JPH0312252B2 - - Google Patents
Info
- Publication number
- JPH0312252B2 JPH0312252B2 JP13548488A JP13548488A JPH0312252B2 JP H0312252 B2 JPH0312252 B2 JP H0312252B2 JP 13548488 A JP13548488 A JP 13548488A JP 13548488 A JP13548488 A JP 13548488A JP H0312252 B2 JPH0312252 B2 JP H0312252B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- foreign matter
- switching
- pellicle
- foreign
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 44
- 238000001514 detection method Methods 0.000 claims description 39
- 230000003287 optical effect Effects 0.000 claims description 17
- 238000005286 illumination Methods 0.000 claims description 16
- 238000007689 inspection Methods 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 13
- 230000002265 prevention Effects 0.000 claims description 7
- 239000000126 substance Substances 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 11
- 230000035945 sensitivity Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63135484A JPS64453A (en) | 1988-06-03 | 1988-06-03 | Foreign matter detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63135484A JPS64453A (en) | 1988-06-03 | 1988-06-03 | Foreign matter detector |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57192462A Division JPS5982727A (ja) | 1982-11-04 | 1982-11-04 | 異物検出方法及びその装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPH01453A JPH01453A (ja) | 1989-01-05 |
| JPS64453A JPS64453A (en) | 1989-01-05 |
| JPH0312252B2 true JPH0312252B2 (OSRAM) | 1991-02-19 |
Family
ID=15152800
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63135484A Granted JPS64453A (en) | 1988-06-03 | 1988-06-03 | Foreign matter detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS64453A (OSRAM) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3087384B2 (ja) * | 1991-10-08 | 2000-09-11 | 松下電器産業株式会社 | 異物検査装置 |
-
1988
- 1988-06-03 JP JP63135484A patent/JPS64453A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS64453A (en) | 1989-01-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4669875A (en) | Foreign particle detecting method and apparatus | |
| US4831274A (en) | Surface inspecting device for detecting the position of foreign matter on a substrate | |
| JPH02114154A (ja) | 欠陥または異物の検査方法およびその装置 | |
| KR19990087136A (ko) | 광학 높이 측정기, 그 높이 측정기가 제공된 표면 검사 장치 및검사 장치가 제공된 리소그래피 장치 | |
| JPS6365904B2 (OSRAM) | ||
| USRE33991E (en) | Foreign particle detecting method and apparatus | |
| JPH05100413A (ja) | 異物検査装置 | |
| JP2512093B2 (ja) | 異物検出装置及び方法 | |
| JP2539182B2 (ja) | 半導体ウエハ上の異物検査方法 | |
| JPH0312252B2 (OSRAM) | ||
| JPS61260632A (ja) | 異物検査装置 | |
| JPS6240656B2 (OSRAM) | ||
| JPH06258237A (ja) | 欠陥検査装置 | |
| JPH0715441B2 (ja) | 異物検出方法及びその装置 | |
| JPH01453A (ja) | 異物検出装置 | |
| JPH0731129B2 (ja) | 半導体ウエハ異物検出装置 | |
| JPH0816651B2 (ja) | 両面異物検出方法及びその装置 | |
| JPH05662B2 (OSRAM) | ||
| JP2705764B2 (ja) | 透明ガラス基板の欠陥検出装置 | |
| JPH07218234A (ja) | 微細パターンの寸法測定方法 | |
| JPS61230048A (ja) | 異物検出方法 | |
| JPH01452A (ja) | 両面異物検出装置 | |
| JPH0334577B2 (OSRAM) | ||
| JPH0430575B2 (OSRAM) | ||
| JP3020546B2 (ja) | 異物検査装置 |