JPH0311226Y2 - - Google Patents

Description

[Detailed explanation of the idea]

(Industrial Application Field) The present invention relates to an arc evaporation type deposition apparatus, and more particularly to a water-cooled structure for an arc cathode that generates arc discharge. (Prior Art) There are various methods for coating a surface with a film of hard material, among others, vapor deposition using arc evaporation has recently attracted attention as a method that enables low-temperature coating. FIG. 2 shows an example of an apparatus used to carry out the above arc evaporation method. (See Special Publication No. 58-3033). In the figure, 1 is a vacuum chamber in which a workpiece 2 and a beam gun 3 are arranged, and a low voltage (<100 V) and a large current (50 ~300 A) is supplied to generate an arc discharge, and source metal particles are ejected from the beam gun 3 and deposited on the workpiece. Note that 6 is a DC power source 7 for a trigger, and 8 is a spark supply power source. In such a device, the electron beam 3 has an inner housing 10 with a conduit 9 for the coolant and an outer housing 15 for supporting the cathode disk 4, as shown in detail in FIG. The inner housing 10 has a manhole cavity 11 on its front surface.
A water-cooled jacket is constituted by a disk-shaped shield 12 disposed within this cavity and a tubular conduit 13 connected thereto. The cathode disc 4 is abutted on the front end of the inner housing 10 via an O-ring seal 14 so as to close the manhole cavity 11, and the outer housing 15 supporting the end of the cathode disc 4 is screwed into place. Inner housing 1 with fasteners (bolts) 16
By tightening to 0, the cathode disk 4 is fixed. In addition, 5 is an anode, 7 is a trigger provided by penetrating the groove 17 of the anode 5, 18 is an insulator provided between the cathode and the anode, and 19 is a magnetic field coil. (Problems to be Solved by the Invention) By the way, when a coating process is performed using the apparatus having the above configuration, there is a problem in that water leaks from the beam gun. This is because during the coating process, it is necessary to evacuate the vacuum chamber and apply pressure to the refrigerant that cools the cathode disk. These pressures often loosen the bolts that fix the cathode disk, causing the O-ring surface to become loose. This is because the refrigerant comes off and the refrigerant leaks from the mounting part.
In particular, there is a drawback that the supply pressure of the refrigerant cannot be effectively increased. Also, the arc discharge is running around abnormally.
Damage to the ring is also a cause. SUMMARY OF THE INVENTION An object of the present invention is to provide an arc evaporation type evaporation apparatus that eliminates the drawbacks of the prior art described above and does not cause water leakage even when the supply pressure of refrigerant is increased. (Means for Solving the Problems) In order to achieve the above object, the present inventor points out that the conventional seal structure using an O-ring is a direct cooling method in which the sealing surface is easily opened into the vacuum chamber. In view of this, we researched structures that can effectively and safely cool the cathode disc using other cooling methods, and as a result, we discovered a method in which a metal-to-metal contact is made with a sealed jacket on the back of the cathode disc. It was invented. That is, the present invention provides the above-mentioned arc evaporation type vapor deposition apparatus, in which the cathode electrode is composed of a plate-shaped electrode surface and a substantially T-shaped cathode body having a bottom surface portion and an upright portion; The back surface of the cathode is brought into contact with the bottom surface of the cathode, and both are caulked with a bolt through a metal gasket, and a jacket is formed between the housing conduit and the cathode body inserted therein. It is. The present invention will be explained in detail below based on examples. (Embodiment) FIG. 1 shows a beam gun structure in an arc evaporation type deposition apparatus according to an embodiment of the present invention. In the figure, 4 is a cathode electrode, 5 is a conical cylindrical anode, and the housing conduit 9 of the housing 10
It is attached to the outside of the insulator 18 via an insulator 18.
A trigger 7 penetrates through a groove 17 provided in the anode 5 and comes into contact with the cathode electrode 4. The cathode electrode 4 includes a plate-shaped electrode surface 40 with a thickness of about 1.5 to 2.0 mm, and a cathode body 50 that is approximately T-shaped.
The cathode main body 50 consists of a bottom part 51 and an upright part 52, and the bottom part 51 is arranged so as to come into contact with the back surface of the plate-shaped electrode surface 40 via the metal packing 20. The installation part 52 is the housing 1
It is arranged to be inserted into the housing conduit 9 of 0. As the metal packing, metal foil with good thermal conductivity such as Cu or Al is used. The cathode main body 50 and the plate-shaped electrode surface 40 are caulked and fixed by fitting bolts 21 into thread grooves provided on surfaces facing each other via the metal packing 20. In addition, the cathode body 50
The bottom part 51 of the housing 10 is connected to the housing 10 at its end.
It is joined to the end of the wire by welding, etc. With the above configuration, when the disc-shaped shield 12 is provided between the housing conduit 9 and the cathode body 50, a water cooling jacket 22 is formed. This seal structure does not have an O-ring and is a one-piece structure with a sealed seal surface, so it is strong against heat and pressure, and is resistant to damage caused by abnormal arc discharge. Not prepared. Furthermore, since no refrigerant pressure is applied to the bolts 21, they will not loosen. In the above embodiment, the inner surface of the housing conduit 9, the bottom surface portion 51 of the cathode body 50, and the upright portion 5
2 is made into a flat shape, but it is also possible to have a structure in which fins are provided in order to improve the cooling effect. Example of use: Using an arc evaporation type evaporation device equipped with a beam gun with the above structure, Ti is used as a cathode, and _N2 gas is introduced into the vacuum chamber while cooling it with water.
A TiN film was deposited on the drill by arc discharging Ti under the conditions of 100A and 23V. For comparison, vapor deposition was performed under similar conditions using an arc evaporation type vapor deposition apparatus equipped with a beam gun of a conventional structure. For water cooling conditions, set the refrigerant inlet temperature to 18 to 20℃.
The supply pressure was kept constant in both cases, and the outlet temperature of the refrigerant was measured every time the evaporation time elapsed. The results are shown in Table 1.

