JPH0311214Y2 - - Google Patents
Info
- Publication number
- JPH0311214Y2 JPH0311214Y2 JP19261583U JP19261583U JPH0311214Y2 JP H0311214 Y2 JPH0311214 Y2 JP H0311214Y2 JP 19261583 U JP19261583 U JP 19261583U JP 19261583 U JP19261583 U JP 19261583U JP H0311214 Y2 JPH0311214 Y2 JP H0311214Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- melt
- dish
- manufacturing
- wafer molding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 66
- 238000000465 moulding Methods 0.000 claims description 39
- 238000004519 manufacturing process Methods 0.000 claims description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- 239000000155 melt Substances 0.000 claims description 17
- 238000002347 injection Methods 0.000 claims description 15
- 239000007924 injection Substances 0.000 claims description 15
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 238000001746 injection moulding Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 15
- 210000003739 neck Anatomy 0.000 description 9
- 238000005266 casting Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19261583U JPS60102262U (ja) | 1983-12-14 | 1983-12-14 | 製造皿 |
| EP84302211A EP0124284B1 (en) | 1983-03-30 | 1984-03-30 | Method of fabricating polycrystalline silicon wafer and fabrication tray used therefor |
| DE8484302211T DE3466901D1 (en) | 1983-03-30 | 1984-03-30 | Method of fabricating polycrystalline silicon wafer and fabrication tray used therefor |
| US06/926,131 US4820145A (en) | 1983-03-30 | 1986-11-03 | Polycrystalline silicon wafer tray |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19261583U JPS60102262U (ja) | 1983-12-14 | 1983-12-14 | 製造皿 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60102262U JPS60102262U (ja) | 1985-07-12 |
| JPH0311214Y2 true JPH0311214Y2 (enrdf_load_stackoverflow) | 1991-03-19 |
Family
ID=30414478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19261583U Granted JPS60102262U (ja) | 1983-03-30 | 1983-12-14 | 製造皿 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60102262U (enrdf_load_stackoverflow) |
-
1983
- 1983-12-14 JP JP19261583U patent/JPS60102262U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60102262U (ja) | 1985-07-12 |