JP2902989B2 - Cleaning equipment - Google Patents
Cleaning equipmentInfo
- Publication number
- JP2902989B2 JP2902989B2 JP32228695A JP32228695A JP2902989B2 JP 2902989 B2 JP2902989 B2 JP 2902989B2 JP 32228695 A JP32228695 A JP 32228695A JP 32228695 A JP32228695 A JP 32228695A JP 2902989 B2 JP2902989 B2 JP 2902989B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- tank
- cleaning liquid
- steam
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、炭化水素溶剤を用
いて電子部品や機械部品などを洗浄する洗浄装置に関
し、特に、超音波洗浄から仕上げリンス及び乾燥までの
一連の洗浄動作を円滑に実現する高性能の洗浄装置に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus for cleaning electronic parts and mechanical parts using a hydrocarbon solvent, and particularly to a series of cleaning operations from ultrasonic cleaning to finish rinsing and drying. High-performance cleaning apparatus.
【０００２】[0002]
【発明が解決しようとする課題】フロンやトリエタンの
全廃を目前に控えて、理想的な代替洗浄剤の開発が進ま
ない中、汎用性や価格上の利点から、水溶性洗剤や炭化
水素溶剤への切替えが積極的に推進されている。その中
でも溶剤系洗浄液の簡便さから炭化水素溶剤が注目され
る。しかしながら、炭化水素洗浄溶剤は、その性質上、
引火性・脱脂性・乾燥性などの本質的な問題を有してお
り、これを用いた高性能の洗浄装置は存在しなかった。
例えば、従来の炭化水素洗浄では、洗浄後に仕上げ洗浄
と液切りの工程があり、その後、熱風乾燥によって洗浄
処理を完了するが、これでは、被洗浄物に付着する洗浄
液の汚染物質が、熱乾燥によって凝縮残留してしまうこ
とになる。本発明は、この問題点に着目してなされたも
のであって、炭化水素溶剤を用いて超音波洗浄から仕上
げリンス及び乾燥までの一連の洗浄動作を一槽で円滑に
実現することのできる高性能の洗浄装置を提供すること
を目的とする。With the elimination of CFCs and triethane shortly before the development of an ideal alternative cleaning agent has progressed, water-soluble detergents and hydrocarbon solvents have been used because of their versatility and price advantages. Switching is being actively promoted. Among them, hydrocarbon solvents are attracting attention because of the simplicity of the solvent-based cleaning liquid. However, hydrocarbon cleaning solvents, by their nature,
It has essential problems such as flammability, degreasing property and drying property, and no high-performance cleaning apparatus using the same has been found.
For example, in the conventional hydrocarbon cleaning, there is a finishing cleaning and a draining process after the cleaning, and then the cleaning process is completed by hot air drying. In this case, contaminants of the cleaning liquid adhering to the object to be cleaned are thermally dried. Will condense and remain. The present invention has been made in view of this problem, and a series of cleaning operations from ultrasonic cleaning to finish rinsing and drying using a hydrocarbon solvent can be smoothly performed in a single tank. It is an object of the present invention to provide a high-performance cleaning apparatus.
【０００３】[0003]
【課題を解決するための手段】上記の目的を達成するた
め、請求項１に係る発明では、開閉弁(V4,V5) を介して
互いに連通している洗浄槽(2) 及び貯留槽(3) と、前記
洗浄槽(2) 及び貯留槽(3) を、所定の速度で所定レベル
まで減圧可能な真空ポンプ(8) と、加熱部(15)を有して
おり、前記貯留槽(3) から導入された洗浄液を常時に加
熱している蒸気発生槽(4) と、凝縮機構(20)を介して前
記蒸気発生槽(4) に接続され、前記蒸気発生槽を減圧状
態に維持すると共に、前記凝縮機構によって液化された
洗浄液を前記貯留槽に供給する蒸留再生部(23)とを備
え、前記蒸留再生部の動作に並行して、前記真空ポンプ
の作用によって、前記洗浄槽と前記貯留槽の間の洗浄液
の給排液、前記洗浄槽での蒸気洗浄、及び、被洗浄物の
真空乾燥を実現している。本発明では、所定の速度で所
定レベルまで減圧可能な高性能の真空ポンプを備えてい
るので、洗浄槽と貯留槽の間の洗浄液の給排液だけでな
く、洗浄槽での蒸気洗浄を円滑に実現することができ、
しかも、その後の被洗浄物の真空乾燥を迅速に完了させ
ることができる。但し、真空度を高め過ぎると、蒸発潜
熱によって被洗浄物の温度が低下しすぎることになるの
で、真空ポンプの入力部にリーク弁を設け、これを開閉
動作しつつ真空乾燥するのが好適である。また、超音波
洗浄に先立って、貯留槽から洗浄槽に洗浄液が供給され
るとき、洗浄液が洗浄槽の壁面全体に広げて流すか、或
いは、霧状などに広げることによって脱気すると、超音
波洗浄の効果を更に高めることができる。また、従来装
置の場合、被洗浄物の形状によっては、穴袋のエアポケ
ットなどに洗浄液が入り込まず、洗浄できないのが一般
的であったが、本発明では、真空ポンプによって、先ず
洗浄槽を減圧することができるので、この時にエアポケ
ット内などの空気を抜き去ることができ、その後、瞬時
に大気圧に戻すことで細部にわたって洗浄液を流入させ
ることができる。つまり、エアポケットを有する被洗浄
物や、密着性の高い被洗浄物の隙間にも確実に洗浄液を
流入させることができ、洗浄不良の問題が解消される。In order to achieve the above object, according to the first aspect of the present invention, a cleaning tank (2) and a storage tank (3) communicating with each other via on-off valves (V4, V5) are provided. ), A vacuum pump (8) capable of reducing the pressure of the washing tank (2) and the storage tank (3) to a predetermined level at a predetermined speed, and a heating unit (15). ) Is connected to the steam generating tank (4) that constantly heats the cleaning liquid introduced from the above and the steam generating tank (4) via a condensation mechanism (20), and maintains the steam generating tank in a reduced pressure state. A distillation regeneration unit (23) for supplying the cleaning liquid liquefied by the condensation mechanism to the storage tank, and in parallel with the operation of the distillation regeneration unit, the cleaning tank and the cleaning tank are operated by the vacuum pump. Supply and drainage of the cleaning liquid between the storage tanks, steam cleaning in the cleaning tank, and vacuum drying of the object to be cleaned are realized. In the present invention, since a high-performance vacuum pump capable of reducing the pressure to a predetermined level at a predetermined speed is provided, not only the supply and discharge of the cleaning liquid between the cleaning tank and the storage tank, but also the steam cleaning in the cleaning tank can be performed smoothly. Can be realized in
