JPH0289434U - - Google Patents
Info
- Publication number
- JPH0289434U JPH0289434U JP16846188U JP16846188U JPH0289434U JP H0289434 U JPH0289434 U JP H0289434U JP 16846188 U JP16846188 U JP 16846188U JP 16846188 U JP16846188 U JP 16846188U JP H0289434 U JPH0289434 U JP H0289434U
- Authority
- JP
- Japan
- Prior art keywords
- sog
- film
- tft panel
- large number
- transparent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 238000009792 diffusion process Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 239000011521 glass Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Thin Film Transistor (AREA)
- Liquid Crystal (AREA)
Description
第１図および第２図は本考案の第１の実施例を
示すＴＦＴパネルの一部分の断面図およびＴＦＴ
パネルの製造工程図、第３図および第４図は本考
案の第２の実施例を示すＴＦＴパネルの一部分の
断面図およびＴＦＴパネルの製造工程図、第５図
および第６図は本考案の第３の実施例を示すＴＦ
Ｔパネルの一部分の断面図およびＴＦＴパネルの
製造工程図、第７図および第８図は本考案の第４
の実施例を示すＴＦＴパネルの一部分の断面図お
よびＴＦＴパネルの製造工程図である。
１……透明基板、２……ＳＯＧ膜、２ａ……透
明画素電極（金属拡散部分）、Ｔ１，Ｔ２，Ｔ３
，Ｔ４……薄膜トランジスタ、Ｇ……ゲート電極
、３……ゲート絶縁膜、４……ｉ―ａ―Ｓｉ半導
体層、Ｓ……ソース電極、Ｄ……ドレイン電極、
８……下地絶縁膜。
1 and 2 are a cross-sectional view of a portion of a TFT panel and a TFT panel showing a first embodiment of the present invention.
3 and 4 are cross-sectional views of a portion of a TFT panel showing the second embodiment of the present invention, and FIGS. 5 and 6 are diagrams of the manufacturing process of the TFT panel, respectively. TF showing the third embodiment
The sectional view of a part of the T panel and the manufacturing process diagram of the TFT panel, Figures 7 and 8 are the fourth part of the present invention.
FIG. 2 is a cross-sectional view of a portion of a TFT panel and a manufacturing process diagram of the TFT panel showing an example of the present invention. 1... Transparent substrate, 2... SOG film, 2a... Transparent pixel electrode (metal diffusion part), T 1 , T 2 , T 3
, T 4 ... thin film transistor, G ... gate electrode, 3 ... gate insulating film, 4 ... ia-Si semiconductor layer, S ... source electrode, D ... drain electrode,
8... Base insulating film.
Claims (1)
極を選択駆動する多数の薄膜トランジスタとを配
列形成したＴＦＴパネルにおいて、前記透明基板
上にそのほぼ全面にわたつてＳＯＧ（スピンオン
ガラス）膜を形成し、このＳＯＧ膜の上に前記薄
膜トランジスタを形成するとともに、前記ＳＯＧ
膜の所定部分を、導電性金属の拡散により導電性
をもたせた透明画素電極としたことを特徴とする
ＴＦＴパネル。 In a TFT panel in which a large number of transparent pixel electrodes and a large number of thin film transistors for selectively driving the pixel electrodes are arranged and formed on a transparent substrate, an SOG (spin-on glass) film is formed over almost the entire surface of the transparent substrate, The thin film transistor is formed on this SOG film, and the SOG
A TFT panel characterized in that a predetermined portion of the film is a transparent pixel electrode made conductive by diffusion of a conductive metal.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16846188U JPH0645937Y2 (en) | 1988-12-28 | 1988-12-28 | TFT panel |
| CA000613680A CA1313563C (en) | 1988-10-26 | 1989-09-27 | Thin film transistor panel |
| US07/415,889 US5084905A (en) | 1988-10-26 | 1989-10-02 | Thin film transistor panel and manufacturing method thereof |
| EP89119842A EP0366116B1 (en) | 1988-10-26 | 1989-10-25 | Thin film transistor panel and manufacturing method thereof |
| DE68923054T DE68923054T2 (en) | 1988-10-26 | 1989-10-25 | Thin film transistor panel and manufacturing process. |
| KR1019890015469A KR940004764B1 (en) | 1988-10-26 | 1989-10-26 | Thin film transistor panel and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16846188U JPH0645937Y2 (en) | 1988-12-28 | 1988-12-28 | TFT panel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0289434U true JPH0289434U (en) | 1990-07-16 |
| JPH0645937Y2 JPH0645937Y2 (en) | 1994-11-24 |
Family
ID=31457657
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16846188U Expired - Lifetime JPH0645937Y2 (en) | 1988-10-26 | 1988-12-28 | TFT panel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645937Y2 (en) |
-
1988
- 1988-12-28 JP JP16846188U patent/JPH0645937Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0645937Y2 (en) | 1994-11-24 |
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