JPH0292646U - - Google Patents
Info
- Publication number
- JPH0292646U JPH0292646U JP149889U JP149889U JPH0292646U JP H0292646 U JPH0292646 U JP H0292646U JP 149889 U JP149889 U JP 149889U JP 149889 U JP149889 U JP 149889U JP H0292646 U JPH0292646 U JP H0292646U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- magnetic field
- microwave
- source chamber
- microwaves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 2
- 230000001902 propagating effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
- 230000004907 flux Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP149889U JPH0292646U (es) | 1989-01-10 | 1989-01-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP149889U JPH0292646U (es) | 1989-01-10 | 1989-01-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0292646U true JPH0292646U (es) | 1990-07-23 |
Family
ID=31201435
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP149889U Pending JPH0292646U (es) | 1989-01-10 | 1989-01-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0292646U (es) |
-
1989
- 1989-01-10 JP JP149889U patent/JPH0292646U/ja active Pending
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