JPH0310092B2 - - Google Patents
Info
- Publication number
- JPH0310092B2 JPH0310092B2 JP57014551A JP1455182A JPH0310092B2 JP H0310092 B2 JPH0310092 B2 JP H0310092B2 JP 57014551 A JP57014551 A JP 57014551A JP 1455182 A JP1455182 A JP 1455182A JP H0310092 B2 JPH0310092 B2 JP H0310092B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- atoms
- layer region
- gas
- amorphous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010410 layer Substances 0.000 claims description 214
- 125000004429 atom Chemical group 0.000 claims description 52
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 39
- 125000005843 halogen group Chemical group 0.000 claims description 28
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 25
- 239000000470 constituent Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 11
- 239000002344 surface layer Substances 0.000 claims description 8
- 230000000737 periodic effect Effects 0.000 claims description 4
- 239000011159 matrix material Substances 0.000 claims description 2
- 230000001747 exhibiting effect Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 78
- 239000002994 raw material Substances 0.000 description 24
- 238000000034 method Methods 0.000 description 22
- 229910021417 amorphous silicon Inorganic materials 0.000 description 16
- 239000007858 starting material Substances 0.000 description 14
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 13
- -1 polyethylene Polymers 0.000 description 13
- 238000004544 sputter deposition Methods 0.000 description 12
- 238000000151 deposition Methods 0.000 description 11
- 230000008021 deposition Effects 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 8
- 150000003377 silicon compounds Chemical class 0.000 description 7
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 150000002366 halogen compounds Chemical class 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 3
- 206010034972 Photosensitivity reaction Diseases 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 150000004820 halides Chemical class 0.000 description 3
- 150000002367 halogens Chemical class 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910001120 nichrome Inorganic materials 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000036211 photosensitivity Effects 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052990 silicon hydride Inorganic materials 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229910052720 vanadium Inorganic materials 0.000 description 3
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- 206010047571 Visual impairment Diseases 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 2
- 229910052794 bromium Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000003085 diluting agent Substances 0.000 description 2
- WFPZPJSADLPSON-UHFFFAOYSA-N dinitrogen tetraoxide Chemical compound [O-][N+](=O)[N+]([O-])=O WFPZPJSADLPSON-UHFFFAOYSA-N 0.000 description 2
- LZDSILRDTDCIQT-UHFFFAOYSA-N dinitrogen trioxide Inorganic materials [O-][N+](=O)N=O LZDSILRDTDCIQT-UHFFFAOYSA-N 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229920003002 synthetic resin Polymers 0.000 description 2
- 239000000057 synthetic resin Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 229910021617 Indium monochloride Inorganic materials 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 229910003691 SiBr Inorganic materials 0.000 description 1
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- 229910004014 SiF4 Inorganic materials 0.000 description 1
- 241000519995 Stachys sylvatica Species 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- UORVGPXVDQYIDP-UHFFFAOYSA-N borane Chemical compound B UORVGPXVDQYIDP-UHFFFAOYSA-N 0.000 description 1
- 229910010277 boron hydride Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- ZWWCURLKEXEFQT-UHFFFAOYSA-N dinitrogen pentaoxide Chemical compound [O-][N+](=O)O[N+]([O-])=O ZWWCURLKEXEFQT-UHFFFAOYSA-N 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical compound [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- APHGZSBLRQFRCA-UHFFFAOYSA-M indium(1+);chloride Chemical compound [In]Cl APHGZSBLRQFRCA-UHFFFAOYSA-M 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- PNDPGZBMCMUPRI-UHFFFAOYSA-N iodine Chemical compound II PNDPGZBMCMUPRI-UHFFFAOYSA-N 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004452 microanalysis Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- GBECUEIQVRDUKB-UHFFFAOYSA-M thallium monochloride Chemical compound [Tl]Cl GBECUEIQVRDUKB-UHFFFAOYSA-M 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- ZQTYRTSKQFQYPQ-UHFFFAOYSA-N trisiloxane Chemical compound [SiH3]O[SiH2]O[SiH3] ZQTYRTSKQFQYPQ-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G5/00—Recording members for original recording by exposure, e.g. to light, to heat, to electrons; Manufacture thereof; Selection of materials therefor
- G03G5/02—Charge-receiving layers
- G03G5/04—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor
- G03G5/08—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic
- G03G5/082—Photoconductive layers; Charge-generation layers or charge-transporting layers; Additives therefor; Binders therefor characterised by the photoconductive material being inorganic and not being incorporated in a bonding material, e.g. vacuum deposited
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Light Receiving Elements (AREA)
- Photoreceptors In Electrophotography (AREA)
Description
æ¬çºæã¯ãå
ïŒããã§ã¯åºçŸ©ã®å
ã§ã玫å€å
ç·ãå¯èŠå ç·ãèµ€å€å ç·ãç·ãγç·çã瀺ãïŒ
ã®æ§ãªé»ç£æ³¢ã«æåæ§ã®ããå å°é»éšæã«é¢ã
ãã åºäœæ®åè£ çœ®ãæãã¯å圢æåéã«ãããé»å
åççšå圢æéšæãåçš¿èªåè£ çœ®ã«ãããå å°é»
å±€ã圢æããå å°é»ææãšããŠã¯ãé«æ床ã§ã
SNæ¯ãå é»æµïŒIpïŒïŒæé»æµïŒIdïŒããé«ããç §
å°ããé»ç£æ³¢ã®ã¹ãã¯ãã«ç¹æ§ã«ãããã³ã°ãã
åžåã¹ãã¯ãã«ç¹æ§ãæããããšãå å¿çæ§ãé
ããææã®ææµæå€ãæããããšã䜿çšæã«ãã
ãŠäººäœã«å¯ŸããŠç¡å ¬å®³ã§ããããšãæŽã«ã¯åºäœæ®
åè£ çœ®ã«ãããŠã¯ãæ®åãæå®æéå ã«å®¹æã«åŠ
çããããšãã§ããããšçã®ç¹æ§ãèŠæ±ãããã
æ®ã«ãäºåæ©ãšããŠãªãã€ã¹ã§äœ¿çšãããé»åå
çè£ çœ®å ã«çµèŸŒãŸããé»ååççšå圢æéšæã®å Ž
åã«ã¯ãäžèšã®äœ¿çšæã«ãããç¡å ¬å®³æ§ã¯éèŠãª
ç¹ã§ããã ãã®æ§ãªç¹ã«ç«èããŠæè¿æ³šç®ãããŠããå å°
é»ææã«ã¢ã¢ã«ãã¢ã¹ã·ãªã³ã³ïŒä»¥åŸïœâSiãšè¡š
èšãïŒããããäŸãã°ãç¬åœå ¬é第2746967å·å ¬
å ±ãå第2855718å·å ¬å ±ã«ã¯é»ååççšå圢æéš
æãšããŠãç¬åœå ¬é第2933411å·å ¬å ±ã«ã¯å é»å€
æèªåè£ çœ®ãžã®å¿çšãèšèŒãããŠããã èä¹ããåŸæ¥ã®ïœâSiã§æ§æãããå å°é»å±€ã
æããå å°é»éšæã¯ãææµæå€ãå æ床ãå å¿ç
æ§çã®é»æ°çãå åŠçãå å°é»çç¹æ§ãåã³äœ¿çš
ç°å¢ç¹æ§ã®ç¹ãæŽã«ã¯çµæçå®å®æ§åã³èä¹ æ§ã®
ç¹ã«ãããŠãåã ãåã ã«ã¯ç¹æ§ã®åäžãèšãã
ãŠãããç·åçãªç¹æ§åäžãèšãäžã§æŽã«æ¹è¯ã
ããäœå°ãåããã®ãå®æ ã§ããã äŸãã°ãé»ååççšå圢æéšæã«é©çšããå Žå
ã«ãé«å æ床åãé«ææµæåãåæã«èšãããšã
ããšåŸæ¥ã«ãããŠã¯ãã®äœ¿çšæã«ãããŠæ®çé»äœ
ãæ®ãå Žåã床ã 芳枬ããããã®çš®ã®å å°é»éšæ
ã¯é·æéç¹°è¿ã䜿çšãç¶ãããšãç¹°è¿ã䜿çšã«ã
ãç²åŽã®èç©ãèµ·ã€ãŠãæ®åãçããæè¬ãŽãŒã¹
ãçŸè±¡ãçºããæ§ã«ãªãçã®äžéœåãªç¹ãå°ãªã
ãªãã€ãã åãïœâSiææã§å å°é»å±€ãæ§æããå Žåã«
ã¯ããã®é»æ°çãå å°é»çç¹æ§ã®æ¹è¯ãèšããã
ã«ãæ°ŽçŽ ååæãã¯åŒçŽ ååãå¡©çŽ ååçã®ãã
ã²ã³ååãåã³é»æ°äŒå°åã®å¶åŸ¡ã®ããã«ç¡ŒçŽ å
