JP3598287B2 - Cleaning equipment - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a cleaning device for cleaning electronic components and mechanical components, and more particularly to a cleaning device having a very small device configuration and high liquid recovery efficiency.
[0002]
[Prior art]
The applicant first has a cleaning tank and a storage tank communicating with each other through an on-off valve, a vacuum pump capable of reducing the pressure of the cleaning tank and the storage tank to a predetermined level, and constantly heating the cleaning liquid introduced from the storage tank. A single-tank-type cleaning apparatus including a steam generation tank and a distillation / regeneration unit for supplying a cleaning liquid liquefied by a condensation mechanism to a storage tank is proposed and patented (Japanese Patent No. 2990289).
[0003]
Here, the distillation regeneration section is, specifically, a separation tank for the distilled and regenerated cleaning liquid, a circulation pump that forms a circulation path for the cleaning liquid including the separate tank, and an ejector disposed in the circulation path for the cleaning liquid. It is configured. The cleaning vapor that has passed through the condensing mechanism is sucked from the ejector together with the condensed cleaning liquid, is integrated with the cleaning liquid, and is collected in the separate tank, so that it is efficiently collected. In addition, the operation of the vacuum pump is advantageous in that the supply and drainage of the cleaning tank and the storage tank, steam cleaning in the cleaning tank, and vacuum drying of the object to be cleaned can be realized.
[0004]
[Problems to be solved by the invention]
However, if the components can be made more compact and the recovery rate of the cleaning liquid can be improved, the completeness of the apparatus will be further enhanced. The present invention is based on the above idea, and an object of the present invention is to provide a cleaning apparatus in which the size of constituent members is reduced and the collection efficiency of the cleaning liquid is extremely improved.
[0005]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, the present inventor has made various investigations in an apparatus configuration such as Japanese Patent No. 2990289, focusing on a decompression line for realizing low-temperature boiling and a vacuum line for realizing high-speed vacuum drying. As a result, the present invention has been completed in which the device configuration can be made extremely compact.
[0006]
That is, the present invention provides a cleaning tank capable of realizing steam cleaning and vacuum drying, a storage tank for storing the cleaning liquid, a steam generation tank for boiling the cleaning liquid in a reduced pressure state, and introducing the cleaning steam into the liquid. A recovery tank for recovery, and a vacuum pump for appropriately depressurizing the respective parts are provided. The cleaning tank is connected to a suction port of the vacuum pump, and the recovery tank is opened to the atmosphere and discharged from the vacuum pump. The cleaning apparatus according to claim 1, further comprising a vacuum drying operation for introducing the cleaning steam to be introduced into the cleaning liquid in the recovery tank .
[0007]
In the cleaning device, in a state where the steam generation tank and the recovery tank are in communication with each other, the pressure of the recovery tank is reduced by the vacuum pump, and the cleaning steam from the steam generation tank is fed into the cleaning liquid in the recovery tank. It is preferable to provide a distillation regeneration operation to be introduced into the apparatus.
[0008]
Further, the cleaning device may further include, while the steam generation tank, the cleaning tank, and the recovery tank are in communication with each other, reducing the pressure of the recovery tank by the vacuum pump, and removing the cleaning steam from the steam generation tank to the recovery tank. It is preferable to provide a steam cleaning operation for introducing the cleaning liquid into the cleaning liquid.
[0009]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described in more detail with reference to the embodiment shown in FIG. The illustrated cleaning apparatus EQ includes a cleaning tank 1 for realizing a series of cleaning operations from immersion cleaning to vacuum drying, a storage tank 2 for storing a cleaning liquid, a steam generation tank 3 for boiling the cleaning liquid in a reduced pressure state, A recovery tank 4 for recovering the cleaning steam by liquid replacement, a vacuum pump 5 for appropriately reducing the pressure in each of the above-described sections, and control valves (not shown) for operating the open / close valves V1 to V12 and the open / close valves V1 to V12 at appropriate timing. It is composed mainly of parts.
