JPH0313494B2 - - Google Patents
Info
- Publication number
- JPH0313494B2 JPH0313494B2 JP60271879A JP27187985A JPH0313494B2 JP H0313494 B2 JPH0313494 B2 JP H0313494B2 JP 60271879 A JP60271879 A JP 60271879A JP 27187985 A JP27187985 A JP 27187985A JP H0313494 B2 JPH0313494 B2 JP H0313494B2
- Authority
- JP
- Japan
- Prior art keywords
- area
- duct
- work area
- electric damper
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012423 maintenance Methods 0.000 claims description 3
- 230000003749 cleanliness Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000003550 marker Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002341 toxic gas Substances 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60271879A JPS62131131A (ja) | 1985-12-03 | 1985-12-03 | トンネルクリ−ンル−ムの緊急安全装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60271879A JPS62131131A (ja) | 1985-12-03 | 1985-12-03 | トンネルクリ−ンル−ムの緊急安全装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62131131A JPS62131131A (ja) | 1987-06-13 |
JPH0313494B2 true JPH0313494B2 (enrdf_load_stackoverflow) | 1991-02-22 |
Family
ID=17506174
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60271879A Granted JPS62131131A (ja) | 1985-12-03 | 1985-12-03 | トンネルクリ−ンル−ムの緊急安全装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62131131A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2736662B2 (ja) * | 1988-11-04 | 1998-04-02 | 東芝セラミックス株式会社 | 半導体ウェーハの曇防止装置 |
US5290200A (en) * | 1991-03-06 | 1994-03-01 | Professional Supply, Inc. | Detection and evacuation of atmospheric pollutants from a confined work place |
-
1985
- 1985-12-03 JP JP60271879A patent/JPS62131131A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62131131A (ja) | 1987-06-13 |
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