JP2000000534A - Water cleaning treatment system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To remove water marks generated by water cleaning and enhance the finishing accuracy and the safety by treating a drain or a tank water generated in the cleaning step or the detergent removing step of a machined part or the like, using an evaporation, concentration and distillation device to obtain a distilled water and using this distilled water as a cleaning water in the detergent removing step. SOLUTION: An article to be cleaned such as a machined part is first introduced into a cleaning tank 3 to remove smears from the surface by the relative movement of the article to be cleaned with a detergent or a cleaning water containing the detergent. Next the article is conveyed into removal tanks 4-1 to 4-3. While the article is circulated through the removal tanks 4-1 to 4-3 sequentially, the cleaning water adhering to the surface of the article is removed by its relative movement with a limpid water-wash water. Following this process, the article is cleaned by a water vapor from a water vapor generation device 10 while the article is conveyed from the last removal tank 4-3 to a drying chamber 5. In this case, an overflowing water from the cleaning tank 3 and the removal tank 4 is stored in a drain tank 6 and then is transferred to an evaporation, concentration and distillation device 7 to obtain a distilled water and further this distilled water is circulated back to the last removal tank 4-3 as a reflux.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning system for machined parts, tableware and the like, and more particularly to a water-based cleaning system.

[0002]

2. Description of the Related Art Conventionally, in a cleaning processing system for an IC substrate or the like, cleaning with ultrapure water has been known as an alternative to chlorofluorocarbon cleaning.

[0003] For example, in washing machined parts obtained by cutting or the like, or in washing dishes and the like, tap water is generally used as it is.

In recent years, petroleum-based cleaning agents have begun to be used, particularly in machine-machined parts cleaning, as an alternative cleaning accompanying the total elimination of trichloroethane, since water-based cleaning (a mark of water droplets remaining after drying) remains in water-based cleaning.

[0005]

However, the use of petroleum-based cleaning agents has not only toxicity problems but also explosion and fire risks.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide a water-based cleaning treatment system which is a water-based cleaning and has markedly improved the remaining watermark.

[0007]

The object of the present invention can be achieved by the following constitution.

(1) A washing step of washing an object to be washed such as a machined part or tableware with a washing agent, a washing agent removing step of washing the washing object with water from the washed object to be washed, and the washing agent A water-based cleaning treatment system having a drying step of drying the object to be cleaned after the removal, wherein wastewater or tank water in the cleaning step and / or the cleaning agent removing step is treated with an evaporative concentration distillation apparatus to form distilled water, A water-based cleaning treatment system, wherein the distilled water is used as cleaning water in the cleaning agent removing step.

(2) The water-based cleaning treatment system according to (1), wherein the entire amount of the cleaning water used in the cleaning agent removing step is distilled water.

(3) The cleaning process according to (1), wherein the cleaning process includes a cleaning process using steam at 100 ° C. or higher, and the steam is generated by heating the distilled water. Water-based cleaning treatment system.

(4) The evaporative concentration distillation apparatus includes a compressor,
A heat radiating means, an expansion valve or a capillary tube and a heat absorbing means are sequentially connected, and the heat radiating means of a heat pump circuit in which a heat medium is sealed is used as a heating means for washing concentrated water, and the heat absorbing means is generated from the washing concentrated water. Evaporating and concentrating by a decompression indirect heat pump decompression method, comprising: a communication vessel that is used as a cooling means for cooling and liquefying the steam to be cooled, and is provided with a communication vessel that makes the heating means and the cooling means communicate with each other, and a pressure reducing means that decompresses the communication vessel. The water-based cleaning treatment system according to the above (1), which is a distillation device.

(5) The water-based cleaning system according to (4), wherein the heat radiating means is used for heating water in the cleaning step and / or the cleaning agent removing step.

(6) The heating and evaporating section for the washing water in the evaporating and concentrating distillation apparatus is divided into two or more stages, and the washing and condensed water is moved from the first stage to the second and subsequent stages by the transfer means,
The water-based cleaning treatment system according to the above (1) or (4), wherein the first stage has a configuration for concentrating to a volume of 1/3 or less.

(7) The water-based cleaning treatment system according to (6), wherein the concentrate is concentrated in the cartridge in the final stage.

(8) The aqueous cleaning system according to (7), wherein the cartridge is configured to be detachable from the system.

