JPS62131131A - Emergency safety device of tunnel clean room - Google Patents
Emergency safety device of tunnel clean roomInfo
- Publication number
- JPS62131131A JPS62131131A JP60271879A JP27187985A JPS62131131A JP S62131131 A JPS62131131 A JP S62131131A JP 60271879 A JP60271879 A JP 60271879A JP 27187985 A JP27187985 A JP 27187985A JP S62131131 A JPS62131131 A JP S62131131A
- Authority
- JP
- Japan
- Prior art keywords
- air
- area
- duct
- clean room
- electric damper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は半導体製造工場などのトンネルクリーンルー
ムの緊急安全装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an emergency safety device for a tunnel clean room in a semiconductor manufacturing factory or the like.
従来のこの種装置は、緊急、ボタンと緊急ブザーとを計
装配線によって接続し、緊急時ボタンを押せば緊急ブザ
ーが鳴るように構成されていた。しかしこのような構成
にあっては下記のような欠点がある。Conventional devices of this kind have been configured so that the emergency button and the emergency buzzer are connected through instrumentation wiring, so that when the emergency button is pressed, the emergency buzzer sounds. However, such a configuration has the following drawbacks.
（１）トンネルクリーンルームは閉鎖的であるので緊急
ブザーが鳴っても避難方向力１すぐに判断できない。(1) Since the tunnel clean room is closed, it is not possible to immediately determine the direction of evacuation even if the emergency buzzer sounds.
（２） クリーンルームは換気回数が多いので、トン
ネル内で有害ガスが発生した場合すぐ充満し、逃げ道が
なくなり、人間の安全性を保障できない。(2) Clean rooms require frequent ventilation, so if toxic gas is generated in the tunnel, it will quickly fill up and there will be no escape route, making it impossible to guarantee human safety.
（３）空調機の給気ファンを停止すると室内の清浄度が
確保できず不良品を発生させると同時に緊急回避後の立
上りがおそくなる。(3) If the air supply fan of the air conditioner is stopped, the cleanliness of the room cannot be ensured, leading to the production of defective products and at the same time slowing down the start-up after emergency avoidance.
この発明の目的は、前記従来技術の欠点を解消し、ブザ
ーが鳴ると避難方向をすぐに判断することができ、人間
の安全性を確保すると同時にダクトの施工が容易で安価
なトンネルクリーンルーム用緊急安全装置を提供するに
ある。The purpose of the present invention is to eliminate the drawbacks of the prior art, to immediately determine the evacuation direction when the buzzer sounds, to ensure human safety, and at the same time, to provide an emergency tunnel clean room with easy and inexpensive duct construction. To provide safety equipment.
第１図はこの発明に係るトンネルクリーンルーム用緊急
安全装置の１実施例の系統図、第２図は平面図を示す。FIG. 1 shows a system diagram of an embodiment of an emergency safety device for a tunnel clean room according to the present invention, and FIG. 2 shows a plan view.
近年半導体製造工場などのクリーンルームとして製造ラ
イン毎にトンネル状に覆ったトンネル２′−リーンルー
ムが用いられるようになった。In recent years, a tunnel 2'-lean room, which is covered in a tunnel shape for each manufacturing line, has come to be used as a clean room in semiconductor manufacturing factories and the like.
トンネルクリーンルームＩＡ、ＩＢ、ＩＣ。Tunnel clean room IA, IB, IC.
ｉＤ、ＩＥ、ＩＦ、ＩＧ、ＩＨは複数個設置され、各ト
ンネルクリーンルームの一端は紙面に平行に設けられた
・廊下２９につながる。A plurality of iD, IE, IF, IG, and IH are installed, and one end of each tunnel clean room is connected to a corridor 29 provided parallel to the plane of the paper.
トンネルクリーンルームＩＡは装置２Ａ、２Ｂを配設し
た処理域３Ａ、３Ｂ、装置２Ａ、２Ｂ、’）前面の作業
域４、装置２Ａ、２Ｂの後面の保全域５に分れる。The tunnel clean room IA is divided into a processing area 3A, 3B in which the devices 2A, 2B are installed, a work area 4 in the front of the devices 2A, 2B,'), and a maintenance area 5 in the rear of the devices 2A, 2B.
