用循環フアンに接続する吸込口に
付設した作業域用電動ダンパと、前記空調機に接
続する還気ダクトと、この還気ダクトに付設した
循環用電動ダンパと、前記還気ダクトより分岐す
る排気ダクトと、この排気ダクトに付設した排気
用電動ダンパと、前記排気ダクトに接続する排気
フアンと、トンネルクリーンルーム内に配設され
て前記処理域用電動ダンパ、処理域用循環フア
ン、作業域用電動ダンパ、作業域用循環フアン、
循環用電動ダンパ、排気用電動ダンパ、排気フア
ン及び空調機にそれぞれ計装配線を介して接続さ
れた緊急ボタンと、を配設し、この緊急ボタンか
らの緊急信号に基づいて前記排気用電動ダンパを
開けると共に排気フアンを回転させ、これと同時
に循環用電動ダンパ、処理域用電動ダンパ及び作
業域用電動ダンパを閉じると共に処理域用循環フ
アンを停止させ、作業域用循環フアンと空調機内
の給気フアンとは運転を続けることを特徴とする
トンネルクリーンルームの緊急安全装置。1 Processing area where the equipment is installed, work area in front of the equipment,
A tunnel clean room consists of a maintenance area at the rear of the equipment, with a tunnel between the processing area and the work area, and includes an outside air duct, an air conditioner connected to this outside air duct, and a processing area air supply connected to this air conditioner. a duct, a processing area circulation fan and filter connected to the processing area air supply duct, a processing area electric damper attached to the processing area air supply duct, and a work area air supply duct connected to the air conditioner; a work area circulation fan and filter connected to the work area air supply duct; a work area electric damper attached to a suction port connected to the work area circulation fan; and a return air duct connected to the air conditioner; An electric damper for circulation attached to this return air duct, an exhaust duct branching from the return air duct, an electric exhaust damper attached to this exhaust duct, an exhaust fan connected to the exhaust duct, and an exhaust fan connected to the exhaust duct. The electric damper for the treatment area, the circulation fan for the treatment area, the electric damper for the work area, the circulation fan for the work area,
An electric damper for circulation, an electric damper for exhaust, an emergency button connected to the exhaust fan and the air conditioner through instrumentation wiring are provided, and the electric damper for exhaust is activated based on an emergency signal from the emergency button. At the same time, the electric damper for circulation, the electric damper for the treatment area, and the electric damper for the work area are closed, and the circulation fan for the treatment area is stopped, and the circulation fan for the work area and the air supply inside the air conditioner are closed. Ki-fan is an emergency safety device for tunnel clean rooms that is characterized by continuous operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60271879A JPS62131131A (en) | 1985-12-03 | 1985-12-03 | Emergency safety device of tunnel clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60271879A JPS62131131A (en) | 1985-12-03 | 1985-12-03 | Emergency safety device of tunnel clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62131131A JPS62131131A (en) | 1987-06-13 |
| JPH0313494B2 true JPH0313494B2 (en) | 1991-02-22 |
Family
ID=17506174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60271879A Granted JPS62131131A (en) | 1985-12-03 | 1985-12-03 | Emergency safety device of tunnel clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62131131A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2736662B2 (en) * | 1988-11-04 | 1998-04-02 | 東芝セラミックス株式会社 | Semiconductor wafer fogging prevention device |
| US5290200A (en) * | 1991-03-06 | 1994-03-01 | Professional Supply, Inc. | Detection and evacuation of atmospheric pollutants from a confined work place |
-
1985
- 1985-12-03 JP JP60271879A patent/JPS62131131A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62131131A (en) | 1987-06-13 |
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