JPH03101881A - Vacuum washing device - Google Patents
Vacuum washing deviceInfo
- Publication number
- JPH03101881A JPH03101881A JP24025989A JP24025989A JPH03101881A JP H03101881 A JPH03101881 A JP H03101881A JP 24025989 A JP24025989 A JP 24025989A JP 24025989 A JP24025989 A JP 24025989A JP H03101881 A JPH03101881 A JP H03101881A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- organic solvent
- sealed container
- solvent
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005406 washing Methods 0.000 title abstract description 4
- 239000003960 organic solvent Substances 0.000 claims abstract description 101
- 239000002904 solvent Substances 0.000 claims abstract description 60
- 239000007921 spray Substances 0.000 claims abstract description 4
- 239000003921 oil Substances 0.000 claims description 16
- 238000010407 vacuum cleaning Methods 0.000 claims description 14
- 239000003925 fat Substances 0.000 claims description 12
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000005507 spraying Methods 0.000 claims description 6
- 238000001035 drying Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 description 16
- 238000001704 evaporation Methods 0.000 description 9
- 230000008020 evaporation Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 239000012459 cleaning agent Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 235000014593 oils and fats Nutrition 0.000 description 2
- 238000001291 vacuum drying Methods 0.000 description 2
- 230000008016 vaporization Effects 0.000 description 2
- 101100284555 Mus musculus Helb gene Proteins 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000013020 steam cleaning Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、金属、セラミックス、プラスチックス等の加
工物を有機溶剤で洗浄する真空洗浄装置に関する．
〔従来の技術〕
従来の加工物（加工物を保持または収容する治具等を含
める）を洗浄する装置としては、特開昭６３−２９６８
８１号公報に開示されているものがある．
これは、加工物の表面に付着する油脂、塵埃等を洗浄す
るために、真空密閉容器の中に加工物を収容し、真空密
閉容器内を真空にし、該加工物に有機溶剤をシャワー状
に噴射して油脂や塵埃を洗い流し、真空密閉容器内に有
機溶剤の蒸気を発生させ、有機溶剤蒸気を加工物の表面
に凝縮させて、前工程で洗い残した油脂を溶解洗浄し、
真空密閉容器内を真空にし、加工物を乾燥して、加工物
を脱脂洗浄する真空洗浄装置である．〔発明が解決しよ
うとする問題点〕
この真空洗浄装置には、洗浄剤として用いる有機溶剤の
使用量が、真空を利用しない他の従来型の洗浄装置に比
べて大幅に低減できるという利点がある．しかしながら
、真空密閉容器内の加工物を真空乾燥する際、真空密閉
容器内に残存する有機溶剤蒸気の一部が、真空排気系の
排気口で完全に回収されないで大気中に放出されてしま
うという問題点があった．このため、有機溶剤の使用量
が増大してランニングコストが高くなり、そのうえ作業
環境が悪化し、労働安全衛生上においても問題があった
．さらに有機溶剤は大気や地中を汚染し、地球環境の破
壊にもつながる様々な問題を引き起していた．
本発明の技術的課題は、上記問題点を解消した真空洗浄
装置を提供することにある．
〔発明の技術的課題を解決するために講じた技術的手段
〕
技術的課題を解決するために講じた技術的手段は、加工
物を収容する真空密閉容器と、該真空密閉容器より真空
密閉容器内の気体を排気する真空ポンプと、前記真空密
閉容器と配管とにより接続される有機溶剤を貯溜する溶
剤タンクと，前記真空密閉容器内が真空時に前記溶剤タ
ンク内に貯溜されている有機溶剤を噴射するシャワー栓
とを有し、前記真空密閉容器内に加工物を収容した後、
該真空密閉容器内を前記真空ポンプで排気して真空にし
、前記シャワー栓から前記溶剤タンク内の有機溶剤を噴
射し，加工物に付着している油脂を洗浄し、さらに洗い
残した油脂を有機溶剤蒸気で蒸気洗浄し、前記真空密閉
容器を真空ポンプで真空排気し，加工物を乾燥すること
により，加工物を脱脂洗浄する真空洗浄装置において，
前記真空密閉容器を真空排気して加工物を乾燥する真空
ポンプと、該真空ポンプに接続される有機溶剤を貯溜す
る溶剤タンクと、該溶剤タンクに内蔵する有機溶剤蒸気
を凝縮する凝縮機あるいは前記真空ポンプと前記溶剤タ
ンクとの間に設ける有機溶剤蒸気を凝縮する凝縮機とを
有し．該溶剤タンクの出口を前記真空密ｒＡ容器の有機
溶剤を噴射するシャワー栓に接続される有機溶剤流入口
に接続し、真空密閉容器から真空ポンプ、溶剤タンクを
経て真空密閉容器に至るまでの溶剤の閉流路あるいは真
空密閉容器から真空ポンプ、凝縮機、溶剤タンクを経て
真空密閉容器に至るまでの溶剤の閉流路を形威すること
である．
〔作 用〕
本発明では、溶剤の閉流路が真空密閉容器から真空ポン
プ、溶剤タンクを経て真空密閉容器に至るまで、あるい
は真空密閉容器から真空ポンプ、凝縮機、溶剤タンクを
経て真空密閉容器に至るまでの溶剤の閉流路が形成され
るので、真空密閉容器内の有機溶剤は真空密閉容器から
前記真空ポンプにより気化されながら排出され、排出さ
れた有機溶剤の気体は後段の凝縮機で凝縮液化され、さ
らに前記溶剤タンクに液化貯溜され、貯溜された有機溶
剤は、真空密閉容器のシャワー栓から噴射され、有機溶
剤は循環される．このように真空洗浄装置内の有機溶剤
は、真空排気系の排気口から大気中に放出されることな
く完全に回収することが可能となる．
〔実施例〕
本発明を図面の実施例について説明すると、第１図及び
第２図は本発明装置の一実施例を示すブッロク図である
．
本発明の実施例を第１図に従って述べると、加工物１を
収容する円筒形の真空密閉容器２には配管接続口が４ケ
所設けられ、さらに真空密閉容器２の前部には図示して
いないが真空密閉容器への加工物１の搬入搬出口が設け
られ、また底部には有機溶剤を蒸発させるヒータＨｌが
設けられ、第１の配管接続口はバルブＶｌを経て補助真
空ポンプ３（例えば油回転ポンプ）の吸い込み口と配管
で接続されている。そして第２の配管接続口はパルブｖ
２を介して真空ポンプ５（例えば液封式真空ポンプ）の
吸い込み口と配管４で接続され、真空ボンプ５の祷出口
は有機溶剤蒸気を液化凝縮する凝ｍ機６の入口と配管接
続され、さらに凝縮機６の出口は凝縮機でＩＭｌｉｉＬ
た有機溶剤液を貯溜する溶剤タンク７の入口に配管で接
続され、そしてさらに溶剤タンク７の有機溶剤液出口と
真空密閉容器２の第３の配管接続口とはバルブｖ３を介
して配管ｌＯで接続され，また前記第３の配管接続口は
真空密閉容器２内で加工物ｌに向けて配設された有機溶
剤を噴射するシャワー栓１１に接続されている。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a vacuum cleaning apparatus for cleaning workpieces such as metals, ceramics, and plastics with an organic solvent. [Prior Art] A conventional device for cleaning workpieces (including jigs for holding or housing workpieces) is disclosed in Japanese Patent Application Laid-Open No. 63-2968.
