JPH0290662U - - Google Patents

Info

Publication number
JPH0290662U
JPH0290662U JP17079788U JP17079788U JPH0290662U JP H0290662 U JPH0290662 U JP H0290662U JP 17079788 U JP17079788 U JP 17079788U JP 17079788 U JP17079788 U JP 17079788U JP H0290662 U JPH0290662 U JP H0290662U
Authority
JP
Japan
Prior art keywords
oven
evaporation
source
separated
introduction pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17079788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17079788U priority Critical patent/JPH0290662U/ja
Publication of JPH0290662U publication Critical patent/JPH0290662U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP17079788U 1988-12-27 1988-12-27 Pending JPH0290662U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17079788U JPH0290662U (enExample) 1988-12-27 1988-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17079788U JPH0290662U (enExample) 1988-12-27 1988-12-27

Publications (1)

Publication Number Publication Date
JPH0290662U true JPH0290662U (enExample) 1990-07-18

Family

ID=31462051

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17079788U Pending JPH0290662U (enExample) 1988-12-27 1988-12-27

Country Status (1)

Country Link
JP (1) JPH0290662U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009057614A (ja) * 2007-09-03 2009-03-19 Canon Inc 蒸着装置及び蒸着方法
JP2010121215A (ja) * 2010-01-14 2010-06-03 Semiconductor Energy Lab Co Ltd 蒸着装置および蒸着方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009057614A (ja) * 2007-09-03 2009-03-19 Canon Inc 蒸着装置及び蒸着方法
JP2010121215A (ja) * 2010-01-14 2010-06-03 Semiconductor Energy Lab Co Ltd 蒸着装置および蒸着方法

Similar Documents

Publication Publication Date Title
NO962072L (no) Fremgangsmåte og anordning for fordamping
JPH0290662U (enExample)
US5866431A (en) Electrothermal atomization means for analytical spectrometry
US1678559A (en) Drying materials
DE2714371A1 (de) Vakuumanlage zum behandeln eines gutes, insbesondere vakuumaufdampfanlage
US4271852A (en) Method for increasing the filling capacity of tobacco
US5282927A (en) Concentrating evaporator
JPS6071801U (ja) 水蒸気発生器
KR970030322A (ko) 이온주입 장치내에 제공되는 전하 컨버터
SU621341A1 (ru) Способ увеличени объема табака
JPS58197270A (ja) 蒸発源るつぼ
JPS6419659A (en) Cluster ion beam source
SU599389A1 (ru) Выпарной аппарат дл алюминатныхРАСТВОРОВ
RU97109306A (ru) Способ получения кристаллических фуллеренов
RU2001622C1 (ru) Способ получени биологически активного вещества растительного происхождени
JPH01103156U (enExample)
RU96118752A (ru) Способ сушки пеноматериалов
US2344839A (en) Evaporator
KR950007485B1 (ko) 반도체 제조장치
JPS57148341A (en) Crystal growth of amorphous layer or polycrystalline layer on single crystal layer
KR810000352Y1 (ko) 벌꿀 농축기
SU848899A2 (ru) Устройство дл увлажнени воздуха
JPS597735Y2 (ja) 質量分析装置のイオン源
GB1341729A (en) Dehumidifying method and apparatus
JPS6348450A (ja) キヤピラリ−カラムを使用したオンカラム注入型ガスクロマトグラフ装置