[Table] From the same table, there is almost no difference in the refrigerant outlet temperature between the conventional method and this method, and the cathode cooling effect is good in both cases. In addition, in the case of this method, no water leakage accidents were observed even after long-term operation. (Effects of the invention) As detailed above, according to the invention, the cooling structure of the arc cathode in the arc evaporation type evaporation apparatus is configured as an indirect cooling method without using an O-ring, thereby preventing water leakage. There is no fear, it has a good cooling effect, and it becomes possible to safely perform stable coating processing.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing a beam gun in an arc evaporation type deposition apparatus according to an embodiment of the present invention, FIGS. 2 and 3 are views showing a conventional arc evaporation type evaporation apparatus, and FIG. FIG. 3 is a cross-sectional view showing the beam gun. 1...Vacuum chamber, 2...Workpiece, 3...
Beam gun, 4... cathode electrode, 5... anode, 7
...Trigger, 9...Housing conduit, 10...
Housing, 12... Shield plate, 17... Groove,
18...Insulator, 20...Metal packing, 21...
... Bolt, 22 ... Jacket, 40 ... Plate electrode surface, 50 ... Cathode body, 51 ... Bottom part,
52... Erected part.

Claims (1)

[Scope of utility model registration request] A plate-shaped cathode electrode attached to the housing,
An arc evaporator comprising a beam gun in a vacuum chamber, which has a conical cylindrical anode and a trigger disposed near the cathode electrode, and the cathode electrode is water-cooled by a refrigerant supplied into a conduit of a housing. In the mold vapor deposition apparatus, the cathode electrode has a plate-shaped electrode surface, a bottom surface portion, and an upright portion.
The back surface of the plate-shaped electrode surface and the bottom surface are in contact with each other, and both are caulked with bolts via a metal gasket, and the housing conduit and the cathode body inserted into the housing conduit are A sealless water-cooled electrode for an arc cathode in an arc evaporation type deposition apparatus, characterized in that a jacket is formed between the electrode and the cathode body.