JP2554017B2 - Cleaning method and cleaning device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning method and a cleaning apparatus, and more particularly, to cleaning various parts and products (objects to be cleaned) such as electronic parts and mechanical parts using a hydrocarbon-based cleaning liquid. The present invention relates to a cleaning method and a cleaning device.

[0002]

2. Description of the Related Art
Freon-based cleaning liquids and chlorine-based solvents such as trichloroethane have been used as industrial cleaning liquids for cleaning electronic components and mechanical components. However, these industrial cleaning liquids have problems that they cause destruction of the ozone layer, pollution of groundwater, or deterioration of working environment.
Its use is being regulated. Therefore, in recent years, a method using a hydrocarbon-based cleaning liquid as another cleaning liquid has been proposed,
It has been implemented.

In order to perform more effective cleaning using a hydrocarbon-based cleaning liquid, a method of cleaning while applying ultrasonic vibration or rocking has been proposed and implemented.

However, even in this cleaning method, a sufficient cleaning effect may not always be obtained depending on the type of the object to be cleaned, and a cleaning method having excellent cleaning efficiency is required.

The present invention meets the above-mentioned demands, and an object of the present invention is to provide a cleaning method and a cleaning apparatus capable of efficiently cleaning an object to be cleaned using a hydrocarbon-based cleaning liquid.

[0006]

In order to achieve the above object, the cleaning method of the present invention is a cleaning method for cleaning an object to be cleaned using a hydrocarbon-based cleaning liquid, wherein the cleaning tank containing the cleaning liquid contains gas. In the rinse cleaning and heating process, the object to be cleaned is held in the phase and the cleaning solution vapor is supplied to the gas phase of the cleaning tank under vacuum (reduced pressure) to heat the object to be cleaned while performing rinse cleaning. The degree of vacuum in the cleaning tank is raised above the degree of vacuum in the rinse cleaning / heating step, and the object to be cleaned that has been heated to a predetermined temperature is immersed in the cleaning liquid in the cleaning tank and heated. It is characterized by including an immersion cleaning step of cleaning by bubbling a cleaning liquid from the surface of the object to be cleaned.

Further, in the immersion cleaning step of the above-mentioned cleaning method, rocking cleaning for rocking and cleaning the object to be cleaned in the cleaning liquid and ultrasonic vibration cleaning for applying ultrasonic vibration to the cleaning are performed. Is characterized by. In the cleaning method of the present invention, swinging is a broad concept including vibration, shaking, rotation and the like.

After the cleaning, the method further includes a drying step of removing the cleaning liquid adhering to the cleaning target by pulling the cleaning target from the cleaning liquid in the cleaning tank into the gas phase and vacuum suction. It has a feature.

Further, in the rinse cleaning / warming step and the drying step, the cleaning solution vapor discharged from the cleaning tank is guided to a cooler without condensing low boiling point substances such as water in the dirty cleaning solution. It is characterized in that it is recovered as a regenerated cleaning liquid by being cooled to a temperature at which it can be evacuated as a gas and condensed.

Further, the cleaning apparatus of the present invention is a cleaning apparatus for carrying out the above-mentioned cleaning method, which comprises a cleaning tank for containing a hydrocarbon-based cleaning liquid for cleaning an object to be cleaned, and an object to be cleaned. An elevating means for immersing in the cleaning liquid in the cleaning tank or pulling it up from the cleaning liquid; an evaporation tank for heating and evaporating the cleaning liquid to supply the cleaning liquid vapor to the gas phase side of the cleaning tank; and a vacuum line for the cleaning tank. A vacuum suction means for vacuum-sucking the inside of the system to a predetermined degree of vacuum connected via a vacuum line and a vacuum line between the cleaning tank and the vacuum suction means, and discharging from the cleaning tank. The cleaning liquid vapor is cooled to a predetermined temperature to be condensed, and a cooler for guiding and cooling the cleaning liquid in the cleaning tank is provided if necessary.

In the present invention, the object to be cleaned is a concept including not only the object to be cleaned but also the object to be cleaned placed in a cleaning jig such as a cleaning basket.

[0012]

[Function] In the rinse cleaning / warming process, the object to be cleaned held in the gas phase of the cleaning tank containing the cleaning liquid is heated to a predetermined temperature while being rinsed by the cleaning liquid vapor under vacuum (reduced pressure). Be warmed. In the immersion cleaning step, the cleaning object heated in the cleaning tank is heated to a predetermined temperature while the degree of vacuum is higher than that in the rinse cleaning / heating step (that is, the boiling point of the cleaning liquid is lowered). When the cleaning liquid is immersed in the cleaning liquid, the cleaning liquid boils on the surface of the object to be cleaned.

