JPH03112932U - - Google Patents

Info

Publication number
JPH03112932U
JPH03112932U JP2086590U JP2086590U JPH03112932U JP H03112932 U JPH03112932 U JP H03112932U JP 2086590 U JP2086590 U JP 2086590U JP 2086590 U JP2086590 U JP 2086590U JP H03112932 U JPH03112932 U JP H03112932U
Authority
JP
Japan
Prior art keywords
reaction
purge gas
exhaust
flange
reaction tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2086590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2086590U priority Critical patent/JPH03112932U/ja
Publication of JPH03112932U publication Critical patent/JPH03112932U/ja
Pending legal-status Critical Current

Links

JP2086590U 1990-02-28 1990-02-28 Pending JPH03112932U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2086590U JPH03112932U (enrdf_load_stackoverflow) 1990-02-28 1990-02-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2086590U JPH03112932U (enrdf_load_stackoverflow) 1990-02-28 1990-02-28

Publications (1)

Publication Number Publication Date
JPH03112932U true JPH03112932U (enrdf_load_stackoverflow) 1991-11-19

Family

ID=31523948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2086590U Pending JPH03112932U (enrdf_load_stackoverflow) 1990-02-28 1990-02-28

Country Status (1)

Country Link
JP (1) JPH03112932U (enrdf_load_stackoverflow)

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