Some of these are disclosed in Publication No. 81. In order to clean oil, fat, dust, etc. that adhere to the surface of the workpiece, the workpiece is placed in a vacuum-sealed container, the inside of the vacuum-sealed container is evacuated, and an organic solvent is showered onto the workpiece. It sprays to wash away fats and oils and dust, generates organic solvent vapor in a vacuum sealed container, condenses the organic solvent vapor on the surface of the workpiece, dissolves and cleans the fats and oils left over from the previous process,
This is a vacuum cleaning device that creates a vacuum inside a vacuum sealed container, dries the workpiece, and degreases and cleans the workpiece. [Problem to be solved by the invention] This vacuum cleaning device has the advantage that the amount of organic solvent used as a cleaning agent can be significantly reduced compared to other conventional cleaning devices that do not use vacuum. ．． However, when vacuum-drying a processed product in a vacuum-sealed container, some of the organic solvent vapor remaining in the vacuum-sealed container is not completely recovered at the exhaust port of the vacuum exhaust system and is released into the atmosphere. There was a problem. As a result, the amount of organic solvent used increased, resulting in higher running costs, and in addition, the working environment deteriorated, causing problems in terms of occupational safety and health. Furthermore, organic solvents pollute the atmosphere and underground, causing various problems that can lead to the destruction of the global environment. A technical object of the present invention is to provide a vacuum cleaning device that solves the above problems. [Technical means taken to solve the technical problem of the invention] The technical means taken to solve the technical problem are: a vacuum-sealed container for housing the workpiece; a vacuum pump for evacuating gas inside the container; a solvent tank for storing an organic solvent connected to the vacuum sealed container and piping; and a solvent tank for storing an organic solvent that is connected to the vacuum sealed container by piping; and a shower stopper that sprays water, and after storing the workpiece in the vacuum sealed container,
The inside of the vacuum sealed container is evacuated by the vacuum pump, and the organic solvent in the solvent tank is injected from the shower tap to wash the oils and fats adhering to the workpiece, and the remaining oils and fats are removed from the organic solvent. In a vacuum cleaning device that degreases and cleans a workpiece by steam cleaning with solvent vapor, evacuating the vacuum sealed container with a vacuum pump, and drying the workpiece,
a vacuum pump for drying the workpiece by evacuating the vacuum sealed container; a solvent tank connected to the vacuum pump for storing an organic solvent; and a condenser for condensing the organic solvent vapor contained in the solvent tank; A condenser for condensing organic solvent vapor is provided between the vacuum pump and the solvent tank. The outlet of the solvent tank is connected to the organic solvent inlet connected to the shower tap for spraying the organic solvent in the vacuum-tight rA container, and the solvent flows from the vacuum-tight container to the vacuum-tight container via the vacuum pump and the solvent tank. It is to form a closed flow path for the solvent from the vacuum sealed container to the vacuum sealed container via the vacuum pump, condenser, and solvent tank. [Function] In the present invention, the closed flow path of the solvent is from the vacuum sealed container to the vacuum sealed container via the vacuum pump and the solvent tank, or from the vacuum sealed container to the vacuum sealed container via the vacuum pump, condenser and solvent tank. Since a closed flow path for the solvent is formed, the organic solvent in the vacuum sealed container is discharged from the vacuum sealed container while being vaporized by the vacuum pump, and the discharged organic solvent gas is transferred to the subsequent condenser. The condensed and liquefied organic solvent is further liquefied and stored in the solvent tank, and the stored organic solvent is injected from the shower plug in the vacuum sealed container, and the organic solvent is circulated. In this way, the organic solvent in the vacuum cleaning equipment can be completely recovered without being released into the atmosphere from the exhaust port of the vacuum exhaust system. [Embodiment] To explain the present invention with reference to an embodiment of the drawings, FIGS. 1 and 2 are block diagrams showing an embodiment of the apparatus of the present invention. An embodiment of the present invention will be described with reference to FIG. 1. A cylindrical vacuum sealed container 2 that accommodates a workpiece 1 is provided with four piping connection ports, and the front part of the vacuum sealed container 2 is not shown. Although not included, there is an opening for carrying in and out of the workpiece 1 into the vacuum sealed container, and a heater Hl for evaporating the organic solvent is provided at the bottom, and the first piping connection port is connected to an auxiliary vacuum pump 3 (e.g. It is connected to the suction port of the oil rotary pump (oil rotary pump) by piping. And the second piping connection port is Pulv V
2 is connected to the suction port of a vacuum pump 5 (for example, a liquid-ring vacuum pump) by piping 4, and the outlet of the vacuum pump 5 is connected to the inlet of a condenser 6 that liquefies and condenses organic solvent vapor, Furthermore, the outlet of the condenser 6 is the condenser IMliiL.