As described above, in the cleaning method of the present invention, the rinse cleaning, the heating of the object to be cleaned and the immersion cleaning (boiling bubbling cleaning) are efficiently combined, and the ordinary rinse cleaning and immersion cleaning are performed. Dirt not removed by the cleaning method can be removed by boiling bubbling cleaning so that the object to be cleaned can be cleaned extremely efficiently.

Further, in the immersion cleaning step, the cleaning efficiency is further improved by performing rocking cleaning for rocking and cleaning the object to be cleaned in the cleaning liquid and ultrasonic vibration cleaning for applying ultrasonic vibration. Can be further improved.

The rocking cleaning and ultrasonic vibration cleaning may be carried out simultaneously or separately.

Further, after the cleaning, the object to be cleaned is pulled up from the cleaning liquid in the cleaning tank into the gas phase, vacuum-sucked, and a drying step of evaporating and removing the cleaning liquid adhering to the object to be cleaned is combined, It is possible to consistently carry out the process from cleaning to drying of the object to be cleaned in one cleaning tank.

Further, the cleaning liquid vapor discharged from the cleaning tank is guided to a cooler, and is cooled and condensed to a temperature at which it can be evacuated as a gas without condensing low boiling point substances such as water. This makes it possible to collect a clean regenerated cleaning liquid that does not contain water in the dirty cleaning liquid.

Further, a cleaning tank for containing a hydrocarbon-based cleaning liquid for cleaning the object to be cleaned, an elevating means for the object to be cleaned, and an evaporator for evaporating the cleaning liquid to supply the cleaning liquid vapor to the gas phase side of the cleaning tank The tank, a vacuum suction means for vacuuming the inside of the system to a predetermined vacuum degree, the cleaning liquid vapor discharged from the cleaning tank is cooled to a predetermined temperature and condensed, and if necessary, the inside of the cleaning tank By using a cleaning device that is combined with a cooler that guides and cools the cleaning liquid, the cleaning method of the present invention can be reliably performed, and the cleaning method of the present invention can be effectively implemented.

[0019]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a cleaning apparatus used for carrying out a cleaning method according to an embodiment of the present invention.

In this cleaning apparatus, a cleaning tank (cleaning / drying tank) 2 for cleaning and drying an object to be cleaned and a cleaning jig 3 containing an object to be cleaned (not shown) are used as a cleaning liquid 1 in the cleaning tank 2. Connected via a vacuum line 6 to a cleaning tank 2 and an elevating means 4 for immersing and lifting the cleaning solution 1, an evaporation tank 5 for heating and evaporating the cleaning solution 1 to supply cleaning solution vapor to the gas phase side of the cleaning tank 2, and a cleaning tank 2. Also, a vacuum suction means 7 for vacuum suctioning the inside of the system to a predetermined vacuum degree, a cleaning liquid vapor disposed in the vacuum line 6 between the cleaning tank 2 and the vacuum suction means 7, and discharged from the cleaning tank 2. Cooler 8 that cools and condenses the liquid to a predetermined temperature and guides and cools the cleaning liquid 1 in the cleaning tank 2 as necessary.
It is configured with.

Further, the cleaning tank 2 has a vacuum shutter 9 which is opened and closed when the cleaning jig 3 is taken in and out, and the cleaning jig 3
A cleaning table 10 for mounting and fixing the cleaning jig 3 in the cleaning tank 2
A rotary oscillating means 11 for rotating and oscillating the ultrasonic wave, and an ultrasonic vibrator 12 for ultrasonic vibration cleaning are provided. The ultrasonic vibrator 12 is arranged so as to be submerged in water that is placed in a vibrator tank 12 a provided on the lower surface side of the cleaning tank 2. Further, the cleaning tank 2 is provided with a pipe 1 for supplying the cleaning solution 1 overflowed and the cleaning solution vapor generated in the evaporation tank 5.
3, a pipe 15 for supplying nitrogen for breaking the vacuum of the cleaning tank 2 is connected, and the pipe 13 and the pipe 15 are connected to the valve 1 respectively.
4, a valve (nitrogen supply valve) 16 is provided.