In addition, the subsequent vacuum drying of the object to be cleaned can be completed quickly. However, if the degree of vacuum is too high, the temperature of the object to be cleaned will be too low due to the latent heat of evaporation. Therefore, it is preferable to provide a leak valve at the input of the vacuum pump and perform vacuum drying while opening and closing the leak valve. is there. Also, prior to ultrasonic cleaning, when the cleaning liquid is supplied from the storage tank to the cleaning tank, the cleaning liquid spreads over the entire wall surface of the cleaning tank, or when the cleaning liquid is degassed by being spread in a mist state, the ultrasonic wave is generated. The cleaning effect can be further enhanced. Further, in the case of the conventional apparatus, depending on the shape of the object to be cleaned, the cleaning liquid generally does not enter into the air pockets of the hole bags and cannot be cleaned. However, in the present invention, the cleaning tank is first opened by the vacuum pump. Since the pressure can be reduced, the air in the air pocket or the like can be removed at this time, and thereafter the pressure can be instantaneously returned to the atmospheric pressure, so that the cleaning liquid can flow in detail. In other words, the cleaning liquid can reliably flow into the gap between the object to be cleaned having the air pocket and the object to be cleaned having high adhesion, and the problem of poor cleaning can be solved.
【０００４】[0004]
【発明の実施の態様】以下、実施例に基づいて、この発
明を更に詳細に説明する。図１は、この発明の一実施例
である洗浄装置１を図示したものである。この洗浄装置
１は、密閉シャッター付きの洗浄槽２と、洗浄液を蓄え
る洗浄液タンク３と、洗浄液の蒸留釜として機能する蒸
気発生槽４と、開閉弁Ｖ１〜Ｖ９とを中心的に備えてい
る。洗浄槽２と洗浄液タンク３は、ともに１Torr以下の
真空度に対応できる液槽であり、洗浄槽２では、超音波
洗浄や蒸気洗浄を行うようになっている。なお、洗浄液
の種類は、特に限定されないが、可燃性液体である炭化
水素溶剤を用いることができる。洗浄槽２は、その内部
に超音波発振器５を備えると共に、壁面全周にわたって
凝縮器６を備えており、蓋体７によって適宜に密閉され
るようになっている。また、洗浄槽２は、真空弁Ｖ１を
通して真空ポンプ８に接続されており、真空ポンプ８の
出力側は、コールドトラップ９と排気ファン１０とを経
由して大気に連通している。ここで、真空ポンプ８は、
洗浄液の給排液と、蒸気洗浄及び真空乾燥を実現するも
のであり、その排気能力は、毎時１００ｍ3 以上であ
り、到達圧力が１Torr以下のものである。また、ドライ
式の真空ポンプであり（油回転式や水封式ではない）、
洗浄液の気化ガスやミストの排気もできるようになって
いる。なお、洗浄槽２は、大気開放弁Ｖ２を通して大気
に開放され、真空ポンプ８の入力側は、真空度調整弁Ｖ
３を通して大気に開放されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in more detail with reference to embodiments. FIG. 1 illustrates a cleaning apparatus 1 according to one embodiment of the present invention. The cleaning apparatus 1 mainly includes a cleaning tank 2 having a closed shutter, a cleaning liquid tank 3 for storing a cleaning liquid, a steam generating tank 4 functioning as a distillation tank for the cleaning liquid, and on-off valves V1 to V9. Each of the cleaning tank 2 and the cleaning liquid tank 3 is a liquid tank capable of coping with a degree of vacuum of 1 Torr or less, and the cleaning tank 2 performs ultrasonic cleaning or steam cleaning. The type of the cleaning liquid is not particularly limited, but a hydrocarbon solvent that is a flammable liquid can be used. The cleaning tank 2 includes an ultrasonic oscillator 5 therein and a condenser 6 over the entire wall surface, and is appropriately sealed by a lid 7. The cleaning tank 2 is connected to a vacuum pump 8 through a vacuum valve V 1, and an output side of the vacuum pump 8 communicates with the atmosphere via a cold trap 9 and an exhaust fan 10. Here, the vacuum pump 8
It realizes supply and discharge of a cleaning liquid, steam cleaning and vacuum drying, and has an exhaust capacity of 100 m 3 or more per hour and an ultimate pressure of 1 Torr or less. In addition, it is a dry vacuum pump (not an oil rotary type or a water ring type),
Vaporized gas and mist of the cleaning liquid can be exhausted. The cleaning tank 2 is opened to the atmosphere through an atmosphere opening valve V2, and the input side of the vacuum pump 8 is connected to a vacuum adjustment valve V2.