(9) A washing step of washing an object to be washed such as a machined part or tableware with a washing agent, a washing agent removing step of washing the washing object with water from the washed object to be washed, and the washing agent A drying step of drying the object to be cleaned after the removal, wherein waste water in the cleaning step and / or the cleaning agent removing step is treated with an evaporative concentration distillation apparatus to obtain distilled water, and the distilled water is used as the cleaning agent. A water-based cleaning treatment system configured to be used as cleaning water in a removing step, and wherein a water flow method in the cleaning step and / or the cleaning agent removing step is a counter current method.

(10) The water according to (1) or (9), wherein the water used in the washing step and the detergent removing step is distilled water obtained from the evaporative concentration distillation apparatus. Water-based cleaning treatment system.

(11) When distilled water to be used is insufficient,
The water-based cleaning system according to (1) or (9), wherein water is supplied to a drainage tank that temporarily stores wastewater from the cleaning step and the cleaning agent removing step.

(12) The above (1) or (9), wherein a sterilizing means is provided in a tank for storing distilled water.
2. The water-based cleaning treatment system according to item 1.

(13) a washing step of washing an object to be washed such as a machined part or tableware with a washing agent, a washing agent removing step of washing the washing object with water from the washed object after washing, and the washing agent A water-based cleaning treatment system having a drying step of drying the object to be cleaned after the removal, wherein a pure water producing apparatus is provided, and pure water from the pure water producing apparatus is used as cleaning water in the cleaning agent removing step. ,
A water-based cleaning treatment system, wherein the pure water is heated to at least 50 ° C. to supply water and / or the cleaning water temperature immediately before the drying step is heated to 50 ° C. or more.

(14) The water-based cleaning treatment system according to the above (13), wherein the pure water producing apparatus is an RO membrane filtration system, a heating distillation system or an ion exchange resin system.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a conceptual diagram showing the entire water-based cleaning processing system (hereinafter simply referred to as a cleaning system).

In the figure, reference numeral 1 denotes the entire cleaning system, 2 denotes a concentrated cleaning agent charging section, and 3 denotes a cleaning object (cleaning) such as machined parts or tableware using the cleaning agent supplied from the concentrated cleaning agent charging section 2. This is a cleaning tank for cleaning the object.

Reference numeral 4 denotes a plurality of, for example, three cleaning agent removing tanks (hereinafter simply referred to as removing tanks) which adhere to the surface of the object to be cleaned which has been cleaned in the cleaning step in the cleaning tank 3. A cleaning agent removing step for washing away the cleaning agent that is present.

Reference numeral 5 denotes a drying chamber (drying section) for drying the object to be cleaned after the cleaning agent has been removed in the removing tank, and constitutes a drying step for the object to be cleaned.

The arrow in the removal tank 4 indicates the moving direction of the washing water.

That is, the washing water overflowing from the removal tank 4-3 farthest from the washing tank 3 enters the middle removal tank 4-2, and the washing water overflowing from the removal tank 4-2 is the above-mentioned washing water. The removal tank 4 in the embodiment employs a so-called counter current method so as to enter the removal tank 4-1 closest to the cleaning tank 3.

A part of the washing water in the removing tank 4-1 is returned to the washing tank 3 by a pump P1 at an appropriate timing and at an appropriate timing, and is used as dilution water for the cleaning agent. .

Further, the washing water overflowing from the removal tank 4-1 and the overflow water from the washing tank 3 are:
It is configured to flow through the pipes L1 and L2 and temporarily store it in the drainage tank 6.

Reference numeral 7 denotes an evaporating and concentrating distillation apparatus which evaporates and condenses contaminated washing water and washing water sent from the drainage tank 6 through a pipe L3 to form distilled water, and partially does not evaporate a cleaning agent or the like. It has the function of making the product a concentrate.

Further, the evaporative concentration distillation apparatus is provided with an appropriate container to facilitate handling of the concentrate.

Reference numeral 8 denotes a distilled water tank for storing distilled water sent from the evaporative concentration distillation apparatus 7 through a pipe L4.

The distilled water stored in the distilled water tank 8 is sent through a system-controlled pump P2 and a pipe L4, and the removal tank 4 is provided immediately before the drying chamber 5.
Replenish to -3.

The distilled water tank 8 and the removal tank 4-
H1 and H2 in FIG. 3 are heaters,
The distilled water in the tank and the washing water in the tank 4-3 are appropriately controlled by a control means so as to be heated to 50 ° C. or more.

The heater functions as a sterilizing means for removing microorganisms in water, and is also useful for reducing the amount of water droplets remaining on the surface of the object to be cleaned.