åãçååçãæãã¯ãã®ä»ã®ç¹æ§æ¹è¯ã®ããã«
ä»ã®ååããåã æ§æååãšããŠå å°é»å±€äžã«å«
æãããããããçã®æ§æååã®å«æã®ä»æ¹åŠäœ
ã«ãã€ãŠã¯ã圢æããå±€ã®é»æ°çæãã¯å å°é»ç
ç¹æ§ãèå§æ§ã«åé¡ãçããå Žåããã€ãã å³ã¡ãäŸãã°ã圢æããå å°é»å±€äžã«å ç §å°ã«
ãã€ãŠçºçããããªããã€ãªã¢ã®è©²å±€äžã§ã®å¯¿åœ
ãå åã§ãªãããšãæéšã«ãããŠãæ¯æäœåŽãã
ã®é»è·ã®æ³šå ¥ã®é»æ¢ãå åã§ãªãããšãæãã¯ã
転åçŽã«è»¢åãããç»åã«ä¿ã«ãçœãã±ããšåŒã°
ãããå±æçãªæŸé»ç Žå£çŸè±¡ã«ãããšæãããç»
åæ¬ é¥ããäŸãã°ãã¯ãªãŒãã³ã°ã«ããã¬ãŒãã
çšãããšãã®æºæŠã«ãããšæããããä¿ã«ãçœã¹
ãžããšäºãããŠããæè¬ç»åæ¬ é¥ãçãããããŠ
ãããåãå€æ¹¿é°å²æ°äžã§äœ¿çšããããæãã¯å€
湿é°å²æ°äžã«é·æéæŸçœ®ããçŽåŸã«äœ¿çšãããšä¿
ã«äºãç»åã®ãã±ãçããå Žåãå°ãªããªãã€
ãã æŽã«ã¯ãå±€åãåæ°ÎŒä»¥äžã«ãªããšå±€åœ¢æçšã®
ç空å ç©å®€ããåãåºããåŸã空æ°äžã§ã®æŸçœ®æ
éã®çµéãšå ±ã«ãæ¯æäœè¡šé¢ããã®å±€ã®æµ®ããå¥
é¢ãæãã¯å±€ã«äºè£ãçããçã®çŸè±¡ãåŒèµ·ãå
ã¡ã«ãªãããã®çŸè±¡ã¯ãæ®ã«æ¯æäœãéåžžãé»å
åçåéã«æŒããŠäœ¿çšãããŠãããã©ã ç¶æ¯æäœ
ã®å Žåã«å€ãèµ·ãçãçµæçå®å®æ§ã®ç¹ã«æŒããŠ
解決ãããå¯ãç¹ãããã åŸã€ãŠïœâSiææãã®ãã®ã®ç¹æ§æ¹è¯ãèšãã
ãäžæ¹ã§å å°é»éšæãèšèšããéã«ãäžèšããæ§
ãªåé¡ã®ç·ãŠã解決ãããæ§ã«å·¥å€«ãããå¿ èŠã
ããã æ¬çºæã¯äžèšã®è«žç¹ã«éã¿æããããã®ã§ãïœ
âSiã«å°±ãŠé»ååççšå圢æéšæãåºäœæ®åè£
眮ãèªåè£ çœ®çã«äœ¿çšãããå å°é»éšæãšããŠã®
é©çšæ§ãšãã®å¿çšæ§ãšãã芳ç¹ããç·æ¬çã«éæ
ç 究æ€èšãç¶ããçµæãã·ãªã³ã³ååãæ¯äœãš
ããæ°ŽçŽ ååïŒïŒšïŒåã¯ããã²ã³ååïŒïŒžïŒã®ã
ãããäžæ¹ãå°ãªããšãå«æããã¢ã¢ã«ãã¢ã¹æ
æãæè¬æ°ŽçŽ åã¢ã¢ã«ãã¢ã¹ã·ãªã³ã³ãããã²ã³
åã¢ã¢ã«ãã¢ã¹ã·ãªã³ã³ãæãã¯ããã²ã³å«ææ°Ž
çŽ åã¢ã¢ã«ãã¢ã¹ã·ãªã³ã³ã以åŸããçã®ç·ç§°ç
è¡šèšãšããŠãïœâSiïŒïŒšïŒïŒžïŒãã䜿çšããããã
æ§æãããå å°é»å±€ãæããå å°é»éšæã®å±€æ§æ
ã以åŸã«èª¬æãããæ§ãªç¹å®åã®äžã«èšèšãããŠ
äœæãããå å°é»éšæã¯å®çšäžèããåªããç¹æ§
ã瀺ãã°ããã§ãªããåŸæ¥ã®å å°é»éšæãšèŒã¹ãŠ
ã¿ãŠãããããç¹ã«ãããŠåé§ããŠããããšãæ®
ã«é»ååççšã®å å°é»éšæãšããŠèããåªããç¹
æ§ãæããŠããããšãèŠåºããç¹ã«åºã¥ããŠã
ãã æ¬çºæã¯é»æ°çãå åŠçãå å°é»çç¹æ§ã䜿çš
ç°å¢ã«æ®ãã©äŸåãªãå®è³ªçã«åžžæå®å®ããŠã
ããèå ç²åŽã«èããé·ããç¹°è¿ã䜿çšã«éããŠ
ãå£åçŸè±¡ãèµ·ããèä¹ æ§ãè湿æ§ã«åªããæ®ç
é»äœãå šãåã¯æ®ãã©èŠ³æž¬ãããªãå å°é»éšæã
æäŸããããšãäž»ããç®çãšããã æ¬çºæã®ä»ã®ç®çã¯ãæ¯æäœäžã«èšããããå±€
ãšæ¯æäœãšã®éãç©å±€ãããå±€ã®åå±€éã«æŒãã
å¯çæ§ã«åªããæ§é é åçã«ç·»å¯ã§å®å®çã§ã
ããå±€å質ã®é«ãå å°é»éšæãæäŸããããšã§ã
ãã æ¬çºæã®ä»ã®ç®çã¯ãé»ååççšå圢æéšæãš
ããŠé©çšãããå Žåãéé»å圢æã®ããã®åž¯é»åŠ
çã®éã®é»è·ä¿æèœåãå åãããéåžžã®é»åå
çæ³ã極ããŠæå¹ã«é©çšããåŸãåªããé»ååç
ç¹æ§ãæããå å°é»éšæãæäŸããããšã§ããã æ¬çºæã®æŽã«ä»ã®ç®çã¯ãé·æã®äœ¿çšã«æŒããŠ
ç»åæ¬ é¥ãç»åã®ãã±ãå šããªããæ¿åºŠãé«ãã
ããŒãããŒã³ãé®®æã«åºãŠäžã€è§£å床ã®é«ããé«
å質ç»åãåŸãããšã容æã«ã§ããé»ååççšã®
å å°é»éšæãæäŸããããšã§ããã æ¬çºæã®æŽã«ããïŒã€ã®ç®çã¯ãé«å æ床æ§ã
é«SNæ¯ç¹æ§åã³é«èå§æ§ãæããå å°é»éšæã
æäŸããããšã§ãããã æ¬çºæã®å å°é»éšæã¯å å°é»éšæçšã®æ¯æäœ
ãšãã·ãªã³ã³ååãæ¯äœãšããæ§æååãšããŠæ°Ž
çŽ åååã¯ããã²ã³ååã®ããããäžæ¹ãå°ãªã
ãšãå«æããéæ¶è³ªææã§æ§æãããå å°é»æ§ã
瀺ãéæ¶è³ªå±€ãšãæããå å°é»éšæã«ãããŠã åèšéæ¶è³ªå±€ããæ§æååãšããŠé žçŽ ååãšç¬¬
æååãšãå«æããåèšæ¯æäœäžã«ç©å±€ããã
å±€é åãšã該局é åäžã«èšãããåèšéæ¶è³ªå±€ã®
è¡šé¢å±€é ååã³åèšç©å±€å±€é åã«å¯ŸããŠãæ§æå
åãšããŠåèšé žçŽ åååã¯åèšç¬¬æååã®äžæ¹
ãå«æããŠããäºã§æ§æããææãç°ãªã€ãŠãã
å±€é åãšãæããŠããã æ§æååãšããŠé žçŽ ååãå«æãã第äžã®å±€é
åã®å±€åãtOãšããæ§æååãšããŠåšæåŸè¡šç¬¬
æã«å±ããååãå«æãã第äºã®å±€é åãšãæã
ã第äºã®å±€é åã®å±€åãtBãšããåèšã®éæ¶è³ªå±€
ã®å±€åãšç¬¬äºã®å±€é åã®å±€åtBãšã®å·®ããšãã tBïŒïŒïŒŽïŒtBïŒâŠ0.4 äžã€ã tOâ tB ã®é¢ä¿ãæç«ããäºãç¹åŸŽãšããã å³ã¡ãæ¬é¡çºæã®å å°é»éšæã¯åèšè£æ£ããã
ç¹èš±è«æ±ã®ç¯å²ã«èšèŒãããç¹æã®æ§æãæã€ã
ãšã«ãã€ãŠãé«æ床ãé«SNæ¯ãé«è§£å床ã§ãã€
ãŠã察å ç²åŽã«é·ããæ¯æäœäžã«èšããããéæ¶
質局ã匷éã§ããæ¯æäœåã³ç©å±€ãããåå±€éã«
ãããŠå¯çæ§ã«åªããé«éã§é·æéé£ç¶çã«ç¹°è¿
ã䜿çšãåŸããã®ã§ãããŸããå ·äœçã«ã¯ãé žçŽ
ååãå å°é»éšæã®æ¯æäœåŽã®éæ¶è³ªå±€é åå ã«
å«æãããããšã«ããé«ææµæåãšæ¯æäœãšéæ¶
質局ãšã®å¯çæ§åã³åèšé žçŽ ååãå«ãé åãã
äžã«ç©å±€ãããéæ¶è³ªå±€ãšã®å¯çæ§ãå³ãããšã
åºæ¥ãŸãããŸãã第æååãå å°é»éšæã®æ¯æ
äœåŽã®éæ¶è³ªå±€é åå ã«å«æãããããšã«ããã
垯é»åŠçã®éã«æ¯æäœåŽããéæ¶è³ªå±€ã®å éšã«é»
è·ãæ³šå ¥ãããã®ãé»æ¢ããããšãã§ããŸãã ããã§ãé žçŽ åååã³ç¬¬æååãå«ãŸããé
æ¶è³ªå±€ãããããå šãæããŠããªãäžå±€ã®åèšïœ
âSiã®éæ¶è³ªå±€ãšçŽæ¥æ¥ãããšããã®çé¢ã§ã¯æ
è»æ§ãäœäžãããããæ¬çºæã§ã¯éæ¶è³ªå±€å šäœã
é žçŽ åååã³ç¬¬æååã®æç¡ã§ãã€ãŠãïŒçš®ã«
åé¡ããŠããããã®çé¢ã§ã®æè»æ§ãåäžããå
ããŠãé žçŽ åååã¯åã³ç¬¬æååã®äžæ¹ãæã
ãããšã«ãããã®åç¬ã®äœçšå¹æãéç«ãããã
ãšãåºæ¥ããã®ã§ããã äžèšããæ§ãªå±€æ§æãåãæ§ã«ããŠèšèšããã
æ¬çºæã®å å°é»éšæã¯ãåèšããè«žåé¡ã®ç·ãŠã
解決ãåŸã極ããŠåªããé»æ°çãå åŠçãå å°é»
çç¹æ§ãèå§æ§åã³äœ¿çšç°å¢ç¹æ§ã瀺ãã æ®ã«ãé»ååççšå圢æéšæãšããŠé©çšããã
å Žåã«ã¯ãç»å圢æãžã®æ®çé»äœã®åœ±é¿ãå šããª
ãããã®é»æ°çç¹æ§ãå®å®ããŠããé«æ床ã§ãé«
SNæ¯ãæãããã®ã§ãã€ãŠãèå ç²åŽãç¹°è¿ã
䜿çšç¹æ§ã«é·ããæ¿åºŠãé«ããããŒãããŒã³ãé®®
æã«åºãŠãäžã€è§£å床ã®é«ããé«å質ã®ç»åãå®
å®ããŠç¹°è¿ãåŸãããšãã§ããã åãæ¬çºæã®å å°é»éšæã¯æ¯æäœäžã«åœ¢æãã
ãéæ¶è³ªå±€ããå±€èªäœã匷éã§ãã€ãŠãäžã€æ¯æ
äœãšã®å¯çæ§ã«èããåªããŠãããé«éã§é·æé
é£ç¶çã«ç¹°è¿ã䜿çšããããšãåºæ¥ãã 以äžãå³é¢ã«åŸã€ãŠãæ¬çºæã®å å°é»éšæã«å°±
ãŠè©³çŽ°ã«èª¬æããã 第ïŒå³ã¯ãæ¬çºæã®ç¬¬ïŒã®å®æœæ æ§äŸã®å å°é»
éšæã®å±€æ§æã説æããããã«æš¡åŒçã«ç€ºããæš¡
åŒçæ§æå³ã§ããã 第ïŒå³ã«ç€ºãå å°é»éšæïŒïŒïŒã¯ãå å°é»éšæ
çšãšããŠã®æ¯æäœïŒïŒïŒã®äžã«ãïœâSiïŒïŒšïŒïŒžïŒ
ããæããå å°é»æ§ã瀺ãéæ¶è³ªå±€ïŒïŒïŒãæã
ãã éæ¶è³ªå±€ïŒïŒïŒã¯ãæ§æååãšããŠé žçŽ ååã
å«æãã第äžã®å±€é åïŒïŒ¯ïŒïŒïŒïŒãåšæåŸè¡šç¬¬
æã«å±ããååïŒç¬¬æååïŒãå«æãã第äº
ã®å±€é åïŒïŒïŒïŒïŒãåã³ç¬¬äºã®å±€é åïŒïŒ
ïŒïŒïŒäžã«ãé žçŽ åååã³ç¬¬æååãå«æãã
ãŠãªãè¡šé¢å±€é åïŒïŒïŒãšããæãå±€æ§é ãæã
ãã 第äžã®å±€é åïŒïŒ¯ïŒïŒïŒïŒãšè¡šé¢å±€é åïŒïŒïŒ
ãšã®éã«èšããããŠããå±€é åïŒïŒïŒã«ã¯ç¬¬æ
ååã¯å«æãããŠãããé žçŽ ååã¯å«æãããŠãª
ãã 第äžã®å±€é åïŒïŒ¯ïŒïŒïŒïŒã«å«æãããé žçŽ å
åã¯ãæãã¯ç¬¬äºã®å±€é åïŒïŒïŒïŒïŒã«å«æã
ãã第æååã¯ãåå±€é åã«æŒããŠãå±€åæ¹å
ã«ã¯é£ç¶çã«åäžã«ååžããæ¯æäœïŒïŒïŒã®è¡šé¢
ã«å®è³ªçã«å¹³è¡ãªé¢å ã«æŒããŠã¯é£ç¶çã«äžã€å®
質çã«åäžã«ååžãããã®ã奜ãŸãããã®ã§ã
ãã 第ïŒå³ã«ç€ºãå Žåã®äŸã®æ§ãªæ¬çºæã®å å°é»éš
æã«æŒããŠã¯ãéæ¶è³ªå±€ïŒïŒïŒã®è¡šé¢éšåã«ã¯ã
é žçŽ åååã³ç¬¬æååãå«æãããªãå±€é å
ïŒç¬¬ïŒå³ã«ç€ºãè¡šé¢å±€é åïŒïŒïŒã«çžåœïŒãæã
ããã第æååã¯å«æãããŠããããé žçŽ åå
ã¯å«æãããªãå±€é åïŒç¬¬ïŒå³ã«ç€ºãå±€é åïŒïŒ
ïŒïŒã¯å¿ ãããèšããããããšãèŠããªãã å³ã¡ãäŸãã°ç¬¬ïŒå³ã«æŒããŠã第äžã®å±€é åïŒ
ïŒïŒïŒïŒ¯ïŒãšç¬¬äºã®å±€é åïŒïŒïŒïŒïŒãšãåã
å±€é åã§ãã€ãŠãè¯ãããåã第äžã®å±€é å
ïŒïŒ¯ïŒïŒïŒïŒã®äžã«ç¬¬äºã®å±€é åïŒïŒïŒïŒïŒã
èšããããŠãè¯ããã®ã§ããã æ¬çºæã®å å°é»éšæã«æŒããŠã¯ã第äžã®å±€é å
ïŒïŒ¯ïŒã«ã¯ãé žçŽ ååã®å«æã«ãã€ãŠãé«ææµæ
åãšãéæ¶è³ªå±€ãçŽæ¥èšããããæ¯æäœãšã®éã®
å¯çæ§ã®åäžãéç¹çã«èšãããè¡šé¢å±€é åã«ã¯
é žçŽ ååãå«æãããã«è湿æ§ãèã³ããã€ãªã³
æ§ã®äžå±€ã®åäžãšé«æ床åãéç¹çã«èšãããŠã
ãã æ®ã«ã第ïŒå³ã«ç€ºãå å°é»éšæïŒïŒïŒã®æ§ã«ã
éæ¶è³ªå±€ïŒïŒïŒããé žçŽ ååãå«æãã第äžã®å±€
é åïŒïŒ¯ïŒïŒïŒïŒã第æååãå«æãã第äºã®
å±€é åïŒïŒïŒïŒïŒãé žçŽ ååã®å«æãããŠããª
ãå±€é åïŒïŒïŒãåã³é žçŽ åååã³ç¬¬æååã®
å«æãããŠããªãè¡šé¢å±€é åïŒïŒïŒãšãæãã第
äžã®å±€é åïŒïŒ¯ïŒïŒïŒïŒãšç¬¬äºã®å±€é åïŒïŒïŒ
ïŒïŒãšãå ±æããå±€é åãæããå±€æ§é ã®å Žåã«
ããè¯å¥œãªçµæãåŸãããã æ¬çºæã®å å°é»éšæã«æŒããŠã¯éæ¶è³ªå±€ã®äžéš
ãæ§æãé žçŽ ååã®å«æããã第äžã®å±€é å
ïŒïŒ¯ïŒã¯ãïŒã€ã«ã¯éæ¶è³ªå±€ã®æ¯æäœãšã®å¯çæ§
ã®åäžãèšãç®çã®çºã«ãåãéæ¶è³ªå±€ã®äžéšã
æ§æã第æååã®å«æããã第äºã®å±€é å
ïŒïŒã¯ãïŒã€ã«ã¯ãéæ¶è³ªå±€ã®èªç±è¡šé¢åŽãã
垯é»åŠçãæœãããéãæ¯æäœåŽããéæ¶è³ªå±€ã®
å éšã«é»è·ãæ³šå ¥ãããã®ãé»æ¢ããç®çã®çºã«
倫ã ãéæ¶è³ªå±€ã®äžéšãšããŠæ¯æäœãšéæ¶è³ªå±€ãš
ãæ¥åããå±€é åãšããŠãå°ãªããšãäºãã®äžéš
ãå ±æããæ§é ã§èšããããã åãå¥ã«ã¯ç¬¬äºã®å±€é åïŒïŒã®æ¯æäœãšãæ
ãã¯ç¬¬äºã®å±€é åïŒïŒã®äžã«çŽæ¥èšããããå±€
é åãšã®å¯çæ§ã®åäžãããäžå±€å¹æçã«éæã
ãã«ã¯ã第äžã®å±€é åïŒïŒ¯ïŒãæ¯æäœãšã®æ¥è§Šç
é¢ããã第äºã®å±€é åïŒïŒãå å ããæ§ã«èšã