外気は外気ガラリ６より外気ダクト７を経て空調機８に
導入される。還気は吸込口９Ａより４気ダクト９を経て
空調機８に導入される。給気は空調機８内の給気ファン
１０によって給気ダクト１１、処理域用給気ダクトＩＩ
Ａ、ＩＩＢ、作業域用給気ダク）１１（：’を経て給気
される。処理域用給気ダク）ＩＩＡ、ＩＩＢには夫々処
理域用Ｍ動ダンパ１２Ａ、１２Ｂを付設する。Outside air is introduced into the air conditioner 8 from the outside air louver 6 through the outside air duct 7. Return air is introduced into the air conditioner 8 from the suction port 9A through the 4-air duct 9. The air is supplied by the air supply fan 10 in the air conditioner 8 to the air supply duct 11 and the treatment area air supply duct II.
A, IIB, working area air supply duct) 11 (Air is supplied through :'. Processing area air supply duct) IIA, IIB are provided with M dynamic dampers 12A, 12B, respectively.
作業域用循環ファン１３、処理域用循環ファン１３Ａ、
１３Ｂをフィルタ１４．１４Ａ、１４Ｂに付設する。Work area circulation fan 13, processing area circulation fan 13A,
13B is attached to filters 14.14A and 14B.
還気ダクト９には循環用電動ダンパ１５を付設する。排
気ダク）１６には排気ファン１７、排気用電動ダンパ１
８、排気ガラリ１９に接続する。A circulation electric damper 15 is attached to the return air duct 9. Exhaust duct) 16 has an exhaust fan 17 and an electric exhaust damper 1.
8. Connect to exhaust louver 19.
作業域用循環ファン１３のケーゾング２０の吸込口２１
に作業域用電動ダンパ２２を付設し、運転時は作業域４
には作業域給気ダクト１１Ｃと作業域用電動ダンパ２２
とＫより作業域給気ダクト１１Ｃからの空気と保全域５
から上昇する空気とを共に作業域４に吹込む。Suction port 21 of casing 20 of circulation fan 13 for work area
An electric damper 22 for the work area is attached to the work area 4 during operation.
There is a work area air supply duct 11C and a work area electric damper 22.
Air from work area air supply duct 11C and maintenance area 5 from
The air rising from the air is blown into the working area 4 together with the air rising from the air.
吹込まれた空気はグレーチング２３を通過して床下チャ
ンバ２４に入り更にグレーチング２３を通過上昇して作
業域用循環ファン１３のケーゾング２０の吸込口２１に
吸込まれて循環する。The blown air passes through the grating 23, enters the underfloor chamber 24, further passes through the grating 23, rises, is sucked into the suction port 21 of the casing ring 20 of the work area circulation fan 13, and is circulated.
トンネルクリーンルーム内に付設して緊急時に押す緊急
ボタン２５を監視室に付設したセレクタスイッチ２６、
廊下に付設した標識灯２７、処理域用電動ダンパ１２
Ａ 、 １２ Ｂ ％処理域用循環ファン１３Ａ、１３
Ｂ、作業域用電動ダンパ２２、循環用電動ダンパ１５、
排気用電動ダンパ１８、排気ファン１７を計装配線２８
によって夫々接続する。a selector switch 26 attached to the monitoring room with an emergency button 25 attached in the tunnel clean room and pressed in an emergency;
Signal light 27 attached to the corridor, electric damper 12 for the treatment area
A, 12B Circulation fans for processing area 13A, 13
B, electric damper 22 for work area, electric damper 15 for circulation,
The electric exhaust damper 18 and the exhaust fan 17 are connected to the instrumentation wiring 28
are connected respectively.
次に作用を説明する。Next, the action will be explained.
通常運転時は、排気用ｌ動ダンパ１８は閉、循環用電動
ダンパ１５、処理域用電動ダンパ１２Ａ。During normal operation, the exhaust damper 18 is closed, the circulation electric damper 15, and the treatment area electric damper 12A.
１２Ｂ１作業域用電動ダンパ２２、はすべて開、処理域
用循環ファン１３Ａ、１３Ｂ、作業域用循環ファン１３
、空調機内給気ファン１０はすべて運転、排気ファン１
７は停止している。12B1 Work area electric damper 22, all open, processing area circulation fans 13A, 13B, work area circulation fan 13
, All the air supply fans 10 in the air conditioner are in operation, and the exhaust fan 1 is in operation.
7 is stopped.