Further, in the evaporation tank 5, a steam heater 17 for heating and evaporating the cleaning liquid, a liquid level control alarm device 2 are provided.
0 is set.

Further, in this cleaning device, a circulation pump 18 for sending the cleaning liquid to the cooler 8 for cooling and circulating the cleaning liquid,
It is equipped with a filter 19 for separating and removing solids in the cleaning liquid, and a control alarm instrument for controlling vacuum, temperature, liquid level, etc., and a connecting pipe nozzle for cleaning liquid, waste liquid, tap water, etc. Has been done.

Next, a procedure for cleaning an object to be cleaned using the above cleaning device will be described. However, the object to be cleaned, the cleaning jig, the cleaning liquid, the processing amount, and the like are as follows. Object to be cleaned: Lead frame for electronic parts Cleaning jig: Rectangular cage Cleaning liquid: Hydrocarbon cleaning liquid Treatment amount: 6 Cleaning jig / hr

(1) Close each manual valve. (2) Set each control alarm instrument to the specified condition. (3) The valve 14 between the cleaning tank 2 and the evaporation tank 5 is opened. (4) After the cleaning liquid supply valve 21 is opened, the cleaning liquid is poured into the evaporation tank 5 through the cleaning tank 2 until the upper limit alarm of the liquid level control alarm device 20 of the evaporation tank 5 is issued, and then the cleaning liquid supply valve Two
1 and valve 14 are closed. (5) The cold water supply valve 22 is opened, and cold water is passed through the cooler 8 for cooling. (6) The raising / lowering means 4 of the washing tank 2 is operated to raise the washing table 10 to the upper limit. (7) The vacuum shutter drive motor 9a is operated to open the vacuum shutter 9. (8) The cleaning jig 3 containing the object to be cleaned is placed and fixed on the cleaning table 10. (9) The vacuum shutter drive motor 9a is operated to close the vacuum shutter 9. (10) The vacuum suction means 7 is operated to bring the cleaning tank 2 and the cooler 8 into a vacuum (reduced pressure) (vacuum degree: 30 Torr). (11) The valve 14 between the cleaning tank 2 and the evaporation tank 5 is opened, and the whole system is evacuated (reduced pressure) (degree of vacuum: 30 Torr). (12) The valve 23 between the cleaning tank 2 and the circulation pump 18 and the valve 24 between the circulation pump 18 and the filter 19 are opened. (13) Operate the circulation pump 18 to filter and cool the cleaning liquid. (14) The steam valve 25 is opened, steam is supplied to the steam heater 17 of the evaporation tank 5, the cleaning liquid 1 is heated and evaporated, and the cleaning liquid vapor is supplied into the cleaning tank 2. The washed product (not shown) is heated while being rinsed. (15) After the cleaning table 10 of the cleaning tank 2 reaches a predetermined temperature (at this time, the cleaning object in the cleaning jig 3 is also heated (cleaning object temperature: 75 ° C.)), the cleaning tank The valve 14 between the evaporation tank 5 and the evaporation tank 5 is closed to raise the degree of vacuum in the cleaning tank 2 (for example, the degree of vacuum: 10 Torr), and the elevating means 4 lowers the cleaning table 10 to the lower limit to clean the object to be cleaned. Immersion in the cleaning liquid 1 and immersion cleaning (boiling bubbling cleaning) are performed while boiling bubbling occurs on the surface of the object to be cleaned (the cleaning liquid temperature drops to some extent during this time). (16) Next, the vacuum degree in the cleaning tank 2 is lowered (the vacuum degree 3
(0 Torr), if necessary, the cleaning liquid 1 is guided to the cooler 8 to be cooled to a predetermined temperature, and the rotary rocking means 11 is activated to rock or rotate the cleaning table 10 to perform immersion cleaning for a predetermined time ( Washing liquid temperature: 40 ° C). (17) Then, the vibrator tank 12 containing the ultrasonic vibrator 12
Cold water is supplied to a, and the ultrasonic transducer 12 is submerged and cooled. (18) Stop the rotation oscillating means 11, operate the ultrasonic vibrator 12, and perform ultrasonic vibration cleaning for a predetermined time (cleaning liquid temperature:
40 ° C). (19) Next, the operation of the ultrasonic transducer 12 is stopped, the rotation rocking means 11 is operated, and the cleaning table 10 is rocked. (20) The elevating means 4 is operated to raise the cleaning table 10 to the upper limit, the valve 14 between the cleaning tank 2 and the evaporation tank 5 is opened, and rinse cleaning is performed for a predetermined time (vacuum degree: 30 Torr,
Cleaning solution vapor temperature 75 ° C). (21) After rinsing and cleaning, the valve 14 between the cleaning tank 2 and the evaporation tank 5 is closed, the vacuum control valve 26 is fully opened, and the cleaning tank 2 is further vacuum-sucked (vacuum degree: 5 Torr). Vacuum drying for an hour (temperature of the object to be cleaned: 75 ° C → approx. 50)
° C). (22) After the completion of drying, the vacuum control valve 26 is closed. (23) The nitrogen supply valve 16 is opened, and nitrogen gas is supplied to the cleaning tank 2 until the atmospheric pressure is reached. (24) Open the vacuum shutter 9. (25) Remove the cleaning jig 3 on the cleaning table 10. (26) Another cleaning jig containing an uncleaned cleaning object is placed and fixed on the cleaning table 10. (27) Close the vacuum shutter 9. (28) The vacuum control valve 26 is opened. (29) The valve 14 between the cleaning tank 2 and the evaporation tank 5 is closed. (30) After that, wash and dry by the steps (15) to (29)