ããè©°ããæ¯æäœãšã®æ¥è§Šçé¢ãã第äºã®å±€é å
ïŒïŒã®äžæ¹ãŸã§å»¶åšãããŠç¬¬äºã®å±€é åïŒïŒ
ãå«ãã å±€æ§é ãšãªãæ§ã«ç¬¬äžã®å±€é åïŒïŒ¯ïŒã
éæ¶è³ªå±€äžã«èšããã®ã奜ãŸãããã®ã§ããã æ¬çºæã«ãããŠãéæ¶è³ªå±€ãæ§æãã第äºã®å±€
é åïŒïŒäžã«å«æãããåšæåŸè¡šç¬¬æã«å±ã
ãååãšããŠäœ¿çšãããã®ã¯ãïŒç¡ŒçŽ ïŒãAlïŒã¢
ã«ãããŠã ïŒãGaïŒã¬ãªãŠã ïŒãInïŒã€ã³ãžãŠã ïŒã
TlïŒã¿ãªãŠã ïŒçã§ãããæ®ã«å¥œé©ã«çšãããã
ã®ã¯ïŒ¢ïŒGaã§ããã æ¬çºæã«ãããŠã第äºã®å±€é åïŒïŒäžã«å«æ
ããã第æååã®å«æéãšããŠã¯ãæ¬çºæã®ç®
çãå¹æçã«éæãããæ§ã«ææã«åŸã€ãŠé©å®æ±º
ããããããå±€é åïŒïŒã«æŒããŠãéåžžã¯30ã
ïŒÃ104atomic ppmã奜ãŸããã¯50ãïŒÃ
104atomic ppmãæé©ã«ã¯100ãïŒÃ103atomic
ppmãšãããã®ãæãŸãããã®ã§ããã 第äžã®å±€é åïŒïŒ¯ïŒäžã«å«æãããé žçŽ ååã®
éã«å°±ãŠã圢æãããå å°é»éšæã«èŠæ±ãããç¹
æ§ã«å¿ããŠææã«åŸã€ãŠé©å®æ±ºããããããéåžž
ã®å Žåã0.001ã50atomicïŒ ã奜ãŸããã¯ã0.002
ã40atomicïŒ ãæé©ã«ã¯0.003ã30atomicïŒ ãšã
ããã®ãæãŸãããã®ã§ããã æ¬çºæã®å å°é»éšæã«æŒããŠã¯ã第æååã®
å«æãããŠããå±€é åïŒïŒã®å±€åtBãšïŒç¬¬ïŒå³
ã§ã¯å±€é åïŒïŒïŒã®å±€åïŒãå±€é åïŒïŒã®äžã«
èšãããããå±€é åïŒïŒãé€ããéšåã®å±€é å
ïŒç¬¬ïŒå³ã§ã¯å±€é åïŒïŒïŒïŒã®å±€åãšã¯ããã®
é¢ä¿ãå ã«ç€ºããæ§ãªé¢ä¿åŒãæºè¶³ããæ§ã«æ±ºã
ããããã®ã§ãããããã奜ãŸããã¯ãå ã«ç€ºã
ãé¢ä¿åŒã®å€ã0.35以äžãæé©ã«ã¯0.3以äžãšã
ããã®ãæãŸããã æ¬çºæã«æŒããŠã第æååã®å«æãããå±€é
åïŒïŒã®å±€åtBãšããŠã¯ãéåžžã¯30â«ã5ÎŒã奜
é©ã«ã¯40â«ã4ÎŒãæé©ã«ã¯50â«ã3ÎŒãšãããã®
ãæãŸãããã®ã§ããã åãåèšå±€åãšå±€åtBãšã®åïŒïŒŽïŒtBïŒãšã
ãŠã¯ãéåžžã¯ïŒã100ÎŒã奜é©ã«ã¯ïŒã80ÎŒãæé©
ã«ã¯ïŒã50ÎŒãšãããã®ãæãŸãããã®ã§ããã é žçŽ ååã®å«æãããå±€é åïŒïŒ¯ïŒã®å±€åtOãš
ããŠã¯ãå°ãªããšããã®äžéšã®å±€é åãå ±æãã
å±€é åïŒïŒã®å±€åtBãšã®é¢ä¿ã«æŒããŠé©å®ææ
ããç®çã«åŸã€ãŠæ±ºå®ãããã®ãæãŸãããå³
ã¡ãå±€é åïŒïŒãšã該局é åïŒïŒãšçŽã«æ¥è§Š
ããæ¯æäœãšã®éã®å¯çæ§ã®åŒ·åãèšãç®çã§ã
ãã°ãå±€é åïŒïŒ¯ïŒã¯ãå±€é åïŒïŒã®æ¯æäœåŽ
端éšå±€é åã«å°ãªããšãèšããããŠããã°è¯ãã
ããå±€é åïŒïŒ¯ïŒã®å±€åtOãšã«ã¯é«ã å±€é å
ïŒïŒã®å±€åtBåã ãããã°è¯ãã åãå±€é åïŒïŒãšè©²å±€é åïŒïŒäžã«çŽã«èš
ããããå±€é åïŒç¬¬ïŒå³ã§ç€ºãã°å±€é åïŒïŒïŒã«
çžåœããïŒãšã®éã®å¯çæ§ã®åŒ·åãèšãã®ã§ãã
ã°ãå±€é åïŒïŒ¯ïŒã¯å±€é åïŒïŒã®æ¯æäœã®èšã
ãŠããåŽãšã¯å察ã®ç«¯éšå±€é åã«å°ãªããšãèšã
ãŠããã°è¯ããããå±€é åïŒïŒ¯ïŒã®å±€åtOãšããŠ
ã¯ãé«ã ãå±€é åïŒïŒã®å±€åtBåã ãããã°è¯
ãã æŽã«ãäžèšïŒã€ã®ç¹ãæºè¶³ããå Žåãèæ ®ãã
ã°å±€é åïŒïŒ¯ïŒã®å±€åtOãšããŠã¯ãå°ãªããšãå±€
é åïŒïŒã®å±€åtBã ãããå¿ èŠããããäžã€ã
ãã®å Žåã¯ãå±€é åïŒïŒ¯ïŒäžã«å±€é åïŒïŒãèš
ããããå±€æ§é ãšãããå¿ èŠãããã å±€é åïŒïŒãšã該局é åïŒïŒäžã«çŽã«èšã
ãããå±€é åãšã®éã®å¯çæ§ãäžå±€å¹æçã«èšã
ã«ã¯å±€é åïŒïŒ¯ïŒãå±€é åïŒïŒã®äžæ¹ïŒæ¯æäœ
ã®ããåŽãšã¯å察æ¹åïŒã«å»¶åšãããã®ã奜ãŸã
ããã®ã§ããã æ¬çºæã«æŒããŠãå±€åtOãšããŠã¯äžèšããç¹ã
èæ ®ãã€ã€ææã«åŸã€ãŠé©å®æ±ºããããããéåžž
ã®å Žå10â«ã10ÎŒã奜é©ã«ã¯20â«ã8ÎŒãæé©ã«ã¯
30â«ã5ÎŒãšãããã®ãæãŸãããã®ã§ããã æ¬çºæã«ãããŠäœ¿çšãããæ¯æäœãšããŠã¯ãå°
é»æ§ã§ãé»æ°çµ¶çžæ§ã§ãã€ãŠãè¯ããå°é»æ§æ¯æ
äœãšããŠã¯ãäŸãã°ãNiCrãã¹ãã³ã¬ã¹ãAlïŒ
CrïŒMoïŒAuïŒNbïŒTaïŒïŒ¶ïŒTiïŒPtïŒPdçã®
éå±åã¯ããçã®åéãæããããã é»æ°çµ¶çžæ§æ¯æäœãšããŠã¯ãããªãšã¹ãã«ãã
ãªãšãã¬ã³ãããªã«ãŒãããŒããã»ã«ããŒãºã¢ã»
ããŒããããªãããã¬ã³ãããªå¡©åããã«ãããª
å¡©åãããªãã³ãããªã¹ãã¬ã³ãããªã¢ããçã®
åææš¹èã®ãã€ã«ã åã¯ã·ãŒããã¬ã©ã¹ãã»ã©ã
ãã¯ãçŽçãé垞䜿çšããããããçã®é»æ°çµ¶çž
æ§æ¯æäœã¯ã奜é©ã«ã¯å°ãªããšããã®äžæ¹ã®è¡šé¢
ãå°é»åŠçããã該å°é»åŠçãããè¡šé¢åŽã«ä»ã®
å±€ãèšããããã®ãæãŸããã äŸãã°ãã¬ã©ã¹ã§ããã°ããã®è¡šé¢ã«ãNiCrïŒ
AlïŒCrïŒMoïŒAuïŒIrïŒNbïŒTaïŒïŒ¶ïŒTiïŒPtïŒ
PdïŒIn2O3ïŒSnO2ïŒITOïŒIn2O3ïŒSnO2ïŒçãã
æãèèãèšããããšã«ãã€ãŠå°é»æ§ãä»äžã
ããæãã¯ããªãšã¹ãã«ãã€ã«ã çã®åææš¹èã
ã€ã«ã ã§ããã°ãNiCrïŒAlïŒAgïŒPbïŒZnïŒNiïŒ
AuïŒCrïŒMoïŒIrïŒNbïŒTaïŒïŒ¶ïŒTiïŒPtçã®é
å±ã®èèãç空èžçãé»åããŒã èžçãã¹ããã¿
ãªã³ã°çã§ãã®è¡šé¢ã«èšããåã¯åèšéå±ã§ãã®
è¡šé¢ãã©ãããŒãåŠçããŠããã®è¡šé¢ã«å°é»æ§ã
ä»äžããããæ¯æäœã®åœ¢ç¶ãšããŠã¯ãåçç¶ãã
ã«ãç¶ãæ¿ç¶çä»»æã®åœ¢ç¶ãšãåŸãææã«ãã€
ãŠããã®åœ¢ç¶ã¯æ±ºå®ãããããäŸãã°ã第ïŒå³ã®
å å°é»éšæïŒïŒïŒãé»ååççšå圢æéšæãšããŠ
䜿çšããã®ã§ããã°é£ç¶é«éè€åã®å Žåã«ã¯ãç¡
端ãã«ãç¶åã¯åçç¶ãšããã®ãæãŸãããæ¯æ
äœã®åãã¯ãææéãã®å å°é»éšæã圢æããã
æ§ã«é©å®æ±ºå®ãããããå å°é»éšæãšããŠå¯ææ§
ãèŠæ±ãããå Žåã«ã¯ãæ¯æäœãšããŠã®æ©èœãå
åçºæ®ãããç¯å²å ã§ããã°å¯èœãªéãèããã
ããèä¹ãããã®æ§ãªå Žåæ¯æäœã®è£œé äžåã³å
æ±ãäžãæ©æ¢°ç匷床çã®ç¹ãããéåžžã¯ã10Ό以
äžãšãããã æ¬çºæã«ãããŠãïœâSiïŒïŒšïŒïŒžïŒã§æ§æãã
ãéæ¶è³ªå±€ã圢æããã«ã¯äŸãã°ã°ããŒæŸé»æ³ã
ã¹ããã¿ãªã³ã°æ³ãæãã¯ã€ãªã³ãã¬ãŒãã€ã³ã°
æ³çã®æŸé»çŸè±¡ãå©çšããç空å ç©æ³ã«ãã€ãŠæ
ããããäŸãã°ãã°ããŒæŸé»æ³ã«ãã€ãŠãïœâSi
ïŒïŒšïŒïŒžïŒã§æ§æãããéæ¶è³ªå±€ã圢æããã«ã¯ã
åºæ¬çã«ã¯ã·ãªã³ã³ååïŒSiïŒãäŸçµŠãåŸãSiäŸ
絊çšã®åæã¬ã¹ãšå ±ã«ãæ°ŽçŽ ååïŒïŒšïŒå°å ¥çšã®
åã¯ïŒåã³ããã²ã³ååïŒïŒžïŒå°å ¥çšã®åæã¬ã¹
ããå éšãæžå§ã«ãåŸãå ç©å®€å ã«å°å ¥ããŠã該
å ç©å®€å ã«ã°ããŒæŸé»ãçèµ·ãããäºãæå®äœçœ®
ã«èšçœ®ãããŠããæå®ã®æ¯æäœè¡šé¢äžã«ïœâSi
ïŒïŒšïŒïŒžïŒããæãå±€ã圢æãããã°è¯ããåã
ã¹ããã¿ãªã³ã°æ³ã§åœ¢æããå Žåã«ã¯ãäŸãã°
ArïŒHeçã®äžæŽ»æ§ã¬ã¹åã¯ããçã®ã¬ã¹ãããŒ
ã¹ãšããæ··åã¬ã¹ã®é°å²æ°äžã§Siã§æ§æãããã¿
ãŒã²ãããã¹ããã¿ãªã³ã°ããéãæ°ŽçŽ åå
ïŒïŒšïŒåã¯ïŒåã³ããã²ã³ååïŒïŒžïŒå°å ¥çšã®ã¬
ã¹ãã¹ããã¿ãªã³ã°çšã®å ç©å®€ã«å°å ¥ããŠããã°
è¯ãã æ¬çºæã«ãããŠãå¿ èŠã«å¿ããŠéæ¶è³ªå±€äžã«å«
æãããããã²ã³ååïŒïŒžïŒãšããŠã¯ãå ·äœçã«
ã¯ããçŽ ãå¡©çŽ ãèçŽ ããšãŠçŽ ãæããããæ®ã«
ããçŽ ãå¡©çŽ ã奜é©ãªãã®ãšããŠæããããšãåº
æ¥ãã æ¬çºæã«ãããŠäœ¿çšããSiäŸçµŠçšã®åæã¬ã¹ãš
ããŠã¯ãSiH4ïŒSi2H6ïŒSi3H8ïŒSi4H10çã®ã¬ã¹
ç¶æ ã®åã¯ã¬ã¹åãåŸãæ°ŽçŽ åç¡ çŽ ïŒã·ã©ã³é¡ïŒ
ãæå¹ã«äœ¿çšããããã®ãšããŠæããããæ®ã«ã
å±€äœæäœæ¥ã®æ±ãæããSiäŸçµŠå¹çã®è¯ãçã®ç¹
ã§SiH4ïŒSi2H6ã奜ãŸãããã®ãšããŠæããã
ãã æ¬çºæã«ãããŠäœ¿çšãããããã²ã³ååå°å ¥çš
ã®åæã¬ã¹ãšããŠæå¹ãªã®ã¯ãå€ãã®ããã²ã³å
åç©ãæããããäŸãã°ããã²ã³ã¬ã¹ãããã²ã³
åç©ãããã²ã³éååç©ãããã²ã³ã§çœ®æããã
ã·ã©ã³èªå°äœçã®ã¬ã¹ç¶æ ã®åã¯ã¬ã¹åãåŸãã
ãã²ã³ååç©ã奜ãŸããæããããã åãæŽã«ã¯ãã·ãªã³ã³ååãšããã²ã³ååãšã
æ§æèŠçŽ ãšããã¬ã¹ç¶æ ã®åã¯ã¬ã¹åãåŸããã
ãã²ã³ååãå«ãç¡ çŽ ååç©ãæå¹ãªãã®ãšããŠ
æ¬çºæã«ãããŠã¯æããããšãåºæ¥ãã æ¬çºæã«ãããŠå¥œé©ã«äœ¿çšãåŸãããã²ã³åå
ç©ãšããŠã¯ãå ·äœçã«ã¯ãããçŽ ãå¡©çŽ ãèçŽ ã
ãšãŠçŽ ã®ããã²ã³ã¬ã¹ãBrFïŒClFïŒClF3ïŒ
BrF5ïŒBrF3ïŒIF3ïŒIF7ïŒIClïŒIBrçã®ããã²ã³
éååç©ãæããããšãåºæ¥ãã ããã²ã³ååãå«ãç¡ çŽ ååç©ãæè¬ãããã²
ã³ååã§çœ®æãããã·ã©ã³èªå°äœãšããŠã¯ãå ·äœ
çã«ã¯äŸãã°SiF4ïŒSi2F6ïŒSiCl4ïŒSiBr4çã®ã
ãã²ã³åç¡ çŽ ã奜ãŸãããã®ãšããŠæããããšã
åºæ¥ãã ãã®æ§ãªããã²ã³ååãå«ãç¡ çŽ ååç©ãæ¡çš
ããŠã°ããŒæŸé»æ³ã«ãã€ãŠæ¬çºæã®ç¹åŸŽçãªå å°
é»éšæã圢æããå Žåã«ã¯ãSiãäŸçµŠãåŸãåæ
ã¬ã¹ãšããŠã®æ°ŽçŽ åç¡ çŽ ã¬ã¹ã䜿çšããªããšãã
æå®ã®æ¯æäœäžã«ããã²ã³ååãå«ãïœâSiãã
æãéæ¶è³ªå±€ã圢æããäºãåºæ¥ãã ã°ããŒæŸé»æ³ã«åŸã€ãŠãããã²ã³ååãå«ãé
æ¶è³ªå±€ã圢æããå Žåãåºæ¬çã«ã¯ãSiäŸçµŠçšã®
åæã¬ã¹ã§ããããã²ã³åç¡ çŽ ã¬ã¹ãšArïŒH2ïŒ
Heçã®ã¬ã¹çãæå®ã®æ··åæ¯ãšã¬ã¹æµéã«ãªã
æ§ã«ããŠéæ¶è³ªå±€ã圢æããå ç©å®€ã«å°å ¥ããã°
ããŒæŸé»ãçèµ·ããŠããçã®ã¬ã¹ã®ãã©ãºãé°å²
æ°ã圢æããããšã«ãã€ãŠãæå®ã®æ¯æäœäžã«é
æ¶è³ªå±€ã圢æãåŸããã®ã§ããããæ°ŽçŽ ååã®å°
å ¥ãèšãçºã«ããçã®ã¬ã¹ã«æŽã«æ°ŽçŽ ååãå«ã
ç¡ çŽ ååç©ã®ã¬ã¹ãæå®éæ··åããŠå±€åœ¢æããŠã
è¯ãã åãåã¬ã¹ã¯åç¬çš®ã®ã¿ã§ãªãæå®ã®æ··åæ¯ã§
è€æ°çš®æ··åããŠäœ¿çšããŠãå·®æ¯ããªããã®ã§ã
ãã åå¿ã¹ããã¿ãªã³ã°æ³æãã¯ã€ãªã³ãã¬ãŒãã€
ã³ã°æ³ã«äŸã€ãŠïœâSiïŒïŒšïŒïŒžïŒããæãéæ¶è³ª
å±€ã圢æããã«ã¯ãäŸãã°ã¹ããã¿ãªã³ã°æ³ã®å Ž
åã«ã¯Siããæãã¿ãŒã²ããã䜿çšããŠãããã
æå®ã®ã¬ã¹ãã©ãºãé°å²æ°äžã§ã¹ããã¿ãªã³ã°
ããã€ãªã³ãã¬ãŒãã€ã³ã°æ³ã®å Žåã«ã¯ãå€çµæ¶
ã·ãªã³ã³åã¯åçµæ¶ã·ãªã³ã³ãèžçºæºãšããŠèžç
ããŒãã«å容ãããã®ã·ãªã³ã³èžçºæºãæµæå ç±
æ³ãæãã¯ãšã¬ã¯ããã³ããŒã æ³ïŒEBæ³ïŒçã«
ãã€ãŠå ç±èžçºããé£ç¿èžçºç©ãæå®ã®ã¬ã¹ãã©
ãºãé°å²æ°äžãééãããäºã§è¡ãäºãåºæ¥ãã ãã®éãã¹ããã¿ãªã³ã°æ³ãã€ãªã³ãã¬ãŒãã€
ã³ã°æ³ã®äœãã®å Žåã«ã圢æãããå±€äžã«ããã²
ã³ååãå°å ¥ããã«ã¯ãåèšã®ããã²ã³ååç©å
ã¯åèšã®ããã²ã³ååãå«ãç¡ çŽ ååç©ã®ã¬ã¹ã
å ç©å®€äžã«å°å ¥ããŠè©²ã¬ã¹ã®ãã©ãºãé°å²æ°ã圢
æããŠããã°è¯ããã®ã§ããã åãæ°ŽçŽ ååãå°å ¥ããå Žåã«ã¯ãæ°ŽçŽ ååå°