The organic solvent solution outlet of the solvent tank 7 and the third piping connection port of the vacuum sealed container 2 are connected to the inlet of the solvent tank 7 which stores the organic solvent solution stored in the vacuum container 2 through a pipe lO via a valve v3. Further, the third piping connection port is connected to a shower tap 11 disposed within the vacuum sealed container 2 and for spraying an organic solvent toward the workpiece l.
これで真空密閉容器２から真空ボンプ５、凝縮機６、溶
剤タンク７、真空密閉容器２までの溶剤の閉流路が形成
される．なお溶剤タンク７の内部には、液化して貯溜さ
れている有機溶剤が再び蒸気化して、溶剤タンク７内の
圧力が上昇するのを防止するための有機溶剤液冷却管８
が設けられており、溶剤タンク７の底部には有機溶剤冷
液９が貯溜される．
そして真空密閉容器２の底部に設けられた第４の配管接
続口はバルブＶ４を介して有機溶剤を蒸発させる蒸発槽
１２の入口と接続され、蒸発槽１２にはその底部に有機
溶剤を蒸発させるためのヒータＨ２が設けられ、さらに
蒸発した有機溶剤蒸気の出口も設けられ、この蒸発槽ｌ
２の有機溶剤蒸気の出口は有機溶剤蒸気を液化するため
の冷却器ｌ４を介して真空ボンプ５の吸い込み口と配管
ｌ３で接続され、冷却器１４と真空ポンプ５の間にはバ
ルブＶ５が設けられている．
一方これとは別に、冷却器ｌ４に設けられている液化し
た有機溶剤液の出口は、バルブｖ６を介して液化した有
機溶剤を一時貯溜する補助タンクｌ５の入口に配管接続
されている．そしてさらに、補助タンクｌ５にＮ＋１に
設けられた有機溶剤の液出口は／ヘルプｖ７を介して真
空ボンプ５の吸い込み口に配管接続されている．
以上のように、この発明は構成されているが、その機能
については以下に説明する．
この発明による・真空洗浄装置では，まず最初に真空密
閉容器２の搬入口から真空密閉容器２内に油脂の付着し
たｆｉａ工物１を搬入する．このとき真空密閉容器の中
には加工物１と共に大気が混入するので、パルブ■２と
バルブｖ３およびバルブＶ４を閉じ、バルブｖ１を開け
、補助真空ボンプ３を作動させて真空密閉容器２内を真
空に減圧し、その後バルブｖ１を閉じ、補助真空ポンプ
３の作動を停止させ、つぎにバルブ■３を開ける．バル
ブｖ３を開けると、真空になっている真空密閉容器２内
と溶剤タンク７内との圧力差により、配管１０を経てシ
ャワー栓１ｌから溶剤タンク７内の有機溶剤冷液９が加
工物ｌに噴射される．真空密閉容器２内に有機溶剤冷液
９が噴射されたとき、真空密閉容器内は真空状態にあっ
たので、有機溶剤冷液９は加工物ｌの細かな上向きまた
は下向きの深い凹部や隙間内に確実に吸い込まれて侵入
し、加工物の隅々に至るまで加工物に付着した油脂を洗
い流しながら加工物ｌを冷却する．そして、油脂を洗い
流した有機溶剤は真空密閉容器２の底部に貯溜される．
つぎにバルブＶ３を閉じて、真空密閉容器２の底部に配
設されたヒータＨ１により真空密閉容器の底部に貯溜さ
れた有機溶剤を加熱蒸発させ，この有機溶剤蒸気で前工
程で洗い残した加工物１の表面の油脂を溶解洗浄する．
このとき有機溶剤蒸気は、前工程で冷却された加工物ｌ
に接触して加工物の表面に凝縮して、加工物の表面に有
機溶剤蒸気の持つエネルギーを放出し、加工物の温度を
有機溶剤温度まで上昇させる．一方、加工物の表面で凝
縮した有機溶剤は、加工物の表面の油脂を柔らかくして
、これを溶解洗浄する．
ついで、／ヘルブ■４を開け、真空密閉容器２内に残っ
ている有機溶剤液を蒸発槽ｌ２に移してからバルブｖ４
を閉じる．その後、バルブｖ５およびパルブｖ７が閉じ
ている状態で，真空ポンブ５を作動してバルブｖ２を開
け、真空密閉容器２内から有機溶剤蒸気および僅かに残
存している有機溶剤液を排出し、真空密閉容器内と加工
物の乾燥を終了する．このとき、有機溶剤液は真空下で
蒸発排出される．真空ボンプ５から排出された有機溶剤
の気体は、後段の凝縮機６で有機溶剤液に凝縮液化され
，後段の溶剤タンク７に貯溜される．溶剤タンク７に貯
溜された有機溶剤液は溶剤タンクの内部に設けられてい
る有機溶剤液冷却管８で冷却され、有機溶剤蒸気が再び
蒸気化して、溶剤タンク内の圧力が上昇するのを防止し
、つぎのシャワー栓から噴射する工程に備える．以上の
通り、溶剤の閉流路が真空密閉容器２から真空ボンプ５
、凝縮機６、溶剤タンク７を経て真空密閉容器２に至る
まで形成されるので、真空密閉容器内の有機溶剤は真空
密閉容器から前記真空ポンプ５により気化されながら排
出され、排出された有機溶剤の気体は凝縮機６で凝縮液
化され、さらに溶剤タンク７に液化貯溜され、貯溜され
た有機溶剤は真空密閉容器２のシャワー栓１ｌに接続さ
れる有機溶剤流入口を経てシャワー栓から噴射され，こ
の真空洗浄装置内の有機溶剤は循環され、真空排気系の
排気口から大気中に放出されることなく完全に回収する
ことが可能となる．
前述の説明で、蒸発槽ｌ２に移された有機溶剤液は、蒸
発槽ｌ２に設けられたヒータＨ２で加熱蒸発されること
となる．ここで蒸発した有機溶剤革気は真空ボンプ５を
作動させ、バルブ■５とバルブ■６およびバルブｖ７を
開けることによって真空ポンプ５に吸引される．有機溶
剤蒸気は真空ポンプ５に吸引される途中で大部分が冷却
器ｌ４で冷却液化されて補助タンクｌ５に流下する。This forms a closed flow path for the solvent from the vacuum sealed container 2 to the vacuum pump 5, the condenser 6, the solvent tank 7, and the vacuum sealed container 2. Inside the solvent tank 7, there is an organic solvent liquid cooling pipe 8 for preventing the liquefied and stored organic solvent from vaporizing again and increasing the pressure inside the solvent tank 7.
