JPH0473809U - - Google Patents
Info
- Publication number
- JPH0473809U JPH0473809U JP11736090U JP11736090U JPH0473809U JP H0473809 U JPH0473809 U JP H0473809U JP 11736090 U JP11736090 U JP 11736090U JP 11736090 U JP11736090 U JP 11736090U JP H0473809 U JPH0473809 U JP H0473809U
- Authority
- JP
- Japan
- Prior art keywords
- probe
- sample
- cantilever
- light
- critical angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11736090U JPH0752618Y2 (ja) | 1990-11-08 | 1990-11-08 | 探針走査型顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11736090U JPH0752618Y2 (ja) | 1990-11-08 | 1990-11-08 | 探針走査型顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0473809U true JPH0473809U (OSRAM) | 1992-06-29 |
| JPH0752618Y2 JPH0752618Y2 (ja) | 1995-11-29 |
Family
ID=31865259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11736090U Expired - Lifetime JPH0752618Y2 (ja) | 1990-11-08 | 1990-11-08 | 探針走査型顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0752618Y2 (OSRAM) |
-
1990
- 1990-11-08 JP JP11736090U patent/JPH0752618Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0752618Y2 (ja) | 1995-11-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0234562A2 (en) | Displacement sensor | |
| MY113350A (en) | Semiconductor laser device to detect a divided reflected light beam | |
| JPH0473809U (OSRAM) | ||
| DE50115284D1 (de) | Optischer sensor zur messung des abstands und der neigung einer fläche | |
| KR950015239A (ko) | 포커스 에러 검출장치 | |
| JPS63105007U (OSRAM) | ||
| JPH0431108U (OSRAM) | ||
| JPS648614U (OSRAM) | ||
| JPS57199902A (en) | Detection of scanning distortion | |
| JPS62140313U (OSRAM) | ||
| JPH01121837U (OSRAM) | ||
| JPS642109U (OSRAM) | ||
| JPS62190929U (OSRAM) | ||
| JPS6134117U (ja) | 距離検出装置における投光光学系 | |
| JPS63298113A (ja) | 光学的距離検出装置の結像光学系の構成 | |
| JPH0376144U (OSRAM) | ||
| JPH022611U (OSRAM) | ||
| JPH0682083B2 (ja) | ポリゴンスキャナ面倒れ測定装置 | |
| JPH0453506U (OSRAM) | ||
| JPH0320337U (OSRAM) | ||
| JPH0268321U (OSRAM) | ||
| JPS645108U (OSRAM) | ||
| JPH01144808U (OSRAM) | ||
| JPS6336922U (OSRAM) | ||
| JPH0461963U (OSRAM) |