緊急時は人が緊急ボタン２５を押すと、監視室のセレク
タスイッチ２６が位置を判定して廊下２９に設置した標
識灯２７の矢印を発生源から出口方向に点灯することに
よって避難方向を判断することができる。In an emergency, when a person presses the emergency button 25, the selector switch 26 in the monitoring room determines the position and determines the evacuation direction by lighting the arrow of the marker light 27 installed in the hallway 29 in the direction from the source to the exit. be able to.
この際排気用電動ダンパ１８は開、循環用電動ダンパ１
５、処理域用電動ダンパ１２ Ａ ｒ １２ Ｂ ％作
業域用電動ダンパ２２は閉、処理域用循環ファン１３Ａ
、１３Ｂは停止、作業域用循環ファン１３、排気ファン
１７、空調機内の給気ファン１０ばすべて運転する。第
２図において、当該１・ノネルクリーンルームＩＡ以外
のＩＢ、ＩＣ２Ｉ Ｄ ＋、 ］ Ｅ ｔ Ｉ Ｆ ＋
Ｉ Ｇ ＋ ’ Ｈへは給気を停止する。At this time, the exhaust electric damper 18 is opened, and the circulation electric damper 1 is opened.
5. Electric damper 12 for processing area A r 12 B % Electric damper 22 for working area is closed, circulation fan 13A for processing area
, 13B are stopped, and the work area circulation fan 13, exhaust fan 17, and air supply fan 10 in the air conditioner are all operated. In Fig. 2, IBs other than the relevant 1. Nonel clean room IA, IC2I D +, ] E t I F +
Stop air supply to IG+'H.
このような運転により、賢者、時には当該トンネルクリ
ーンルームのみを新鮮な空気のみによって加圧するので
有害ガスが入らず避難時の人間の安全を確保することが
できる。By operating in this manner, only the tunnel clean room is pressurized with fresh air, so harmful gases do not enter and the safety of people during evacuation can be ensured.
また空調機内の給気ファンを停止させないから緊急時に
おりても最低限の清浄度を保って不良品の発生を防止で
き、緊、＠、回耕後の立上りが早くすぐに稼動すること
ができる。In addition, since the air supply fan inside the air conditioner is not stopped, even in an emergency, the minimum level of cleanliness can be maintained and the generation of defective products can be prevented, and the start-up after turning is quick and the operation can be started immediately. .
この発明は、トンネルクリーンルームの緊急安全装置と
して有害ガス発生時に当該トンネルクリーンルームのみ
に新鮮な外気のみを空調して加圧給気して排気するから
、有害ガスが入らず安全を確保することができる。This invention is an emergency safety device for tunnel clean rooms, and when harmful gases are generated, only fresh outside air is air-conditioned, pressurized, and exhausted into the tunnel clean room, so no harmful gases enter and safety can be ensured. .
また空調機内の給気ファンを停止させないから、緊急時
においても最低限の清浄度を保って不良品の発生を防止
でき、緊急回避後の立上りが早くすぐ稼動することがで
きろ。In addition, since the air supply fan inside the air conditioner is not stopped, the minimum level of cleanliness can be maintained even in an emergency, preventing the generation of defective products, and the system can be started up quickly after an emergency.
第１図はこの発明に係るトンネルクリーンルームムの緊
急安全装置の１実施例の系統図、第２図：ま平面図を示
す。
１ ・・・トンネルクリーンルーム ３Ａ、３Ｂ・・・
処理域４・・・作業域 ５・・・保全域７・
・・外気ダクト ８・・・空調機９・・・還気ダ
クト １０・・・給気ファンＩ １・・・給気ダク
） ＩＩＡ、ＪＩＢ・・処理域給気ダクト１
１Ｃ・・・作業域給気ダクト １２Ａ、１２Ｂ・・
・処理域用電動夕）′パ１３・・・作業域用循環ファン
１３Ａ、１３Ｂ・・・処理域用循環ファン１４・・
・フィルタ １４Ａ、１４・・・フィルタ１５
・・・循環用電動ダンパ １６・・・排気ダクト】
７・・・排気ファン 】 ８・・・排気用電動
タンパ２１・・・吸込口 ２２・・・作業
域用電動ダンパ２５・・・緊急ボタン ２６・・
・セレクタスイッチ２７・・・標識灯 ２８・
・・計装配線２９・・・廊 下。FIG. 1 shows a system diagram of an embodiment of an emergency safety device for a tunnel clean room according to the present invention, and FIG. 2 shows a plan view. 1...Tunnel clean room 3A, 3B...
Processing area 4...Working area 5...Maintenance area 7.