A cold organic solvent liquid 9 is stored at the bottom of the solvent tank 7. The fourth piping connection port provided at the bottom of the vacuum sealed container 2 is connected via a valve V4 to the inlet of the evaporation tank 12 that evaporates the organic solvent. A heater H2 is provided for this purpose, and an outlet for the evaporated organic solvent vapor is also provided.
The outlet of the organic solvent vapor of No. 2 is connected to the suction port of the vacuum pump 5 by a pipe 13 via a cooler 14 for liquefying the organic solvent vapor, and a valve V5 is provided between the cooler 14 and the vacuum pump 5. It is being done. Separately, the outlet of the liquefied organic solvent provided in the cooler 14 is connected via a valve v6 to the inlet of an auxiliary tank 15 for temporarily storing the liquefied organic solvent. Further, the organic solvent outlet provided at N+1 in the auxiliary tank 15 is connected via piping to the suction port of the vacuum pump 5 via /help v7. The present invention is configured as described above, and its functions will be explained below. In the vacuum cleaning apparatus according to the present invention, the FIA workpiece 1 with oil and fat adhering to it is first carried into the vacuum sealed container 2 through the loading port of the vacuum sealed container 2. At this time, the air enters the vacuum sealed container along with the workpiece 1, so close valve 2, valve v3, and valve V4, open valve v1, and operate the auxiliary vacuum pump 3 to air the inside of the vacuum sealed container 2. Reduce the pressure to vacuum, then close valve v1, stop the operation of auxiliary vacuum pump 3, and then open valve 3. When valve v3 is opened, due to the pressure difference between the vacuum sealed container 2 and the solvent tank 7, the organic solvent cold liquid 9 in the solvent tank 7 flows from the shower tap 1l through the pipe 10 to the workpiece l. It is sprayed. When the organic solvent cold liquid 9 was injected into the vacuum sealed container 2, the inside of the vacuum sealed container was in a vacuum state, so the organic solvent cold liquid 9 was injected into the small upward or downward deep recesses and gaps of the workpiece l. The oil is surely sucked into the workpiece and cools the workpiece while washing away the fat and oil that has adhered to the workpiece, reaching every corner of the workpiece. The organic solvent that has washed away the oil and fat is stored at the bottom of the vacuum sealed container 2. Next, the valve V3 is closed, and the organic solvent stored at the bottom of the vacuum-sealed container 2 is heated and evaporated by the heater H1 provided at the bottom of the vacuum-sealed container 2, and the organic solvent vapor is used to process the unwashed residue from the previous process. Dissolve and clean the fat and oil on the surface of object 1. At this time, the organic solvent vapor is transferred to the workpiece cooled in the previous process.
The organic solvent vapor condenses on the surface of the workpiece and releases the energy of the organic solvent vapor onto the workpiece surface, raising the temperature of the workpiece to the organic solvent temperature. On the other hand, the organic solvent that condenses on the surface of the workpiece softens the oil and fat on the workpiece surface and dissolves and cleans it. Next, open the /helb 4, transfer the organic solvent remaining in the vacuum sealed container 2 to the evaporation tank 12, and then close the valve v4.
Close. Thereafter, with valves v5 and v7 closed, the vacuum pump 5 is operated to open valve v2, and the organic solvent vapor and the slight remaining organic solvent liquid are discharged from the vacuum sealed container 2. Finish drying the sealed container and the processed material. At this time, the organic solvent solution is evaporated under vacuum. The organic solvent gas discharged from the vacuum pump 5 is condensed into an organic solvent liquid in a subsequent condenser 6 and stored in a subsequent solvent tank 7. The organic solvent liquid stored in the solvent tank 7 is cooled by an organic solvent liquid cooling pipe 8 provided inside the solvent tank, thereby preventing the organic solvent vapor from vaporizing again and increasing the pressure inside the solvent tank. Then prepare for the next process of spraying from the shower faucet. As mentioned above, the closed flow path of the solvent is from the vacuum sealed container 2 to the vacuum pump 5.
