JPH0295488A - Surface cleaning mechanism for stepped parts - Google Patents

Abstract

PURPOSE:To surely remove dust from the surfaces of parts by successively blowing air on the surfaces to be cleaned, dropping alcohol on the surfaces and wiping away the alcohol with cleaning paper. CONSTITUTION:Air is blown from an air nozzle 10 on the surfaces 51 of parts 5 on a rail 1 to blow off coarse dust, alcohol is dropped from an alcohol nozzle 9 on the surfaces 51 of the parts 5 and the parts 5 are moved onto a rail 2. A roll 7 is lowered to adhere cleaning paper 6 to the surfaces 51 of the parts 5 and the surfaces 51 are cleaned with the alcohol by moving the rail 2 several times within the range of the surfaces 51. The parts 5 are then moved onto a rail 3, a roll 8 is lowered and the rail 3 is moved several times within the range of the surfaces 51 to wipe the surfaces 51 with the dry unused cleaning paper 6. Dust is surely removed from the surfaces 51.

Description

DETAILED DESCRIPTION OF THE INVENTION (a) Technical Field of the Invention The present invention relates to a mechanism for cleaning the surface of a component with steps, such as a CCD (charge coupled device).

(b) Prior Art and Problems Next, a component with a step will be explained with reference to FIGS. 10 and 11.

10th [21 is a part with a step such as a CCD, 22
is the surface, and 23 is the step.

A CCD is an image sensor that takes out an image as a brightness signal, and the surface 22 of the image sensor portion is a glass surface.

If dust or the like adheres to the surface 22, the image of the dust will be detected as data, so when measuring COD performance or using a CCD, it is necessary to remove the dust from the surface 22.

The surface 21 in FIG. 10 is retracted from the rest of the surface by a step 23.

31 in Figure 11 is a CCD, similar to 21 in Figure 1O.
32 is the surface and 33 is the step. The surface 32 in FIG. 11 has a shape that protrudes from other parts by a step 33.

When using parts 21 and 31, a simple method is as follows:
The parts 21 and 31 are measured after wiping the surfaces 22 and 32 with a cotton swab or the like to check whether there is any dirt or the like on them. This method has a problem in that the degree of cleaning varies.

In addition, as an apparatus for cleaning mask substrates and desk surfaces of semiconductor elements, Japanese Patent Application Laid-Open No. 1987-203643,
There are Utility Application No. 62-81543, etc., which attach the object to be cleaned to a rotating shaft, press the cleaning agent into contact with it, and
Cleaning is performed by rotating the object to be cleaned. For this reason, when cleaning the glass surface of a CCD, etc., dirt other than the glass surface may adhere to the glass surface, or scraps of cleaning agent may adhere to the glass surface due to the difference in level between the glass surface and the surface. There is a problem with putting it away.

(C) Purpose of the Invention This invention provides a method for cleaning the surface of a component with steps, such as a CCD, by arranging a plurality of these components and moving them, and then applying all the air to the surface of the component. The purpose is to reliably remove dust from the surface of this component by using a cleaning mechanism that drops alcohol onto the surface of this component and wipes only the stepped surface with cleaning paper.

(d) Examples of the invention Next, a block diagram of an embodiment according to the present invention is shown in FIG.

In FIG. 1, 1 to 4 are rails, 5 is a component, 6 is cleaning paper, 7 and 8 are rollers, 9 is an alcohol nozzle, 10 is an air nozzle, and 11 and 12 are reels.

One end of the cleaning paper 6 is wound around a reel 11, and the other end of the cleaning paper 6 passes through rollers 8 and 7.
It is wound on reel 12. As you clean,
The cleaning paper 6 is moved by a drive mechanism (not shown).
Reel 111! ! ! It is wound from I to the reel 12 side.

Part 5 connects rails 1 to 1 using the leads of part 5.
4, and the rails 1 to 4 are mounted on drive ti! rails (not shown). As a result, it moves from the left side of Figure 1 to the right side.

Next, a configuration diagram of the roller 7 portion will be explained with reference to FIGS. 2 to 5.

The roller 8 portion also has the same configuration.

FIG. 2 is a diagram showing the relationship between the component 5 and the roller rough before the rail 2 moves, and FIG. 3 is a diagram showing the relationship between the component 5 and the roller 7 after the rail 2 has moved.

Figure 4 is a side view of Figure 2 or Figure 3, and Figure 5!
2I is a cross-sectional view of an intermediate state from FIG. 2 to FIG.
It has a structure that allows pressure welding.

To this end, the roller 7 applies a constant pressure to the surface 51 of the component 5 using a spring or the like (not shown).

Next, FIG. 6 shows an enlarged explanatory view of FIGS. 2 and 3.

FIG. 6 shows the relationship between the movement range of the roller rough and the surface 51 of the component 5.