å ¥çšã®åæã¬ã¹ãäŸãã°ãH2ãæãã¯åèšãã
ã·ã©ã³é¡çã®ã¬ã¹ãã¹ããã¿ãªã³ã°çšã®å ç©å®€äž
ã«å°å ¥ããŠè©²ã¬ã¹ã®ãã©ãºãé°å²æ°ã圢æããŠã
ãã°è¯ãã æ¬çºæã«ãããŠã¯ãããã²ã³ååå°å ¥çšã®åæ
ã¬ã¹ãšããŠäžèšãããããã²ã³ååç©æãã¯ãã
ã²ã³ãå«ãç¡ çŽ ååç©ãæå¹ãªãã®ãšããŠäœ¿çšã
ãããã®ã§ãããããã®ä»ã«ãHFïŒHClïŒ
HBrïŒHIçã®ããã²ã³åæ°ŽçŽ ãSiH2F2ïŒ
SiH2I2ïŒSiH2Cl2ïŒSiHCl3ïŒSiH2Br2ïŒSiHBr3ç
ã®ããã²ã³çœ®ææ°ŽçŽ åç¡ çŽ ãçã ã®ã¬ã¹ç¶æ ã®æ
ãã¯ã¬ã¹åãåŸããæ°ŽçŽ ååãæ§æèŠçŽ ã®ïŒã€ãš
ããããã²ã³åç©ãæå¹ãªéæ¶è³ªå±€åœ¢æçšã®åºçº
ç©è³ªãšããŠæããäºãåºæ¥ãã ããçã®æ°ŽçŽ ååãå«ãããã²ã³åç©ã¯ãéæ¶
質局圢æã®éã«å±€äžã«ããã²ã³ååã®å°å ¥ãšåæ
ã«é»æ°çæãã¯å é»çç¹æ§ã®å¶åŸ¡ã«æ¥µããŠæå¹ãª
æ°ŽçŽ ååãå°å ¥ãããã®ã§ãæ¬çºæã«ãããŠã¯å¥œ
é©ãªããã²ã³ååå°å ¥çšã®åæãšããŠäœ¿çšãã
ãã æ°ŽçŽ ååãéæ¶è³ªå±€äžã«æ§é çã«å°å ¥ããã«
ã¯ãäžèšã®ä»ã«H2ãæãã¯SiH4ïŒSi2H6ïŒ
Si3H8ïŒSi4H10çã®æ°ŽçŽ åç¡ çŽ ã®ã¬ã¹ãSiãäŸçµŠ
ããçºã®ã·ãªã³ã³ååç©ãšå ç©å®€äžã«å ±åãããŠ
æŸé»ãçèµ·ãããäºã§ãè¡ãäºãåºæ¥ãã äŸãã°ãåå¿ã¹ããã¿ãªã³ã°æ³ã®å Žåã«ã¯ãSi
ã¿ãŒã²ããã䜿çšããããã²ã³ååå°å ¥çšã®ã¬ã¹
åã³H2ã¬ã¹ãå¿ èŠã«å¿ããŠHeïŒArçã®äžæŽ»æ§ã¬
ã¹ãå«ããŠå ç©å®€å ã«å°å ¥ããŠãã©ãºãé°å²æ°ã
圢æããåèšSiã¿ãŒã²ãããã¹ããã¿ãªã³ã°ãã
äºã«ãã€ãŠãåºæ¿äžã«ïœâSiïŒïŒšïŒïŒžïŒããæã
éæ¶è³ªå±€ã圢æãããã æŽã«ã¯ãäžçŽç©ã®ããŒãã³ã°ãå ŒããŠB2H6ç
ã®ã¬ã¹ãå°å ¥ããŠããããšãåºæ¥ãã æ¬çºæã«ãããŠã圢æãããå å°é»éšæã®éæ¶
質局äžã«å«æãããæ°ŽçŽ ååïŒïŒšïŒã®éåã¯ãã
ã²ã³ååïŒïŒžïŒã®éåã¯æ°ŽçŽ ååãšããã²ã³åå
ã®éã®åïŒïŒšïŒïŒžïŒã¯éåžžã®å ŽåïŒã40atomic
ïŒ ã奜é©ã«ã¯ïŒã30atomicïŒ ãšãããã®ãæãŸ
ããã éæ¶è³ªå±€äžã«å«æãããæ°ŽçŽ ååïŒïŒšïŒåã¯ïŒ
åã³ããã²ã³ååïŒïŒžïŒã®éãå¶åŸ¡ããã«ã¯ãäŸ
ãã°æ¯æäœæž©åºŠåã¯ïŒåã³æ°ŽçŽ ååïŒïŒšïŒãæã
ã¯ããã²ã³ååïŒïŒžïŒãå«æãããçºã«äœ¿çšãã
ãåºçºç©è³ªã®å ç©è£ 眮系å ãžå°å ¥ããéãæŸé»ã
åçãå¶åŸ¡ããŠããã°è¯ãã éæ¶è³ªå±€ã«ã第æååãå«æããå±€é å
ïŒïŒåã³é žçŽ ååãå«æããå±€é åïŒïŒ¯ïŒãèš
ããã«ã¯ãã°ããŒæŸé»æ³ãåå¿ã¹ããã¿ãªã³ã°æ³
çã«ããéæ¶è³ªå±€ã®åœ¢æã®éã«ã第æååå°å ¥
çšã®åºçºç©è³ªåã³é žçŽ ååå°å ¥çšã®åºçºç©è³ªã
倫ã åèšããéæ¶è³ªå±€åœ¢æçšã®åºçºç©è³ªãšå ±ã«äœ¿
çšããŠã圢æãããå±€äžã«ãã®éãå¶åŸ¡ãä¹ãå«
æããŠããäºã«ãã€ãŠæãããã éæ¶è³ªå±€ãæ§æãããé žçŽ ååã®å«æãããå±€
é åïŒïŒ¯ïŒåã³ç¬¬æååã®å«æãããå±€é å
ïŒïŒã倫ã 圢æããã®ã«ã°ããŒæŸé»æ³ãçšãã
å Žåãåå±€é å圢æçšã®åæã¬ã¹ãšãªãåºçºç©è³ª
ãšããŠã¯ãåèšããéæ¶è³ªå±€åœ¢æçšã®åºçºç©è³ªã®
äžããææã«åŸã€ãŠéžæããããã®ã«ãé žçŽ åå
å°å ¥çšã®åºçºç©è³ªåã¯ïŒåã³ç¬¬æååå°å ¥çšã®
åºçºç©è³ªãå ããããããã®æ§ãªé žçŽ ååå°å ¥çš
ã®åºçºç©è³ªåã¯ç¬¬æååå°å ¥çšã®åºçºç©è³ªãšã
ãŠã¯ãå°ãªããšãé žçŽ ååæãã¯ç¬¬æååãæ§
æååãšããã¬ã¹ç¶ã®ç©è³ªåã¯ã¬ã¹åãåŸãç©è³ª
ãã¬ã¹åãããã®ã®äžã®å€§æŠã®ãã®ã䜿çšããåŸ
ãã äŸãã°å±€é åïŒïŒ¯ïŒã圢æããã®ã§ããã°ãã·
ãªã³ã³ååïŒSiïŒãæ§æååãšããåæã¬ã¹ãšã
é žçŽ ååïŒïŒ¯ïŒãæ§æååãšããåæã¬ã¹ãšãå¿
èŠã«å¿ããŠæ°ŽçŽ ååïŒïŒšïŒåã¯ïŒåã³ããã²ã³å
åïŒïŒžïŒãæ§æååãšããåæã¬ã¹ãšãææã®æ··
åæ¯ã§æ··åããŠäœ¿çšããããåã¯ãã·ãªã³ã³åå
ïŒSiïŒãæ§æååãšããåæã¬ã¹ãšãé žçŽ åå
ïŒïŒ¯ïŒåã³æ°ŽçŽ ååïŒïŒšïŒãæ§æååãšããåæ
ã¬ã¹ãšãããããåææã®æ··åæ¯ã§æ··åãããã
æãã¯ãã·ãªã³ã³ååïŒSiïŒãæ§æååãšããå
æã¬ã¹ãšãã·ãªã³ã³ååïŒSiïŒãé žçŽ ååïŒïŒ¯ïŒ
åã³æ°ŽçŽ ååïŒïŒšïŒã®ïŒã€ãæ§æååãšããåæ
ã¬ã¹ãšãæ··åããŠäœ¿çšããããšãåºæ¥ãã åãå¥ã«ã¯ãã·ãªã³ã³ååïŒSiïŒãšæ°ŽçŽ åå
ïŒïŒšïŒãšãæ§æååãšããåæã¬ã¹ã«é žçŽ åå
ïŒïŒ¯ïŒãæ§æååãšããåæã¬ã¹ãæ··åããŠäœ¿çš
ããŠãè¯ãã é žçŽ ååå°å ¥çšã®åºçºç©è³ªãšãªããã®ãšããŠå ·
äœçã«ã¯ãäŸãã°é žçŽ ïŒO2ïŒããªãŸã³ïŒO3ïŒãäž
é žåçªçŽ ïŒNOïŒãäºé žåçªçŽ ïŒNO2ïŒãäžäºé žå
çªçŽ ïŒN2OïŒãäžäºé žåçªçŽ ïŒN2O3ïŒãåäºé žå
çªçŽ ïŒN2O4ïŒãäºäºé žåçªçŽ ïŒN2O5ïŒãäžé žåçª
çŽ ïŒNO3ïŒãã·ãªã³ã³ååïŒSiïŒãšé žçŽ ååïŒïŒ¯ïŒ
ãšæ°ŽçŽ ååïŒïŒšïŒãšãæ§æååãšãããäŸãã°ã
ãžã·ãããµã³H3SiOSiH3ãããªã·ãããµã³
H3SiOSiH2OSiH3çã®äœçŽã·ãããµã³çãæã
ãããšãåºæ¥ãã å±€é åïŒïŒãã°ããŒæŸé»æ³ãçšããŠåœ¢æãã
å Žåã«ç¬¬æååå°å ¥çšã®åºçºç©è³ªãšããŠãæ¬çº
æã«ãããŠæå¹ã«äœ¿çšãããã®ã¯ãç¡ŒçŽ ååå°å ¥
çšãšããŠã¯ãB2H6ïŒB4H10ïŒB5H9ïŒB5H11ïŒ
B6H10ïŒB6H12ïŒB6H14çã®æ°ŽçŽ åç¡ŒçŽ ãBF3ïŒ
BCl3ïŒBBr3çã®ããã²ã³åç¡ŒçŽ çãæããããã
ãã®ä»ãAlCl3ïŒGaCl3ïŒGaïŒCH3ïŒ3ïŒInCl3ïŒ
TlCl3çãæããããšãåºæ¥ãã 第æååãå«æããå±€é åïŒïŒã«å°å ¥ãã
ã第æååã®å«æéã¯ãå ç©å®€äžã«æµå ¥ããã
第æååå°å ¥çšã®åºçºç©è³ªã®ã¬ã¹æµéãã¬ã¹æµ
éæ¯ãæŸé»ãã¯ãŒãæ¯æäœæž©åºŠãå ç©å®€å ã®å§å
çãå¶åŸ¡ããããšã«ãã€ãŠä»»æã«å¶åŸ¡ããåŸãã ã¹ããã¿ãŒãªã³ã°æ³ã«ãã€ãŠãé žçŽ ååãå«æ
ããå±€é åïŒïŒ¯ïŒã圢æããã«ã¯ãåçµæ¶åã¯å€
çµæ¶ã®SiãŠãšãŒããŒåã¯SiO2ãŠãšãŒããŒãåã¯Si
ãšSiO2ãæ··åãããŠå«æãããŠãããŠãšãŒããŒ
ãã¿ãŒã²ãããšããŠãããçãçš®ã ã®ã¬ã¹é°å²æ°
äžã§ã¹ããã¿ãŒãªã³ã°ããããšã«ãã€ãŠè¡ãã°è¯
ãã äŸãã°ãSiãŠãšãŒããŒãã¿ãŒã²ãããšããŠäœ¿çš
ããã°ãé žçŽ ååãšå¿ èŠã«å¿ããŠæ°ŽçŽ åååã¯ïŒ
åã³ããã²ã³ååãå°å ¥ããçºã®åæã¬ã¹ããå¿
èŠã«å¿ããŠçšéã¬ã¹ã§çšéããŠãã¹ããã¿ãŒçšã®
å ç©å®€äžã«å°å ¥ããããçã®ã¬ã¹ã®ã¬ã¹ãã©ãºã
ã圢æããŠåèšSiãŠãšãŒããŒãã¹ããã¿ãŒãªã³ã°
ããã°è¯ãã åãå¥ã«ã¯ãSiãšSiO2ãšã¯å¥ã ã®ã¿ãŒã²ãã
ãšããŠãåã¯SiãšSiO2ã®æ··åããäžæã®ã¿ãŒã²
ããã䜿çšããããšã«ãã€ãŠãã¹ããã¿ãŒçšã®ã¬
ã¹ãšããŠã®çšéã¬ã¹ã®é°å²æ°äžã§åã¯å°ãªããšã
æ°ŽçŽ ååïŒïŒšïŒåã¯ïŒåã³ããã²ã³ååïŒïŒžïŒã
æ§æååãšããŠå«æããã¬ã¹é°å²æ°äžã§ã¹ããã¿
ãŒãªã³ã°ããããšã«ãã€ãŠæããããé žçŽ ååå°
å ¥çšã®åæã¬ã¹ãšããŠã¯ãå è¿°ããã°ããŒæŸé»ã®
äŸã§ç€ºããåæã¬ã¹ã®äžã®é žçŽ ååå°å ¥çšã®åæ
ã¬ã¹ããã¹ããã¿ãŒãªã³ã°ã®å Žåã«ãæå¹ãªã¬ã¹
ãšããŠäœ¿çšããåŸãã æ¬çºæã«ãããŠãéæ¶è³ªå±€ãã°ããŒæŸé»æ³ã§åœ¢
æããéã«äœ¿çšãããçšéã¬ã¹ãæãã¯ã¹ããã¿
ãªã³ã°æ³ã§åœ¢æãããéã«äœ¿çšãããã¹ããã¿ãŒ
ãªã³ã°çšã®ã¬ã¹ãšããŠã¯ãæè¬çšã¬ã¹ãäŸãã°
HeïŒNeïŒArçã奜é©ãªãã®ãšããŠæããããš
ãåºæ¥ãã 次ã«ã第ïŒå³ã«ã°ããŒæŸé»å解æ³ã«ããå å°é»
éšæã®è£œé è£ çœ®ã瀺ãã å³äžã®ïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒ
ïŒã®ã¬ã¹ãã³ãã«ã¯ãæ¬çºæã®å€«ã ã®å±€é åã圢
æããããã®åæã¬ã¹ãå¯å°ãããŠããããã®ïŒ
äŸãšããŠããšãã°ïŒïŒïŒã¯ãHeã§çšéããã
SiH4ã¬ã¹ïŒçŽåºŠ99.999ïŒ ã以äžSiH4ïŒHeãšç¥
ããïŒãã³ããïŒïŒïŒã¯Heã§çšéãããB2H6ã¬
ã¹ïŒçŽåºŠ99.999ïŒ ã以äžB2H6ïŒHeãšç¥ããïŒã
ã³ããïŒïŒïŒã¯Heã§çšéãããSi2H6ã¬ã¹ïŒçŽåºŠ
99.99ïŒ ã以äžSi2H6ïŒHeãšç¥ããïŒãã³ããïŒïŒ
ïŒã¯NOã¬ã¹ïŒçŽåºŠ99.999ïŒ ïŒãã³ããïŒïŒïŒã¯
Heã§åžéãããSiF4ã¬ã¹ïŒçŽåºŠ99.999ïŒ ã以äž
SiF4ïŒHeãšç¥ããïŒãã³ãã§ããã ãããã®ã¬ã¹ãåå¿å®€ïŒïŒïŒã«æµå ¥ãããã«ã¯
ã¬ã¹ãã³ãïŒïŒïŒãïŒïŒïŒã®ãã«ããïŒïŒïŒãïŒ
ïŒïŒããªãŒã¯ãã«ãïŒïŒïŒãéããããŠããããš
ã確èªããåãæµå ¥ãã«ãïŒïŒïŒãïŒïŒïŒãæµåº
ãã«ãïŒïŒïŒãïŒïŒïŒïŒãè£å©ãã«ãïŒïŒïŒãé
ãããŠããããšã確èªããŠå ã¥ã¡ã€ã³ãã«ãïŒïŒ
ïŒãéããŠåå¿å®€ïŒïŒïŒãã¬ã¹é 管å ãææ°ã
ãã次ã«ç空èšïŒïŒïŒã®èªã¿ãçŽïŒÃ10-6torrã«
ãªã€ãæç¹ã§è£å©ãã«ãïŒïŒïŒïŒïŒïŒïŒãæµåºã
ã«ãïŒïŒïŒãïŒïŒïŒãéããã åºäœã·ãªã³ããŒïŒïŒïŒäžã«éæ¶è³ªå±€ãæ§æãã
å±€é åïŒïŒã圢æããå Žåã®ïŒäŸãããããšã
ã¬ã¹ãã³ãïŒïŒïŒããSiH4ïŒHeã¬ã¹ãã¬ã¹ãã³
ãïŒïŒïŒããB2H6ïŒHeã¬ã¹ããã«ãïŒïŒïŒïŒïŒ
ïŒïŒãéããŠåºå£å§ã²ãŒãžïŒïŒïŒïŒïŒïŒïŒã®å§ã
ïŒKgïŒcm2ã«èª¿æŽããæµå ¥ãã«ãïŒïŒïŒïŒïŒïŒïŒã
åŸã ã«éããŠããã¹ããã³ã³ãããŒã©ïŒïŒïŒïŒïŒ
ïŒïŒå ã«æµå ¥ããããåŒãç¶ããŠæµåºãã«ãïŒïŒ
ïŒïŒïŒïŒïŒãè£å©ãã«ãïŒïŒïŒãåŸã ã«éããŠ
倫ã ã®ã¬ã¹ãåå¿å®€ïŒïŒïŒã«æµå ¥ãããããã®ãš
ãã®SiH4ïŒHeã¬ã¹æµéãšB2H6ïŒHeã¬ã¹æµéãš
ã®æ¯ãææã®å€ã«ãªãããã«æµåºãã«ãïŒïŒïŒïŒ
ïŒïŒïŒã調æŽããåãåå¿å®€å ã®å§åãææã®å€
ã«ãªãããã«ç空èšïŒïŒïŒã®èªã¿ãèŠãªããã¡ã€
ã³ãã«ãïŒïŒïŒã®éå£ã調æŽããããããŠåºäœã·
ãªã³ããŒïŒïŒïŒã®æž©åºŠãå ç±ããŒã¿ãŒïŒïŒïŒã«ã
ã50ã400âã®æž©åºŠã«èšå®ãããŠããããšã確èª
ããåŸãé»æºïŒïŒïŒãææã®é»åã«èšå®ããŠåå¿
宀ïŒïŒïŒå ã«ã°ããŒæŸé»ãçèµ·ãããŠå±€é å
ïŒïŒãæ¯æäœäžã«åœ¢æããã å±€é åïŒïŒ¯ïŒã圢æããã«ã¯å±€é åïŒïŒã®åœ¢
æã®éã«äœ¿çšããB2H6ïŒHeã¬ã¹ã®ãããã«åã¯
該ã¬ã¹ã«å ããŠNOã¬ã¹ãçšããŠå±€åœ¢æãè¡ãª
ãã 倫ã ã®å±€ã圢æããéã«å¿ èŠãªã¬ã¹ä»¥å€ã®æµåº
ãã«ãã¯å šãŠéããããšã¯èšããŸã§ããªããåã
倫ã ã®å±€ã圢æããéãåå±€ã®åœ¢æã«äœ¿çšããã¬
ã¹ãåå¿å®€ïŒïŒïŒå ãæµåºãã«ãïŒïŒïŒãïŒïŒïŒ
ããåå¿å®€ïŒïŒïŒå ã«è³ãé 管å ã«æ®çããããš
ãé¿ããããã«ãæµåºãã«ãïŒïŒïŒãïŒïŒïŒãé
ãè£å©ãã«ãïŒïŒïŒïŒïŒïŒïŒãéããŠã¡ã€ã³ãã«
ãïŒïŒïŒãå šéããŠç³»å ãäžæŠé«ç空ã«ææ°ãã
æäœãå¿ èŠã«å¿ããŠè¡ãªãã åã局圢æãè¡ãªã€ãŠããéã¯å±€åœ¢æã®åäžå
ãèšãããåºäœã·ãªã³ããŒïŒïŒïŒã¯ã¢ãŒã¿ïŒïŒïŒ