3 open to the atmosphere.
【０００５】洗浄槽２と洗浄液タンク３とは、洗浄液導
入管１１と洗浄液排出管１２と凝縮回収管１３とで接続
されており、洗浄液導入管１１と洗浄液排出管１２に
は、それぞれ、洗浄液導入弁Ｖ４と洗浄液排出弁Ｖ５が
設けられている。また、洗浄液タンク３には、凝縮器１
４が設けられると共に、大気開放弁Ｖ６が設けられてい
る。なお、真空ポンプ８の入力側と洗浄液タンク３と
は、真空弁Ｖ７を通して接続されている。蒸気発生槽４
には、オイルヒータ１５ａやポンプなどによる加熱部１
５が設けられており（スチームを使用しても良い）、洗
浄液の沸点と内部圧力とに対応した所定温度で加熱する
ことにより、洗浄液の蒸気を常に発生させている。そし
て、蒸発によって減少する洗浄液は、液面調整タンク１
６から補給されるようになっている。また、蒸気発生槽
４と液面調整タンク１６とは、連通管１７を介して接続
されており、蒸気発生槽４の内部圧力と同じ圧力での安
定的な液供給を可能にしている。蒸気発生槽４と洗浄槽
２は、蒸気出力管１８によって接続されており、蒸気導
入弁Ｖ８によって連通状態が制御される。また、蒸気出
力管１８には、加温部１９が設けられており、洗浄液タ
ンク３から液面調整タンク１６に導入される洗浄液が予
め加温されるようになっている。蒸気発生槽４はまた、
蒸留再生弁Ｖ９を介してコンデンサ２０に接続されてお
り、コンデンサ２０の出力側は、エゼクタータンク２１
や循環ポンプ２２などで構成されたエゼクター２３に接
続されている。その為、蒸気発生槽４で発生した洗浄液
の蒸気は、コンデンサ２０で液化された後、エゼクター
２３によって吸引されてセパレートタンク２１に導入さ
れる。このように、この洗浄装置１では、蒸気発生槽４
→コンデンサ２０→エゼクター２３→洗浄液タンク３→
加温器１９→液面調整タンク１６からなる蒸留再生ライ
ンが形成されている。なお、洗浄液の種類に応じて異な
るが、蒸気発生槽４は、エゼクター２３によって５００
〜６５０ｍｍＨｇ程度の減圧状態になっており、洗浄液
の沸点を低下させた状態で、効率のよい蒸留再生が行わ
れている。The cleaning tank 2 and the cleaning liquid tank 3 are connected by a cleaning liquid introduction pipe 11, a cleaning liquid discharge pipe 12, and a condensation recovery pipe 13. The cleaning liquid introduction pipe 11 and the cleaning liquid discharge pipe 12 are respectively connected to the cleaning liquid introduction pipe 11 and the cleaning liquid discharge pipe 12. A valve V4 and a cleaning liquid discharge valve V5 are provided. The washing liquid tank 3 includes a condenser 1
4 and an atmosphere release valve V6. The input side of the vacuum pump 8 and the cleaning liquid tank 3 are connected through a vacuum valve V7. Steam generation tank 4
The heating unit 1 includes an oil heater 15a and a pump.
5 is provided (steam may be used), and the vapor of the cleaning liquid is constantly generated by heating at a predetermined temperature corresponding to the boiling point and the internal pressure of the cleaning liquid. The cleaning liquid that is reduced by evaporation is supplied to the liquid level adjusting tank 1.
6 is to be replenished. Further, the steam generating tank 4 and the liquid level adjusting tank 16 are connected via a communication pipe 17 to enable stable liquid supply at the same pressure as the internal pressure of the steam generating tank 4. The steam generation tank 4 and the cleaning tank 2 are connected by a steam output pipe 18, and the communication state is controlled by a steam introduction valve V8. Further, a heating unit 19 is provided in the steam output pipe 18 so that the cleaning liquid introduced from the cleaning liquid tank 3 to the liquid level adjustment tank 16 is heated in advance. The steam generation tank 4 also
The condenser 20 is connected to the condenser 20 via a distillation regeneration valve V9.
