JPH0295488A - 段差のある部品の表面クリーニング機構 - Google Patents
段差のある部品の表面クリーニング機構Info
- Publication number
- JPH0295488A JPH0295488A JP24553088A JP24553088A JPH0295488A JP H0295488 A JPH0295488 A JP H0295488A JP 24553088 A JP24553088 A JP 24553088A JP 24553088 A JP24553088 A JP 24553088A JP H0295488 A JPH0295488 A JP H0295488A
- Authority
- JP
- Japan
- Prior art keywords
- rail
- alcohol
- parts
- roller
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 38
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000000428 dust Substances 0.000 abstract description 8
- 238000007664 blowing Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 11
- 239000011521 glass Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 239000012459 cleaning agent Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Electron Beam Exposure (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24553088A JPH0295488A (ja) | 1988-09-29 | 1988-09-29 | 段差のある部品の表面クリーニング機構 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24553088A JPH0295488A (ja) | 1988-09-29 | 1988-09-29 | 段差のある部品の表面クリーニング機構 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0295488A true JPH0295488A (ja) | 1990-04-06 |
JPH05113B2 JPH05113B2 (enrdf_load_stackoverflow) | 1993-01-05 |
Family
ID=17135062
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP24553088A Granted JPH0295488A (ja) | 1988-09-29 | 1988-09-29 | 段差のある部品の表面クリーニング機構 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0295488A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH047068A (ja) * | 1990-04-25 | 1992-01-10 | Kitagawa Elaborate Mach Co Ltd | 板状物のクリーニング装置 |
CN108246750A (zh) * | 2017-12-13 | 2018-07-06 | 北京华航无线电测量研究所 | 一种大面阵ccd光窗清洁方法 |
-
1988
- 1988-09-29 JP JP24553088A patent/JPH0295488A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH047068A (ja) * | 1990-04-25 | 1992-01-10 | Kitagawa Elaborate Mach Co Ltd | 板状物のクリーニング装置 |
CN108246750A (zh) * | 2017-12-13 | 2018-07-06 | 北京华航无线电测量研究所 | 一种大面阵ccd光窗清洁方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH05113B2 (enrdf_load_stackoverflow) | 1993-01-05 |
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