, the condenser 6, and the solvent tank 7 to reach the vacuum sealed container 2, so that the organic solvent in the vacuum sealed container is discharged from the vacuum sealed container while being vaporized by the vacuum pump 5, and the discharged organic solvent is The gas is condensed and liquefied in the condenser 6, and further liquefied and stored in the solvent tank 7, and the stored organic solvent is injected from the shower tap through the organic solvent inlet connected to the shower tap 1L of the vacuum sealed container 2. The organic solvent in this vacuum cleaning device is circulated and can be completely recovered without being released into the atmosphere from the exhaust port of the vacuum exhaust system. In the above explanation, the organic solvent liquid transferred to the evaporation tank 12 is heated and evaporated by the heater H2 provided in the evaporation tank 12. The organic solvent vapor evaporated here is sucked into the vacuum pump 5 by operating the vacuum pump 5 and opening the valves 5, 6, and v7. While being sucked into the vacuum pump 5, most of the organic solvent vapor is cooled and liquefied by the cooler 14 and flows down into the auxiliary tank 15.
流下した有機溶剤液は冷却器１４で液化しなかった有機
溶剤蒸気と共に真空ボンプ５に吸引されて凝縮機６に送
られる．有機溶剤液と共に送られた有機溶剤蒸気は凝縮
液化されて溶剤タンク７に貯溜され、シャワー栓から噴
射する工程に備える。The organic solvent liquid that has flowed down is sucked into the vacuum pump 5 and sent to the condenser 6 together with the organic solvent vapor that has not been liquefied in the cooler 14. The organic solvent vapor sent together with the organic solvent liquid is condensed and liquefied and stored in the solvent tank 7, in preparation for the step of spraying it from the shower faucet.
つぎに第２の実施例として、第２図を用いて説明する．
加工物ｌを収容する円筒形の真空密閉容器２には、実施
例ｌにおける第１の配管接続口が省略されて、第２〜第
４の配管接続口が３ケ所に設けられ、真空密閉容器２の
前部には真空密閉容器への加工物の搬入搬出口（図示し
ない）が設けられ、底部にはヒータＨｌが設けられてい
る．そして第２の配管接続口はバルブＶ２を介して真空
ポンプ５（例えばスクリュー式真空ポンプ）の吸い込み
口と配管４で接続され、真空ポンプ５の排出口はバルブ
ｖ９を介して凝縮機６の入口と配管接続され、真空ボン
プ５とバルブ■９との間に大気と連通しているバルブｖ
８が接続されている．さらに凝縮機６の出口は溶剤タン
ク７の入口に配管で接続され、そして溶剤タンク７の有
機溶剤液出口と真空密閉容器２の第３の配管接続口とバ
ルブｖ３を介して配管１０で接続され、前記第３の配管
接続口は真空密閉容器内で加工物に向けて配設された有
機溶剤を噴射するシャワー栓１１に接続されている．こ
のようにして真空密閉容器２から真空ポンプ５、凝縮機
６，溶剤タンク７、真空密閉容器２までの溶剤の閉流路
が形威される。Next, a second embodiment will be explained using FIG. 2. The cylindrical vacuum-sealed container 2 that accommodates the workpiece L is provided with second to fourth piping connections at three locations, with the first piping connection port in Example I omitted, and the vacuum-sealed container 2 accommodates the workpiece L. The front part of the container 2 is provided with an opening (not shown) for carrying the workpiece into the vacuum sealed container, and the bottom part is provided with a heater Hl. The second piping connection port is connected to the suction port of a vacuum pump 5 (for example, a screw vacuum pump) via a pipe 4 via a valve V2, and the discharge port of the vacuum pump 5 is connected to an inlet of a condenser 6 via a valve V9. A valve v is connected to the atmosphere by piping and communicates with the atmosphere between the vacuum pump 5 and the valve ■9.
8 is connected. Furthermore, the outlet of the condenser 6 is connected to the inlet of a solvent tank 7 by a pipe, and the organic solvent liquid outlet of the solvent tank 7 is connected to a third pipe connection port of the vacuum sealed container 2 by a pipe 10 via a valve v3. , the third piping connection port is connected to a shower plug 11 disposed in a vacuum sealed container and for spraying an organic solvent toward the workpiece. In this way, a closed flow path for the solvent from the vacuum sealed container 2 to the vacuum pump 5, the condenser 6, the solvent tank 7, and the vacuum sealed container 2 is established.