[0010]
The recovery tank 4 is a characteristic part of the present embodiment in which the cleaning liquid is recovered by liquid replacement. The recovery tank 4 has a cooling coil 6 externally or internally provided, and cools the inside of the recovery tank 4 to a temperature sufficient to liquefy the cleaning liquid. A diffuser 7 into which the cleaning steam is introduced is provided inside the recovery tank 4. The air diffuser 7 has a large number of fine holes formed therein, and the gas containing the introduced cleaning vapor is released as fine bubbles into the cleaning liquid. The released cleaning vapor is integrated with the surrounding cleaning liquid and liquefied, but the other gases float as they are and are separated from the cleaning liquid (liquid replacement). The air diffuser 7 is connected to the steam generating tank 3 through the on-off valve V2, is connected to the cleaning tank 1 through the on-off valve V4, and is connected to the discharge port of the vacuum pump 5 through the on-off valve V11.
[0011]
The collection tank 4 having such a diffuser 7 is connected to a suction port of a vacuum pump 5 through an on-off valve V8, and a discharge port of the vacuum pump 5 is opened to the atmosphere through an on-off valve 12. Then, the opening and closing operation of the leak valve V13 provided in the collection tank 4 keeps the collection tank 4 in a predetermined reduced pressure state. The recovery tank 4 is also provided with an on-off valve V9, and the recovery tank 4 is opened to the atmosphere as needed. The recovery tank 4 is provided with a float switch FS. When the cleaning liquid increases and the liquid level rises, the float switch FS is turned on.
[0012]
Other configurations are similar to those of the conventional device. The cleaning tank 1 is a part that receives a workpiece to be cleaned and realizes immersion cleaning, steam cleaning, and vacuum drying, and includes an ultrasonic oscillator therein. The cleaning tank 1 is connected to the steam generation tank 3 through the on-off valve V1 and is connected to the storage tank 2 through the on-off valve V3, so that the cleaning steam and the cleaning liquid are introduced at a required timing. Further, the cleaning tank 1 is connected to a suction port of the vacuum pump 6 through an on-off valve V10, and when the on-off valve V10 is open, the inside thereof is set to a required reduced pressure state. On the other hand, the cleaning tank 1 is also provided with an on-off valve V7, which is opened to the atmosphere as needed.
[0013]
The storage tank 2 is a part that receives the cleaning liquid collected in the recovery tank 4 and supplies the cleaning liquid to the cleaning tank 1 and the liquid level adjusting tank 8 as necessary. The storage tank 2 is provided with a cleaning liquid circulation path including an on-off valve V5, a circulation pump P, and a filtration filter F so that the cleaning liquid in the storage tank 2 is circulated and impurities are captured by the filter F. Has become. Further, the suction port of the circulation pump P is also connected to the recovery tank 4 through the on-off valve V6, and the cleaning liquid is introduced from the recovery tank 4 into the storage tank 2.
[0014]
The on-off valve V6 operates based on the ON / OFF output of the float switch FS of the recovery tank 4. That is, while the liquid level of the cleaning liquid in the recovery tank 4 is low, the float switch FS is in the OFF state, and only the on-off valve V5 is opened to circulate the cleaning liquid. When turned on, the on-off valve V6 is opened for a predetermined time, and the cleaning liquid in the recovery tank 4 is moved to the storage tank 2. When the on-off valve V6 is opened, the on-off valve V5 may be closed.
[0015]
The steam generation tank 3 is a distillation still for boiling the cleaning liquid under reduced pressure, and has a heating mechanism 9 for heating the cleaning liquid in accordance with the boiling point of the cleaning liquid under a predetermined reduced pressure. The type of the cleaning liquid is not particularly limited, but a hydrocarbon solvent that is a flammable liquid can be used. The steam generating tank 3 communicates with a liquid level adjusting tank 8, and the liquid level is adjusted by a ball tap type float provided in the liquid level adjusting tank. Specifically, when the liquid level falls below a predetermined level, the on-off valve BT is automatically opened and the cleaning liquid is replenished from the storage tank 2.
[0016]
Next, the operation of the cleaning apparatus having the above configuration will be described.
[Distillation regeneration operation (see FIG. 2)]
The on-off valves V1, V3, V4, V9, V10, and V11 are in a closed state, while the on-off valves V2, V8, and V12 are in an open state. The pressure is reduced (FIG. 2). Since the recovery tank 4 is provided with a leak valve V13 for adjusting the pressure, the steam generation tank 3 can be set to an arbitrary pressure according to the characteristics of the cleaning liquid, and the cleaning liquid is set to an arbitrary boiling temperature. can do.