When the lower limit alarm or the middle limit alarm of the liquid level control alarm device 20 of the evaporation tank 5 is activated, the vacuum control valve 26 is closed and the nitrogen supply valve 16 is opened, and the cleaning tank 2, The entire system such as the evaporation tank 5 and the cooler 8 is set to the atmospheric pressure, and the cleaning liquid is replenished or the waste liquid is extracted.

When the cleaning device is stopped, each motor is stopped, each valve is closed, and then each part is stopped.

The above procedure is for the case where the bubbling bubbling cleaning is performed only once. However, the rinsing cleaning and the bubbling cleaning can be repeated by repeating the operations (15) to (20). It is possible.

In the cleaning method of the above embodiment,
The cleaning liquid vapor discharged from the cleaning tank 2 is guided to the cooler 8,
Since this is cooled to a predetermined temperature (for example, a vacuum degree of 30 Torr and a temperature of 40 ° C.) that can be evacuated as a gas without condensing a low-boiling substance such as water, it is condensed. It is possible to collect a clean regenerated cleaning liquid that does not contain water in the dirty cleaning liquid.

The present invention is not limited to the above-described embodiments, but specific conditions of the rinse cleaning / heating step and the immersion cleaning step of cleaning by bubbling the cleaning liquid, such as rocking cleaning and super cleaning. With regard to specific conditions such as sonic vibration cleaning or vacuum degree in the drying step, operating conditions of the cooler, and further detailed configuration of the cleaning device for carrying out the cleaning method of the present invention, the scope of the invention Within, it is possible to add various applications and modifications.

[0031]

As described above, in the cleaning method of the present invention, the rinse cleaning, the heating of the object to be cleaned and the immersion cleaning (boiling bubbling cleaning) are efficiently combined,
It is possible to extremely efficiently wash the object to be cleaned by removing the stains that were difficult to remove by the usual cleaning methods such as rinse cleaning and immersion cleaning by boiling bubbling cleaning.

Further, in the immersion cleaning step, by performing rocking cleaning for rocking and cleaning the object to be cleaned in the cleaning liquid and ultrasonic vibration cleaning for applying ultrasonic vibration,
The cleaning efficiency can be further improved.

Further, after the cleaning, the object to be cleaned is lifted from the cleaning liquid in the cleaning tank into the gas phase, vacuum-sucked, and a drying process of evaporating and removing the cleaning liquid adhering to the object to be cleaned is combined, It is possible to consistently carry out the process from cleaning to drying of the object to be cleaned in one cleaning tank.

Further, the cleaning liquid vapor discharged from the cleaning tank is guided to a cooler, and is cooled and condensed to a temperature at which it can be vacuum-exhausted as a gas without condensing a low boiling point substance such as water. This makes it possible to collect a clean regenerated cleaning liquid that does not contain water in the dirty cleaning liquid.

Further, a cleaning tank for containing a hydrocarbon-based cleaning liquid for cleaning the object to be cleaned, an elevating means for the object to be cleaned, an evaporation tank for evaporating the cleaning liquid and supplying it to the gas phase side of the cleaning tank, By using a cleaning device that combines a vacuum suction means for vacuuming the inside of the system to a predetermined vacuum degree and a cooler that cools and condenses the cleaning liquid vapor discharged from the cleaning tank to a predetermined temperature, The cleaning method of the invention of the present application can be surely carried out and effectively produced.

