JPS60102262U - 製造皿 - Google Patents

製造皿

Info

Publication number
JPS60102262U
JPS60102262U JP19261583U JP19261583U JPS60102262U JP S60102262 U JPS60102262 U JP S60102262U JP 19261583 U JP19261583 U JP 19261583U JP 19261583 U JP19261583 U JP 19261583U JP S60102262 U JPS60102262 U JP S60102262U
Authority
JP
Japan
Prior art keywords
wafer
manufacturing
dish
melt
injection part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19261583U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311214Y2 (enrdf_load_stackoverflow
Inventor
沢谷　敬司
敬志 横山
松山　兵之
Original Assignee
株式会社　ほくさん
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社　ほくさん filed Critical 株式会社　ほくさん
Priority to JP19261583U priority Critical patent/JPS60102262U/ja
Priority to DE8484302211T priority patent/DE3466901D1/de
Priority to EP84302211A priority patent/EP0124284B1/en
Publication of JPS60102262U publication Critical patent/JPS60102262U/ja
Priority to US06/926,131 priority patent/US4820145A/en
Application granted granted Critical
Publication of JPH0311214Y2 publication Critical patent/JPH0311214Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP19261583U 1983-03-30 1983-12-14 製造皿 Granted JPS60102262U (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP19261583U JPS60102262U (ja) 1983-12-14 1983-12-14 製造皿
DE8484302211T DE3466901D1 (en) 1983-03-30 1984-03-30 Method of fabricating polycrystalline silicon wafer and fabrication tray used therefor
EP84302211A EP0124284B1 (en) 1983-03-30 1984-03-30 Method of fabricating polycrystalline silicon wafer and fabrication tray used therefor
US06/926,131 US4820145A (en) 1983-03-30 1986-11-03 Polycrystalline silicon wafer tray

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19261583U JPS60102262U (ja) 1983-12-14 1983-12-14 製造皿

Publications (2)

Publication Number Publication Date
JPS60102262U true JPS60102262U (ja) 1985-07-12
JPH0311214Y2 JPH0311214Y2 (enrdf_load_stackoverflow) 1991-03-19

Family

ID=30414478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19261583U Granted JPS60102262U (ja) 1983-03-30 1983-12-14 製造皿

Country Status (1)

Country Link
JP (1) JPS60102262U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0311214Y2 (enrdf_load_stackoverflow) 1991-03-19

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