ã«ããäžå®é床ã§å転ãããã 以äžå®æœäŸã«ã€ããŠèª¬æããã åèäŸ ïŒ ç¬¬ïŒå³ã«ç€ºãã補é è£ çœ®ã«ãããã¢ã«ãããŠã
åºæ¿äžã«ã以äžã®æ¡ä»¶ã§å±€åœ¢æãè¡ã€ãã
ç·ãå¯èŠå ç·ãèµ€å€å ç·ãç·ãγç·çã瀺ãïŒ
ã®æ§ãªé»ç£æ³¢ã«æåæ§ã®ããå å°é»éšæã«é¢ã
ãã åºäœæ®åè£ çœ®ãæãã¯å圢æåéã«ãããé»å
åççšå圢æéšæãåçš¿èªåè£ çœ®ã«ãããå å°é»
å±€ã圢æããå å°é»ææãšããŠã¯ãé«æ床ã§ã
SNæ¯ãå é»æµïŒIpïŒïŒæé»æµïŒIdïŒããé«ããç §
å°ããé»ç£æ³¢ã®ã¹ãã¯ãã«ç¹æ§ã«ãããã³ã°ãã
åžåã¹ãã¯ãã«ç¹æ§ãæããããšãå å¿çæ§ãé
ããææã®ææµæå€ãæããããšã䜿çšæã«ãã
ãŠäººäœã«å¯ŸããŠç¡å ¬å®³ã§ããããšãæŽã«ã¯åºäœæ®
åè£ çœ®ã«ãããŠã¯ãæ®åãæå®æéå ã«å®¹æã«åŠ
çããããšãã§ããããšçã®ç¹æ§ãèŠæ±ãããã
æ®ã«ãäºåæ©ãšããŠãªãã€ã¹ã§äœ¿çšãããé»åå
çè£ çœ®å ã«çµèŸŒãŸããé»ååççšå圢æéšæã®å Ž
åã«ã¯ãäžèšã®äœ¿çšæã«ãããç¡å ¬å®³æ§ã¯éèŠãª
ç¹ã§ããã ãã®æ§ãªç¹ã«ç«èããŠæè¿æ³šç®ãããŠããå å°
é»ææã«ã¢ã¢ã«ãã¢ã¹ã·ãªã³ã³ïŒä»¥åŸïœâSiãšè¡š
èšãïŒããããäŸãã°ãç¬åœå ¬é第2746967å·å ¬
å ±ãå第2855718å·å ¬å ±ã«ã¯é»ååççšå圢æéš
æãšããŠãç¬åœå ¬é第2933411å·å ¬å ±ã«ã¯å é»å€
æèªåè£ çœ®ãžã®å¿çšãèšèŒãããŠããã èä¹ããåŸæ¥ã®ïœâSiã§æ§æãããå å°é»å±€ã
æããå å°é»éšæã¯ãææµæå€ãå æ床ãå å¿ç
æ§çã®é»æ°çãå åŠçãå å°é»çç¹æ§ãåã³äœ¿çš
ç°å¢ç¹æ§ã®ç¹ãæŽã«ã¯çµæçå®å®æ§åã³èä¹ æ§ã®
ç¹ã«ãããŠãåã ãåã ã«ã¯ç¹æ§ã®åäžãèšãã
ãŠãããç·åçãªç¹æ§åäžãèšãäžã§æŽã«æ¹è¯ã
ããäœå°ãåããã®ãå®æ ã§ããã äŸãã°ãé»ååççšå圢æéšæã«é©çšããå Žå
ã«ãé«å æ床åãé«ææµæåãåæã«èšãããšã
ããšåŸæ¥ã«ãããŠã¯ãã®äœ¿çšæã«ãããŠæ®çé»äœ
ãæ®ãå Žåã床ã 芳枬ããããã®çš®ã®å å°é»éšæ
ã¯é·æéç¹°è¿ã䜿çšãç¶ãããšãç¹°è¿ã䜿çšã«ã
ãç²åŽã®èç©ãèµ·ã€ãŠãæ®åãçããæè¬ãŽãŒã¹
ãçŸè±¡ãçºããæ§ã«ãªãçã®äžéœåãªç¹ãå°ãªã
ãªãã€ãã åãïœâSiææã§å å°é»å±€ãæ§æããå Žåã«
ã¯ããã®é»æ°çãå å°é»çç¹æ§ã®æ¹è¯ãèšããã
ã«ãæ°ŽçŽ ååæãã¯åŒçŽ ååãå¡©çŽ ååçã®ãã
ã²ã³ååãåã³é»æ°äŒå°åã®å¶åŸ¡ã®ããã«ç¡ŒçŽ å
åãçååçãæãã¯ãã®ä»ã®ç¹æ§æ¹è¯ã®ããã«
ä»ã®ååããåã æ§æååãšããŠå å°é»å±€äžã«å«
æãããããããçã®æ§æååã®å«æã®ä»æ¹åŠäœ
ã«ãã€ãŠã¯ã圢æããå±€ã®é»æ°çæãã¯å å°é»ç
ç¹æ§ãèå§æ§ã«åé¡ãçããå Žåããã€ãã å³ã¡ãäŸãã°ã圢æããå å°é»å±€äžã«å ç §å°ã«
ãã€ãŠçºçããããªããã€ãªã¢ã®è©²å±€äžã§ã®å¯¿åœ
ãå åã§ãªãããšãæéšã«ãããŠãæ¯æäœåŽãã
ã®é»è·ã®æ³šå ¥ã®é»æ¢ãå åã§ãªãããšãæãã¯ã
転åçŽã«è»¢åãããç»åã«ä¿ã«ãçœãã±ããšåŒã°
ãããå±æçãªæŸé»ç Žå£çŸè±¡ã«ãããšæãããç»
åæ¬ é¥ããäŸãã°ãã¯ãªãŒãã³ã°ã«ããã¬ãŒãã
çšãããšãã®æºæŠã«ãããšæããããä¿ã«ãçœã¹
ãžããšäºãããŠããæè¬ç»åæ¬ é¥ãçãããããŠ
ãããåãå€æ¹¿é°å²æ°äžã§äœ¿çšããããæãã¯å€
湿é°å²æ°äžã«é·æéæŸçœ®ããçŽåŸã«äœ¿çšãããšä¿
ã«äºãç»åã®ãã±ãçããå Žåãå°ãªããªãã€
ãã æŽã«ã¯ãå±€åãåæ°ÎŒä»¥äžã«ãªããšå±€åœ¢æçšã®
ç空å ç©å®€ããåãåºããåŸã空æ°äžã§ã®æŸçœ®æ
éã®çµéãšå ±ã«ãæ¯æäœè¡šé¢ããã®å±€ã®æµ®ããå¥
é¢ãæãã¯å±€ã«äºè£ãçããçã®çŸè±¡ãåŒèµ·ãå
ã¡ã«ãªãããã®çŸè±¡ã¯ãæ®ã«æ¯æäœãéåžžãé»å
åçåéã«æŒããŠäœ¿çšãããŠãããã©ã ç¶æ¯æäœ
ã®å Žåã«å€ãèµ·ãçãçµæçå®å®æ§ã®ç¹ã«æŒããŠ
解決ãããå¯ãç¹ãããã åŸã€ãŠïœâSiææãã®ãã®ã®ç¹æ§æ¹è¯ãèšãã
ãäžæ¹ã§å å°é»éšæãèšèšããéã«ãäžèšããæ§
ãªåé¡ã®ç·ãŠã解決ãããæ§ã«å·¥å€«ãããå¿ èŠã
ããã æ¬çºæã¯äžèšã®è«žç¹ã«éã¿æããããã®ã§ãïœ
âSiã«å°±ãŠé»ååççšå圢æéšæãåºäœæ®åè£
眮ãèªåè£ çœ®çã«äœ¿çšãããå å°é»éšæãšããŠã®
é©çšæ§ãšãã®å¿çšæ§ãšãã芳ç¹ããç·æ¬çã«éæ
ç 究æ€èšãç¶ããçµæãã·ãªã³ã³ååãæ¯äœãš
ããæ°ŽçŽ ååïŒïŒšïŒåã¯ããã²ã³ååïŒïŒžïŒã®ã
ãããäžæ¹ãå°ãªããšãå«æããã¢ã¢ã«ãã¢ã¹æ
æãæè¬æ°ŽçŽ åã¢ã¢ã«ãã¢ã¹ã·ãªã³ã³ãããã²ã³
åã¢ã¢ã«ãã¢ã¹ã·ãªã³ã³ãæãã¯ããã²ã³å«ææ°Ž
çŽ åã¢ã¢ã«ãã¢ã¹ã·ãªã³ã³ã以åŸããçã®ç·ç§°ç
è¡šèšãšããŠãïœâSiïŒïŒšïŒïŒžïŒãã䜿çšããããã
æ§æãããå å°é»å±€ãæããå å°é»éšæã®å±€æ§æ
ã以åŸã«èª¬æãããæ§ãªç¹å®åã®äžã«èšèšãããŠ
äœæãããå å°é»éšæã¯å®çšäžèããåªããç¹æ§
ã瀺ãã°ããã§ãªããåŸæ¥ã®å å°é»éšæãšèŒã¹ãŠ
ã¿ãŠãããããç¹ã«ãããŠåé§ããŠããããšãæ®
ã«é»ååççšã®å å°é»éšæãšããŠèããåªããç¹
æ§ãæããŠããããšãèŠåºããç¹ã«åºã¥ããŠã
ãã æ¬çºæã¯é»æ°çãå åŠçãå å°é»çç¹æ§ã䜿çš
ç°å¢ã«æ®ãã©äŸåãªãå®è³ªçã«åžžæå®å®ããŠã
ããèå ç²åŽã«èããé·ããç¹°è¿ã䜿çšã«éããŠ
ãå£åçŸè±¡ãèµ·ããèä¹ æ§ãè湿æ§ã«åªããæ®ç
é»äœãå šãåã¯æ®ãã©èŠ³æž¬ãããªãå å°é»éšæã
æäŸããããšãäž»ããç®çãšããã æ¬çºæã®ä»ã®ç®çã¯ãæ¯æäœäžã«èšããããå±€
ãšæ¯æäœãšã®éãç©å±€ãããå±€ã®åå±€éã«æŒãã
å¯çæ§ã«åªããæ§é é åçã«ç·»å¯ã§å®å®çã§ã
ããå±€å質ã®é«ãå å°é»éšæãæäŸããããšã§ã
ãã æ¬çºæã®ä»ã®ç®çã¯ãé»ååççšå圢æéšæãš
ããŠé©çšãããå Žåãéé»å圢æã®ããã®åž¯é»åŠ
çã®éã®é»è·ä¿æèœåãå åãããéåžžã®é»åå
çæ³ã極ããŠæå¹ã«é©çšããåŸãåªããé»ååç
ç¹æ§ãæããå å°é»éšæãæäŸããããšã§ããã æ¬çºæã®æŽã«ä»ã®ç®çã¯ãé·æã®äœ¿çšã«æŒããŠ
ç»åæ¬ é¥ãç»åã®ãã±ãå šããªããæ¿åºŠãé«ãã
ããŒãããŒã³ãé®®æã«åºãŠäžã€è§£å床ã®é«ããé«
å質ç»åãåŸãããšã容æã«ã§ããé»ååççšã®
å å°é»éšæãæäŸããããšã§ããã æ¬çºæã®æŽã«ããïŒã€ã®ç®çã¯ãé«å æ床æ§ã
é«SNæ¯ç¹æ§åã³é«èå§æ§ãæããå å°é»éšæã
æäŸããããšã§ãããã æ¬çºæã®å å°é»éšæã¯å å°é»éšæçšã®æ¯æäœ
ãšãã·ãªã³ã³ååãæ¯äœãšããæ§æååãšããŠæ°Ž
çŽ åååã¯ããã²ã³ååã®ããããäžæ¹ãå°ãªã
ãšãå«æããéæ¶è³ªææã§æ§æãããå å°é»æ§ã
瀺ãéæ¶è³ªå±€ãšãæããå å°é»éšæã«ãããŠã åèšéæ¶è³ªå±€ããæ§æååãšããŠé žçŽ ååãšç¬¬
æååãšãå«æããåèšæ¯æäœäžã«ç©å±€ããã
å±€é åãšã該局é åäžã«èšãããåèšéæ¶è³ªå±€ã®
è¡šé¢å±€é ååã³åèšç©å±€å±€é åã«å¯ŸããŠãæ§æå
åãšããŠåèšé žçŽ åååã¯åèšç¬¬æååã®äžæ¹
ãå«æããŠããäºã§æ§æããææãç°ãªã€ãŠãã
å±€é åãšãæããŠããã æ§æååãšããŠé žçŽ ååãå«æãã第äžã®å±€é
åã®å±€åãtOãšããæ§æååãšããŠåšæåŸè¡šç¬¬
æã«å±ããååãå«æãã第äºã®å±€é åãšãæã
ã第äºã®å±€é åã®å±€åãtBãšããåèšã®éæ¶è³ªå±€
ã®å±€åãšç¬¬äºã®å±€é åã®å±€åtBãšã®å·®ããšãã tBïŒïŒïŒŽïŒtBïŒâŠ0.4 äžã€ã tOâ tB ã®é¢ä¿ãæç«ããäºãç¹åŸŽãšããã å³ã¡ãæ¬é¡çºæã®å å°é»éšæã¯åèšè£æ£ããã
ç¹èš±è«æ±ã®ç¯å²ã«èšèŒãããç¹æã®æ§æãæã€ã
ãšã«ãã€ãŠãé«æ床ãé«SNæ¯ãé«è§£å床ã§ãã€
ãŠã察å ç²åŽã«é·ããæ¯æäœäžã«èšããããéæ¶
質局ã匷éã§ããæ¯æäœåã³ç©å±€ãããåå±€éã«
ãããŠå¯çæ§ã«åªããé«éã§é·æéé£ç¶çã«ç¹°è¿
ã䜿çšãåŸããã®ã§ãããŸããå ·äœçã«ã¯ãé žçŽ
ååãå å°é»éšæã®æ¯æäœåŽã®éæ¶è³ªå±€é åå ã«
å«æãããããšã«ããé«ææµæåãšæ¯æäœãšéæ¶
質局ãšã®å¯çæ§åã³åèšé žçŽ ååãå«ãé åãã
äžã«ç©å±€ãããéæ¶è³ªå±€ãšã®å¯çæ§ãå³ãããšã
åºæ¥ãŸãããŸãã第æååãå å°é»éšæã®æ¯æ
äœåŽã®éæ¶è³ªå±€é åå ã«å«æãããããšã«ããã
垯é»åŠçã®éã«æ¯æäœåŽããéæ¶è³ªå±€ã®å éšã«é»
è·ãæ³šå ¥ãããã®ãé»æ¢ããããšãã§ããŸãã ããã§ãé žçŽ åååã³ç¬¬æååãå«ãŸããé
æ¶è³ªå±€ãããããå šãæããŠããªãäžå±€ã®åèšïœ
âSiã®éæ¶è³ªå±€ãšçŽæ¥æ¥ãããšããã®çé¢ã§ã¯æ
è»æ§ãäœäžãããããæ¬çºæã§ã¯éæ¶è³ªå±€å šäœã
é žçŽ åååã³ç¬¬æååã®æç¡ã§ãã€ãŠãïŒçš®ã«
åé¡ããŠããããã®çé¢ã§ã®æè»æ§ãåäžããå
ããŠãé žçŽ åååã¯åã³ç¬¬æååã®äžæ¹ãæã
ãããšã«ãããã®åç¬ã®äœçšå¹æãéç«ãããã
ãšãåºæ¥ããã®ã§ããã äžèšããæ§ãªå±€æ§æãåãæ§ã«ããŠèšèšããã
æ¬çºæã®å å°é»éšæã¯ãåèšããè«žåé¡ã®ç·ãŠã
解決ãåŸã極ããŠåªããé»æ°çãå åŠçãå å°é»
çç¹æ§ãèå§æ§åã³äœ¿çšç°å¢ç¹æ§ã瀺ãã æ®ã«ãé»ååççšå圢æéšæãšããŠé©çšããã
å Žåã«ã¯ãç»å圢æãžã®æ®çé»äœã®åœ±é¿ãå šããª
ãããã®é»æ°çç¹æ§ãå®å®ããŠããé«æ床ã§ãé«
SNæ¯ãæãããã®ã§ãã€ãŠãèå ç²åŽãç¹°è¿ã
䜿çšç¹æ§ã«é·ããæ¿åºŠãé«ããããŒãããŒã³ãé®®
æã«åºãŠãäžã€è§£å床ã®é«ããé«å質ã®ç»åãå®
å®ããŠç¹°è¿ãåŸãããšãã§ããã åãæ¬çºæã®å å°é»éšæã¯æ¯æäœäžã«åœ¢æãã
ãéæ¶è³ªå±€ããå±€èªäœã匷éã§ãã€ãŠãäžã€æ¯æ
äœãšã®å¯çæ§ã«èããåªããŠãããé«éã§é·æé
é£ç¶çã«ç¹°è¿ã䜿çšããããšãåºæ¥ãã 以äžãå³é¢ã«åŸã€ãŠãæ¬çºæã®å å°é»éšæã«å°±
ãŠè©³çŽ°ã«èª¬æããã 第ïŒå³ã¯ãæ¬çºæã®ç¬¬ïŒã®å®æœæ æ§äŸã®å å°é»
éšæã®å±€æ§æã説æããããã«æš¡åŒçã«ç€ºããæš¡
åŒçæ§æå³ã§ããã 第ïŒå³ã«ç€ºãå å°é»éšæïŒïŒïŒã¯ãå å°é»éšæ
çšãšããŠã®æ¯æäœïŒïŒïŒã®äžã«ãïœâSiïŒïŒšïŒïŒžïŒ
ããæããå å°é»æ§ã瀺ãéæ¶è³ªå±€ïŒïŒïŒãæã
ãã éæ¶è³ªå±€ïŒïŒïŒã¯ãæ§æååãšããŠé žçŽ ååã
å«æãã第äžã®å±€é åïŒïŒ¯ïŒïŒïŒïŒãåšæåŸè¡šç¬¬
æã«å±ããååïŒç¬¬æååïŒãå«æãã第äº
ã®å±€é åïŒïŒïŒïŒïŒãåã³ç¬¬äºã®å±€é åïŒïŒ
ïŒïŒïŒäžã«ãé žçŽ åååã³ç¬¬æååãå«æãã
ãŠãªãè¡šé¢å±€é åïŒïŒïŒãšããæãå±€æ§é ãæã
ãã 第äžã®å±€é åïŒïŒ¯ïŒïŒïŒïŒãšè¡šé¢å±€é åïŒïŒïŒ
ãšã®éã«èšããããŠããå±€é åïŒïŒïŒã«ã¯ç¬¬æ
ååã¯å«æãããŠãããé žçŽ ååã¯å«æãããŠãª
ãã 第äžã®å±€é åïŒïŒ¯ïŒïŒïŒïŒã«å«æãããé žçŽ å
åã¯ãæãã¯ç¬¬äºã®å±€é åïŒïŒïŒïŒïŒã«å«æã
ãã第æååã¯ãåå±€é åã«æŒããŠãå±€åæ¹å
ã«ã¯é£ç¶çã«åäžã«ååžããæ¯æäœïŒïŒïŒã®è¡šé¢
ã«å®è³ªçã«å¹³è¡ãªé¢å ã«æŒããŠã¯é£ç¶çã«äžã€å®
質çã«åäžã«ååžãããã®ã奜ãŸãããã®ã§ã
ãã 第ïŒå³ã«ç€ºãå Žåã®äŸã®æ§ãªæ¬çºæã®å å°é»éš