The entire cleaning system has the above-described configuration, and the object to be cleaned is cleaned as follows.

The object to be cleaned introduced into the cleaning tank 3 is cleaned of surface stains by relative movement with a cleaning agent or cleaning water containing the cleaning agent, and then removed in a cleaning agent removing step. It is carried into the tank 4.

Each time the tank is changed to the removal tanks 4-1 to 4-3, the tank is exposed to clean rinsing water (distilled water) and adheres to the surface through relative movement with the rinsing water. The cleaning agent is completely wiped, and is washed with steam (may contain a small amount of boiling water) from the steam generator 10 at 100 ° C. while entering the drying chamber from the removal tank 4-3.

Thereafter, the moisture on the surface is eliminated by a drying step in a drying chamber.

The water overflowing from the washing tank 3 and the removing tank 4 during the above-mentioned washing treatment is stored in a drain tank 6 and is appropriately sent to an evaporating / concentrating / distilling apparatus 7 to be distilled water. Thereafter, returning to the removal tank 4-3,
This circulation is repeated.

That is, the total amount of water used in the present system is distilled water.

If the amount of distilled water to be used is insufficient, including during the above-mentioned washing treatment, the drainage tank 6 provided in front of the evaporative concentration / distillation apparatus 7 is provided with a water supply, as viewed from the circulation path of the distilled water. It is covered by replenishing water.

That is, the replenished tap water is converted into distilled water by the evaporating and concentrating distillation apparatus 7, and then used as washing water.

In the above configuration, the cleaning step of the cleaning tank 3 includes a cleaning step using steam at 100 ° C. or higher.
3 can also be dedicated to 100 ° C steam cleaning. this is,
It is effective for cleaning narrow parts and removing oil stains on the surface of the object to be cleaned.

It is also preferable to combine ultrasonic cleaning in the cleaning step and the cleaning agent removing step, since rapid processing becomes possible.

FIG. 2 shows an evaporative concentration distillation apparatus (pure water production apparatus).
FIG. 7 is a schematic diagram showing an internal configuration of a seventh embodiment.

In the figures, the same components as those described above (means) are denoted by the same reference numerals.

In the figure, reference numeral 700 denotes a cylindrical first container, an upper portion of which has a mist preventing member 701 for preventing mist from entering, and is in communication with the drainage tank 6 via a pipe L3.

D1 is a first solenoid valve provided in the pipe L3.

The lower part of the first container 700 communicates via a pipe 703 with a concentrate collecting bag (hereinafter simply referred to as a collecting bag) 707 provided in a box-shaped concentrate collecting means 705.

The concentrate collecting means 705 is configured to move up and down at three stop positions by appropriate moving means, and the collecting bag 707 is detachable from the concentrate collecting means 705. . 1000 denotes a low-temperature heater.

In the middle of the pipe 703, the second electric valve D2
And a branched pipe 709 extends from the upstream side (closer to the first container) of the motor-operated valve D2.

The free end side of the pipe 709 is located at the upper part inside the first container and forms one circulation path. P
A pump 3 is provided on the pipe 709.

Reference numeral 711 denotes a pipe having one end communicating with the collection bag 707 and the other end communicating with a heat absorbing portion 715 provided around the outside of the mist prevention member 701 above the first container 700.

The mist prevention member 701 and the heat absorbing portion 715
Is in a container shape, and is kept sealed with respect to the surroundings by an appropriate lid member.

The communication between the pipes 703 and 711 and the collecting bag 707 is actually performed by the concentrate collecting means 7.
05 is communicated via a lid 706 that seals the opening (opening).

The heat absorbing section 715 has the form of a hollow ring-shaped container, and has a protruding short pipe 717 at a position 180 ° out of phase with the position where the pipe 711 communicates.

The short pipe 717 is connected to one of the aspirators 720.
It is connected (communicated) with one mouth.

Another port of the aspirator 717 is open to the second container 730, and another port is a pipe 73 connected to the bottom of the second container 730.
It is connected to 1.

P4 on the pipe 731 is a pump.

The second container 730 is connected to another pipe L4
The other end of the pipe L4 is connected to the distilled water tank 8.

The free end of the pipe L5 connected to the distilled water tank 8 is open to the removal tank 4-3 as shown in FIG.

The above configuration relates to the flow path of the water to be treated.

Next, the heat pump circuit will be described.