And an ejector 23 constituted by a circulation pump 22 and the like. Therefore, the vapor of the cleaning liquid generated in the vapor generation tank 4 is liquefied by the condenser 20, then sucked by the ejector 23 and introduced into the separate tank 21. Thus, in this cleaning device 1, the steam generation tank 4
→ condenser 20 → ejector 23 → cleaning liquid tank 3 →
A distillation regeneration line consisting of the heater 19 and the liquid level adjustment tank 16 is formed. In addition, although it differs depending on the type of the cleaning liquid, the steam generating tank 4
The pressure is reduced to about 650 mmHg, and efficient distillation regeneration is performed with the boiling point of the washing liquid lowered.
【０００６】以上、図１に示す洗浄装置１について、主
として機器構成を説明したので、次に、洗浄装置１の動
作内容について説明する。 〔蒸留再生動作〕洗浄装置１は、洗浄槽２において超音
波洗浄や蒸気洗浄が行われるが、この洗浄動作に並行し
て、上記した蒸留再生ラインにおいて、汚染物質を含ん
だ洗浄液の蒸留再生を行っている。すなわち、洗浄後の
汚染物質を含んだ洗浄液は、洗浄液タンク３に貯留され
るが、この洗浄液（混合液）は、加温部１９において予
め加温された状態で蒸気発生槽４に供給される。蒸気発
生槽４は、混合液から当該洗浄液のみを蒸発させること
により、純粋な洗浄液を抽出する蒸留釜であるが、エゼ
クター２３によって所定の減圧状態に維持されているの
で、内部の洗浄液は、比較的低沸点で沸騰させることが
できる。蒸気発生槽４において発生した洗浄蒸気は、加
温部１９で熱交換した後、蒸留再生弁Ｖ９を介してコン
デンサ２０に伝えられて液化される。そして、エゼクタ
ー２３により吸引されてエゼクタータンク２１に導入さ
れる。エゼクタータンク２１に貯留される洗浄液は、蒸
留再生された高純度の洗浄液であるから、これが洗浄液
タンク３に導入されることにより、洗浄液タンク３内の
洗浄液の純度が上がることになる。以上の通り、この洗
浄装置１では、蒸気発生槽４→コンデンサ２０→エゼク
ター２３→洗浄液タンク３→蒸気発生槽４からなる蒸留
再生ラインが形成されており、洗浄によって混入する汚
染物質を蒸気発生槽４に集積させることによって、蒸気
液タンク３の洗浄液の純度を維持している。[0006] The apparatus configuration of the cleaning apparatus 1 shown in FIG. 1 has been mainly described above. Next, the operation of the cleaning apparatus 1 will be described. [Distillation / Regeneration Operation] In the cleaning apparatus 1, ultrasonic cleaning and steam cleaning are performed in the cleaning tank 2. In parallel with this cleaning operation, the distillation / regeneration of the cleaning liquid containing contaminants is performed in the distillation / regeneration line described above. Is going. That is, the cleaning liquid containing the contaminants after cleaning is stored in the cleaning liquid tank 3, and this cleaning liquid (mixed liquid) is supplied to the steam generation tank 4 in a state where the cleaning liquid is heated in advance in the heating unit 19. . The steam generation tank 4 is a distillation still for extracting a pure cleaning liquid by evaporating only the cleaning liquid from the mixed liquid. However, the internal cleaning liquid is maintained at a predetermined reduced pressure by the ejector 23. It can be boiled at a very low boiling point. The washing steam generated in the steam generating tank 4 is heat-exchanged in the heating unit 19 and then transmitted to the condenser 20 via the distillation regeneration valve V9 to be liquefied. Then, it is sucked by the ejector 23 and introduced into the ejector tank 21. Since the cleaning liquid stored in the ejector tank 21 is a high-purity cleaning liquid that has been distilled and regenerated, introduction of the cleaning liquid into the cleaning liquid tank 3 increases the purity of the cleaning liquid in the cleaning liquid tank 3. As described above, in the cleaning apparatus 1, the distillation regeneration line including the steam generation tank 4 → the condenser 20 → the ejector 23 → the cleaning liquid tank 3 → the steam generation tank 4 is formed, and contaminants mixed in by the cleaning are removed by the steam generation tank. 4, the purity of the cleaning liquid in the vapor liquid tank 3 is maintained.