そして真空密閉容器２の底部に設けられた第４の配管接
続口はバルブ■４を介して蒸発槽ｌ２の入口と接続され
、蒸発槽の底部にはヒータＨ２が設けられ、さらに蒸発
槽の上部には蒸発した有機溶剤蒸気の出口が設けられ、
この出口は冷却器１４を介して真空ポンプ５の吸い込み
口と配管１３で接続され、冷却器ｌ４と真空ボンプ５の
間にはパルブｖ５が設けられている．一方、これとは別
に冷却器１４に設けられている液化した有機溶剤液の出
口はバルブ■６を介して補助タンクｌ５の入口に配管接
続されている．補助タンク１５に設けられた有機溶剤の
液出口はパルブｖ７を介して真空ポンプ５の吸い込み口
に配管接続されている．
以上のように８２の実施例は構成されており、その機能
については、実施例１における説明中「真空密閉容器２
の搬入口から真空密閉容器２内に油脂の付着した加工物
ｌを搬入する．このとき真空密閉容器の中には加工物１
と共に大気が混入するので、バルブ■２とパルブｖ３お
よびパルブ■４を閉じ、バルブｖ１を開け、補助真空ボ
ンプ３を作動させて真空密閉容器２内を真空に減圧し、
」とある部分を、「真空密閉容器２の搬入口から真空密
閉容器２内に油脂の付着した加工物ｌを搬入する．この
とき真空密閉容器の中には加工物１と共に大気が混入す
るので、バルブＶ３とバルブｖ４、バルブｖ５、バルブ
ｖ７およびバルブｖ９を閉じ、真空ボンプ５を作動させ
、バルブｖ２とバルブＶ８を開けて真空密閉容器２内を
真空に減圧し、」と読み代え、実施例ｌに加えてバルブ
■８およびバルブ■９の開閉を追加すればよい．
これにより本発明では、補助真空ボンプ３を省略して真
空ボンプ５一台で、真空洗浄装置を実施することか可能
となる．
したがって上記構威によれば、真空密閉容器内の加工物
を真空乾燥する際、真空密閉容器内に残存する有機溶剤
蒸気の全部を，真空排気系の排気口で完全に回収するこ
とができ、有機溶剤が大気中に放出されなくなったので
、この真空洗浄装置は真空を利用するしないを問わず、
洗浄剤として用いる有機溶剤の使用量が、他の従来型の
洗浄装置に比べて大幅に低減できるとともに、作業環境
を大幅に改善し、労働安全衛生上における安全性も確保
できることとなった．
このように有機溶剤の使用量が大幅に低減できる結果、
ランニングコストも安〈なり、かつ大気や地中の汚染を
防止し、地球環境の破壊ということにつながる様々な問
題を解決できる．
上記実施例では、真空密閉容器を円筒形状である場合に
ついて述べたが、真空密閉容器が多角形状であっても直
方体形状であってもかまわない．また加工物の搬入搬出
口が真空密閉容器の前部に設けられている例について説
明したが、真空密閉容器の後部はもちろん、上部であっ
ても、側面であってもこの発明を実施する上で妨げにな
らないものであればかまわない．
凝縮機と溶剤タンクが別々である場合について述べたが
、凝縮機と溶剤タンクが一体的で、一方が他方を内蔵す
る内蔵型のものとしてもよい．さらに真空ボンプ３が油
回転ポンプで、真空ポンプが本封式真空ポンプ、スクリ
ュー式真空ポンプである例について説明したが、この発
明装置に使用する真空ポンプは、ルーツ式真空ポンプあ
るいは他の真空ポンプで、この発明を実施する上で妨げ
にならないものであればよく、好まし〈はドライ型の真
空ポンプが良好な結果を提供する．〔発明の効果〕
よって本発明によれば、真空密閉容器から真空ポンプ、
溶剤タンクを経て真空密閉容器に至るまで、あるいは真
空密閉容器から真空ポンプ，凝縮機、溶剤タンクを経て
真空密閉容器に至るまでの溶剤の閉流路が形成される．
このため真空密閉容器内の有機溶剤は真空密閉容器から
前記真空ポンプにより気化されながら排出され、排出さ
れた有機溶剤の気体は凝縮機で凝縮液化され、溶剤タン
クに液化貯溜され、貯溜された有機溶剤は真空密閉容器
のシャワー栓に接続された有機溶剤流入口を経てシャワ
ー栓から噴射され、再度真空ポンプにより気化されると
いう工程が繰り返えされる．
このように真空洗浄装置内の有機溶剤は、真空排気系の
排気口から大気中に放出されずに完全に回収されるので
、この真空洗浄装置は真空を利用するしないを問わず、
洗浄剤として用いられる有機溶剤の使用量を、他の従来
型の洗浄装置に比べて大幅に低減できると共に、作業環
境を大幅に改善し、労働安全衛生上における安全性も確
保できる等のすぐれた効果を有する．
さらに、有機溶剤の使用量が大幅に低減できる結果、ラ
ンニングコストも安くなり，大気や地中の汚染を防止し
、地球環境の破壊につながる様々な社会問題を解決でき
るという顕著で重要な効果を有する．The fourth piping connection port provided at the bottom of the vacuum sealed container 2 is connected to the inlet of the evaporation tank 12 via a valve 4, and a heater H2 is provided at the bottom of the evaporation tank, and the top of the evaporation tank is provided with an outlet for evaporated organic solvent vapor,
This outlet is connected to the suction port of the vacuum pump 5 by a pipe 13 via a cooler 14, and a valve v5 is provided between the cooler l4 and the vacuum pump 5. On the other hand, the outlet of the liquefied organic solvent, which is separately provided in the cooler 14, is connected to the inlet of the auxiliary tank 15 via a valve 6. A liquid outlet of the organic solvent provided in the auxiliary tank 15 is connected to the suction port of the vacuum pump 5 via a valve V7. The 82 embodiments are configured as described above, and their functions are described in the description of Embodiment 1 under "Vacuum sealed container 2".
The workpiece l with oil and fat attached is carried into the vacuum sealed container 2 through the carrying entrance. At this time, the workpiece 1 is inside the vacuum sealed container.
At the same time, air will be mixed in, so close the valves 2, v3, and 4, open the valve v1, operate the auxiliary vacuum pump 3, and reduce the pressure inside the vacuum sealed container 2 to vacuum.
"The workpiece 1 with oil and fat attached is carried into the vacuum-sealed container 2 from the loading port of the vacuum-sealed container 2. At this time, the atmosphere will enter the vacuum-sealed container together with the workpiece 1. , close valve V3, valve v4, valve v5, valve v7, and valve v9, operate vacuum pump 5, open valve v2 and valve V8, and reduce the pressure inside vacuum sealed container 2 to vacuum.'' In addition to Example 1, the opening and closing of valves ■8 and valves ■9 can be added. As a result, in the present invention, the auxiliary vacuum pump 3 can be omitted and the vacuum cleaning apparatus can be implemented with just one vacuum pump 5. Therefore, according to the above structure, when vacuum drying the workpiece in the vacuum sealed container, all of the organic solvent vapor remaining in the vacuum sealed container can be completely recovered at the exhaust port of the vacuum evacuation system. Since organic solvents are no longer released into the atmosphere, this vacuum cleaning equipment can be used regardless of whether it uses a vacuum or not.