The heat pump circuit includes a heat radiator (also referred to as a heat radiator for convenience) 910 having a compressor 900, a fan 911, and a heat medium (refrigerant) fin 912;
Heat dissipating part arranged in the container (for convenience, also called heat dissipating means)
920, an expansion valve or a capillary tube 930, and a heat absorbing / cooling unit 714 in the second container 730 and the heat absorbing unit (for convenience, also referred to as heat absorbing means) 715 are connected (connected) by a thin hollow pipe 940, and a heat medium And a loop-shaped flow path for the heat medium is formed.

Reference numeral 990 denotes a fan for releasing odor.

The heat absorbing section 715 is in the form of a hollow ring-shaped container as described above, and accommodates a part of the pipe 940 forming the loop-shaped flow path therein.

In such a configuration, when the cleaning process proceeds and the solenoid valve D1 is opened, the first container 700 is contaminated from the cleaning tank 3 or the drainage tank 6 by a pressure reducing means (pressure reducing action) described later. Wash water or the like containing a solvent (hereinafter referred to as dirty water) enters.

The pressure reducing means is provided with the aspirator 72.
0, a second container 730, a pump P3 for circulating water in the second container, and a pipe 73 constituting a circulation path
1.

That is, the water in the second container is pump P
3 and flows into the second container again through the aspirator 720. The flow rate at the time of passing through the aspirator 720 causes the heat absorbing portion 71
5. Concentrate recovery means 705 and mist prevention member 7
The pressure in the first container 700 is reduced through 01.

The contaminated water that has entered the first container 700 circulates through a loop formed by the pump P3 including the first container, releases steam by the heating action of the heat radiating means 920, and is gradually concentrated. Water vapor is a mist prevention member 7
01, reaches the heat absorbing section 715, is cooled and becomes distilled water.

When the concentration progresses, the electric valve D2
Is opened, and the concentrated contaminated water is discharged to the collection bag 707 prepared at the place of the concentrate collection means 705.

It is preferable that the concentration is reduced to 1/3 or less in the first container 700 and discharged to the concentrate collecting means 705, more preferably 1/30 or less.

When the concentration is low, a load is applied to dryness, and the low-temperature heater 1000 becomes insufficient. In order to prevent abnormal heating by the low-temperature heater, the ratio is preferably 1/3 or less.

The concentrated liquid in the collection bag 707 is supplied to the low-temperature heater 1
It is heated at 000 to release water vapor and become dry.
The generated water vapor passes through a pipe 711 and passes through the heat absorbing section 715.
To be distilled water.

As described above, the water vapor content is reduced by the mist prevention member 70.
1 and a pipe 711 to the heat absorbing section, where the water is condensed by the heat absorbing means 715 to become distilled water,
20 and is collected in the second container 730.

The heat medium, which is a factor constituting the heat pump, is converted into a high-pressure gas by the compressor 900 and transferred through the pipe, where the heat radiating portion 910 and the heat radiating portion 92 in the first container are formed.
In the second container 730, the heat absorbing cooling unit 714 and the heat absorbing unit 715 are used for water in the second container 730.
, And repeats returning to the compressor 900.

When the distilled water stored in the second container 730 reaches an appropriate water level, the distilled water is collected in the distilled water tank 8 via the pipe L4, and is then sent to the removal tank as washing water.

As described above, the washing water according to the present invention is entirely covered with distilled water.

In the above, the non-evaporable matter is collected in the collection bag 70.
7 and gradually become a concentrate.

In the process of forming the concentrate, the concentrate collecting means 705 is moved downward step by step by a suitable moving means to increase the degree of concentration, and is taken out at an appropriate timing. The extraction time and the like are obtained from, for example, experimental data.

The apparatus for producing pure water is not limited to the upstream heating system, but may be an RO membrane filtration system or an ion exchange resin system.

As the sterilizing means, as described above, 50
In addition to heating at a temperature of at least ° C, ozone blowing, UV irradiation, or a chlorine-based or bromine-based disinfectant can be used.

[0085]

As described above, the present invention is a water-based cleaning treatment, and almost no watermark is generated.

In addition, since the water is circulated, the amount of water to be used can be reduced, and an environmentally friendly system that does not substantially emit wastewater can be provided.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram showing the entire water-based cleaning treatment system.