æã«æŒããŠã¯ãéæ¶è³ªå±€ïŒïŒïŒã®è¡šé¢éšåã«ã¯ã
é žçŽ åååã³ç¬¬æååãå«æãããªãå±€é å
ïŒç¬¬ïŒå³ã«ç€ºãè¡šé¢å±€é åïŒïŒïŒã«çžåœïŒãæã
ããã第æååã¯å«æãããŠããããé žçŽ åå
ã¯å«æãããªãå±€é åïŒç¬¬ïŒå³ã«ç€ºãå±€é åïŒïŒ
ïŒïŒã¯å¿ ãããèšããããããšãèŠããªãã å³ã¡ãäŸãã°ç¬¬ïŒå³ã«æŒããŠã第äžã®å±€é åïŒ
ïŒïŒïŒïŒ¯ïŒãšç¬¬äºã®å±€é åïŒïŒïŒïŒïŒãšãåã
å±€é åã§ãã€ãŠãè¯ãããåã第äžã®å±€é å
ïŒïŒ¯ïŒïŒïŒïŒã®äžã«ç¬¬äºã®å±€é åïŒïŒïŒïŒïŒã
èšããããŠãè¯ããã®ã§ããã æ¬çºæã®å å°é»éšæã«æŒããŠã¯ã第äžã®å±€é å
ïŒïŒ¯ïŒã«ã¯ãé žçŽ ååã®å«æã«ãã€ãŠãé«ææµæ
åãšãéæ¶è³ªå±€ãçŽæ¥èšããããæ¯æäœãšã®éã®
å¯çæ§ã®åäžãéç¹çã«èšãããè¡šé¢å±€é åã«ã¯
é žçŽ ååãå«æãããã«è湿æ§ãèã³ããã€ãªã³
æ§ã®äžå±€ã®åäžãšé«æ床åãéç¹çã«èšãããŠã
ãã æ®ã«ã第ïŒå³ã«ç€ºãå å°é»éšæïŒïŒïŒã®æ§ã«ã
éæ¶è³ªå±€ïŒïŒïŒããé žçŽ ååãå«æãã第äžã®å±€
é åïŒïŒ¯ïŒïŒïŒïŒã第æååãå«æãã第äºã®
å±€é åïŒïŒïŒïŒïŒãé žçŽ ååã®å«æãããŠããª
ãå±€é åïŒïŒïŒãåã³é žçŽ åååã³ç¬¬æååã®
å«æãããŠããªãè¡šé¢å±€é åïŒïŒïŒãšãæãã第
äžã®å±€é åïŒïŒ¯ïŒïŒïŒïŒãšç¬¬äºã®å±€é åïŒïŒïŒ
ïŒïŒãšãå ±æããå±€é åãæããå±€æ§é ã®å Žåã«
ããè¯å¥œãªçµæãåŸãããã æ¬çºæã®å å°é»éšæã«æŒããŠã¯éæ¶è³ªå±€ã®äžéš
ãæ§æãé žçŽ ååã®å«æããã第äžã®å±€é å
ïŒïŒ¯ïŒã¯ãïŒã€ã«ã¯éæ¶è³ªå±€ã®æ¯æäœãšã®å¯çæ§
ã®åäžãèšãç®çã®çºã«ãåãéæ¶è³ªå±€ã®äžéšã
æ§æã第æååã®å«æããã第äºã®å±€é å
ïŒïŒã¯ãïŒã€ã«ã¯ãéæ¶è³ªå±€ã®èªç±è¡šé¢åŽãã
垯é»åŠçãæœãããéãæ¯æäœåŽããéæ¶è³ªå±€ã®
å éšã«é»è·ãæ³šå ¥ãããã®ãé»æ¢ããç®çã®çºã«
倫ã ãéæ¶è³ªå±€ã®äžéšãšããŠæ¯æäœãšéæ¶è³ªå±€ãš
ãæ¥åããå±€é åãšããŠãå°ãªããšãäºãã®äžéš
ãå ±æããæ§é ã§èšããããã åãå¥ã«ã¯ç¬¬äºã®å±€é åïŒïŒã®æ¯æäœãšãæ
ãã¯ç¬¬äºã®å±€é åïŒïŒã®äžã«çŽæ¥èšããããå±€
é åãšã®å¯çæ§ã®åäžãããäžå±€å¹æçã«éæã
ãã«ã¯ã第äžã®å±€é åïŒïŒ¯ïŒãæ¯æäœãšã®æ¥è§Šç
é¢ããã第äºã®å±€é åïŒïŒãå å ããæ§ã«èšã
ããè©°ããæ¯æäœãšã®æ¥è§Šçé¢ãã第äºã®å±€é å
ïŒïŒã®äžæ¹ãŸã§å»¶åšãããŠç¬¬äºã®å±€é åïŒïŒ
ãå«ãã å±€æ§é ãšãªãæ§ã«ç¬¬äžã®å±€é åïŒïŒ¯ïŒã
éæ¶è³ªå±€äžã«èšããã®ã奜ãŸãããã®ã§ããã æ¬çºæã«ãããŠãéæ¶è³ªå±€ãæ§æãã第äºã®å±€
é åïŒïŒäžã«å«æãããåšæåŸè¡šç¬¬æã«å±ã
ãååãšããŠäœ¿çšãããã®ã¯ãïŒç¡ŒçŽ ïŒãAlïŒã¢
ã«ãããŠã ïŒãGaïŒã¬ãªãŠã ïŒãInïŒã€ã³ãžãŠã ïŒã
TlïŒã¿ãªãŠã ïŒçã§ãããæ®ã«å¥œé©ã«çšãããã
ã®ã¯ïŒ¢ïŒGaã§ããã æ¬çºæã«ãããŠã第äºã®å±€é åïŒïŒäžã«å«æ
ããã第æååã®å«æéãšããŠã¯ãæ¬çºæã®ç®
çãå¹æçã«éæãããæ§ã«ææã«åŸã€ãŠé©å®æ±º
ããããããå±€é åïŒïŒã«æŒããŠãéåžžã¯30ã
ïŒÃ104atomic ppmã奜ãŸããã¯50ãïŒÃ
104atomic ppmãæé©ã«ã¯100ãïŒÃ103atomic
ppmãšãããã®ãæãŸãããã®ã§ããã 第äžã®å±€é åïŒïŒ¯ïŒäžã«å«æãããé žçŽ ååã®
éã«å°±ãŠã圢æãããå å°é»éšæã«èŠæ±ãããç¹
æ§ã«å¿ããŠææã«åŸã€ãŠé©å®æ±ºããããããéåžž
ã®å Žåã0.001ã50atomicïŒ ã奜ãŸããã¯ã0.002
ã40atomicïŒ ãæé©ã«ã¯0.003ã30atomicïŒ ãšã
ããã®ãæãŸãããã®ã§ããã æ¬çºæã®å å°é»éšæã«æŒããŠã¯ã第æååã®
å«æãããŠããå±€é åïŒïŒã®å±€åtBãšïŒç¬¬ïŒå³
ã§ã¯å±€é åïŒïŒïŒã®å±€åïŒãå±€é åïŒïŒã®äžã«
èšãããããå±€é åïŒïŒãé€ããéšåã®å±€é å
ïŒç¬¬ïŒå³ã§ã¯å±€é åïŒïŒïŒïŒã®å±€åãšã¯ããã®
é¢ä¿ãå ã«ç€ºããæ§ãªé¢ä¿åŒãæºè¶³ããæ§ã«æ±ºã
ããããã®ã§ãããããã奜ãŸããã¯ãå ã«ç€ºã
ãé¢ä¿åŒã®å€ã0.35以äžãæé©ã«ã¯0.3以äžãšã
ããã®ãæãŸããã æ¬çºæã«æŒããŠã第æååã®å«æãããå±€é
åïŒïŒã®å±€åtBãšããŠã¯ãéåžžã¯30â«ã5ÎŒã奜
é©ã«ã¯40â«ã4ÎŒãæé©ã«ã¯50â«ã3ÎŒãšãããã®
ãæãŸãããã®ã§ããã åãåèšå±€åãšå±€åtBãšã®åïŒïŒŽïŒtBïŒãšã
ãŠã¯ãéåžžã¯ïŒã100ÎŒã奜é©ã«ã¯ïŒã80ÎŒãæé©
ã«ã¯ïŒã50ÎŒãšãããã®ãæãŸãããã®ã§ããã é žçŽ ååã®å«æãããå±€é åïŒïŒ¯ïŒã®å±€åtOãš
ããŠã¯ãå°ãªããšããã®äžéšã®å±€é åãå ±æãã
å±€é åïŒïŒã®å±€åtBãšã®é¢ä¿ã«æŒããŠé©å®ææ
ããç®çã«åŸã€ãŠæ±ºå®ãããã®ãæãŸãããå³
ã¡ãå±€é åïŒïŒãšã該局é åïŒïŒãšçŽã«æ¥è§Š
ããæ¯æäœãšã®éã®å¯çæ§ã®åŒ·åãèšãç®çã§ã
ãã°ãå±€é åïŒïŒ¯ïŒã¯ãå±€é åïŒïŒã®æ¯æäœåŽ
端éšå±€é åã«å°ãªããšãèšããããŠããã°è¯ãã
ããå±€é åïŒïŒ¯ïŒã®å±€åtOãšã«ã¯é«ã å±€é å
ïŒïŒã®å±€åtBåã ãããã°è¯ãã åãå±€é åïŒïŒãšè©²å±€é åïŒïŒäžã«çŽã«èš
ããããå±€é åïŒç¬¬ïŒå³ã§ç€ºãã°å±€é åïŒïŒïŒã«
çžåœããïŒãšã®éã®å¯çæ§ã®åŒ·åãèšãã®ã§ãã
ã°ãå±€é åïŒïŒ¯ïŒã¯å±€é åïŒïŒã®æ¯æäœã®èšã
ãŠããåŽãšã¯å察ã®ç«¯éšå±€é åã«å°ãªããšãèšã
ãŠããã°è¯ããããå±€é åïŒïŒ¯ïŒã®å±€åtOãšããŠ
ã¯ãé«ã ãå±€é åïŒïŒã®å±€åtBåã ãããã°è¯
ãã æŽã«ãäžèšïŒã€ã®ç¹ãæºè¶³ããå Žåãèæ ®ãã
ã°å±€é åïŒïŒ¯ïŒã®å±€åtOãšããŠã¯ãå°ãªããšãå±€
é åïŒïŒã®å±€åtBã ãããå¿ èŠããããäžã€ã
ãã®å Žåã¯ãå±€é åïŒïŒ¯ïŒäžã«å±€é åïŒïŒãèš
ããããå±€æ§é ãšãããå¿ èŠãããã å±€é åïŒïŒãšã該局é åïŒïŒäžã«çŽã«èšã
ãããå±€é åãšã®éã®å¯çæ§ãäžå±€å¹æçã«èšã
ã«ã¯å±€é åïŒïŒ¯ïŒãå±€é åïŒïŒã®äžæ¹ïŒæ¯æäœ
ã®ããåŽãšã¯å察æ¹åïŒã«å»¶åšãããã®ã奜ãŸã
ããã®ã§ããã æ¬çºæã«æŒããŠãå±€åtOãšããŠã¯äžèšããç¹ã
èæ ®ãã€ã€ææã«åŸã€ãŠé©å®æ±ºããããããéåžž
ã®å Žå10â«ã10ÎŒã奜é©ã«ã¯20â«ã8ÎŒãæé©ã«ã¯
30â«ã5ÎŒãšãããã®ãæãŸãããã®ã§ããã æ¬çºæã«ãããŠäœ¿çšãããæ¯æäœãšããŠã¯ãå°
é»æ§ã§ãé»æ°çµ¶çžæ§ã§ãã€ãŠãè¯ããå°é»æ§æ¯æ
äœãšããŠã¯ãäŸãã°ãNiCrãã¹ãã³ã¬ã¹ãAlïŒ
CrïŒMoïŒAuïŒNbïŒTaïŒïŒ¶ïŒTiïŒPtïŒPdçã®
éå±åã¯ããçã®åéãæããããã é»æ°çµ¶çžæ§æ¯æäœãšããŠã¯ãããªãšã¹ãã«ãã
ãªãšãã¬ã³ãããªã«ãŒãããŒããã»ã«ããŒãºã¢ã»
ããŒããããªãããã¬ã³ãããªå¡©åããã«ãããª
å¡©åãããªãã³ãããªã¹ãã¬ã³ãããªã¢ããçã®
åææš¹èã®ãã€ã«ã åã¯ã·ãŒããã¬ã©ã¹ãã»ã©ã
ãã¯ãçŽçãé垞䜿çšããããããçã®é»æ°çµ¶çž
æ§æ¯æäœã¯ã奜é©ã«ã¯å°ãªããšããã®äžæ¹ã®è¡šé¢
ãå°é»åŠçããã該å°é»åŠçãããè¡šé¢åŽã«ä»ã®
å±€ãèšããããã®ãæãŸããã äŸãã°ãã¬ã©ã¹ã§ããã°ããã®è¡šé¢ã«ãNiCrïŒ
AlïŒCrïŒMoïŒAuïŒIrïŒNbïŒTaïŒïŒ¶ïŒTiïŒPtïŒ
PdïŒIn2O3ïŒSnO2ïŒITOïŒIn2O3ïŒSnO2ïŒçãã
æãèèãèšããããšã«ãã€ãŠå°é»æ§ãä»äžã
ããæãã¯ããªãšã¹ãã«ãã€ã«ã çã®åææš¹èã
ã€ã«ã ã§ããã°ãNiCrïŒAlïŒAgïŒPbïŒZnïŒNiïŒ
AuïŒCrïŒMoïŒIrïŒNbïŒTaïŒïŒ¶ïŒTiïŒPtçã®é
å±ã®èèãç空èžçãé»åããŒã èžçãã¹ããã¿
ãªã³ã°çã§ãã®è¡šé¢ã«èšããåã¯åèšéå±ã§ãã®
è¡šé¢ãã©ãããŒãåŠçããŠããã®è¡šé¢ã«å°é»æ§ã
ä»äžããããæ¯æäœã®åœ¢ç¶ãšããŠã¯ãåçç¶ãã
ã«ãç¶ãæ¿ç¶çä»»æã®åœ¢ç¶ãšãåŸãææã«ãã€
ãŠããã®åœ¢ç¶ã¯æ±ºå®ãããããäŸãã°ã第ïŒå³ã®
å å°é»éšæïŒïŒïŒãé»ååççšå圢æéšæãšããŠ
䜿çšããã®ã§ããã°é£ç¶é«éè€åã®å Žåã«ã¯ãç¡
端ãã«ãç¶åã¯åçç¶ãšããã®ãæãŸãããæ¯æ
äœã®åãã¯ãææéãã®å å°é»éšæã圢æããã
æ§ã«é©å®æ±ºå®ãããããå å°é»éšæãšããŠå¯ææ§
ãèŠæ±ãããå Žåã«ã¯ãæ¯æäœãšããŠã®æ©èœãå
åçºæ®ãããç¯å²å ã§ããã°å¯èœãªéãèããã
ããèä¹ãããã®æ§ãªå Žåæ¯æäœã®è£œé äžåã³å
æ±ãäžãæ©æ¢°ç匷床çã®ç¹ãããéåžžã¯ã10Ό以
äžãšãããã æ¬çºæã«ãããŠãïœâSiïŒïŒšïŒïŒžïŒã§æ§æãã
ãéæ¶è³ªå±€ã圢æããã«ã¯äŸãã°ã°ããŒæŸé»æ³ã
ã¹ããã¿ãªã³ã°æ³ãæãã¯ã€ãªã³ãã¬ãŒãã€ã³ã°
æ³çã®æŸé»çŸè±¡ãå©çšããç空å ç©æ³ã«ãã€ãŠæ
ããããäŸãã°ãã°ããŒæŸé»æ³ã«ãã€ãŠãïœâSi
ïŒïŒšïŒïŒžïŒã§æ§æãããéæ¶è³ªå±€ã圢æããã«ã¯ã
åºæ¬çã«ã¯ã·ãªã³ã³ååïŒSiïŒãäŸçµŠãåŸãSiäŸ
絊çšã®åæã¬ã¹ãšå ±ã«ãæ°ŽçŽ ååïŒïŒšïŒå°å ¥çšã®
åã¯ïŒåã³ããã²ã³ååïŒïŒžïŒå°å ¥çšã®åæã¬ã¹
ããå éšãæžå§ã«ãåŸãå ç©å®€å ã«å°å ¥ããŠã該
å ç©å®€å ã«ã°ããŒæŸé»ãçèµ·ãããäºãæå®äœçœ®
ã«èšçœ®ãããŠããæå®ã®æ¯æäœè¡šé¢äžã«ïœâSi
ïŒïŒšïŒïŒžïŒããæãå±€ã圢æãããã°è¯ããåã
ã¹ããã¿ãªã³ã°æ³ã§åœ¢æããå Žåã«ã¯ãäŸãã°
ArïŒHeçã®äžæŽ»æ§ã¬ã¹åã¯ããçã®ã¬ã¹ãããŒ
ã¹ãšããæ··åã¬ã¹ã®é°å²æ°äžã§Siã§æ§æãããã¿
ãŒã²ãããã¹ããã¿ãªã³ã°ããéãæ°ŽçŽ åå
ïŒïŒšïŒåã¯ïŒåã³ããã²ã³ååïŒïŒžïŒå°å ¥çšã®ã¬
ã¹ãã¹ããã¿ãªã³ã°çšã®å ç©å®€ã«å°å ¥ããŠããã°
è¯ãã æ¬çºæã«ãããŠãå¿ èŠã«å¿ããŠéæ¶è³ªå±€äžã«å«
æãããããã²ã³ååïŒïŒžïŒãšããŠã¯ãå ·äœçã«
ã¯ããçŽ ãå¡©çŽ ãèçŽ ããšãŠçŽ ãæããããæ®ã«
ããçŽ ãå¡©çŽ ã奜é©ãªãã®ãšããŠæããããšãåº
æ¥ãã æ¬çºæã«ãããŠäœ¿çšããSiäŸçµŠçšã®åæã¬ã¹ãš
ããŠã¯ãSiH4ïŒSi2H6ïŒSi3H8ïŒSi4H10çã®ã¬ã¹
ç¶æ ã®åã¯ã¬ã¹åãåŸãæ°ŽçŽ åç¡ çŽ ïŒã·ã©ã³é¡ïŒ
ãæå¹ã«äœ¿çšããããã®ãšããŠæããããæ®ã«ã
å±€äœæäœæ¥ã®æ±ãæããSiäŸçµŠå¹çã®è¯ãçã®ç¹
ã§SiH4ïŒSi2H6ã奜ãŸãããã®ãšããŠæããã
ãã æ¬çºæã«ãããŠäœ¿çšãããããã²ã³ååå°å ¥çš
ã®åæã¬ã¹ãšããŠæå¹ãªã®ã¯ãå€ãã®ããã²ã³å
åç©ãæããããäŸãã°ããã²ã³ã¬ã¹ãããã²ã³
åç©ãããã²ã³éååç©ãããã²ã³ã§çœ®æããã
ã·ã©ã³èªå°äœçã®ã¬ã¹ç¶æ ã®åã¯ã¬ã¹åãåŸãã
ãã²ã³ååç©ã奜ãŸããæããããã åãæŽã«ã¯ãã·ãªã³ã³ååãšããã²ã³ååãšã
æ§æèŠçŽ ãšããã¬ã¹ç¶æ ã®åã¯ã¬ã¹åãåŸããã
ãã²ã³ååãå«ãç¡ çŽ ååç©ãæå¹ãªãã®ãšããŠ
æ¬çºæã«ãããŠã¯æããããšãåºæ¥ãã æ¬çºæã«ãããŠå¥œé©ã«äœ¿çšãåŸãããã²ã³åå
ç©ãšããŠã¯ãå ·äœçã«ã¯ãããçŽ ãå¡©çŽ ãèçŽ ã
ãšãŠçŽ ã®ããã²ã³ã¬ã¹ãBrFïŒClFïŒClF3ïŒ