...Outside air duct 8...Air conditioner 9...Return air duct 10...Air supply fan I 1...Air supply duct) IIA, JIB...Processing area air supply duct 1
1C...Work area air supply duct 12A, 12B...
・Electric fan for treatment area) 'P13...Circulation fan for work area 13A, 13B...Circulation fan for treatment area 14...
・Filter 14A, 14... Filter 15
...Electric damper for circulation 16...Exhaust duct]
7...Exhaust fan] 8...Electric tamper for exhaust 21...Suction port 22...Electric damper for work area 25...Emergency button 26...
・Selector switch 27...Signal light 28・
...Instrumentation wiring 29...corridor.
Claims (1)
保全域より構成され、処理域と作業域とがトンネルをな
したトンネルクリーンルームであつて、外気ダクトと、
この外気ダクトに接続する空調機と、この空調機に接続
する処理域給気ダクトと、この処理域給気ダクトに接続
する処理域用循環ファンとフィルタと、前記処理域給気
ダクトに付設した処理域用電動ダンパと、前記空調機に
接続する作業域給気ダクトと、この作業域給気ダクトに
接続する作業域用循環ファンとフィルタと、前記作業域
用循環ファンに接続する吸込口に付設した作業域用電動
ダンパと、前記空調機に接続する還気ダクトと、この還
気ダクトに付設した循環用電動ダンパと、前記還気ダク
トより分岐する排気ダクトと、この排気ダクトに付設し
た排気用電動ダンパと、前記排気ダクトに接続する排気
ファンとを配設し、トンネルクリーンルーム内に配設し
た緊急ボタンを前記処理域用電動ダンパ、処理域用循環
ファン、作業域用電動ダンパ、循環用電動ダンパ、排気
用電動ダンパ、排気ファンに計装配線を介して夫々接続
したことを特徴とするトンネルクリーンルームの緊急安
全装置。It is a tunnel clean room consisting of a processing area where the equipment is installed, a working area in front of the equipment, and a maintenance area at the rear of the equipment, and the processing area and the working area form a tunnel, with an outside air duct,
An air conditioner connected to this outside air duct, a treatment area air supply duct connected to this air conditioner, a treatment area circulation fan and filter connected to this treatment area air supply duct, and a treatment area air supply duct attached to the treatment area air supply duct. an electric damper for the treatment area, a work area air supply duct connected to the air conditioner, a work area circulation fan and filter connected to the work area air supply duct, and a suction port connected to the work area circulation fan. an attached electric damper for the work area, a return air duct connected to the air conditioner, a circulation electric damper attached to the return air duct, an exhaust duct branching from the return air duct, and an exhaust duct attached to the exhaust duct. An electric exhaust damper and an exhaust fan connected to the exhaust duct are installed, and an emergency button installed in the tunnel clean room is connected to the electric damper for the treatment area, the circulation fan for the treatment area, the electric damper for the work area, and the electric damper for the work area. An emergency safety device for a tunnel clean room, which is characterized by being connected to an electric damper for use in a tunnel, an electric damper for exhaust, and an exhaust fan through instrumentation wiring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60271879A JPS62131131A (en) | 1985-12-03 | 1985-12-03 | Emergency safety device of tunnel clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60271879A JPS62131131A (en) | 1985-12-03 | 1985-12-03 | Emergency safety device of tunnel clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62131131A true JPS62131131A (en) | 1987-06-13 |
| JPH0313494B2 JPH0313494B2 (en) | 1991-02-22 |
Family
ID=17506174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60271879A Granted JPS62131131A (en) | 1985-12-03 | 1985-12-03 | Emergency safety device of tunnel clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62131131A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5039321A (en) * | 1988-11-04 | 1991-08-13 | Toshiba Ceramics Co., Ltd. | Apparatus for preventing clouding of a semiconductor wafer |
| US5290200A (en) * | 1991-03-06 | 1994-03-01 | Professional Supply, Inc. | Detection and evacuation of atmospheric pollutants from a confined work place |
-
1985
- 1985-12-03 JP JP60271879A patent/JPS62131131A/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5039321A (en) * | 1988-11-04 | 1991-08-13 | Toshiba Ceramics Co., Ltd. | Apparatus for preventing clouding of a semiconductor wafer |
| US5290200A (en) * | 1991-03-06 | 1994-03-01 | Professional Supply, Inc. | Detection and evacuation of atmospheric pollutants from a confined work place |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0313494B2 (en) | 1991-02-22 |
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