JPH0310206U - - Google Patents

Info

Publication number
JPH0310206U
JPH0310206U JP7039389U JP7039389U JPH0310206U JP H0310206 U JPH0310206 U JP H0310206U JP 7039389 U JP7039389 U JP 7039389U JP 7039389 U JP7039389 U JP 7039389U JP H0310206 U JPH0310206 U JP H0310206U
Authority
JP
Japan
Prior art keywords
scale
scale member
support section
optical
displacement detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7039389U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0632566Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989070393U priority Critical patent/JPH0632566Y2/ja
Publication of JPH0310206U publication Critical patent/JPH0310206U/ja
Application granted granted Critical
Publication of JPH0632566Y2 publication Critical patent/JPH0632566Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP1989070393U 1989-06-16 1989-06-16 光学式変位検出器 Expired - Fee Related JPH0632566Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989070393U JPH0632566Y2 (ja) 1989-06-16 1989-06-16 光学式変位検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989070393U JPH0632566Y2 (ja) 1989-06-16 1989-06-16 光学式変位検出器

Publications (2)

Publication Number Publication Date
JPH0310206U true JPH0310206U (OSRAM) 1991-01-31
JPH0632566Y2 JPH0632566Y2 (ja) 1994-08-24

Family

ID=31606514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989070393U Expired - Fee Related JPH0632566Y2 (ja) 1989-06-16 1989-06-16 光学式変位検出器

Country Status (1)

Country Link
JP (1) JPH0632566Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007183254A (ja) * 2005-12-06 2007-07-19 Mitsutoyo Corp 変位測定装置用スケール

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210314A (ja) * 1983-05-03 1984-11-29 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング 測定装置
JPS61105803U (OSRAM) * 1984-12-18 1986-07-05
JPS61206811A (ja) * 1985-03-06 1986-09-13 株式会社ミツトヨ 機械要素の連結構造
JPS61254811A (ja) * 1985-05-02 1986-11-12 ベブ・カ−ル・ツアイス・イエ−ナ 長さ測定系用の物差し取付け手段

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210314A (ja) * 1983-05-03 1984-11-29 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング 測定装置
JPS61105803U (OSRAM) * 1984-12-18 1986-07-05
JPS61206811A (ja) * 1985-03-06 1986-09-13 株式会社ミツトヨ 機械要素の連結構造
JPS61254811A (ja) * 1985-05-02 1986-11-12 ベブ・カ−ル・ツアイス・イエ−ナ 長さ測定系用の物差し取付け手段

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007183254A (ja) * 2005-12-06 2007-07-19 Mitsutoyo Corp 変位測定装置用スケール

Also Published As

Publication number Publication date
JPH0632566Y2 (ja) 1994-08-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees