JPS57199902A - Detection of scanning distortion - Google Patents

Detection of scanning distortion

Info

Publication number
JPS57199902A
JPS57199902A JP8533381A JP8533381A JPS57199902A JP S57199902 A JPS57199902 A JP S57199902A JP 8533381 A JP8533381 A JP 8533381A JP 8533381 A JP8533381 A JP 8533381A JP S57199902 A JPS57199902 A JP S57199902A
Authority
JP
Japan
Prior art keywords
dimensional
scanning
array
light
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8533381A
Other languages
Japanese (ja)
Inventor
Masahiro Inota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujifilm Holdings Corp
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Priority to JP8533381A priority Critical patent/JPS57199902A/en
Publication of JPS57199902A publication Critical patent/JPS57199902A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/28—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication
    • G01D5/30—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with deflection of beams of light, e.g. for direct optical indication the beams of light being detected by photocells

Abstract

PURPOSE:To make the detection of the quantity of scanning distortion that changes momentarily in a real time during scanning period by converting the two-dimensional movement of a light beam to one-dimensional movement by the use of a one-dimensional condensing optical system. CONSTITUTION:The light beam of a laser light source 1 is focused via a lens 2 and a mirror 3 to the reflecting mirror surface of a galvanometer 4, and the focal point is set on the centerline of the oscillation of the reflecting mirror. The deflection point of this light is so disposed as to parallel with the plane having the condensing characteristics of a one-dimensional elliptical mirror 5. A one-dimensional sensor array 6 is disposed at the other focal position of the scanning beam by locating the array direction perpendicularly to the scanning plane. Then, the light beam moves only one dimensionally in the array direction of the array 6, and since this on-dimensional movement occurs in the inclination errors of the galvanometer 4, it is detected as the deviation information of the position by the array 6, whereby the change in the quantity of scanning distortion with respect to the optical path length of the light is detected in a real time.
JP8533381A 1981-06-03 1981-06-03 Detection of scanning distortion Pending JPS57199902A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8533381A JPS57199902A (en) 1981-06-03 1981-06-03 Detection of scanning distortion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8533381A JPS57199902A (en) 1981-06-03 1981-06-03 Detection of scanning distortion

Publications (1)

Publication Number Publication Date
JPS57199902A true JPS57199902A (en) 1982-12-08

Family

ID=13855705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8533381A Pending JPS57199902A (en) 1981-06-03 1981-06-03 Detection of scanning distortion

Country Status (1)

Country Link
JP (1) JPS57199902A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4698513A (en) * 1985-03-15 1987-10-06 Kabushiki Kaishi Toshiba Position detector by vibrating a light beam for averaging the reflected light
KR100467745B1 (en) * 2002-06-19 2005-01-24 주식회사 이오테크닉스 System of measuring position of rotor of Galvano meter

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574519A (en) * 1978-11-30 1980-06-05 Fujitsu Ltd Measuring method for deviation of scanning light beam

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5574519A (en) * 1978-11-30 1980-06-05 Fujitsu Ltd Measuring method for deviation of scanning light beam

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4698513A (en) * 1985-03-15 1987-10-06 Kabushiki Kaishi Toshiba Position detector by vibrating a light beam for averaging the reflected light
KR100467745B1 (en) * 2002-06-19 2005-01-24 주식회사 이오테크닉스 System of measuring position of rotor of Galvano meter

Similar Documents

Publication Publication Date Title
US4475787A (en) Single facet wobble free scanner
US4606601A (en) Single facet wobble free scanner
US3870394A (en) Optical scanner mechanism
GB1198655A (en) Entrant Beam Optical Scanner.
US4429220A (en) Light beam scanning device with curved grid pattern
JPS56164312A (en) Optical deflecting device
KR890013458A (en) Surface roughness photodetection method and apparatus
ATE71715T1 (en) OPTICAL SYSTEM FOR DETERMINING THE CHANGE IN CURVE OF AN OBJECT ON A ZONE OF SMALL DIMENSIONS.
JPS5555311A (en) Light beam scanner
US3966329A (en) Precision optical beam divider and position detector
US3506839A (en) Contactless probe system
JPS57199902A (en) Detection of scanning distortion
US3812371A (en) Scanning beam position indicator
JPS5587907A (en) Device for continuously inspecting surface of object
EP0310231B1 (en) Optical measuring apparatus
JPS5767815A (en) Measuring method for position of reflector using light
JPS54153051A (en) Scanning optical system
JPS57179704A (en) Method and device for measuring length
JPS57199909A (en) Distance measuring device
JP3194743B2 (en) Scanner device
EP0484310A3 (en) Device for measuring the roughness of a moving metal product
KR880004297Y1 (en) Optical sensor for focusing control
JPS6474405A (en) Method for measuring work gap at the time of arc welding
JPS55153914A (en) Laser scanner
JPS5772004A (en) Device for measuring curvature