BrF5ïŒBrF3ïŒIF3ïŒIF7ïŒIClïŒIBrçã®ããã²ã³
éååç©ãæããããšãåºæ¥ãã ããã²ã³ååãå«ãç¡ çŽ ååç©ãæè¬ãããã²
ã³ååã§çœ®æãããã·ã©ã³èªå°äœãšããŠã¯ãå ·äœ
çã«ã¯äŸãã°SiF4ïŒSi2F6ïŒSiCl4ïŒSiBr4çã®ã
ãã²ã³åç¡ çŽ ã奜ãŸãããã®ãšããŠæããããšã
åºæ¥ãã ãã®æ§ãªããã²ã³ååãå«ãç¡ çŽ ååç©ãæ¡çš
ããŠã°ããŒæŸé»æ³ã«ãã€ãŠæ¬çºæã®ç¹åŸŽçãªå å°
é»éšæã圢æããå Žåã«ã¯ãSiãäŸçµŠãåŸãåæ
ã¬ã¹ãšããŠã®æ°ŽçŽ åç¡ çŽ ã¬ã¹ã䜿çšããªããšãã
æå®ã®æ¯æäœäžã«ããã²ã³ååãå«ãïœâSiãã
æãéæ¶è³ªå±€ã圢æããäºãåºæ¥ãã ã°ããŒæŸé»æ³ã«åŸã€ãŠãããã²ã³ååãå«ãé
æ¶è³ªå±€ã圢æããå Žåãåºæ¬çã«ã¯ãSiäŸçµŠçšã®
åæã¬ã¹ã§ããããã²ã³åç¡ çŽ ã¬ã¹ãšArïŒH2ïŒ
Heçã®ã¬ã¹çãæå®ã®æ··åæ¯ãšã¬ã¹æµéã«ãªã
æ§ã«ããŠéæ¶è³ªå±€ã圢æããå ç©å®€ã«å°å ¥ããã°
ããŒæŸé»ãçèµ·ããŠããçã®ã¬ã¹ã®ãã©ãºãé°å²
æ°ã圢æããããšã«ãã€ãŠãæå®ã®æ¯æäœäžã«é
æ¶è³ªå±€ã圢æãåŸããã®ã§ããããæ°ŽçŽ ååã®å°
å ¥ãèšãçºã«ããçã®ã¬ã¹ã«æŽã«æ°ŽçŽ ååãå«ã
ç¡ çŽ ååç©ã®ã¬ã¹ãæå®éæ··åããŠå±€åœ¢æããŠã
è¯ãã åãåã¬ã¹ã¯åç¬çš®ã®ã¿ã§ãªãæå®ã®æ··åæ¯ã§
è€æ°çš®æ··åããŠäœ¿çšããŠãå·®æ¯ããªããã®ã§ã
ãã åå¿ã¹ããã¿ãªã³ã°æ³æãã¯ã€ãªã³ãã¬ãŒãã€
ã³ã°æ³ã«äŸã€ãŠïœâSiïŒïŒšïŒïŒžïŒããæãéæ¶è³ª
å±€ã圢æããã«ã¯ãäŸãã°ã¹ããã¿ãªã³ã°æ³ã®å Ž
åã«ã¯Siããæãã¿ãŒã²ããã䜿çšããŠãããã
æå®ã®ã¬ã¹ãã©ãºãé°å²æ°äžã§ã¹ããã¿ãªã³ã°
ããã€ãªã³ãã¬ãŒãã€ã³ã°æ³ã®å Žåã«ã¯ãå€çµæ¶
ã·ãªã³ã³åã¯åçµæ¶ã·ãªã³ã³ãèžçºæºãšããŠèžç
ããŒãã«å容ãããã®ã·ãªã³ã³èžçºæºãæµæå ç±
æ³ãæãã¯ãšã¬ã¯ããã³ããŒã æ³ïŒEBæ³ïŒçã«
ãã€ãŠå ç±èžçºããé£ç¿èžçºç©ãæå®ã®ã¬ã¹ãã©
ãºãé°å²æ°äžãééãããäºã§è¡ãäºãåºæ¥ãã ãã®éãã¹ããã¿ãªã³ã°æ³ãã€ãªã³ãã¬ãŒãã€
ã³ã°æ³ã®äœãã®å Žåã«ã圢æãããå±€äžã«ããã²
ã³ååãå°å ¥ããã«ã¯ãåèšã®ããã²ã³ååç©å
ã¯åèšã®ããã²ã³ååãå«ãç¡ çŽ ååç©ã®ã¬ã¹ã
å ç©å®€äžã«å°å ¥ããŠè©²ã¬ã¹ã®ãã©ãºãé°å²æ°ã圢
æããŠããã°è¯ããã®ã§ããã åãæ°ŽçŽ ååãå°å ¥ããå Žåã«ã¯ãæ°ŽçŽ ååå°
å ¥çšã®åæã¬ã¹ãäŸãã°ãH2ãæãã¯åèšãã
ã·ã©ã³é¡çã®ã¬ã¹ãã¹ããã¿ãªã³ã°çšã®å ç©å®€äž
ã«å°å ¥ããŠè©²ã¬ã¹ã®ãã©ãºãé°å²æ°ã圢æããŠã
ãã°è¯ãã æ¬çºæã«ãããŠã¯ãããã²ã³ååå°å ¥çšã®åæ
ã¬ã¹ãšããŠäžèšãããããã²ã³ååç©æãã¯ãã
ã²ã³ãå«ãç¡ çŽ ååç©ãæå¹ãªãã®ãšããŠäœ¿çšã
ãããã®ã§ãããããã®ä»ã«ãHFïŒHClïŒ
HBrïŒHIçã®ããã²ã³åæ°ŽçŽ ãSiH2F2ïŒ
SiH2I2ïŒSiH2Cl2ïŒSiHCl3ïŒSiH2Br2ïŒSiHBr3ç
ã®ããã²ã³çœ®ææ°ŽçŽ åç¡ çŽ ãçã ã®ã¬ã¹ç¶æ ã®æ
ãã¯ã¬ã¹åãåŸããæ°ŽçŽ ååãæ§æèŠçŽ ã®ïŒã€ãš
ããããã²ã³åç©ãæå¹ãªéæ¶è³ªå±€åœ¢æçšã®åºçº
ç©è³ªãšããŠæããäºãåºæ¥ãã ããçã®æ°ŽçŽ ååãå«ãããã²ã³åç©ã¯ãéæ¶
質局圢æã®éã«å±€äžã«ããã²ã³ååã®å°å ¥ãšåæ
ã«é»æ°çæãã¯å é»çç¹æ§ã®å¶åŸ¡ã«æ¥µããŠæå¹ãª
æ°ŽçŽ ååãå°å ¥ãããã®ã§ãæ¬çºæã«ãããŠã¯å¥œ
é©ãªããã²ã³ååå°å ¥çšã®åæãšããŠäœ¿çšãã
ãã æ°ŽçŽ ååãéæ¶è³ªå±€äžã«æ§é çã«å°å ¥ããã«
ã¯ãäžèšã®ä»ã«H2ãæãã¯SiH4ïŒSi2H6ïŒ
Si3H8ïŒSi4H10çã®æ°ŽçŽ åç¡ çŽ ã®ã¬ã¹ãSiãäŸçµŠ
ããçºã®ã·ãªã³ã³ååç©ãšå ç©å®€äžã«å ±åãããŠ
æŸé»ãçèµ·ãããäºã§ãè¡ãäºãåºæ¥ãã äŸãã°ãåå¿ã¹ããã¿ãªã³ã°æ³ã®å Žåã«ã¯ãSi
ã¿ãŒã²ããã䜿çšããããã²ã³ååå°å ¥çšã®ã¬ã¹
åã³H2ã¬ã¹ãå¿ èŠã«å¿ããŠHeïŒArçã®äžæŽ»æ§ã¬
ã¹ãå«ããŠå ç©å®€å ã«å°å ¥ããŠãã©ãºãé°å²æ°ã
圢æããåèšSiã¿ãŒã²ãããã¹ããã¿ãªã³ã°ãã
äºã«ãã€ãŠãåºæ¿äžã«ïœâSiïŒïŒšïŒïŒžïŒããæã
éæ¶è³ªå±€ã圢æãããã æŽã«ã¯ãäžçŽç©ã®ããŒãã³ã°ãå ŒããŠB2H6ç
ã®ã¬ã¹ãå°å ¥ããŠããããšãåºæ¥ãã æ¬çºæã«ãããŠã圢æãããå å°é»éšæã®éæ¶
質局äžã«å«æãããæ°ŽçŽ ååïŒïŒšïŒã®éåã¯ãã
ã²ã³ååïŒïŒžïŒã®éåã¯æ°ŽçŽ ååãšããã²ã³åå
ã®éã®åïŒïŒšïŒïŒžïŒã¯éåžžã®å ŽåïŒã40atomic
ïŒ ã奜é©ã«ã¯ïŒã30atomicïŒ ãšãããã®ãæãŸ
ããã éæ¶è³ªå±€äžã«å«æãããæ°ŽçŽ ååïŒïŒšïŒåã¯ïŒ
åã³ããã²ã³ååïŒïŒžïŒã®éãå¶åŸ¡ããã«ã¯ãäŸ
ãã°æ¯æäœæž©åºŠåã¯ïŒåã³æ°ŽçŽ ååïŒïŒšïŒãæã
ã¯ããã²ã³ååïŒïŒžïŒãå«æãããçºã«äœ¿çšãã
ãåºçºç©è³ªã®å ç©è£ 眮系å ãžå°å ¥ããéãæŸé»ã
åçãå¶åŸ¡ããŠããã°è¯ãã éæ¶è³ªå±€ã«ã第æååãå«æããå±€é å
ïŒïŒåã³é žçŽ ååãå«æããå±€é åïŒïŒ¯ïŒãèš
ããã«ã¯ãã°ããŒæŸé»æ³ãåå¿ã¹ããã¿ãªã³ã°æ³
çã«ããéæ¶è³ªå±€ã®åœ¢æã®éã«ã第æååå°å ¥
çšã®åºçºç©è³ªåã³é žçŽ ååå°å ¥çšã®åºçºç©è³ªã
倫ã åèšããéæ¶è³ªå±€åœ¢æçšã®åºçºç©è³ªãšå ±ã«äœ¿
çšããŠã圢æãããå±€äžã«ãã®éãå¶åŸ¡ãä¹ãå«
æããŠããäºã«ãã€ãŠæãããã éæ¶è³ªå±€ãæ§æãããé žçŽ ååã®å«æãããå±€
é åïŒïŒ¯ïŒåã³ç¬¬æååã®å«æãããå±€é å
ïŒïŒã倫ã 圢æããã®ã«ã°ããŒæŸé»æ³ãçšãã
å Žåãåå±€é å圢æçšã®åæã¬ã¹ãšãªãåºçºç©è³ª
ãšããŠã¯ãåèšããéæ¶è³ªå±€åœ¢æçšã®åºçºç©è³ªã®
äžããææã«åŸã€ãŠéžæããããã®ã«ãé žçŽ åå
å°å ¥çšã®åºçºç©è³ªåã¯ïŒåã³ç¬¬æååå°å ¥çšã®
åºçºç©è³ªãå ããããããã®æ§ãªé žçŽ ååå°å ¥çš
ã®åºçºç©è³ªåã¯ç¬¬æååå°å ¥çšã®åºçºç©è³ªãšã
ãŠã¯ãå°ãªããšãé žçŽ ååæãã¯ç¬¬æååãæ§
æååãšããã¬ã¹ç¶ã®ç©è³ªåã¯ã¬ã¹åãåŸãç©è³ª
ãã¬ã¹åãããã®ã®äžã®å€§æŠã®ãã®ã䜿çšããåŸ
ãã äŸãã°å±€é åïŒïŒ¯ïŒã圢æããã®ã§ããã°ãã·
ãªã³ã³ååïŒSiïŒãæ§æååãšããåæã¬ã¹ãšã
é žçŽ ååïŒïŒ¯ïŒãæ§æååãšããåæã¬ã¹ãšãå¿
èŠã«å¿ããŠæ°ŽçŽ ååïŒïŒšïŒåã¯ïŒåã³ããã²ã³å
åïŒïŒžïŒãæ§æååãšããåæã¬ã¹ãšãææã®æ··
åæ¯ã§æ··åããŠäœ¿çšããããåã¯ãã·ãªã³ã³åå
ïŒSiïŒãæ§æååãšããåæã¬ã¹ãšãé žçŽ åå
ïŒïŒ¯ïŒåã³æ°ŽçŽ ååïŒïŒšïŒãæ§æååãšããåæ
ã¬ã¹ãšãããããåææã®æ··åæ¯ã§æ··åãããã
æãã¯ãã·ãªã³ã³ååïŒSiïŒãæ§æååãšããå
æã¬ã¹ãšãã·ãªã³ã³ååïŒSiïŒãé žçŽ ååïŒïŒ¯ïŒ
åã³æ°ŽçŽ ååïŒïŒšïŒã®ïŒã€ãæ§æååãšããåæ
ã¬ã¹ãšãæ··åããŠäœ¿çšããããšãåºæ¥ãã åãå¥ã«ã¯ãã·ãªã³ã³ååïŒSiïŒãšæ°ŽçŽ åå
ïŒïŒšïŒãšãæ§æååãšããåæã¬ã¹ã«é žçŽ åå
ïŒïŒ¯ïŒãæ§æååãšããåæã¬ã¹ãæ··åããŠäœ¿çš
ããŠãè¯ãã é žçŽ ååå°å ¥çšã®åºçºç©è³ªãšãªããã®ãšããŠå ·
äœçã«ã¯ãäŸãã°é žçŽ ïŒO2ïŒããªãŸã³ïŒO3ïŒãäž
é žåçªçŽ ïŒNOïŒãäºé žåçªçŽ ïŒNO2ïŒãäžäºé žå
çªçŽ ïŒN2OïŒãäžäºé žåçªçŽ ïŒN2O3ïŒãåäºé žå
çªçŽ ïŒN2O4ïŒãäºäºé žåçªçŽ ïŒN2O5ïŒãäžé žåçª
çŽ ïŒNO3ïŒãã·ãªã³ã³ååïŒSiïŒãšé žçŽ ååïŒïŒ¯ïŒ
ãšæ°ŽçŽ ååïŒïŒšïŒãšãæ§æååãšãããäŸãã°ã
ãžã·ãããµã³H3SiOSiH3ãããªã·ãããµã³
H3SiOSiH2OSiH3çã®äœçŽã·ãããµã³çãæã
ãããšãåºæ¥ãã å±€é åïŒïŒãã°ããŒæŸé»æ³ãçšããŠåœ¢æãã
å Žåã«ç¬¬æååå°å ¥çšã®åºçºç©è³ªãšããŠãæ¬çº
æã«ãããŠæå¹ã«äœ¿çšãããã®ã¯ãç¡ŒçŽ ååå°å ¥
çšãšããŠã¯ãB2H6ïŒB4H10ïŒB5H9ïŒB5H11ïŒ
B6H10ïŒB6H12ïŒB6H14çã®æ°ŽçŽ åç¡ŒçŽ ãBF3ïŒ
BCl3ïŒBBr3çã®ããã²ã³åç¡ŒçŽ çãæããããã
ãã®ä»ãAlCl3ïŒGaCl3ïŒGaïŒCH3ïŒ3ïŒInCl3ïŒ
TlCl3çãæããããšãåºæ¥ãã 第æååãå«æããå±€é åïŒïŒã«å°å ¥ãã
ã第æååã®å«æéã¯ãå ç©å®€äžã«æµå ¥ããã
第æååå°å ¥çšã®åºçºç©è³ªã®ã¬ã¹æµéãã¬ã¹æµ
éæ¯ãæŸé»ãã¯ãŒãæ¯æäœæž©åºŠãå ç©å®€å ã®å§å
çãå¶åŸ¡ããããšã«ãã€ãŠä»»æã«å¶åŸ¡ããåŸãã ã¹ããã¿ãŒãªã³ã°æ³ã«ãã€ãŠãé žçŽ ååãå«æ
ããå±€é åïŒïŒ¯ïŒã圢æããã«ã¯ãåçµæ¶åã¯å€
çµæ¶ã®SiãŠãšãŒããŒåã¯SiO2ãŠãšãŒããŒãåã¯Si
ãšSiO2ãæ··åãããŠå«æãããŠãããŠãšãŒããŒ
ãã¿ãŒã²ãããšããŠãããçãçš®ã ã®ã¬ã¹é°å²æ°
äžã§ã¹ããã¿ãŒãªã³ã°ããããšã«ãã€ãŠè¡ãã°è¯
ãã äŸãã°ãSiãŠãšãŒããŒãã¿ãŒã²ãããšããŠäœ¿çš
ããã°ãé žçŽ ååãšå¿ èŠã«å¿ããŠæ°ŽçŽ åååã¯ïŒ
åã³ããã²ã³ååãå°å ¥ããçºã®åæã¬ã¹ããå¿
èŠã«å¿ããŠçšéã¬ã¹ã§çšéããŠãã¹ããã¿ãŒçšã®
å ç©å®€äžã«å°å ¥ããããçã®ã¬ã¹ã®ã¬ã¹ãã©ãºã
ã圢æããŠåèšSiãŠãšãŒããŒãã¹ããã¿ãŒãªã³ã°
ããã°è¯ãã åãå¥ã«ã¯ãSiãšSiO2ãšã¯å¥ã ã®ã¿ãŒã²ãã
ãšããŠãåã¯SiãšSiO2ã®æ··åããäžæã®ã¿ãŒã²
ããã䜿çšããããšã«ãã€ãŠãã¹ããã¿ãŒçšã®ã¬
ã¹ãšããŠã®çšéã¬ã¹ã®é°å²æ°äžã§åã¯å°ãªããšã
æ°ŽçŽ ååïŒïŒšïŒåã¯ïŒåã³ããã²ã³ååïŒïŒžïŒã
æ§æååãšããŠå«æããã¬ã¹é°å²æ°äžã§ã¹ããã¿
ãŒãªã³ã°ããããšã«ãã€ãŠæããããé žçŽ ååå°
å ¥çšã®åæã¬ã¹ãšããŠã¯ãå è¿°ããã°ããŒæŸé»ã®
äŸã§ç€ºããåæã¬ã¹ã®äžã®é žçŽ ååå°å ¥çšã®åæ
ã¬ã¹ããã¹ããã¿ãŒãªã³ã°ã®å Žåã«ãæå¹ãªã¬ã¹
ãšããŠäœ¿çšããåŸãã æ¬çºæã«ãããŠãéæ¶è³ªå±€ãã°ããŒæŸé»æ³ã§åœ¢
æããéã«äœ¿çšãããçšéã¬ã¹ãæãã¯ã¹ããã¿
ãªã³ã°æ³ã§åœ¢æãããéã«äœ¿çšãããã¹ããã¿ãŒ
ãªã³ã°çšã®ã¬ã¹ãšããŠã¯ãæè¬çšã¬ã¹ãäŸãã°
HeïŒNeïŒArçã奜é©ãªãã®ãšããŠæããããš
ãåºæ¥ãã 次ã«ã第ïŒå³ã«ã°ããŒæŸé»å解æ³ã«ããå å°é»
éšæã®è£œé è£ çœ®ã瀺ãã å³äžã®ïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒïŒ
ïŒã®ã¬ã¹ãã³ãã«ã¯ãæ¬çºæã®å€«ã ã®å±€é åã圢
æããããã®åæã¬ã¹ãå¯å°ãããŠããããã®ïŒ
äŸãšããŠããšãã°ïŒïŒïŒã¯ãHeã§çšéããã
SiH4ã¬ã¹ïŒçŽåºŠ99.999ïŒ ã以äžSiH4ïŒHeãšç¥
ããïŒãã³ããïŒïŒïŒã¯Heã§çšéãããB2H6ã¬
ã¹ïŒçŽåºŠ99.999ïŒ ã以äžB2H6ïŒHeãšç¥ããïŒã
ã³ããïŒïŒïŒã¯Heã§çšéãããSi2H6ã¬ã¹ïŒçŽåºŠ
99.99ïŒ ã以äžSi2H6ïŒHeãšç¥ããïŒãã³ããïŒïŒ
ïŒã¯NOã¬ã¹ïŒçŽåºŠ99.999ïŒ ïŒãã³ããïŒïŒïŒã¯
Heã§åžéãããSiF4ã¬ã¹ïŒçŽåºŠ99.999ïŒ ã以äž
SiF4ïŒHeãšç¥ããïŒãã³ãã§ããã ãããã®ã¬ã¹ãåå¿å®€ïŒïŒïŒã«æµå ¥ãããã«ã¯