The area where roller 7 contacts surface 51 of component 5 is
A position closer to the center by a distance L1 from the end 52 of the part 5
The distance ML2 is between the end 53 and a position closer to the center. If the roller 7 contacts the surface 51 of the component 5 within the range shown in FIG. 6, the cleaning paper 6 can move without contacting the ends 52 and 53 of the component 5.

Next, an explanatory diagram of the moving mechanism for the component 5 is shown in FIG.

The rail 1 is fixed to a guide rod 13 and a guide rod 14, and the guide rods 13 and 14 are simultaneously moved left and right in FIG. 7 by a drive mechanism (not shown). This results in
The rail 1 in FIG. 7 may be moved from the left side to the right side, or the rails 2 and 3 may be moved so that the rollers 7 and 8 are in contact with only the surface 51 of the component 5.

By placing the parts 5 on the rail one after another as the guide rods 13 and 14 move, the parts 5 can be sent from the rail 1 to the rail 4 in sequence.

Next, how to use FIG. 1 will be explained.

(a) Air nozzle 10 on the surface 51 of the component 5 on the rail 1
Blow out air to blow away relatively large debris.

(a) Drop alcohol onto the surface 51 of the component 5 from the alcohol nozzle 9.

(1) Move the part 5 to the rail 2.

(1) Lower the roller 7 and bring the cleaning paper 6 into close contact with the surface 51 of the component 5.

(E) Move the rail 2 several times within the range of the surface 51 under the roller rougher and clean the surface 51 with alcohol.

(Force) Move part 5 from rail 2 to rail 3.

(g) Move the rail 3 several times to cover the surface 51 under the roller 8, and wipe the surface 51 dry with a cleaning paper.

(ri) Move the part 5 on the rail 3 to the rail 4.

The surface 51 of the component 5 is cleaned by (a) and (ri), but comparatively heavily soiled garbage such as sticky material is removed by (e), and alcohol and minute dust are removed by (g). .

Further, the parts 5 are placed on the rail 1 to the rail 4 continuously, so that the rail 2 is moved under the roller 7 and the rail 3 is not moved under the roller 8. Thereby, cleaning by roller 7 and cleaning by roller 8 can proceed simultaneously.

Next, FIGS. 8 and 9 show diagrams of the relationship between the rollers 7 and 8 and the cleaning paper 6.

Let the constant feed distance between the rollers 7 and 8 be X, the distance between the rollers 7 and 8 be y, and the distance between the rollers 7 and 8 of the cleaning paper 6 be A to E.

By moving the cleaning paper 6 every time cleaning is completed, new cleaning paper 6 can always be supplied to the rollers 7 and 8.

fe) Effect of invention According to this invention, there are the following effects.

(a) A roller-shaped cleaning paper can be brought into pressure contact only with the surface of a part with a step.

Moreover, when cleaning a component, the moving rail moves by the length of the surface area of the component, so that only the surface can be reliably wiped.

(a) Since the rollers are brought into contact with the same cleaning paper at two locations to perform cleaning with alcohol and wiping, two cleaning papers are not required, so the apparatus can be made smaller.

(1) Blow air to remove relatively large debris, cleaning with alcohol to remove sticky materials and other heavily soiled debris, and wiping to remove alcohol and microscopic debris. + Garbage etc.
(+ri can be removed in an orderly manner and with certainty.

[Brief explanation of drawings]

Figure 1 is a configuration diagram of an embodiment according to the present invention, Figures 2 to 5
The figure is a configuration diagram of the roller 7 part, FIG. 6 is an enlarged Jj2 clear view of FIGS. 2 and 3, and FIG. 7 is an explanatory diagram of the moving mechanism of the part 5.
8 and 9 are relationship diagrams between the rollers 7 and 8 and the cleaning paper 6, and FIGS. 10 and 11 are explanatory diagrams of parts with steps. 1-4...Rail, 5...Parts, 6.
...Cleaning paper, 7, 8...Roller, 9...Air nozzle, 10...Alcohol nozzle, 11, 12...Reel, 13・1
4...Guide rod, 51...Surface. Agent Patent Attorney Kin Tsukasa Komata

Claims (1)

[Claims] 1. A first rail (1) on which an air nozzle (10) and an alcohol nozzle (9) are arranged, and a second rail (2) arranged under the first roller (7).
), and a third rail (3) disposed under the second roller (8).
), and guide rods (13) and (14) that simultaneously move the first rail (1), second rail (2), and third rail (3).
), one end is connected to the first reel (11), the second roller (8) passes through the first roller (7), the other end is connected to the second reel (12), the first Cleaning paper (6) sent from the second reel (11) to the second reel (12)
The part (5) with a step is placed on the first rail (1), and the surface (51) of the part (5) is heated with air from the air nozzle (10).
), drop alcohol from the alcohol nozzle (9) onto the surface (51) of the part (5), and then remove the alcohol from the second rail (2).
, move the cleaning paper (
6) to the surface (51) of the part (5), move the third rail (3) back and forth, and use the second roller (8) to bring the cleaning paper (6) into contact with the surface (51) of the part (5). ) A surface cleaning mechanism for parts with steps.