JPH01103156U - - Google Patents
Info
- Publication number
- JPH01103156U JPH01103156U JP19797887U JP19797887U JPH01103156U JP H01103156 U JPH01103156 U JP H01103156U JP 19797887 U JP19797887 U JP 19797887U JP 19797887 U JP19797887 U JP 19797887U JP H01103156 U JPH01103156 U JP H01103156U
- Authority
- JP
- Japan
- Prior art keywords
- oven
- workpiece
- heater
- sublimates
- thermocouples
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007787 solid Substances 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims 2
- 239000007943 implant Substances 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19797887U JPH01103156U (enExample) | 1987-12-26 | 1987-12-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19797887U JPH01103156U (enExample) | 1987-12-26 | 1987-12-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01103156U true JPH01103156U (enExample) | 1989-07-12 |
Family
ID=31488506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19797887U Pending JPH01103156U (enExample) | 1987-12-26 | 1987-12-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01103156U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5254897A (en) * | 1975-10-29 | 1977-05-04 | Hitachi Ltd | Plasma ion source for solid materials |
-
1987
- 1987-12-26 JP JP19797887U patent/JPH01103156U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5254897A (en) * | 1975-10-29 | 1977-05-04 | Hitachi Ltd | Plasma ion source for solid materials |