JPH0314769B2 - - Google Patents
Info
- Publication number
- JPH0314769B2 JPH0314769B2 JP5659283A JP5659283A JPH0314769B2 JP H0314769 B2 JPH0314769 B2 JP H0314769B2 JP 5659283 A JP5659283 A JP 5659283A JP 5659283 A JP5659283 A JP 5659283A JP H0314769 B2 JPH0314769 B2 JP H0314769B2
- Authority
- JP
- Japan
- Prior art keywords
- dish
- hole
- melt
- wafer
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 58
- 238000004519 manufacturing process Methods 0.000 claims description 32
- 239000000155 melt Substances 0.000 claims description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 11
- 238000000465 moulding Methods 0.000 claims description 11
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 24
- 238000005266 casting Methods 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5659283A JPS59182219A (ja) | 1983-03-31 | 1983-03-31 | 重積式製造皿 |
| AU26132/84A AU578240B2 (en) | 1983-03-30 | 1984-03-27 | Polycrystalline silicon wafers and fabrication tray |
| EP84302211A EP0124284B1 (en) | 1983-03-30 | 1984-03-30 | Method of fabricating polycrystalline silicon wafer and fabrication tray used therefor |
| DE8484302211T DE3466901D1 (en) | 1983-03-30 | 1984-03-30 | Method of fabricating polycrystalline silicon wafer and fabrication tray used therefor |
| US06/926,131 US4820145A (en) | 1983-03-30 | 1986-11-03 | Polycrystalline silicon wafer tray |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5659283A JPS59182219A (ja) | 1983-03-31 | 1983-03-31 | 重積式製造皿 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59182219A JPS59182219A (ja) | 1984-10-17 |
| JPH0314769B2 true JPH0314769B2 (enrdf_load_stackoverflow) | 1991-02-27 |
Family
ID=13031462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5659283A Granted JPS59182219A (ja) | 1983-03-30 | 1983-03-31 | 重積式製造皿 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59182219A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61214422A (ja) * | 1985-03-20 | 1986-09-24 | Hoxan Corp | 半導体ウエハに多結晶シリコン層を形成する方法 |
-
1983
- 1983-03-31 JP JP5659283A patent/JPS59182219A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59182219A (ja) | 1984-10-17 |