[Brief description of drawings]

FIG. 1 is a diagram showing an example of a cleaning apparatus used to carry out a cleaning method of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Cleaning liquid 2 Cleaning tank (cleaning / drying tank) 3 Cleaning jig 4 Elevating means 5 Evaporating tank 7 Vacuum suction means 8 Cooler 9 Vacuum shutter 10 Cleaning table 11 Rotating rocking means 12 Ultrasonic transducer 17 Steam heater 18 Circulating pump 19 Filter 20 Liquid level control alarm

Continuation of front page (56) Reference JP-A-3-30329 (JP, A) JP-A-3-30330 (JP, A) JP-A-3-89984 (JP, A) JP-A-56-115676 (JP , A) JP 54-113965 (JP, A) JP 59-73090 (JP, A) JP 63-310683 (JP, A) JP 5-123658 (JP, A) JP 5-179473 (JP, A) JP 63-122222 (JP, A) JP 61-221387 (JP, A) JP 61-154130 (JP, A) JP 64-38182 (JP, A) JP-A-4-326971 (JP, A) JP-A-3-293072 (JP, A) JP-A-3-200327 (JP, A) Actually open 1-179784 (JP, U) Actually open 3 -128478 (JP, U) JP-B 51-16589 (JP, B1) JP-B 3-31111 (JP, B2) JP-B 61-9600 (JP, B2) JP-B 60-45956 (JP, B2) ) JP-B 7-57913 (JP, B2) JP-B 3-49633 (JP, B2) JP-B 1-4616 2 (JP, B2) Japanese Patent 6-11435 (JP, B2) Actual Public 63-10849 (JP, Y2) Actual Public 6-4954 (JP, Y2) Actual Public 6-4953 (JP, Y2) Actual Kohei 7-5841 (JP, Y2)

Claims (5)

(57) [Claims] 1. A cleaning method for cleaning an object to be cleaned using a hydrocarbon-based cleaning liquid, wherein the object to be cleaned is held in a gas phase of a cleaning tank containing the cleaning liquid, and the cleaning tank is kept under vacuum (reduced pressure). The rinse cleaning / warming process of supplying cleaning liquid vapor into the vapor phase of the product to heat the object to be cleaned while performing rinse cleaning, and the degree of vacuum in the cleaning tank from the vacuum of the rinse cleaning / heating process. An immersion cleaning process in which the object to be cleaned that has been raised and heated to a predetermined temperature is immersed in the cleaning solution in the cleaning tank, and the cleaning solution is boiled and bubbling from the surface of the heated object to be cleaned. A cleaning method comprising: 2. The immersion cleaning step of the cleaning method according to claim 1, further comprising rocking cleaning for rocking and cleaning an object to be cleaned in a cleaning liquid, and ultrasonic vibration for applying ultrasonic vibration for cleaning. A cleaning method comprising performing cleaning. 3. A drying step of evaporating and removing the cleaning liquid adhering to the cleaning target by pulling the cleaning target after cleaning from the cleaning liquid in the cleaning tank into the gas phase and vacuum suction The cleaning method according to claim 1 or 2, which is characterized. 4. In the rinse cleaning / warming step and the drying step, the cleaning solution vapor discharged from the cleaning tank is guided to a cooler without condensing a low boiling point substance such as water in the dirt cleaning solution. 4. The cleaning method according to claim 1, wherein the cleaning liquid is recovered as a regenerated cleaning liquid by being cooled to a temperature at which it can be evacuated and condensed. 5. A cleaning apparatus for carrying out the cleaning method according to claim 1, wherein the cleaning tank contains a hydrocarbon-based cleaning liquid for cleaning the cleaning target, and the cleaning target. Is an elevating means for immersing the cleaning solution in the cleaning solution in the cleaning tank or lifting it from the cleaning solution; an evaporation tank for heating and evaporating the cleaning solution to supply the cleaning solution vapor to the gas phase side of the cleaning tank; and a vacuum for the cleaning tank. A vacuum suction unit connected via a line for vacuum suctioning the inside of the system to a predetermined vacuum degree, and a vacuum line between the cleaning tank and the vacuum suction unit. A cleaning device comprising: a cooler that cools and condenses the discharged cleaning liquid vapor to a predetermined temperature, and guides and cools the cleaning liquid in the cleaning tank as needed.