【０００７】〔超音波洗浄〕続いて、洗浄槽２における
超音波洗浄の手順について説明する。洗浄槽２に被洗浄
物を投入して蓋体７を密閉したら、最初に、真空弁Ｖ１
のみを開放し、真空ポンプ８を駆動させて、洗浄槽２の
気圧を６０ｍｍＨｇ（−７００ｍｍＨｇ）程度まで減圧
させる。次に、真空弁Ｖ１を閉じた後、洗浄液導入弁Ｖ
４と大気開放弁Ｖ６とを開放する。すると、洗浄槽２が
減圧状態であることから、洗浄液タンク３の洗浄液は、
１秒間に１０リットル以上、洗浄液導入管１１を通って
洗浄槽２に供給される。この時、スプレーノズルを通し
て洗浄槽２の壁面全体に洗浄液を膜状に供給するか、或
いは、スプレーノズルからの洗浄液を霧状、フラット
状、又は円錐状などにして液表面積を大きくして真空下
にさらすことにより、洗浄液の溶存気体（酸素）を脱気
させる。なお、この脱気処理により、６〜７ppm の溶存
酸素が１〜２ppm 程度まで減少し、音圧測定によると音
圧が８mVから１８mVまで上昇することが実験的に確認さ
れている。[Ultrasonic cleaning] Next, the procedure of ultrasonic cleaning in the cleaning tank 2 will be described. After the object to be cleaned is put into the cleaning tank 2 and the lid 7 is closed, first, the vacuum valve V1
Only, the vacuum pump 8 is driven to reduce the pressure in the cleaning tank 2 to about 60 mmHg (-700 mmHg). Next, after closing the vacuum valve V1, the cleaning liquid introduction valve V
4 and the atmosphere release valve V6 are opened. Then, the cleaning liquid in the cleaning liquid tank 3 is
At least 10 liters per second is supplied to the cleaning tank 2 through the cleaning liquid introduction pipe 11. At this time, the cleaning liquid is supplied in the form of a film to the entire wall surface of the cleaning tank 2 through the spray nozzle, or the cleaning liquid from the spray nozzle is atomized, flat, or conical to increase the liquid surface area and to apply a vacuum. To remove the dissolved gas (oxygen) of the cleaning liquid. It has been experimentally confirmed that this deaeration reduces the dissolved oxygen of 6 to 7 ppm to about 1 to 2 ppm, and that the sound pressure increases from 8 mV to 18 mV according to the sound pressure measurement.
【０００８】その後、洗浄液導入弁Ｖ４と大気開放弁Ｖ
６を閉じて、超音波発振器５を動作させて洗浄槽２内の
被洗浄物を超音波洗浄する。前述したように、この洗浄
液からは、キャビテーションを阻害する溶存酸素が除去
されているので、強力な洗浄力を発揮する。また、エア
ポケット部や被洗浄物の隙間にも、確実に洗浄液が行き
渡っているので、高性能の超音波洗浄が実現される。な
お、この超音波洗浄の動作中、真空弁Ｖ７を開放させ
て、真空ポンプ８によって洗浄液タンク３の気圧を６０
ｍｍＨｇ（−７００ｍｍＨｇ）程度まで減圧させる。超
音波洗浄が完了すると、洗浄槽２の大気開放弁Ｖ２と、
洗浄液排出管１２の洗浄液排出弁Ｖ５とを共に開放し
て、洗浄槽２の洗浄液を洗浄液タンク３に回収する。こ
のように、本発明の洗浄装置１では、洗浄液タンク３と
洗浄槽２の気圧差を利用して、洗浄液の供給や排出を行
っているので、ポンプなどの動力機器を用いる場合より
安全であり、迅速に給排液の動作を終えることができ
る。Thereafter, the cleaning liquid introduction valve V4 and the atmosphere release valve V
6 is closed and the ultrasonic oscillator 5 is operated to ultrasonically clean the object to be cleaned in the cleaning tank 2. As described above, since the dissolved oxygen that inhibits cavitation is removed from the cleaning liquid, a strong cleaning power is exhibited. Further, since the cleaning liquid is surely spread to the air pockets and the gaps between the objects to be cleaned, high-performance ultrasonic cleaning is realized. During the operation of the ultrasonic cleaning, the vacuum valve V7 is opened, and the pressure of the cleaning liquid tank 3 is reduced to 60 by the vacuum pump 8.
The pressure is reduced to about mmHg (−700 mmHg). When the ultrasonic cleaning is completed, the air release valve V2 of the cleaning tank 2
The cleaning liquid discharge valve V5 of the cleaning liquid discharge pipe 12 is opened together, and the cleaning liquid in the cleaning tank 2 is collected in the cleaning liquid tank 3. As described above, in the cleaning apparatus 1 of the present invention, the supply and discharge of the cleaning liquid are performed by utilizing the pressure difference between the cleaning liquid tank 3 and the cleaning tank 2, so that the cleaning apparatus 1 is safer than using a power device such as a pump. The operation of the supply and drainage can be completed quickly.