[0017]
On the other hand, the heating mechanism 9 of the steam generation tank 3 heats the cleaning liquid in accordance with the set boiling temperature, and the cleaning liquid in the steam generation tank 3 is always in a boiling state. Therefore, the cleaning steam obtained by boiling passes through the on-off valve V2 and is introduced into the air diffuser 7. The cleaning steam introduced into the diffuser 7 floats in the cleaning liquid in the recovery tank 4 as fine bubbles, but since the cleaning liquid in the recovery tank 4 is cooled to a predetermined temperature, the cleaning vapor is liquefied during the floating process. It is integrated with the cleaning liquid in the recovery tank 4.
[0018]
As described above, the cleaning liquid in the steam generation tank 3 is purified during the process of boiling and liquefaction and recovery in the recovery tank 4. Can be realized. In addition, since a highly efficient liquid replacement method is employed, about 99% of the liquid can be regenerated, and waste of the cleaning liquid is eliminated.
[0019]
In addition, the cleaning liquid in the steam generation tank 3 decreases and the cleaning liquid in the recovery tank 4 increases by this distillation regeneration operation. However, when the float switch FS is turned on, the cleaning liquid in the recovery tank 4 is supplied to the storage tank via the on-off valve V6. Transferred to 2. Further, the lowering of the liquid level in the steam regeneration tank 3 is detected by the liquid level adjustment tank 8, and the cleaning liquid is supplied from the storage tank 2 by opening the on-off valve BT.
[0020]
[Immersion cleaning (see Fig. 3)]
The cleaning operation of the workpiece to be cleaned can be started while performing the above-described distillation regeneration. After the cleaning tank 1 is opened and the work to be cleaned is loaded, the on-off valve V10 is opened while the on-off valves V1, V3, V4, V7 are closed. Then, the inside of the cleaning tank 1 is evacuated (preliminarily depressurized) by the operation of the vacuum pump 5 ((1) evacuation operation). When the pressure of the cleaning tank 1 is reduced to a predetermined level, the on-off valve V3 is subsequently opened. I do. Then, since the cleaning liquid in the storage tank 2 is introduced into the cleaning tank via the on-off valve V3 ((2) introduction operation), the on-off valve V3 and the on-off valve V10 are closed at an appropriate timing.
[0021]
After the above preparation, the ultrasonic oscillator is operated to perform ultrasonic cleaning ((3) ultrasonic cleaning). Ultrasound generally means a sound wave of 20 kHz or more. Using such a high-frequency sound wave to vibrate water or a solvent, it is necessary to clean a complicated shape or safely wash a fragile object. Ultrasonic cleaning. It is said that there are three effects of ultrasonic cleaning: cavitation, acceleration of water molecules, etc., and promotion of physical and chemical reactions such as minute signals of the object to be cleaned. It is said to be expensive.
[0022]
Cavitation is an infinite number of cavities generated when a pressure of a predetermined level or more is applied to a cleaning liquid, and bubbles such as dissolved oxygen are generated as nuclei. And, in the cleaning liquid, since the ultrasonic signal forms a standing wave, countless cavitations generated at the position of the ultrasonic signal of large amplitude are destroyed inward during the floating process, and the strong impact force at this time is reduced. It will exert a cleaning action.
[0023]
When the ultrasonic cleaning is completed by the above operation, as shown in FIG. 4, the on-off valves V7 and V3 are opened with the on-off valve V10 closed. Then, since the cleaning tank 1 is brought into the atmospheric pressure state, the cleaning liquid inside is collected in the storage tank 2 by its own weight.
[0024]
[Steam cleaning operation (see Fig. 5)]
Subsequently, the on-off valve V4 is opened while the on-off valves V1, V3, V7, V10 are closed, and the cleaning tank 1 is put in a reduced pressure state. When the pressure in the cleaning tank 1 is reduced to about the same level as the pressure in the steam generating tank 3, the on-off valve V1 is opened as shown in FIG.