FIG. 2 is a schematic diagram showing the internal configuration of the evaporative concentration distillation apparatus 7.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Whole washing | cleaning processing system 2 Thick detergent supply part 3 Cleaning tank 4 Detergent removal tank 5 Drying room 6 Drain tank 7 Evaporative concentration distillation apparatus 8 Distilled water tank 700 1st container 705 Concentrate collection means 707 Concentrate collection bag 703 , 709, 711, 731 Piping 715 Heat absorbing part 720 Aspirator 730 Second container 900 Compressor 910, 920 Heat releasing part 930 Capillary tube 940 Pipe 990 Odor releasing fan

Claims (14)

[Claims] A cleaning step of cleaning an object to be cleaned such as a machined part or tableware with a cleaning agent, a cleaning agent removing step of washing the cleaning object with water from the cleaned cleaning object, and a cleaning agent removing step. A water-based cleaning treatment system having a drying step of drying the object to be cleaned later, wherein the wastewater or tank water in the cleaning step and / or the cleaning agent removing step is treated with an evaporative concentration distillation apparatus to obtain distilled water. A water-based cleaning treatment system, wherein distilled water is used as cleaning water in the cleaning agent removing step. 2. The water-based cleaning treatment system according to claim 1, wherein the entire amount of the cleaning water used in the cleaning agent removing step is distilled water. 3. The water system according to claim 1, wherein the cleaning step includes a cleaning step using steam at 100 ° C. or higher, and the steam has a configuration in which the distilled water is generated by heating the distilled water. Cleaning processing system. 4. The evaporating and concentrating distillation apparatus includes a compressor, a heat radiating means, an expansion valve or a capillary tube, and a heat absorbing means connected in order, and the heat radiating means of a heat pump circuit in which a heat medium is sealed is provided with a washing means for heating concentrated water Used as
The heat absorbing means is used as a cooling means for cooling and liquefying the steam generated from the washing concentrated water, and a communication container for making the heating means and the cooling means in communication with each other, and a pressure reducing means for reducing the pressure of the communication container are provided. The water-based cleaning treatment system according to claim 1, wherein the evaporative concentration distillation apparatus is a pressure-reduction indirect heat pump pressure-reduction-type distillation apparatus. 5. The water-based cleaning system according to claim 4, wherein said heat radiating means is used for heating water in said cleaning step and / or cleaning agent removing step. 6. The heating and evaporating section for washing water of the evaporating and concentrating distillation apparatus is divided into two or more stages, and the washing and condensed water is moved from a first stage to a second stage and thereafter by a transfer means. 5. The water-based cleaning treatment system according to claim 1, wherein the water-based cleaning treatment system has a configuration for concentrating to a volume of 1/3 or less. 7. The water-based cleaning treatment system according to claim 6, wherein the concentrate is concentrated in the cartridge in the final stage. 8. The water-based cleaning treatment system according to claim 7, wherein the cartridge is configured to be detachable from the system. 9. A cleaning step of cleaning an object to be cleaned such as a machined part or tableware with a cleaning agent, a cleaning agent removing step of washing the cleaning object with water from the cleaned cleaning object, and removing the cleaning agent. A drying step of drying the object to be cleaned later, wherein the wastewater in the cleaning step and / or the cleaning agent removing step is treated with an evaporation-concentration distillation apparatus to obtain distilled water, and the distilled water is used to remove the cleaning agent. A water-based cleaning treatment system configured to be used as cleaning water in a process, and wherein a water flow system in the cleaning process and / or the cleaning agent removing process is a counter current system. 10. The water-based cleaning treatment according to claim 1, wherein water used in the cleaning step and the cleaning agent removing step is distilled water obtained from the evaporative concentration distillation apparatus. system. 11. The system according to claim 1, wherein when the amount of distilled water used is insufficient, water is supplied to a drainage tank for temporarily storing wastewater from the washing step and the detergent removing step. Alternatively, the aqueous cleaning treatment system according to claim 9. 12. The water-based cleaning treatment system according to claim 1, wherein a sterilizing means is provided in a tank for storing the distilled water. 13. A cleaning step of cleaning an object to be cleaned such as a machined part or tableware with a cleaning agent, a cleaning agent removing step of washing the cleaning object with water from the cleaned object to be cleaned,
A water-based cleaning treatment system having a drying step of drying the object to be cleaned after the cleaning agent is removed, wherein a pure water production device is provided, and pure water from the pure water production device is used as cleaning water in the cleaning agent removal process. A water-based cleaning treatment system for use, wherein the pure water is heated to at least 50 ° C. or more to supply water and / or the washing water temperature immediately before the drying step is heated to 50 ° C. or more. 14. The water-based cleaning treatment system according to claim 13, wherein the pure water production apparatus is an RO membrane filtration system, a heating distillation system, or an ion exchange resin system.