The amount of organic solvent used as a cleaning agent can be significantly reduced compared to other conventional cleaning equipment, and the work environment has been significantly improved, ensuring safety in terms of occupational health and safety. As a result of this, the amount of organic solvent used can be significantly reduced.
Running costs are low, and by preventing air and underground pollution, it can solve various problems that lead to the destruction of the global environment. In the above embodiment, the case where the vacuum sealed container is cylindrical is described, but the vacuum sealed container may be polygonal or rectangular. In addition, although an example has been described in which the workpiece loading/unloading port is provided at the front of the vacuum sealed container, this invention can be implemented not only at the rear but also at the top or side of the vacuum sealed container. It doesn't matter if it doesn't get in the way. Although we have described the case where the condenser and solvent tank are separate, the condenser and solvent tank may be integrated and one may be a built-in type in which the other is built-in. Furthermore, an example was explained in which the vacuum pump 3 is an oil rotary pump, and the vacuum pump is a sealed type vacuum pump or a screw type vacuum pump. Any type of vacuum pump may be used as long as it does not interfere with carrying out the present invention, and preferably a dry type vacuum pump provides good results. [Effects of the Invention] Therefore, according to the present invention, the vacuum pump,
A closed flow path for the solvent is formed from the solvent tank to the vacuum sealed container, or from the vacuum sealed container to the vacuum pump, condenser, and solvent tank to the vacuum sealed container. For this reason, the organic solvent in the vacuum sealed container is discharged from the vacuum sealed container while being vaporized by the vacuum pump, and the discharged organic solvent gas is condensed and liquefied in the condenser, and is liquefied and stored in the solvent tank. The solvent passes through the organic solvent inlet connected to the shower plug in the vacuum-sealed container, is injected from the shower plug, and is vaporized again by the vacuum pump, and the process is repeated. In this way, the organic solvent in the vacuum cleaning equipment is completely recovered without being released into the atmosphere from the exhaust port of the vacuum exhaust system, so this vacuum cleaning equipment can be used regardless of whether it uses a vacuum or not.
It has excellent features such as significantly reducing the amount of organic solvent used as a cleaning agent compared to other conventional cleaning equipment, greatly improving the working environment, and ensuring safety in terms of occupational safety and health. It has an effect. Furthermore, as a result of significantly reducing the amount of organic solvents used, running costs are also reduced, and this has the remarkable and important effect of preventing air and underground pollution and solving various social problems that lead to the destruction of the global environment. have.
第１図及び第２図は本発明装置の一実施例を示すプツロ
ク図である．
１・・・・・・・・・加工物
２・・・・・・・・・真空密閉容器
３・・・・・・・・・補助真空ポンプ
４、１０、１３・・・・・・・・・配管５・・・・・・
・・・真空ポンプ
６・・・・・・・・・凝縮機
７・・・・・・・・・溶剤タンク
８・・・・・・・・・有機溶剤液冷却管９・・・・・・
・・・有機溶剤冷液
１ｌ・・・・・・・・・シャワー栓
ｌ２・・・・・・・・・蒸発槽
１４・・・・・・・・・冷却器
１５・・・・・・・・・補助タンク
Ｈｌ．Ｈ２・・・・・・・・・ヒータ
■１〜■９・・・・・・・・・バルブFigures 1 and 2 are Puturoku diagrams showing an embodiment of the device of the present invention. 1... Workpiece 2... Vacuum sealed container 3... Auxiliary vacuum pump 4, 10, 13... ...Piping 5...
...Vacuum pump 6...Condenser 7...Solvent tank 8...Organic solvent liquid cooling pipe 9...・
1 liter of organic solvent cold liquid 2 shower taps 14 evaporation tank 14 Cooler 15 ... Auxiliary tank Hl. H2・・・・・・Heater ■1～■9・・・・・・・・・Valve
Claims (1)
り真空密閉容器内の気体を排気する真空ポンプと、前記
真空密閉容器と配管とにより接続される有機溶剤を貯溜
する溶剤タンクと、前記真空密閉容器内が真空時に前記
溶剤タンク内に貯溜されている有機溶剤を噴射するシャ
ワー栓とを有し、前記真空密閉容器内に加工物を収容し
た後、該真空密閉容器内を前記真空ポンプで排気して真
空にし、前記シャワー栓から前記溶剤タンク内の有機溶
剤を噴射し、加工物に付着している油脂を洗浄し、さら
に洗い残した油脂を有機溶剤蒸気で蒸気洗浄し、前記真
空密閉容器を真空ポンプで真空排気し、加工物を乾燥す
ることにより、加工物を脱脂洗浄する真空洗浄装置にお
いて、 前記真空密閉容器を真空排気して加工物を乾燥する真空
ポンプと、該真空ポンプに接続される有機溶剤を貯溜す
る溶剤タンクと、該溶剤タンクに内蔵する有機溶剤蒸気
を凝縮する凝縮機あるいは前記真空ポンプと前記溶剤タ
ンクとの間に設ける有機溶剤蒸気を凝縮する凝縮機とを
有し、該溶剤タンクの出口を前記真空密閉容器の有機溶
剤を噴射するシャワー栓に接続される有機溶剤流入口に
接続し、真空密閉容器から真空ポンプ、溶剤タンクを経
て真空密閉容器に至るまでの溶剤の閉流路あるいは真空
密閉容器から真空ポンプ、凝縮機、溶剤タンクを経て真
空密閉容器に至るまでの溶剤の閉流路を形成することを