ã¬ã¹ãã³ãïŒïŒïŒãïŒïŒïŒã®ãã«ããïŒïŒïŒãïŒ
ïŒïŒããªãŒã¯ãã«ãïŒïŒïŒãéããããŠããããš
ã確èªããåãæµå ¥ãã«ãïŒïŒïŒãïŒïŒïŒãæµåº
ãã«ãïŒïŒïŒãïŒïŒïŒïŒãè£å©ãã«ãïŒïŒïŒãé
ãããŠããããšã確èªããŠå ã¥ã¡ã€ã³ãã«ãïŒïŒ
ïŒãéããŠåå¿å®€ïŒïŒïŒãã¬ã¹é 管å ãææ°ã
ãã次ã«ç空èšïŒïŒïŒã®èªã¿ãçŽïŒÃ10-6torrã«
ãªã€ãæç¹ã§è£å©ãã«ãïŒïŒïŒïŒïŒïŒïŒãæµåºã
ã«ãïŒïŒïŒãïŒïŒïŒãéããã åºäœã·ãªã³ããŒïŒïŒïŒäžã«éæ¶è³ªå±€ãæ§æãã
å±€é åïŒïŒã圢æããå Žåã®ïŒäŸãããããšã
ã¬ã¹ãã³ãïŒïŒïŒããSiH4ïŒHeã¬ã¹ãã¬ã¹ãã³
ãïŒïŒïŒããB2H6ïŒHeã¬ã¹ããã«ãïŒïŒïŒïŒïŒ
ïŒïŒãéããŠåºå£å§ã²ãŒãžïŒïŒïŒïŒïŒïŒïŒã®å§ã
ïŒKgïŒcm2ã«èª¿æŽããæµå ¥ãã«ãïŒïŒïŒïŒïŒïŒïŒã
åŸã ã«éããŠããã¹ããã³ã³ãããŒã©ïŒïŒïŒïŒïŒ
ïŒïŒå ã«æµå ¥ããããåŒãç¶ããŠæµåºãã«ãïŒïŒ
ïŒïŒïŒïŒïŒãè£å©ãã«ãïŒïŒïŒãåŸã ã«éããŠ
倫ã ã®ã¬ã¹ãåå¿å®€ïŒïŒïŒã«æµå ¥ãããããã®ãš
ãã®SiH4ïŒHeã¬ã¹æµéãšB2H6ïŒHeã¬ã¹æµéãš
ã®æ¯ãææã®å€ã«ãªãããã«æµåºãã«ãïŒïŒïŒïŒ
ïŒïŒïŒã調æŽããåãåå¿å®€å ã®å§åãææã®å€
ã«ãªãããã«ç空èšïŒïŒïŒã®èªã¿ãèŠãªããã¡ã€
ã³ãã«ãïŒïŒïŒã®éå£ã調æŽããããããŠåºäœã·
ãªã³ããŒïŒïŒïŒã®æž©åºŠãå ç±ããŒã¿ãŒïŒïŒïŒã«ã
ã50ã400âã®æž©åºŠã«èšå®ãããŠããããšã確èª
ããåŸãé»æºïŒïŒïŒãææã®é»åã«èšå®ããŠåå¿
宀ïŒïŒïŒå ã«ã°ããŒæŸé»ãçèµ·ãããŠå±€é å
ïŒïŒãæ¯æäœäžã«åœ¢æããã å±€é åïŒïŒ¯ïŒã圢æããã«ã¯å±€é åïŒïŒã®åœ¢
æã®éã«äœ¿çšããB2H6ïŒHeã¬ã¹ã®ãããã«åã¯
該ã¬ã¹ã«å ããŠNOã¬ã¹ãçšããŠå±€åœ¢æãè¡ãª
ãã 倫ã ã®å±€ã圢æããéã«å¿ èŠãªã¬ã¹ä»¥å€ã®æµåº
ãã«ãã¯å šãŠéããããšã¯èšããŸã§ããªããåã
倫ã ã®å±€ã圢æããéãåå±€ã®åœ¢æã«äœ¿çšããã¬
ã¹ãåå¿å®€ïŒïŒïŒå ãæµåºãã«ãïŒïŒïŒãïŒïŒïŒ
ããåå¿å®€ïŒïŒïŒå ã«è³ãé 管å ã«æ®çããããš
ãé¿ããããã«ãæµåºãã«ãïŒïŒïŒãïŒïŒïŒãé
ãè£å©ãã«ãïŒïŒïŒïŒïŒïŒïŒãéããŠã¡ã€ã³ãã«
ãïŒïŒïŒãå šéããŠç³»å ãäžæŠé«ç空ã«ææ°ãã
æäœãå¿ èŠã«å¿ããŠè¡ãªãã åã局圢æãè¡ãªã€ãŠããéã¯å±€åœ¢æã®åäžå
ãèšãããåºäœã·ãªã³ããŒïŒïŒïŒã¯ã¢ãŒã¿ïŒïŒïŒ
ã«ããäžå®é床ã§å転ãããã 以äžå®æœäŸã«ã€ããŠèª¬æããã åèäŸ ïŒ ç¬¬ïŒå³ã«ç€ºãã補é è£ çœ®ã«ãããã¢ã«ãããŠã
åºæ¿äžã«ã以äžã®æ¡ä»¶ã§å±€åœ¢æãè¡ã€ãã
ãè¡šã
ããããŠåŸãããå圢æéšæã垯é»é²å
çŸåè£
眮ã«èšçœ®ãã5KVã§0.2secéã³ãã垯é»ãè¡ã
çŽã¡ã«å åãç §å°ãããå æºã¯ã¿ã³ã°ã¹ãã³ã©ã³
ããçšãã1.0lux secã®å éããééåã®ãã¹ã
ãã€ãŒããçšããŠç §å°ããããã®åŸçŽã¡ã«è·é»
æ§ã®çŸåå€ïŒãããŒãšãã€ãªã¢ãå«ãïŒãéšæè¡š
é¢ã«ã«ã¹ã±ãŒãããããšã«ãã€ãŠéšæè¡šé¢äžã«è¯
奜ãªãããŒç»åãåŸãã ãã®ããã«ããŠåŸããããããŒåããäžæŠãŽã
ãã¬ãŒãã§ã¯ãªãŒãã³ã°ããåã³äžèšäœåã¯ãªãŒ
ãã³ã°å·¥çšãç¹°ãè¿ãããç¹°ãè¿ãåæ°10äžå以
äžè¡ã€ãŠãç»åã®å£åã¯ã¿ãããªãã€ãã åèäŸ ïŒ åèäŸïŒã«ãããŠå圢æéšæã®äœè£œã®ç¬¬ïŒæ®µé
ã§Heã¬ã¹ã§10000vppmã«çšéããB2H6ã¬ã¹äžŠã³
ã«NOã¬ã¹ã®æµéãåã ãå€åãããä»ã¯å šãå
æ§ã®äœè£œæ¡ä»¶ã§å圢æéšæãäœè£œãããã®åŸå®æœ
äŸïŒãšåæ§ã®æ¹æ³ã§è©äŸ¡ãè¡ã€ããããã«åè©Šæ
ã®ãäœè£œã®ç¬¬ïŒæ®µéã§å«æãããç¡ŒçŽ åã³é žçŽ é
ãã€ãªã³ãã€ã¯ãã¢ããªã·ã¹ïŒIMAæ³ïŒã«ãã
åæããã äžèšã®çµæã第ïŒè¡šã«ç€ºãã
眮ã«èšçœ®ãã5KVã§0.2secéã³ãã垯é»ãè¡ã
çŽã¡ã«å åãç §å°ãããå æºã¯ã¿ã³ã°ã¹ãã³ã©ã³
ããçšãã1.0lux secã®å éããééåã®ãã¹ã
ãã€ãŒããçšããŠç §å°ããããã®åŸçŽã¡ã«è·é»
æ§ã®çŸåå€ïŒãããŒãšãã€ãªã¢ãå«ãïŒãéšæè¡š
é¢ã«ã«ã¹ã±ãŒãããããšã«ãã€ãŠéšæè¡šé¢äžã«è¯
奜ãªãããŒç»åãåŸãã ãã®ããã«ããŠåŸããããããŒåããäžæŠãŽã
ãã¬ãŒãã§ã¯ãªãŒãã³ã°ããåã³äžèšäœåã¯ãªãŒ
ãã³ã°å·¥çšãç¹°ãè¿ãããç¹°ãè¿ãåæ°10äžå以
äžè¡ã€ãŠãç»åã®å£åã¯ã¿ãããªãã€ãã åèäŸ ïŒ åèäŸïŒã«ãããŠå圢æéšæã®äœè£œã®ç¬¬ïŒæ®µé
ã§Heã¬ã¹ã§10000vppmã«çšéããB2H6ã¬ã¹äžŠã³
ã«NOã¬ã¹ã®æµéãåã ãå€åãããä»ã¯å šãå
æ§ã®äœè£œæ¡ä»¶ã§å圢æéšæãäœè£œãããã®åŸå®æœ
äŸïŒãšåæ§ã®æ¹æ³ã§è©äŸ¡ãè¡ã€ããããã«åè©Šæ
ã®ãäœè£œã®ç¬¬ïŒæ®µéã§å«æãããç¡ŒçŽ åã³é žçŽ é
ãã€ãªã³ãã€ã¯ãã¢ããªã·ã¹ïŒIMAæ³ïŒã«ãã
åæããã äžèšã®çµæã第ïŒè¡šã«ç€ºãã
ãè¡šã
åèäŸ ïŒ
第ïŒå³ã«ç€ºãã補é è£
眮ã«ããã¢ã«ãããŠã åº
æ¿äžã«ä»¥äžã®æ¡ä»¶ã§å±€åœ¢æãè¡ã€ãã
æ¿äžã«ä»¥äžã®æ¡ä»¶ã§å±€åœ¢æãè¡ã€ãã
ãè¡šã
äœè£œããå圢æéšæã«ã€ããŠåèäŸïŒãšåæ§ã®
æ¹æ³ã§è©äŸ¡ãããšãã第ïŒè¡šã«ç€ºãæ§ãªçµæãåŸ
ãã
æ¹æ³ã§è©äŸ¡ãããšãã第ïŒè¡šã«ç€ºãæ§ãªçµæãåŸ
ãã
ãè¡šã
å®æœäŸ ïŒ
第ïŒå³ã«ç€ºãã補é è£
眮ã«ãããã¢ã«ãããŠã
åºæ¿äžã«ä»¥äžã®æ¡ä»¶ã§å±€åœ¢æãè¡ã€ãã
åºæ¿äžã«ä»¥äžã®æ¡ä»¶ã§å±€åœ¢æãè¡ã€ãã
ãè¡šã
ãã®æ§ã«ããŠåŸãããå圢æéšæã«ã€ããŠå®å
èäŸïŒãšåæ§ã®æ¹æ³ã«ããè©äŸ¡ãè¡ã€ããšããè¯
奜ãªçµæãåŸãããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºãã補é è£ çœ®ã«ãããã¢ã«ãããŠã
åºæ¿äžã«ä»¥äžã®æ¡ä»¶ã§å±€åœ¢æãè¡ã€ãã
èäŸïŒãšåæ§ã®æ¹æ³ã«ããè©äŸ¡ãè¡ã€ããšããè¯
奜ãªçµæãåŸãããã å®æœäŸ ïŒ ç¬¬ïŒå³ã«ç€ºãã補é è£ çœ®ã«ãããã¢ã«ãããŠã
åºæ¿äžã«ä»¥äžã®æ¡ä»¶ã§å±€åœ¢æãè¡ã€ãã
ãè¡šã
ãã®æ§ã«ããŠåŸãããå圢æéšæã«ã€ããŠåè
äŸïŒãšåæ§ã®æ¹æ³ã§è©äŸ¡ãããšãããè¯å¥œãªçµæ
ãåŸãããã åèäŸ ïŒ ç¬¬ïŒè¡šã«ç€ºãæ¡ä»¶ã®ããšã§å圢æéšæãäœè£œã
ãåŸãåèäŸïŒãšåæ§ã®æ¹æ³ã§è©äŸ¡ãããšããè¯
奜ãªçµæãåŸãããã
äŸïŒãšåæ§ã®æ¹æ³ã§è©äŸ¡ãããšãããè¯å¥œãªçµæ
ãåŸãããã åèäŸ ïŒ ç¬¬ïŒè¡šã«ç€ºãæ¡ä»¶ã®ããšã§å圢æéšæãäœè£œã
ãåŸãåèäŸïŒãšåæ§ã®æ¹æ³ã§è©äŸ¡ãããšããè¯
奜ãªçµæãåŸãããã
ãè¡šã
åèäŸ ïŒ
第ïŒè¡šã«ç€ºãæ¡ä»¶ã®ããšã§å圢æéšæãäœè£œã
ãåŸãåèäŸïŒãšåæ§ã®æ¹æ³ã§è©äŸ¡ãããšããè¯
奜ãªçµæãåŸãããã
ãåŸãåèäŸïŒãšåæ§ã®æ¹æ³ã§è©äŸ¡ãããšããè¯
奜ãªçµæãåŸãããã
ãè¡šã
第ïŒå³ã¯ãæ¬çºæã®å
å°é»éšæã®å¥œé©ãªå®æœäŸ
æ æ§äŸã®å±€æ§é ãæš¡åŒçã«ç€ºããæš¡åŒçå±€æ§æ
å³ã第ïŒå³ã¯ãæ¬çºæã®å å°é»éšæã補é ããçº
ã®è£ 眮ã®äžäŸã瀺ãæš¡åŒç説æå³ã§ããã ïŒïŒïŒâŠâŠå å°é»éšæãïŒïŒïŒâŠâŠæ¯æäœãïŒ
ïŒïŒâŠâŠéæ¶è³ªå±€ãïŒïŒïŒâŠâŠç¬¬äžã®å±€é åãïŒ
ïŒïŒâŠâŠç¬¬äºã®å±€é åãïŒïŒïŒâŠâŠèªç±è¡šé¢ã
æ æ§äŸã®å±€æ§é ãæš¡åŒçã«ç€ºããæš¡åŒçå±€æ§æ
å³ã第ïŒå³ã¯ãæ¬çºæã®å å°é»éšæã補é ããçº
ã®è£ 眮ã®äžäŸã瀺ãæš¡åŒç説æå³ã§ããã ïŒïŒïŒâŠâŠå å°é»éšæãïŒïŒïŒâŠâŠæ¯æäœãïŒ
ïŒïŒâŠâŠéæ¶è³ªå±€ãïŒïŒïŒâŠâŠç¬¬äžã®å±€é åãïŒ
ïŒïŒâŠâŠç¬¬äºã®å±€é åãïŒïŒïŒâŠâŠèªç±è¡šé¢ã
Claims (1)
- ãç¹èš±è«æ±ã®ç¯å²ã ïŒ å å°é»éšæçšã®æ¯æäœãšãã·ãªã³ã³ååãæ¯
äœãšããæ§æååãšããŠæ°ŽçŽ åååã¯ããã²ã³å
åã®ããããäžæ¹ãå°ãªããšãå«æããéæ¶è³ªæ
æã§æ§æãããå å°é»æ§ã瀺ãéæ¶è³ªå±€ãšãæã
ãå å°é»éšæã«ãããŠã åèšéæ¶è³ªå±€ããæ§æååãšããŠé žçŽ ååãšç¬¬
æååãšãå«æããåèšæ¯æäœäžã«ç©å±€ããã
å±€é åãšã該局é åäžã«èšãããåèšéæ¶è³ªå±€ã®
è¡šé¢å±€é ååã³åèšç©å±€å±€é åã«å¯ŸããŠãæ§æå
åãšããŠåèšé žçŽ åååã¯åèšç¬¬æååã®äžæ¹
ãå«æããŠããäºã§æ§æããææãç°ãªã€ãŠãã
å±€é åãšãæããŠããã æ§æååãšããŠé žçŽ ååãå«æãã第äžã®å±€é
åã®å±€åãtOãšããæ§æååãšããŠåšæåŸè¡šç¬¬
æã«å±ããååãå«æãã第äºã®å±€é åãšãæã
ã第äºã®å±€é åã®å±€åãtBãšããåèšã®éæ¶è³ªå±€
ã®å±€åãšç¬¬äºã®å±€é åã®å±€åtBãšã®å·®ããšãã tBïŒïŒïŒŽïŒtBïŒâŠ0.4 äžã€ã tOâ tB ã®é¢ä¿ãæç«ããäºãç¹åŸŽãšããå å°é»éšæã
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57014551A JPS58132243A (ja) | 1982-02-01 | 1982-02-01 | å å°é»éšæ |
FR8301437A FR2520886B1 (fr) | 1982-02-01 | 1983-01-31 | Element photoconducteur |
DE19833303266 DE3303266A1 (de) | 1982-02-01 | 1983-02-01 | Fotoeleitfaehiges element |
US06/830,483 US4636450A (en) | 1982-02-01 | 1986-02-18 | Photoconductive member having amorphous silicon matrix with oxygen and impurity containing regions |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57014551A JPS58132243A (ja) | 1982-02-01 | 1982-02-01 | å å°é»éšæ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58132243A JPS58132243A (ja) | 1983-08-06 |
JPH0310092B2 true JPH0310092B2 (ja) | 1991-02-12 |
Family
ID=11864282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57014551A Granted JPS58132243A (ja) | 1982-02-01 | 1982-02-01 | å å°é»éšæ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58132243A (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5766439A (en) * | 1980-10-13 | 1982-04-22 | Minolta Camera Co Ltd | Electrophotographic receptor |
-
1982
- 1982-02-01 JP JP57014551A patent/JPS58132243A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5766439A (en) * | 1980-10-13 | 1982-04-22 | Minolta Camera Co Ltd | Electrophotographic receptor |
Also Published As
Publication number | Publication date |
---|---|
JPS58132243A (ja) | 1983-08-06 |