【０００９】〔蒸気洗浄（仕上げリンス）〕蒸気洗浄を
行う場合は、続いて、真空弁Ｖ１のみを開放し、真空ポ
ンプ８によって洗浄槽２を６０ｍｍＨｇ程度まで減圧し
た後、真空弁Ｖ１を閉じる。次に、蒸気導入弁Ｖ８、洗
浄液排出弁Ｖ５、及び真空弁Ｖ７を開放して真空ポンプ
８を駆動する。すると、蒸気発生槽４で発生した洗浄蒸
気が洗浄槽２に導入され、被洗浄物を蒸気洗浄しつつ一
部は液化し、蒸気と共に洗浄液排出弁Ｖ５を通って洗浄
液タンク３に伝えられる。洗浄液タンク３には凝縮器１
４が設けられているので、洗浄蒸気は液化されて洗浄液
タンク３に回収される。なお、洗浄蒸気は、真空ポンプ
８に吸引された後、コールドトラップ９において更に液
化回収される。そして、蒸気洗浄が完了すれば、蒸気導
入弁Ｖ８を閉じて、洗浄槽２から洗浄蒸気を排出する。
これにより、余分な蒸気は効率良く回収され、高精度な
仕上げリンスが完了するが、被洗浄物には、同時に、自
熱乾燥に必要な熱エネルギーが効率よく与えられたこと
になる。なお、上記の説明では、洗浄槽２と洗浄液タン
ク３とを連通させ、液化した洗浄液を直接的に回収した
が、洗浄槽２からコンデンサ２０を通してエゼクタータ
ンク２１に回収するようにしても良い。この場合には、
蒸気導入弁Ｖ８と蒸気排出弁Ｖ５’のみを開放して、洗
浄槽２の洗浄蒸気をコンデンサ２０に回収するので、凝
縮器１４を省略することができるが、所定の減圧状態を
維持するためには洗浄動作中に蒸留再生弁Ｖ９を閉じる
必要があり、蒸留再生と蒸気洗浄とを並行処理できない
という不利がある。[Steam Cleaning (Finishing Rinse)] When performing steam cleaning, subsequently, only the vacuum valve V1 is opened, the pressure of the cleaning tank 2 is reduced to about 60 mmHg by the vacuum pump 8, and then the vacuum valve V1 is closed. Next, the vacuum pump 8 is driven by opening the steam introduction valve V8, the cleaning liquid discharge valve V5, and the vacuum valve V7. Then, the cleaning steam generated in the steam generating tank 4 is introduced into the cleaning tank 2, and a part of the cleaning target is liquefied while performing the steam cleaning, and is transmitted to the cleaning liquid tank 3 through the cleaning liquid discharge valve V 5 together with the steam. Condenser 1 in cleaning liquid tank 3
Since the cleaning steam tank 4 is provided, the cleaning steam is liquefied and collected in the cleaning liquid tank 3. The washing steam is further liquefied and collected in the cold trap 9 after being sucked by the vacuum pump 8. When the steam cleaning is completed, the steam introduction valve V8 is closed, and the cleaning steam is discharged from the cleaning tank 2.
As a result, excess steam is efficiently collected, and high-precision finish rinsing is completed. However, the object to be cleaned is simultaneously efficiently supplied with heat energy required for self-heating drying. In the above description, the cleaning tank 2 is communicated with the cleaning liquid tank 3 to directly recover the liquefied cleaning liquid. However, the cleaning liquid may be recovered from the cleaning tank 2 to the ejector tank 21 through the condenser 20. In this case,
Since only the steam introduction valve V8 and the steam discharge valve V5 'are opened and the washing steam in the washing tank 2 is collected in the condenser 20, the condenser 14 can be omitted, but in order to maintain a predetermined reduced pressure state. Has the disadvantage that the distillation regeneration valve V9 must be closed during the cleaning operation, and the distillation regeneration and steam cleaning cannot be performed in parallel.
【００１０】〔真空乾燥〕続いて、洗浄液排出弁Ｖ５と
真空弁Ｖ７とを閉じると共に、真空弁Ｖ１を開放して真
空ポンプ８によって洗浄槽２を減圧する。すると、被洗
浄物表面に付着している洗浄液は、被洗浄物のもつ自熱
だけで瞬時に沸騰乾燥することになる。なお、洗浄槽２
から吸引される洗浄液の蒸気やミストは、コールドトラ
ップ９において液化され無駄なく回収される。この真空
乾燥を行う場合、被洗浄物に付着した溶剤は沸騰乾燥す
るが、反面、蒸気潜熱によって被洗浄物の表面温度を急
激に低下させることにもなる。そこで、被洗浄物の表面
温度をあまり低下させることがないよう、真空度調整弁
Ｖ３を適宜に開閉制御して、被洗浄物の材質、形状、寸
法などを考慮した最適な真空乾燥を実現している。以上
説明したように、本発明に係る洗浄装置１では、次のよ
うな種々のすぐれた特徴を有している。すなわち、す
べての工程が真空環境で行われるため、引火に必要な酸
素濃度になく、本質的な安全性が確保される。高純度
蒸気による仕上げ洗浄が、洗浄ムラを無くし、炭化水素
洗浄の用途範囲と洗浄度のワクを最大限に広げた。蒸
留蒸気の熱エネルギーだけを利用した自熱乾燥方式のた
め、熱風や輻射熱など危険性の高い乾燥熱とエネルギー
が一切不要となった。蒸気圧を利用した高真空乾燥に
より、あらゆる形状・姿勢の被洗浄物でも高速乾燥する
ことができる。全システムが真空クローズドのため洗
浄液の持ち出しや自然消耗が殆どない。[Vacuum Drying] Subsequently, the cleaning liquid discharge valve V5 and the vacuum valve V7 are closed, the vacuum valve V1 is opened, and the pressure of the cleaning tank 2 is reduced by the vacuum pump 8. Then, the cleaning liquid adhering to the surface of the object to be cleaned is instantaneously boiled and dried only by the self-heating of the object to be cleaned. Cleaning tank 2
Vapors and mist of the cleaning liquid sucked from the liquefier are liquefied in the cold trap 9 and collected without waste. In this vacuum drying, the solvent adhering to the object to be cleaned is boiled and dried, but on the other hand, the surface temperature of the object to be cleaned is rapidly lowered by the latent heat of steam. Therefore, the vacuum degree adjusting valve V3 is appropriately opened and closed so as not to lower the surface temperature of the object to be cleaned so as to realize the optimum vacuum drying in consideration of the material, shape and dimensions of the object to be cleaned. ing. As described above, the cleaning device 1 according to the present invention has the following various excellent features. In other words, since all the steps are performed in a vacuum environment, the essential safety is ensured without the oxygen concentration required for ignition. Finish cleaning with high-purity steam eliminates cleaning unevenness and maximizes the range of applications for hydrocarbon cleaning and the degree of cleaning. The self-heating drying system uses only the heat energy of the distilled steam, eliminating the need for highly dangerous drying heat and energy such as hot air and radiant heat. High-vacuum drying utilizing vapor pressure enables high-speed drying of objects to be cleaned in any shape and posture. Since the entire system is vacuum-closed, there is almost no take-out of cleaning liquid or natural consumption.
