JPH0311226Y2 - - Google Patents
Info
- Publication number
- JPH0311226Y2 JPH0311226Y2 JP11021886U JP11021886U JPH0311226Y2 JP H0311226 Y2 JPH0311226 Y2 JP H0311226Y2 JP 11021886 U JP11021886 U JP 11021886U JP 11021886 U JP11021886 U JP 11021886U JP H0311226 Y2 JPH0311226 Y2 JP H0311226Y2
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- electrode
- housing
- arc
- conduit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001704 evaporation Methods 0.000 claims description 17
- 230000008020 evaporation Effects 0.000 claims description 16
- 239000003507 refrigerant Substances 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 230000008021 deposition Effects 0.000 claims description 4
- 238000001816 cooling Methods 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 238000000576 coating method Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000010891 electric arc Methods 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 238000012856 packing Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11021886U JPH0311226Y2 (enrdf_load_html_response) | 1986-07-18 | 1986-07-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11021886U JPH0311226Y2 (enrdf_load_html_response) | 1986-07-18 | 1986-07-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6319564U JPS6319564U (enrdf_load_html_response) | 1988-02-09 |
| JPH0311226Y2 true JPH0311226Y2 (enrdf_load_html_response) | 1991-03-19 |
Family
ID=30989037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11021886U Expired JPH0311226Y2 (enrdf_load_html_response) | 1986-07-18 | 1986-07-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0311226Y2 (enrdf_load_html_response) |
-
1986
- 1986-07-18 JP JP11021886U patent/JPH0311226Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6319564U (enrdf_load_html_response) | 1988-02-09 |
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