JPH0296725U - - Google Patents

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Publication number
JPH0296725U
JPH0296725U JP534789U JP534789U JPH0296725U JP H0296725 U JPH0296725 U JP H0296725U JP 534789 U JP534789 U JP 534789U JP 534789 U JP534789 U JP 534789U JP H0296725 U JPH0296725 U JP H0296725U
Authority
JP
Japan
Prior art keywords
vapor phase
reactor
phase growth
rotor
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP534789U
Other languages
English (en)
Other versions
JPH0715131Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989005347U priority Critical patent/JPH0715131Y2/ja
Publication of JPH0296725U publication Critical patent/JPH0296725U/ja
Application granted granted Critical
Publication of JPH0715131Y2 publication Critical patent/JPH0715131Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案に係る有機金属気相成長装置の
一実施例の系統図、第２図はドライ回転吸引機の
一例を示す縦断面図、第３図及び第４図は従来の
有機金属気相成長装置の２種の系統図である。 １……リアクタ、２……油回転ポンプ、３……
廃ガス処理機、５……ブロワー、６……ドライ回
転吸引機、７……ハウジング、８……ロータ、９
……キヤビネツト、１０……吸引管。

Claims (1)

    【実用新案登録請求の範囲】
  1. 有機金属気相成長を行わせるリアクタと、該リ
    アクタからの排気ガスを処理する廃ガス処理機と
    の間に、ロータとそのハウジングとの間に油を介
    在させないドライ回転吸引機を設けたことを特徴
    とする有機金属気相成長装置。
JP1989005347U 1989-01-20 1989-01-20 有機金属気相成長装置 Expired - Lifetime JPH0715131Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989005347U JPH0715131Y2 (ja) 1989-01-20 1989-01-20 有機金属気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989005347U JPH0715131Y2 (ja) 1989-01-20 1989-01-20 有機金属気相成長装置

Publications (2)

Publication Number Publication Date
JPH0296725U true JPH0296725U (ja) 1990-08-01
JPH0715131Y2 JPH0715131Y2 (ja) 1995-04-10

Family

ID=31208645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989005347U Expired - Lifetime JPH0715131Y2 (ja) 1989-01-20 1989-01-20 有機金属気相成長装置

Country Status (1)

Country Link
JP (1) JPH0715131Y2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534158A (en) * 1978-09-01 1980-03-10 Sony Corp Vacuum reaction apparatus
JPS63285924A (ja) * 1987-05-19 1988-11-22 Hitachi Ltd 半導体製造装置
JPS63291624A (ja) * 1987-05-23 1988-11-29 Showa Denko Kk ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5534158A (en) * 1978-09-01 1980-03-10 Sony Corp Vacuum reaction apparatus
JPS63285924A (ja) * 1987-05-19 1988-11-22 Hitachi Ltd 半導体製造装置
JPS63291624A (ja) * 1987-05-23 1988-11-29 Showa Denko Kk ガリウム・ヒ素ウェハ−のドライエッチング排ガスの処理方法

Also Published As

Publication number Publication date
JPH0715131Y2 (ja) 1995-04-10

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