[0025]
Then, the cleaning steam introduced from the steam generating tank 3 is condensed by coming into contact with the workpiece to be cleaned, and the condensed cleaning liquid is condensed to realize the final cleaning of the workpiece to be cleaned. At this time, the cleaning steam that has not been condensed passes through the on-off valve V4, is introduced into the diffuser 7, and is liquefied and recovered in the process of floating as bubbles.
[0026]
As a result of the above operation, when the steam cleaning is completed, the on-off valve V1 is closed, and the cleaning steam in the cleaning tank 1 is discharged. It is preferable that the on-off valve V2 be kept closed during the steam cleaning operation.
[0027]
[Vacuum drying operation (see Fig. 6)]
Subsequently, all of the on-off valves V1, V4, V8 and V12 are closed, while all of the on-off valves V10, V11 and V9 are opened (FIG. 6). The on-off valves V2, V3, and V7 are all closed. Then, since the pressure in the cleaning tank 1 is rapidly reduced, the cleaning liquid that wets the surface of the work to be cleaned is vaporized and is contained in the cleaning liquid through the path of the on-off valve V10 → the vacuum pump 5 → the on-off valve V11 → the diffuser 7. Will be introduced. Then, it is liquefied and collected in the process of floating as bubbles, and the other gases are discharged through the on-off valve V9.
[0028]
As described above, according to the configuration of the present embodiment, liquid recovery during vacuum drying is also realized in the recovery tank 4, so that there is no need to provide a special cold trap device as in the related art.
[0029]
As described above, the cleaning apparatus according to the embodiment employs a method in which cleaning steam is introduced into the cooled cleaning liquid during distillation regeneration, steam cleaning, and recovery of the cleaning liquid during vacuum drying. The efficiency of vapor liquefaction has been improved, and it has become possible to minimize the consumption of the cleaning liquid. In addition, since a reduced pressure line for realizing low-temperature boiling of the cleaning liquid and a vacuum line for high-speed vacuum drying are shared, manufacturing costs can be reduced and the installation space can be minimized.
[0030]
The contents specifically described in the embodiments do not particularly limit the present invention, and various modifications can be made without departing from the gist of the present invention. That is, the gist of the present invention resides in that a pressure reducing line for realizing low-temperature boiling of the cleaning liquid and a vacuum line for realizing high-speed vacuum drying are shared, and the other parts can be appropriately changed.
[0031]
【The invention's effect】
As described above, according to the present invention, it is possible to realize a cleaning apparatus in which the constituent members are made compact and the collection efficiency of the cleaning liquid is extremely improved.
[Brief description of the drawings]
FIG. 1 is a block diagram illustrating a cleaning apparatus according to an embodiment.
FIG. 2 is a diagram illustrating a distillation regeneration operation.
FIG. 3 is a diagram illustrating an operation of immersion cleaning.
FIG. 4 is a view for explaining a cleaning liquid discharging operation.
FIG. 5 is a diagram illustrating an operation of steam cleaning.
FIG. 6 is a diagram illustrating an operation of vacuum drying.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Cleaning tank 2 Storage tank 3 Steam generation tank 4 Recovery tank 5 Vacuum pump

Claims (3)

A cleaning tank capable of realizing steam cleaning and vacuum drying, a storage tank for storing the cleaning liquid, a steam generating tank for boiling the cleaning liquid in a reduced pressure state, and a recovery tank for introducing and collecting the cleaning steam into the liquid, A vacuum pump for appropriately reducing the pressure of each section, connecting the suction port of the vacuum pump with the cleaning tank , opening the recovery tank to the atmosphere, and discharging the cleaning steam discharged from the vacuum pump to the A cleaning apparatus comprising a vacuum drying operation for introducing a cleaning liquid into a recovery tank. In a state in which the steam generation tank and the recovery tank are in communication with each other, distillation regeneration is performed while introducing the cleaning steam from the steam generation tank into the cleaning liquid in the recovery tank while depressurizing the recovery tank by the vacuum pump. The cleaning device according to claim 1, further comprising an operation. In a state where the steam generation tank, the cleaning tank, and the recovery tank are in communication with each other, the pressure of the recovery tank is reduced by the vacuum pump, and the cleaning steam from the steam generation tank is introduced into the cleaning liquid in the recovery tank. cleaning apparatus according to claim 1 or 2, characterized in that it comprises a steam washing operation for introducing. "

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