特徴とする真空洗浄装置。[Scope of Claims] A vacuum sealed container for accommodating a workpiece, a vacuum pump for evacuating gas from the vacuum sealed container, and an organic solvent connected to the vacuum sealed container by piping. It has a solvent tank and a shower stopper that sprays the organic solvent stored in the solvent tank when the interior of the vacuum sealed container is evacuated, and after storing the workpiece in the vacuum sealed container, the vacuum sealed container is The interior is evacuated by the vacuum pump, and the organic solvent in the solvent tank is injected from the shower tap to wash the fats and oils adhering to the workpiece, and the remaining fats and oils are vaporized with organic solvent vapor. In a vacuum cleaning apparatus that degreases and cleans a workpiece by cleaning, evacuating the vacuum-tight container with a vacuum pump, and drying the workpiece, the vacuum pump evacuates the vacuum-tight container to dry the workpiece. and a solvent tank connected to the vacuum pump to store an organic solvent, and a condenser built in the solvent tank to condense the organic solvent vapor, or a condenser provided between the vacuum pump and the solvent tank to condense the organic solvent vapor. The outlet of the solvent tank is connected to an organic solvent inlet connected to a shower stopper for spraying organic solvent in the vacuum sealed container, and the vacuum is passed from the vacuum sealed container to the vacuum pump and the solvent tank. A vacuum cleaning device characterized by forming a closed flow path for a solvent up to a sealed container, or a closed flow path for a solvent from a vacuum sealed container to a vacuum sealed container via a vacuum pump, a condenser, and a solvent tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24025989A JPH0611435B2 (en) | 1989-09-18 | 1989-09-18 | Vacuum cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24025989A JPH0611435B2 (en) | 1989-09-18 | 1989-09-18 | Vacuum cleaning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03101881A true JPH03101881A (en) | 1991-04-26 |
| JPH0611435B2 JPH0611435B2 (en) | 1994-02-16 |
Family
ID=17056834
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24025989A Expired - Lifetime JPH0611435B2 (en) | 1989-09-18 | 1989-09-18 | Vacuum cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0611435B2 (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05123658A (en) * | 1991-10-17 | 1993-05-21 | Japan Field Kk | Method for cleaning body to be cleaned and apparatus therefor |
| EP0639658A2 (en) * | 1991-11-11 | 1995-02-22 | Leybold Aktiengesellschaft | Process for degreasing and cleaning material covered with greasy and/or oily substances |
| WO1995006762A3 (en) * | 1993-08-30 | 1995-04-06 | Emo Oberflaechentech Gmbh | Vapour phase cleaning |
| JPH07116616A (en) * | 1993-10-28 | 1995-05-09 | Chugai Ro Co Ltd | Cleaning device |
| JPH07243073A (en) * | 1994-02-28 | 1995-09-19 | Nippon Enbairo Kogyo Kk | Washing device |
| JPH07278859A (en) * | 1993-05-28 | 1995-10-24 | Aichelin Ind Gmbh | Method and apparatus for cleaning metallic workpiece |
| JPH08252546A (en) * | 1995-03-16 | 1996-10-01 | Chugai Ro Co Ltd | Washing device using organic solvent |
| WO2001019540A1 (en) * | 1999-09-13 | 2001-03-22 | Emhart Inc. | Method and device for washing article |
| JP2006249530A (en) * | 2005-03-11 | 2006-09-21 | Fujitsu Ltd | Method for forming pattern made of metallic film |
| JP2016022414A (en) * | 2014-07-18 | 2016-02-08 | 株式会社デンソー | Cleaning method and cleaning device |
| CN108686585A (en) * | 2018-07-13 | 2018-10-23 | 南京卡邦科技有限公司 | Technique prepares column automated packing automatic discharge unit |
-
1989
- 1989-09-18 JP JP24025989A patent/JPH0611435B2/en not_active Expired - Lifetime
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05123658A (en) * | 1991-10-17 | 1993-05-21 | Japan Field Kk | Method for cleaning body to be cleaned and apparatus therefor |
| EP0639658A3 (en) * | 1991-11-11 | 1995-04-19 | Leybold Ag | Process for degreasing and cleaning material covered with greasy and/or oily substances. |
| EP0639658A2 (en) * | 1991-11-11 | 1995-02-22 | Leybold Aktiengesellschaft | Process for degreasing and cleaning material covered with greasy and/or oily substances |
| JPH07278859A (en) * | 1993-05-28 | 1995-10-24 | Aichelin Ind Gmbh | Method and apparatus for cleaning metallic workpiece |
| WO1995006762A3 (en) * | 1993-08-30 | 1995-04-06 | Emo Oberflaechentech Gmbh | Vapour phase cleaning |
| US5690751A (en) * | 1993-08-30 | 1997-11-25 | The Dow Chemical Company | Vapor phase cleaning |
| JPH07116616A (en) * | 1993-10-28 | 1995-05-09 | Chugai Ro Co Ltd | Cleaning device |
| JPH07243073A (en) * | 1994-02-28 | 1995-09-19 | Nippon Enbairo Kogyo Kk | Washing device |
| JPH08252546A (en) * | 1995-03-16 | 1996-10-01 | Chugai Ro Co Ltd | Washing device using organic solvent |
| US5607514A (en) * | 1995-03-16 | 1997-03-04 | Chugai Ro Company, Ltd. | Cleaning apparatus |
| WO2001019540A1 (en) * | 1999-09-13 | 2001-03-22 | Emhart Inc. | Method and device for washing article |
| JP2006249530A (en) * | 2005-03-11 | 2006-09-21 | Fujitsu Ltd | Method for forming pattern made of metallic film |
| JP2016022414A (en) * | 2014-07-18 | 2016-02-08 | 株式会社デンソー | Cleaning method and cleaning device |
| CN108686585A (en) * | 2018-07-13 | 2018-10-23 | 南京卡邦科技有限公司 | Technique prepares column automated packing automatic discharge unit |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0611435B2 (en) | 1994-02-16 |
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