JPH0291340U - - Google Patents
Info
- Publication number
- JPH0291340U JPH0291340U JP16939788U JP16939788U JPH0291340U JP H0291340 U JPH0291340 U JP H0291340U JP 16939788 U JP16939788 U JP 16939788U JP 16939788 U JP16939788 U JP 16939788U JP H0291340 U JPH0291340 U JP H0291340U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- chamber
- heating chamber
- cart
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 29
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000001816 cooling Methods 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000007723 transport mechanism Effects 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16939788U JPH0610679Y2 (ja) | 1988-12-29 | 1988-12-29 | 連続インライン式成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16939788U JPH0610679Y2 (ja) | 1988-12-29 | 1988-12-29 | 連続インライン式成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0291340U true JPH0291340U (OSRAM) | 1990-07-19 |
| JPH0610679Y2 JPH0610679Y2 (ja) | 1994-03-16 |
Family
ID=31459417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16939788U Expired - Lifetime JPH0610679Y2 (ja) | 1988-12-29 | 1988-12-29 | 連続インライン式成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610679Y2 (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010114458A (ja) * | 2001-08-16 | 2010-05-20 | First Solar Inc | 化学蒸着システム |
| JP2017082342A (ja) * | 2012-10-18 | 2017-05-18 | 株式会社アルバック | 成膜装置 |
-
1988
- 1988-12-29 JP JP16939788U patent/JPH0610679Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010114458A (ja) * | 2001-08-16 | 2010-05-20 | First Solar Inc | 化学蒸着システム |
| JP2017082342A (ja) * | 2012-10-18 | 2017-05-18 | 株式会社アルバック | 成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610679Y2 (ja) | 1994-03-16 |
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