【００１１】[0011]
【発明の効果】本発明は、開閉弁を介して連通している
洗浄槽及び貯留槽と、洗浄槽及び貯留槽を所定の速度で
所定レベルまで減圧可能な真空ポンプと、貯留槽から導
入された洗浄液を常時に加熱している蒸気発生槽と、蒸
気発生槽を減圧すると共に、凝縮機構により液化された
洗浄液を貯留槽に供給する蒸留再生部とを備えているの
で、炭化水素溶剤を用いて超音波洗浄から仕上げリンス
及び乾燥までの一連の洗浄動作を円滑に実現することが
できる。According to the present invention, a cleaning tank and a storage tank communicating with each other through an on-off valve, a vacuum pump capable of reducing the pressure of the cleaning tank and the storage tank to a predetermined level at a predetermined speed, and a storage tank are introduced. A steam generation tank that constantly heats the cleaning liquid that has been heated, and a distillation regeneration unit that depressurizes the steam generation tank and supplies the cleaning liquid liquefied by the condensation mechanism to the storage tank. Thus, a series of cleaning operations from ultrasonic cleaning to finish rinsing and drying can be smoothly realized.
【図１】本発明の一実施例である洗浄装置を図示したも
のである。FIG. 1 illustrates a cleaning apparatus according to an embodiment of the present invention.
２ 洗浄槽 ３ 洗浄液タンク（貯留槽） ４ 蒸気発生槽 ８ 真空ポンプ １５ 加熱部 ２０ コンデンサ（凝縮機構） ２３ エゼクター（蒸留再生部） Ｖ４，Ｖ５ 開閉弁 2 Cleaning tank 3 Cleaning liquid tank (storage tank) 4 Steam generation tank 8 Vacuum pump 15 Heating unit 20 Condenser (condensing mechanism) 23 Ejector (Distillation regeneration unit) V4, V5 Open / close valve
フロントページの続き (56)参考文献 特開 平８−71514（ＪＰ，Ａ) 特開 昭54−75356（ＪＰ，Ａ) 特開 平６−273037（ＪＰ，Ａ) 特開 平６−163508（ＪＰ，Ａ) 特開 平６−224174（ＪＰ，Ａ) 特開 平７−185484（ＪＰ，Ａ) 特開 平６−15239（ＪＰ，Ａ) 特開 平７−54174（ＪＰ，Ａ) 特開 平６−134444（ＪＰ，Ａ) 実開 平７−17377（ＪＰ，Ｕ) 実開 昭49−119271（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.6，ＤＢ名) B08B 3/00 - 3/14 C23G 5/00 - 5/04 Continuation of front page (56) References JP-A-8-71514 (JP, A) JP-A-54-75356 (JP, A) JP-A-6-273037 (JP, A) JP-A-6-163508 (JP, A) JP-A-6-224174 (JP, A) JP-A-7-185484 (JP, A) JP-A-6-15239 (JP, A) JP-A-7-54174 (JP, A) 6-134444 (JP, A) Fully open Hei 7-17377 (JP, U) Fully open Showa 49-119271 (JP, U) (58) Fields investigated (Int. Cl. 6 , DB name) B08B 3/00 -3/14 C23G 5/00-5/04
Claims (3)
いる洗浄槽(2)及び単一の貯留槽(3) と、前記洗浄槽(2)
及び貯留槽(3) を、所定の速度で所定レベルまで減圧
可能な真空ポンプ(8) と、加熱部(15)を有しており、前
記貯留槽(3) から導入された洗浄液を常時に加熱してい
る蒸気発生槽(4) と、凝縮機構(20)を介して前記蒸気発
生槽(4) に接続され、前記蒸気発生槽を減圧状態に維持
すると共に、前記凝縮機構によって液化された洗浄液を
前記貯留槽に供給する蒸留再生部(23)とを備え、前記蒸
留再生部の動作に並行して、前記真空ポンプの作用によ
って、前記洗浄槽と前記貯留槽の間の洗浄液の給排液、
前記洗浄槽での蒸気洗浄、及び、被洗浄物の真空乾燥を
実現していることを特徴とする洗浄装置。A cleaning tank (2) and a single storage tank (3) communicating with each other via on-off valves (V4, V5);
A vacuum pump (8) capable of reducing the pressure of the storage tank (3) to a predetermined level at a predetermined speed, and a heating unit (15), so that the cleaning liquid introduced from the storage tank (3) is constantly supplied. The heated steam generating tank (4) was connected to the steam generating tank (4) via a condensing mechanism (20), and the steam generating tank was maintained in a reduced pressure state and liquefied by the condensing mechanism. A distillation regeneration unit (23) for supplying a cleaning liquid to the storage tank, and in parallel with the operation of the distillation regeneration unit, supply and discharge of the cleaning liquid between the cleaning tank and the storage tank by the action of the vacuum pump. liquid,
A cleaning apparatus, wherein steam cleaning in the cleaning tank and vacuum drying of an object to be cleaned are realized.
ク弁が設けられており、真空乾燥時には、前記リーク弁
を開閉動作させることを特徴とする請求項１に記載の洗
浄装置。2. The cleaning apparatus according to claim 1, wherein a leak valve is provided at an input portion of the vacuum pump, and the vacuum valve is opened and closed during vacuum drying.
給されるとき、洗浄液が洗浄槽の壁面全体に広げて流す
か、或いは、霧状などに広げることによって脱気するこ
とを特徴とする請求項１又は請求項２に記載の洗浄装
置。3. When the cleaning liquid is supplied from the storage tank to the cleaning tank, the cleaning liquid is deaerated by spreading the cleaning liquid over the entire wall surface of the cleaning tank or by spreading it in a mist state. The cleaning device according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32228695A JP2902989B2 (en) | 1995-11-15 | 1995-11-15 | Cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32228695A JP2902989B2 (en) | 1995-11-15 | 1995-11-15 | Cleaning equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH09141216A JPH09141216A (en) | 1997-06-03 |
| JP2902989B2 true JP2902989B2 (en) | 1999-06-07 |
Family
ID=18141945
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32228695A Expired - Lifetime JP2902989B2 (en) | 1995-11-15 | 1995-11-15 | Cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2902989B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100357343B1 (en) * | 2000-06-08 | 2002-10-19 | 주식회사 그린소닉 | Method of ultrasonic cleaning of heat units from the sediments and the device for its implement |
| JP2003024884A (en) * | 2001-07-11 | 2003-01-28 | Hisaka Works Ltd | Cleaning apparatus |
| JP4311559B2 (en) * | 2004-12-17 | 2009-08-12 | ジャパン・フィールド株式会社 | Apparatus for removing precipitates in surface treatment liquid |
| WO2007063975A1 (en) * | 2005-12-02 | 2007-06-07 | Suzuki, Shinsei | Apparatus and method for restoring electronic device |
| JP4752675B2 (en) * | 2006-08-22 | 2011-08-17 | 東ソー株式会社 | Cleaning method using hydrocarbon cleaner |
| JP4750870B2 (en) * | 2009-03-30 | 2011-08-17 | ジャパン・フィールド株式会社 | Method and apparatus for cleaning object to be cleaned |
| JP5945349B2 (en) * | 2015-04-22 | 2016-07-05 | 株式会社Ihi | Vacuum cleaning device |
-
1995
- 1995-11-15 JP JP32228695A patent/JP2902989B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH09141216A (en) | 1997-06-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6418942B1 (en) | Solvent and aqueous decompression processing system | |
| US5449010A (en) | Pressure controlled cleaning system | |
| US5538025A (en) | Solvent cleaning system | |
| US6004403A (en) | Solvent cleaning system | |
| JP2902989B2 (en) | Cleaning equipment | |
| KR100617984B1 (en) | Vacuum washing and drying apparatus | |
| US20070107748A1 (en) | Vacuum cavitational streaming | |
| US20140299162A1 (en) | Hyperbaric Methods and Systems for Surface Treatment, Cleaning, and Drying: Thin Liquid H-CNX | |
| JP3634718B2 (en) | Cleaning device | |
| JP3806110B2 (en) | Vacuum drying equipment | |
| JP3096241B2 (en) | Cleaning equipment | |
| JP2000237706A (en) | Vacuum cleaning and drying method using single treating tank and device therefor | |
| JP3234204B2 (en) | Method and apparatus for cleaning articles etc. | |
| JP6526858B2 (en) | Cleaning solution distillation regenerating apparatus, parts cleaning apparatus, and method for regenerating distillation of cleaning solution | |
| JP3052103B2 (en) | Vacuum degreasing cleaning equipment | |
| JPH0921586A (en) | Heating and drying method | |
| JPH0578876A (en) | Vacuum cleaning method and device | |
| JP3519488B2 (en) | Metal parts cleaning equipment with organic solvent | |
| JP2000000534A (en) | Water cleaning treatment system | |
| JPH0326383A (en) | Cleaning device using organic solvent | |
| JP3278781B2 (en) | Hermetic solvent cleaning and recovery method and apparatus | |
| JP3598287B2 (en) | Cleaning equipment | |
| JP3326845B2 (en) | Washing / drying method and washing / drying apparatus | |
| JP4683773B2 (en) | Method for evaporating and concentrating effervescent liquid | |
| JP3193696B2 (en) | Cleaning equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 19990216 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R360 | Written notification for declining of transfer of rights |
Free format text: JAPANESE INTERMEDIATE CODE: R360 |
|
| R370 | Written measure of declining of transfer procedure |
Free format text: JAPANESE INTERMEDIATE CODE: R370 |
|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090319 Year of fee payment: 10 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100319 Year of fee payment: 11 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110319 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130319 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130319 Year of fee payment: 14 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140319 Year of fee payment: 15 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |